JP4774332B2 - 偏芯量測定方法 - Google Patents
偏芯量測定方法 Download PDFInfo
- Publication number
- JP4774332B2 JP4774332B2 JP2006157198A JP2006157198A JP4774332B2 JP 4774332 B2 JP4774332 B2 JP 4774332B2 JP 2006157198 A JP2006157198 A JP 2006157198A JP 2006157198 A JP2006157198 A JP 2006157198A JP 4774332 B2 JP4774332 B2 JP 4774332B2
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- JP
- Japan
- Prior art keywords
- image
- point
- line
- reticle
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
- G01M11/0264—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0221—Testing optical properties by determining the optical axis or position of lenses
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Geometry (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006157198A JP4774332B2 (ja) | 2006-06-06 | 2006-06-06 | 偏芯量測定方法 |
| KR1020070051119A KR100923059B1 (ko) | 2006-06-06 | 2007-05-25 | 편심량 측정 방법 |
| TW096119269A TW200745506A (en) | 2006-06-06 | 2007-05-30 | Method of measuring amount of eccentricity |
| CNB2007101088518A CN100567888C (zh) | 2006-06-06 | 2007-06-05 | 偏心量测定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006157198A JP4774332B2 (ja) | 2006-06-06 | 2006-06-06 | 偏芯量測定方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007327771A JP2007327771A (ja) | 2007-12-20 |
| JP2007327771A5 JP2007327771A5 (enExample) | 2009-07-09 |
| JP4774332B2 true JP4774332B2 (ja) | 2011-09-14 |
Family
ID=38928343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006157198A Expired - Fee Related JP4774332B2 (ja) | 2006-06-06 | 2006-06-06 | 偏芯量測定方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4774332B2 (enExample) |
| KR (1) | KR100923059B1 (enExample) |
| CN (1) | CN100567888C (enExample) |
| TW (1) | TW200745506A (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5362431B2 (ja) * | 2008-06-10 | 2013-12-11 | 富士フイルム株式会社 | 偏芯量測定方法 |
| JP5359048B2 (ja) * | 2008-06-20 | 2013-12-04 | 株式会社ニコン | 偏芯測定装置および偏芯測定方法 |
| JP5317619B2 (ja) * | 2008-10-06 | 2013-10-16 | 富士フイルム株式会社 | 偏芯量測定方法 |
| JP2010230578A (ja) | 2009-03-27 | 2010-10-14 | Fujifilm Corp | 偏芯量測定方法 |
| JP2010281792A (ja) * | 2009-06-08 | 2010-12-16 | Fujifilm Corp | 非球面体測定方法および装置 |
| JP5222796B2 (ja) * | 2009-06-08 | 2013-06-26 | 富士フイルム株式会社 | 光学素子の偏芯調整組立方法および偏芯調整組立装置 |
| JP2011069797A (ja) * | 2009-09-28 | 2011-04-07 | Saxa Inc | 変位量測定装置及び変位量測定方法 |
| JP6075993B2 (ja) * | 2012-08-02 | 2017-02-08 | 株式会社ディスコ | 板状ワーク中心検出方法 |
| CN102879182B (zh) * | 2012-09-27 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | 采用激光跟踪仪检测离轴非球面偏心量的方法 |
| CN104101482B (zh) * | 2013-04-10 | 2016-08-10 | 致茂电子(苏州)有限公司 | 发光模块检测装置以及发光模块检测方法 |
| CN103940377B (zh) * | 2014-03-26 | 2017-01-04 | 中国科学院长春光学精密机械与物理研究所 | 光学镜头球心偏差测量装置 |
| KR101538129B1 (ko) * | 2014-10-24 | 2015-07-23 | 한국표준과학연구원 | 검안용 굴절력계용 표준렌즈 |
| CN104406547B (zh) * | 2014-12-09 | 2017-11-07 | 上海新跃仪表厂 | 一种光学零件的偏心量测量装置及其测量方法 |
| JP6218261B2 (ja) | 2015-10-23 | 2017-10-25 | 株式会社カツラ・オプト・システムズ | 光学素子特性測定装置 |
| CN107339955B (zh) * | 2017-01-07 | 2020-11-13 | 深圳市灿锐科技有限公司 | 一种高精度透镜中心偏检测仪器及其测量方法 |
| CN107843213B (zh) * | 2017-10-23 | 2020-06-16 | 北京理工大学 | 共焦自准直中心偏和曲率半径测量方法与装置 |
| CN109946046B (zh) * | 2017-12-21 | 2022-01-07 | 宁波舜宇车载光学技术有限公司 | 偏心测试装置及方法 |
| WO2019176805A1 (ja) * | 2018-03-12 | 2019-09-19 | 富士フイルム株式会社 | 偏芯測定装置及び方法 |
| CN110595736A (zh) * | 2019-08-20 | 2019-12-20 | 扬州辰亚光学科技有限公司 | 一种光学零件的偏心量测量装置 |
| CN114216362B (zh) * | 2021-12-15 | 2023-09-15 | 中国科学院合肥物质科学研究院 | 一种基于图像处理自动测量校靶镜机械轴线偏差的方法 |
| CN117405358B (zh) * | 2023-08-29 | 2024-07-19 | 河南微米光学科技有限公司 | 分离式光学透镜偏心仪 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2842310B2 (ja) * | 1995-07-27 | 1999-01-06 | 日本電気株式会社 | 光モジュール光軸調整装置及び方法 |
| JP3414975B2 (ja) * | 1997-03-06 | 2003-06-09 | 日立電子エンジニアリング株式会社 | 位置ずれ量測定装置 |
| JP4425449B2 (ja) * | 2000-09-28 | 2010-03-03 | フジノン株式会社 | 斜入射干渉計装置 |
| JP2004309514A (ja) * | 2003-04-01 | 2004-11-04 | Pulstec Industrial Co Ltd | ピンホール素子および同素子を用いた光学装置 |
| JP2005024254A (ja) * | 2003-06-30 | 2005-01-27 | Mitsutoyo Corp | 情報処理装置、情報処理装置の校正方法、情報処理プログラム、このプログラムを記録した記録媒体、偏芯測定装置 |
| JP2005055202A (ja) * | 2003-08-06 | 2005-03-03 | Mitsutoyo Corp | 偏芯測定装置、レンズ取付方法およびレンズ偏芯検査方法 |
| JP4474150B2 (ja) * | 2003-11-28 | 2010-06-02 | キヤノン株式会社 | 偏心測定方法 |
| JP4555021B2 (ja) | 2004-08-04 | 2010-09-29 | 株式会社 ソキア・トプコン | 測量機検査方法及びこの検査方法に使用するコリメータ |
-
2006
- 2006-06-06 JP JP2006157198A patent/JP4774332B2/ja not_active Expired - Fee Related
-
2007
- 2007-05-25 KR KR1020070051119A patent/KR100923059B1/ko not_active Expired - Fee Related
- 2007-05-30 TW TW096119269A patent/TW200745506A/zh not_active IP Right Cessation
- 2007-06-05 CN CNB2007101088518A patent/CN100567888C/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| KR100923059B1 (ko) | 2009-10-22 |
| KR20070116721A (ko) | 2007-12-11 |
| CN101086445A (zh) | 2007-12-12 |
| JP2007327771A (ja) | 2007-12-20 |
| TWI327639B (enExample) | 2010-07-21 |
| CN100567888C (zh) | 2009-12-09 |
| TW200745506A (en) | 2007-12-16 |
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