KR100814576B1 - 반송장치 - Google Patents

반송장치 Download PDF

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Publication number
KR100814576B1
KR100814576B1 KR1020020025467A KR20020025467A KR100814576B1 KR 100814576 B1 KR100814576 B1 KR 100814576B1 KR 1020020025467 A KR1020020025467 A KR 1020020025467A KR 20020025467 A KR20020025467 A KR 20020025467A KR 100814576 B1 KR100814576 B1 KR 100814576B1
Authority
KR
South Korea
Prior art keywords
substrate
conveying
roller
rollers
board
Prior art date
Application number
KR1020020025467A
Other languages
English (en)
Korean (ko)
Other versions
KR20020091776A (ko
Inventor
다테야마기요히사
모토다기미오
Original Assignee
동경 엘렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 동경 엘렉트론 주식회사 filed Critical 동경 엘렉트론 주식회사
Publication of KR20020091776A publication Critical patent/KR20020091776A/ko
Application granted granted Critical
Publication of KR100814576B1 publication Critical patent/KR100814576B1/ko

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00—Roller-ways
    • B65G13/02—Roller-ways having driven rollers
    • B65G13/04—Roller-ways having driven rollers all rollers driven
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00—Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/10—Arrangements of rollers
    • B65G39/12—Arrangements of rollers mounted on framework
    • B65G39/14—Spring-supported sets, e.g. permitting troughing of a load-carrying belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67069—Apparatus for fluid treatment for etching for drying etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)
KR1020020025467A 2001-05-30 2002-05-09 반송장치 KR100814576B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001161990 2001-05-30
JPJP-P-2001-00161990 2001-05-30

Publications (2)

Publication Number Publication Date
KR20020091776A KR20020091776A (ko) 2002-12-06
KR100814576B1 true KR100814576B1 (ko) 2008-03-17

Family

ID=37490884

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020020025467A KR100814576B1 (ko) 2001-05-30 2002-05-09 반송장치

Country Status (2)

Country Link
JP (1) JP3960087B2 (ja)
KR (1) KR100814576B1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105772473A (zh) * 2016-03-24 2016-07-20 京东方科技集团股份有限公司 一种除尘方法及装置

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100500169B1 (ko) * 2003-07-02 2005-07-07 주식회사 디엠에스 도킹형 기판 이송 및 처리 시스템과, 그를 이용한 이송 및 처리 방법
JP4754885B2 (ja) * 2004-11-30 2011-08-24 株式会社ダイヘン 基板搬送装置
JP4881575B2 (ja) * 2005-04-28 2012-02-22 芝浦メカトロニクス株式会社 基板の搬送装置
KR100672964B1 (ko) * 2005-08-22 2007-01-22 주식회사 케이씨텍 대면적 기판 이송장치
TWI296835B (en) * 2006-05-19 2008-05-11 Au Optronics Corp Apparatus for transporting glass substrates
KR100821181B1 (ko) * 2006-06-22 2008-04-11 주식회사 에스에프에이 기판 반송장치
DE102006033354B4 (de) * 2006-07-19 2012-01-12 Höllmüller Maschinenbau GmbH Vorrichtung zum Behandeln von flachen, zerbrechlichen Substraten
KR101367850B1 (ko) * 2006-12-26 2014-02-25 엘지디스플레이 주식회사 습식공정을 위한 기판 이송용 트랙
JP5139034B2 (ja) * 2007-10-31 2013-02-06 株式会社三共製作所 材料送り装置
JP4675401B2 (ja) * 2008-08-29 2011-04-20 東京エレクトロン株式会社 基板搬送装置
JP5773158B2 (ja) * 2011-11-10 2015-09-02 株式会社Ihi 薄板状ワーク保管装置
JP6829962B2 (ja) * 2016-07-28 2021-02-17 日本電産サンキョー株式会社 産業用ロボット
JP2019175933A (ja) * 2018-03-27 2019-10-10 株式会社荏原製作所 洗浄装置、これを備えためっき装置、及び洗浄方法
KR102656981B1 (ko) * 2018-03-27 2024-04-11 가부시키가이샤 에바라 세이사꾸쇼 세정 장치, 이를 구비한 도금 장치 및 세정 방법
JP7257742B2 (ja) * 2018-03-27 2023-04-14 株式会社荏原製作所 洗浄装置、これを備えためっき装置、及び洗浄方法
JP7096746B2 (ja) * 2018-09-21 2022-07-06 株式会社荏原製作所 基板搬送装置および基板搬送装置を備える基板処理装置
JP7332391B2 (ja) * 2018-09-28 2023-08-23 芝浦メカトロニクス株式会社 基板搬送装置および基板処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980019115A (ko) * 1996-08-30 1998-06-05 히가시 데츠로 반도체 처리용 도포 장치(coating apparatus for semiconductor process)

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19980019115A (ko) * 1996-08-30 1998-06-05 히가시 데츠로 반도체 처리용 도포 장치(coating apparatus for semiconductor process)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105772473A (zh) * 2016-03-24 2016-07-20 京东方科技集团股份有限公司 一种除尘方法及装置

Also Published As

Publication number Publication date
KR20020091776A (ko) 2002-12-06
JP2003051529A (ja) 2003-02-21
JP3960087B2 (ja) 2007-08-15

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