KR100893739B1 - 광경화성 수지의 도포 장치 및 도포 방법 - Google Patents

광경화성 수지의 도포 장치 및 도포 방법 Download PDF

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Publication number
KR100893739B1
KR100893739B1 KR1020077012586A KR20077012586A KR100893739B1 KR 100893739 B1 KR100893739 B1 KR 100893739B1 KR 1020077012586 A KR1020077012586 A KR 1020077012586A KR 20077012586 A KR20077012586 A KR 20077012586A KR 100893739 B1 KR100893739 B1 KR 100893739B1
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KR
South Korea
Prior art keywords
photocurable resin
substrate
coating
board
stage
Prior art date
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KR1020077012586A
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English (en)
Korean (ko)
Other versions
KR20070074660A (ko
Inventor
게이고 이마무라
Original Assignee
시바우라 메카트로닉스 가부시키가이샤
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Publication of KR20070074660A publication Critical patent/KR20070074660A/ko
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles
    • B05C5/0216Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles by relative movement of article and outlet according to a predetermined path
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1345Conductors connecting electrodes to cell terminals
    • G02F1/13452Conductors connecting driver circuitry and terminals of panels
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/28Applying non-metallic protective coatings

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Coating Apparatus (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Liquid Crystal (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
KR1020077012586A 2005-01-12 2005-09-13 광경화성 수지의 도포 장치 및 도포 방법 KR100893739B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00005395 2005-01-12
JP2005005395 2005-01-12
JPJP-P-2005-00229560 2005-08-08
JP2005229560A JP4741897B2 (ja) 2005-01-12 2005-08-08 光硬化性樹脂の塗布装置及び塗布方法

Publications (2)

Publication Number Publication Date
KR20070074660A KR20070074660A (ko) 2007-07-12
KR100893739B1 true KR100893739B1 (ko) 2009-04-17

Family

ID=36677456

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077012586A KR100893739B1 (ko) 2005-01-12 2005-09-13 광경화성 수지의 도포 장치 및 도포 방법

Country Status (5)

Country Link
JP (1) JP4741897B2 (ja)
KR (1) KR100893739B1 (ja)
CN (1) CN101098760B (ja)
TW (1) TWI368799B (ja)
WO (1) WO2006075421A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006218470A (ja) * 2005-01-12 2006-08-24 Shibaura Mechatronics Corp 光硬化性樹脂の塗布装置及び塗布方法
KR101442932B1 (ko) 2009-09-04 2014-09-22 데쿠세리아루즈 가부시키가이샤 충전 장치

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4884991B2 (ja) * 2007-01-19 2012-02-29 東京エレクトロン株式会社 塗布処理装置
TWI355970B (en) 2007-01-19 2012-01-11 Tokyo Electron Ltd Coating treatment apparatus, substrate treatment s
KR100895863B1 (ko) * 2007-11-20 2009-05-06 세메스 주식회사 기판 제조 장치 및 그 방법
KR100933027B1 (ko) * 2007-11-21 2009-12-21 세메스 주식회사 기판 제조 장치 및 그 방법
KR100901489B1 (ko) * 2007-11-21 2009-06-08 세메스 주식회사 기판 제조 장치 및 그 방법
JP2011000545A (ja) * 2009-06-19 2011-01-06 Sharp Corp 液滴塗布状態判定装置および液滴塗布状態判定方法及びそれを用いた液滴塗布装置
JP5455583B2 (ja) * 2009-11-30 2014-03-26 キヤノン株式会社 インプリント装置
CN102520554A (zh) * 2011-11-21 2012-06-27 深圳市华星光电技术有限公司 涂布装置及涂布方法
US20130129913A1 (en) * 2011-11-21 2013-05-23 Shenzhen China Star Optoellectronics Technolohy Co., Ltd. Coating apparatus and coating method
KR101416769B1 (ko) * 2012-11-15 2014-07-09 안성룡 가경화 장치
KR101502786B1 (ko) * 2012-12-17 2015-03-17 주식회사 프로텍 Tft lcd 패널 제조 장치
CN104185370A (zh) * 2013-05-24 2014-12-03 索尼电子(无锡)有限公司 具有防水层的基板、基板中防水层的形成方法和加工设备
CN104423101A (zh) * 2013-08-21 2015-03-18 北京京东方光电科技有限公司 一种封框胶涂布装置、方法以及实现对盒的方法
JP2014064022A (ja) * 2013-11-11 2014-04-10 Canon Inc インプリント装置
CN103895345B (zh) * 2014-03-27 2016-01-20 华中科技大学 一种多功能电流体喷墨打印系统及方法
CN104096660B (zh) * 2014-07-16 2016-08-24 京东方科技集团股份有限公司 一种点胶治具
JP5933060B2 (ja) * 2015-03-13 2016-06-08 キヤノン株式会社 インプリント装置および方法ならびに物品製造方法
CN105772340B (zh) * 2016-05-16 2019-07-05 京东方科技集团股份有限公司 液态光固化胶涂覆装置和方法
CN105797902A (zh) * 2016-05-17 2016-07-27 复旦大学 智能自清洗双固化涂装系统
JP6905325B2 (ja) * 2016-10-31 2021-07-21 デクセリアルズ株式会社 積層体の製造方法
KR102039822B1 (ko) * 2018-04-09 2019-11-01 주식회사 프로텍 사이드 실링 디스펜서
KR101970444B1 (ko) * 2018-12-14 2019-04-18 문득수 단방향 또는 양방향 디스플레이 패널의 레진 도포장치, 그리고 이를 활용한 레진 도포방법
JP2020120085A (ja) * 2019-01-28 2020-08-06 日本特殊陶業株式会社 配線基板の製造方法及び配線基板の製造装置
JP2020136640A (ja) * 2019-02-26 2020-08-31 トヨタ自動車株式会社 膜の製造方法
JP7286250B2 (ja) * 2019-08-07 2023-06-05 株式会社ディスコ 保護部材形成装置
KR102354878B1 (ko) * 2019-08-22 2022-01-25 에이피시스템 주식회사 용액 도포장치, 용액 도포방법 및 이를 이용한 합착 방법

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JPH07325310A (ja) * 1994-05-31 1995-12-12 Canon Inc 液晶表示素子の製造方法及び該製造に用いる封止装置
JP2001282147A (ja) * 2000-03-31 2001-10-12 Minolta Co Ltd 積層型表示パネルの製造方法
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JP2004163950A (ja) * 2002-11-13 2004-06-10 Lg Philips Lcd Co Ltd 液晶表示パネルのシールディスペンサ及びこれを利用したシールパターンの断線検出方法

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JPH0721254Y2 (ja) * 1992-09-18 1995-05-17 徹也 北城 紫外線硬化型樹脂材料の塗付兼硬化装置
JPH08298394A (ja) * 1995-04-26 1996-11-12 Tescon:Kk ディスペンサー装置
JPH11128800A (ja) * 1997-10-27 1999-05-18 Fujitsu Ten Ltd 接着剤塗布装置
JP4558973B2 (ja) * 2001-04-20 2010-10-06 株式会社小森コーポレーション 印刷機またはコーティング装置
JP4200758B2 (ja) * 2002-12-26 2008-12-24 株式会社日立ハイテクノロジーズ パネルの樹脂塗布方法、ディスプレイ用パネルの製造方法及び樹脂塗布装置
JP4393093B2 (ja) * 2003-03-31 2010-01-06 シャープ株式会社 液剤描画装置
JP2004322460A (ja) * 2003-04-24 2004-11-18 Konica Minolta Medical & Graphic Inc 画像記録装置
JP4741897B2 (ja) * 2005-01-12 2011-08-10 芝浦メカトロニクス株式会社 光硬化性樹脂の塗布装置及び塗布方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07325310A (ja) * 1994-05-31 1995-12-12 Canon Inc 液晶表示素子の製造方法及び該製造に用いる封止装置
JP2001282147A (ja) * 2000-03-31 2001-10-12 Minolta Co Ltd 積層型表示パネルの製造方法
KR20040004782A (ko) * 2002-07-05 2004-01-16 엘지.필립스 엘시디 주식회사 유브이 경화장치를 포함하는 홀로그래픽 확산층 복제장비
JP2004163950A (ja) * 2002-11-13 2004-06-10 Lg Philips Lcd Co Ltd 液晶表示パネルのシールディスペンサ及びこれを利用したシールパターンの断線検出方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006218470A (ja) * 2005-01-12 2006-08-24 Shibaura Mechatronics Corp 光硬化性樹脂の塗布装置及び塗布方法
KR101442932B1 (ko) 2009-09-04 2014-09-22 데쿠세리아루즈 가부시키가이샤 충전 장치

Also Published As

Publication number Publication date
JP4741897B2 (ja) 2011-08-10
CN101098760B (zh) 2010-12-08
TWI368799B (en) 2012-07-21
TW200624967A (en) 2006-07-16
KR20070074660A (ko) 2007-07-12
WO2006075421A1 (ja) 2006-07-20
JP2006218470A (ja) 2006-08-24
CN101098760A (zh) 2008-01-02

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