KR100923059B1 - 편심량 측정 방법 - Google Patents

편심량 측정 방법 Download PDF

Info

Publication number
KR100923059B1
KR100923059B1 KR1020070051119A KR20070051119A KR100923059B1 KR 100923059 B1 KR100923059 B1 KR 100923059B1 KR 1020070051119 A KR1020070051119 A KR 1020070051119A KR 20070051119 A KR20070051119 A KR 20070051119A KR 100923059 B1 KR100923059 B1 KR 100923059B1
Authority
KR
South Korea
Prior art keywords
image
point
test
line
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070051119A
Other languages
English (en)
Korean (ko)
Other versions
KR20070116721A (ko
Inventor
핑 선
타카유키 사이토
Original Assignee
후지논 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 후지논 가부시키가이샤 filed Critical 후지논 가부시키가이샤
Publication of KR20070116721A publication Critical patent/KR20070116721A/ko
Application granted granted Critical
Publication of KR100923059B1 publication Critical patent/KR100923059B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G01M11/0264Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0221Testing optical properties by determining the optical axis or position of lenses

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
KR1020070051119A 2006-06-06 2007-05-25 편심량 측정 방법 Expired - Fee Related KR100923059B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00157198 2006-06-06
JP2006157198A JP4774332B2 (ja) 2006-06-06 2006-06-06 偏芯量測定方法

Publications (2)

Publication Number Publication Date
KR20070116721A KR20070116721A (ko) 2007-12-11
KR100923059B1 true KR100923059B1 (ko) 2009-10-22

Family

ID=38928343

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070051119A Expired - Fee Related KR100923059B1 (ko) 2006-06-06 2007-05-25 편심량 측정 방법

Country Status (4)

Country Link
JP (1) JP4774332B2 (enExample)
KR (1) KR100923059B1 (enExample)
CN (1) CN100567888C (enExample)
TW (1) TW200745506A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101538129B1 (ko) * 2014-10-24 2015-07-23 한국표준과학연구원 검안용 굴절력계용 표준렌즈

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5362431B2 (ja) * 2008-06-10 2013-12-11 富士フイルム株式会社 偏芯量測定方法
JP5359048B2 (ja) * 2008-06-20 2013-12-04 株式会社ニコン 偏芯測定装置および偏芯測定方法
JP5317619B2 (ja) * 2008-10-06 2013-10-16 富士フイルム株式会社 偏芯量測定方法
JP2010230578A (ja) 2009-03-27 2010-10-14 Fujifilm Corp 偏芯量測定方法
JP2010281792A (ja) * 2009-06-08 2010-12-16 Fujifilm Corp 非球面体測定方法および装置
JP5222796B2 (ja) * 2009-06-08 2013-06-26 富士フイルム株式会社 光学素子の偏芯調整組立方法および偏芯調整組立装置
JP2011069797A (ja) * 2009-09-28 2011-04-07 Saxa Inc 変位量測定装置及び変位量測定方法
JP6075993B2 (ja) * 2012-08-02 2017-02-08 株式会社ディスコ 板状ワーク中心検出方法
CN102879182B (zh) * 2012-09-27 2014-12-24 中国科学院长春光学精密机械与物理研究所 采用激光跟踪仪检测离轴非球面偏心量的方法
CN104101482B (zh) * 2013-04-10 2016-08-10 致茂电子(苏州)有限公司 发光模块检测装置以及发光模块检测方法
CN103940377B (zh) * 2014-03-26 2017-01-04 中国科学院长春光学精密机械与物理研究所 光学镜头球心偏差测量装置
CN104406547B (zh) * 2014-12-09 2017-11-07 上海新跃仪表厂 一种光学零件的偏心量测量装置及其测量方法
JP6218261B2 (ja) 2015-10-23 2017-10-25 株式会社カツラ・オプト・システムズ 光学素子特性測定装置
CN107339955B (zh) * 2017-01-07 2020-11-13 深圳市灿锐科技有限公司 一种高精度透镜中心偏检测仪器及其测量方法
CN107843213B (zh) * 2017-10-23 2020-06-16 北京理工大学 共焦自准直中心偏和曲率半径测量方法与装置
CN109946046B (zh) * 2017-12-21 2022-01-07 宁波舜宇车载光学技术有限公司 偏心测试装置及方法
WO2019176805A1 (ja) * 2018-03-12 2019-09-19 富士フイルム株式会社 偏芯測定装置及び方法
CN110595736A (zh) * 2019-08-20 2019-12-20 扬州辰亚光学科技有限公司 一种光学零件的偏心量测量装置
CN114216362B (zh) * 2021-12-15 2023-09-15 中国科学院合肥物质科学研究院 一种基于图像处理自动测量校靶镜机械轴线偏差的方法
CN117405358B (zh) * 2023-08-29 2024-07-19 河南微米光学科技有限公司 分离式光学透镜偏心仪

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005055202A (ja) * 2003-08-06 2005-03-03 Mitsutoyo Corp 偏芯測定装置、レンズ取付方法およびレンズ偏芯検査方法
KR20050052385A (ko) * 2003-11-28 2005-06-02 캐논 가부시끼가이샤 편심측정방법 및 편심측정장치
JP2006047090A (ja) 2004-08-04 2006-02-16 Sokkia Co Ltd 測量機検査方法及びこの検査方法に使用するコリメータ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2842310B2 (ja) * 1995-07-27 1999-01-06 日本電気株式会社 光モジュール光軸調整装置及び方法
JP3414975B2 (ja) * 1997-03-06 2003-06-09 日立電子エンジニアリング株式会社 位置ずれ量測定装置
JP4425449B2 (ja) * 2000-09-28 2010-03-03 フジノン株式会社 斜入射干渉計装置
JP2004309514A (ja) * 2003-04-01 2004-11-04 Pulstec Industrial Co Ltd ピンホール素子および同素子を用いた光学装置
JP2005024254A (ja) * 2003-06-30 2005-01-27 Mitsutoyo Corp 情報処理装置、情報処理装置の校正方法、情報処理プログラム、このプログラムを記録した記録媒体、偏芯測定装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005055202A (ja) * 2003-08-06 2005-03-03 Mitsutoyo Corp 偏芯測定装置、レンズ取付方法およびレンズ偏芯検査方法
KR20050052385A (ko) * 2003-11-28 2005-06-02 캐논 가부시끼가이샤 편심측정방법 및 편심측정장치
JP2006047090A (ja) 2004-08-04 2006-02-16 Sokkia Co Ltd 測量機検査方法及びこの検査方法に使用するコリメータ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
한국정밀공학회 2005 춘계학술대회 논문집 pp1793-1796*

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101538129B1 (ko) * 2014-10-24 2015-07-23 한국표준과학연구원 검안용 굴절력계용 표준렌즈
WO2016064092A1 (ko) * 2014-10-24 2016-04-28 한국표준과학연구원 시력굴절력계 교정용 모델아이 렌즈의 새 디자인 및 교정법

Also Published As

Publication number Publication date
KR20070116721A (ko) 2007-12-11
CN101086445A (zh) 2007-12-12
JP2007327771A (ja) 2007-12-20
TWI327639B (enExample) 2010-07-21
CN100567888C (zh) 2009-12-09
TW200745506A (en) 2007-12-16
JP4774332B2 (ja) 2011-09-14

Similar Documents

Publication Publication Date Title
KR100923059B1 (ko) 편심량 측정 방법
JP6453220B2 (ja) Spim顕微鏡法のための顕微鏡および方法
US7982950B2 (en) Measuring system for structures on a substrate for semiconductor manufacture
US10401149B2 (en) Method for determining the thickness of a specimen holder in the beam path of a microscope
KR20130095211A (ko) 얇은 디스크 형상물의 가장자리 프로파일을 비접촉으로 결정하기 위한 장치
US11300770B2 (en) Inclination measurement and correction of the cover glass in the optical path of a microscope
KR20130037723A (ko) 비구면을 정밀 고해상도로 측정하는 방법
JP2008298739A (ja) 偏芯量測定装置
CN110174240B (zh) 用于测量至少一个光学有效的物体的设备和方法
US12320744B2 (en) Reference sample for a microscope, methods and uses
CN1932432B (zh) 光波干涉装置
JP6217748B2 (ja) 屈折率測定装置
JP5362431B2 (ja) 偏芯量測定方法
KR101826127B1 (ko) 광학적 웨이퍼 검사 장치
WO2015064098A1 (ja) 全反射顕微鏡
CN116989693B (zh) 聚焦曲线的评价方法
JP4135133B2 (ja) 光軸補正装置及び光学機器システム
KR100790706B1 (ko) 렌즈 초점 거리 측정 장치
KR101119558B1 (ko) 편심량 측정 방법
JP2005083981A (ja) 非球面偏心測定装置と非球面偏心測定方法
JPH11211611A (ja) 偏心測定装置
KR100447456B1 (ko) 에지산란광을 이용한 위치검출장치의 반도체기판 및 노광마스크
JP2007017431A (ja) 偏芯量測定方法
JP2008058133A (ja) 長尺工具エッジの曲率半径の計測装置および長尺工具エッジの曲率半径の計測方法
JP2012002607A (ja) 円錐面測定装置

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20120924

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20130924

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20141001

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20151016

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20151016