KR100831135B1 - 박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치 - Google Patents

박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치 Download PDF

Info

Publication number
KR100831135B1
KR100831135B1 KR1020070035014A KR20070035014A KR100831135B1 KR 100831135 B1 KR100831135 B1 KR 100831135B1 KR 1020070035014 A KR1020070035014 A KR 1020070035014A KR 20070035014 A KR20070035014 A KR 20070035014A KR 100831135 B1 KR100831135 B1 KR 100831135B1
Authority
KR
South Korea
Prior art keywords
plate
air
porous film
thin
mesh member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070035014A
Other languages
English (en)
Korean (ko)
Other versions
KR20080013693A (ko
Inventor
노리유키 나구라
료묘 하마나카
세츠지 유미바
노리유키 도리야마
츠토무 오구리
츠토무 마키노
조지 후쿠다
하루미치 히로세
Original Assignee
가부시키가이샤 니혼 셋케이 고교
시바우라 메카트로닉스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 니혼 셋케이 고교, 시바우라 메카트로닉스 가부시키가이샤 filed Critical 가부시키가이샤 니혼 셋케이 고교
Publication of KR20080013693A publication Critical patent/KR20080013693A/ko
Application granted granted Critical
Publication of KR100831135B1 publication Critical patent/KR100831135B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/02—Conveying systems characterised by their application for specified purposes not otherwise provided for for conveying workpieces through baths of liquid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020070035014A 2006-08-08 2007-04-10 박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치 Expired - Fee Related KR100831135B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006215557A JP4629007B2 (ja) 2006-08-08 2006-08-08 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置
JPJP-P-2006-00215557 2006-08-08

Publications (2)

Publication Number Publication Date
KR20080013693A KR20080013693A (ko) 2008-02-13
KR100831135B1 true KR100831135B1 (ko) 2008-05-20

Family

ID=39084012

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070035014A Expired - Fee Related KR100831135B1 (ko) 2006-08-08 2007-04-10 박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치

Country Status (4)

Country Link
JP (1) JP4629007B2 (enExample)
KR (1) KR100831135B1 (enExample)
CN (1) CN101121466B (enExample)
TW (1) TW200811021A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8047354B2 (en) 2008-09-26 2011-11-01 Corning Incorporated Liquid-ejecting bearings for transport of glass sheets
JP5123842B2 (ja) * 2008-12-26 2013-01-23 Ｃｋｄ株式会社 非接触支持装置
TWI472467B (zh) * 2009-04-23 2015-02-11 Corning Inc 玻璃片運送之液體射出軸承
JP6043123B2 (ja) * 2012-08-22 2016-12-14 オイレス工業株式会社 非接触支持装置及び塗布装置
JP6173173B2 (ja) * 2013-11-11 2017-08-02 株式会社ディスコ 切削装置
JP7378481B2 (ja) * 2019-12-26 2023-11-13 ナンジン リアン セミコンダクター リミテッド 半導体産業におけるウェハ幾何学形状測定のためのツールアーキテクチャ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR930008524B1 (ko) * 1988-12-09 1993-09-09 로오무 가부시끼가이샤 펠릿 수용 정렬 지그 및 그 제작방법과 이에 사용되는 펠릿 설치방법
JP2003321119A (ja) 2002-05-07 2003-11-11 Mineya Mori プレートとフラットパネルの間の相対的高圧力域によってフラットパネルを浮上させる浮上機器
KR200346820Y1 (ko) 2004-01-06 2004-04-06 김태원 다공질 플라스틱(porous plastic)을 공기분사부로 이용한부상이송장치
JP2004345744A (ja) 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
JP2004352375A (ja) 2003-04-02 2004-12-16 Daiichi Shisetsu Kogyo Kk 非接触浮上ユニット

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680227A (ja) * 1992-08-31 1994-03-22 Taiyo Yuden Co Ltd 物品搬送ベルト
JP3718014B2 (ja) * 1996-11-01 2005-11-16 東レエンジニアリング株式会社 板状物搬送装置及び非接触搬送ライン
JPH11268830A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JPH11268831A (ja) * 1998-03-19 1999-10-05 Toray Eng Co Ltd 気流搬送セル
JP2003063643A (ja) * 2001-08-30 2003-03-05 Nippon Sekkei Kogyo:Kk 薄板の搬送方法及び装置
JP2004307152A (ja) * 2003-04-08 2004-11-04 Daiichi Shisetsu Kogyo Kk 起倒可能な非接触搬送装置
JP4217963B2 (ja) * 2003-07-08 2009-02-04 株式会社ダイフク 板状体搬送装置
JP2005075496A (ja) * 2003-08-28 2005-03-24 Murata Mach Ltd 浮上搬送装置
JP2005340399A (ja) * 2004-05-26 2005-12-08 Hitachi Zosen Corp ガラス基板の作業台装置
JP2006049493A (ja) * 2004-08-03 2006-02-16 Dainippon Screen Mfg Co Ltd 基板搬送モジュールならびにそれを用いた基板搬送装置および基板搬送方法
JP4414856B2 (ja) * 2004-09-30 2010-02-10 大日本スクリーン製造株式会社 基板保管装置
JP2006179653A (ja) * 2004-12-22 2006-07-06 Murata Mach Ltd 枚葉搬送用トレイおよび搬送システム
CN1810608A (zh) * 2005-01-26 2006-08-02 三发机电有限公司 基底传送设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR930008524B1 (ko) * 1988-12-09 1993-09-09 로오무 가부시끼가이샤 펠릿 수용 정렬 지그 및 그 제작방법과 이에 사용되는 펠릿 설치방법
JP2003321119A (ja) 2002-05-07 2003-11-11 Mineya Mori プレートとフラットパネルの間の相対的高圧力域によってフラットパネルを浮上させる浮上機器
JP2004352375A (ja) 2003-04-02 2004-12-16 Daiichi Shisetsu Kogyo Kk 非接触浮上ユニット
JP2004345744A (ja) 2003-05-20 2004-12-09 Hitachi Zosen Corp 空気浮上装置および空気浮上式搬送装置
KR200346820Y1 (ko) 2004-01-06 2004-04-06 김태원 다공질 플라스틱(porous plastic)을 공기분사부로 이용한부상이송장치

Also Published As

Publication number Publication date
TWI352056B (enExample) 2011-11-11
KR20080013693A (ko) 2008-02-13
TW200811021A (en) 2008-03-01
CN101121466A (zh) 2008-02-13
CN101121466B (zh) 2012-01-04
JP2008041989A (ja) 2008-02-21
JP4629007B2 (ja) 2011-02-09

Similar Documents

Publication Publication Date Title
KR100900381B1 (ko) 박판 형상 재료 반송 장치와 방법
JP4896148B2 (ja) 薄板状材料搬送装置
KR100831135B1 (ko) 박판 형상 재료 반송용 에어 테이블과 박판 형상 재료반송장치
JP5430430B2 (ja) ステージクリーナ、描画装置及び基板処理装置
JP2009073646A (ja) 浮上方法及び浮上ユニット
JP2003063643A (ja) 薄板の搬送方法及び装置
JP5047545B2 (ja) 浮上搬送ユニット
JP4889275B2 (ja) 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置
JP2008007319A5 (enExample)
JP4229670B2 (ja) 薄板状材の搬送方法及び装置
JP2007051001A (ja) 薄板状材料の搬送方法及び装置
JP2006264804A (ja) 大型フラットパネルの浮上ユニット及びこれを用いた非接触搬送装置
JP4171293B2 (ja) 薄板状材の搬送方法及び装置
CN211870749U (zh) 玻璃面板输送装置
JP4392692B2 (ja) 半導体ウエハー及び液晶ガラスエアー浮上搬送装置
JP2009149389A (ja) 浮上ユニット及びそれを有する装置
CN102892693B (zh) 旋流形成体及非接触式运送装置
JP2009161283A (ja) 浮上ユニット及び装置
KR20010070780A (ko) 액정표시장치용 유리기판 반송장치
JP2004179580A (ja) 板状部材の搬送装置
JP2012101897A (ja) 搬送装置
KR100490971B1 (ko) 액정표시장치용 유리기판의 부상장치
JP2003321119A (ja) プレートとフラットパネルの間の相対的高圧力域によってフラットパネルを浮上させる浮上機器
JP2007160249A (ja) ファンフィルターユニット
HK1133238B (zh) 薄板状材料输送装置

Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

R15-X000 Change to inventor requested

St.27 status event code: A-3-3-R10-R15-oth-X000

R16-X000 Change to inventor recorded

St.27 status event code: A-3-3-R10-R16-oth-X000

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20120323

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20130315

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

FPAY Annual fee payment

Payment date: 20150227

Year of fee payment: 8

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 8

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20160515

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20160515