KR100868110B1 - 기판 검지 기구 및 기판 수용 용기 - Google Patents

기판 검지 기구 및 기판 수용 용기 Download PDF

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Publication number
KR100868110B1
KR100868110B1 KR1020070083845A KR20070083845A KR100868110B1 KR 100868110 B1 KR100868110 B1 KR 100868110B1 KR 1020070083845 A KR1020070083845 A KR 1020070083845A KR 20070083845 A KR20070083845 A KR 20070083845A KR 100868110 B1 KR100868110 B1 KR 100868110B1
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KR
South Korea
Prior art keywords
substrate
optical sensor
container
board
support member
Prior art date
Application number
KR1020070083845A
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English (en)
Korean (ko)
Other versions
KR20080018120A (ko
Inventor
노보루 하야카와
세이지 오카베
Original Assignee
도쿄엘렉트론가부시키가이샤
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Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20080018120A publication Critical patent/KR20080018120A/ko
Application granted granted Critical
Publication of KR100868110B1 publication Critical patent/KR100868110B1/ko

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
    • H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020070083845A 2006-08-22 2007-08-21 기판 검지 기구 및 기판 수용 용기 KR100868110B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006225619A JP4795893B2 (ja) 2006-08-22 2006-08-22 基板検知機構および基板収容容器
JPJP-P-2006-00225619 2006-08-22

Publications (2)

Publication Number Publication Date
KR20080018120A KR20080018120A (ko) 2008-02-27
KR100868110B1 true KR100868110B1 (ko) 2008-11-10

Family

ID=39128714

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070083845A KR100868110B1 (ko) 2006-08-22 2007-08-21 기판 검지 기구 및 기판 수용 용기

Country Status (4)

Country Link
JP (1) JP4795893B2 (zh)
KR (1) KR100868110B1 (zh)
CN (1) CN101131366B (zh)
TW (1) TWI445113B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100976402B1 (ko) 2008-07-25 2010-08-17 주식회사 에스에프에이 화학 기상 증착 장치
JP5460274B2 (ja) * 2009-12-03 2014-04-02 信越ポリマー株式会社 基板収納容器
KR101326014B1 (ko) 2010-10-06 2013-11-07 엘아이지에이디피 주식회사 기판 트레이 및 기판분리모듈
CN102721692B (zh) * 2012-06-19 2015-11-25 深圳市华星光电技术有限公司 玻璃基板卡匣的检测装置
CN102809539A (zh) * 2012-07-23 2012-12-05 浙江万马电缆股份有限公司 一种中高压电缆半导电屏蔽层破损检测方法及装置
CN102967887A (zh) * 2012-11-13 2013-03-13 深圳市华星光电技术有限公司 一种用于检测空卡匣的检测装置
JP6342299B2 (ja) * 2014-11-04 2018-06-13 株式会社アルバック 基板割れ判定方法
JP6700149B2 (ja) * 2016-09-29 2020-05-27 株式会社Ｓｃｒｅｅｎホールディングス 姿勢変更装置
WO2019219371A1 (en) * 2018-05-15 2019-11-21 Evatec Ag Substrate vacuum treatment apparatus and method therefore
KR102699744B1 (ko) * 2018-11-05 2024-08-27 세메스 주식회사 반도체 스트립 이송 유닛

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050088150A (ko) * 2003-01-06 2005-09-01 동경 엘렉트론 주식회사 반도체 처리용의 기판 검출 방법 및 장치와 기판반송시스템

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208741A (ja) * 1983-05-12 1984-11-27 Mitsubishi Electric Corp 半導体ウエ−ハ用吸着チヤツク装置
JPH03280447A (ja) * 1990-03-28 1991-12-11 Tel Varian Ltd 基板有無検出方法
JP3457110B2 (ja) * 1995-12-05 2003-10-14 大日本スクリーン製造株式会社 ウエハの周縁形状検出装置
JPH09246348A (ja) * 1996-03-06 1997-09-19 Nikon Corp 基板搬送装置
JP3468056B2 (ja) * 1997-09-23 2003-11-17 東京エレクトロン株式会社 基板検出装置
JPH11163093A (ja) * 1997-11-28 1999-06-18 Nissin Electric Co Ltd 基板搬送ロボット
JP2004022807A (ja) * 2002-06-17 2004-01-22 Renesas Technology Corp 半導体処理装置およびその調整方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050088150A (ko) * 2003-01-06 2005-09-01 동경 엘렉트론 주식회사 반도체 처리용의 기판 검출 방법 및 장치와 기판반송시스템

Also Published As

Publication number Publication date
JP4795893B2 (ja) 2011-10-19
JP2008053302A (ja) 2008-03-06
TW200818376A (en) 2008-04-16
KR20080018120A (ko) 2008-02-27
CN101131366B (zh) 2011-05-11
TWI445113B (zh) 2014-07-11
CN101131366A (zh) 2008-02-27

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