TWI296835B - Apparatus for transporting glass substrates - Google Patents

Apparatus for transporting glass substrates Download PDF

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Publication number
TWI296835B
TWI296835B TW095117911A TW95117911A TWI296835B TW I296835 B TWI296835 B TW I296835B TW 095117911 A TW095117911 A TW 095117911A TW 95117911 A TW95117911 A TW 95117911A TW I296835 B TWI296835 B TW I296835B
Authority
TW
Taiwan
Prior art keywords
sleeve
disposed
roller
upper roller
roller set
Prior art date
Application number
TW095117911A
Other languages
Chinese (zh)
Other versions
TW200744149A (en
Inventor
Giaway Tzeng
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW095117911A priority Critical patent/TWI296835B/en
Priority to KR1020060094129A priority patent/KR100826106B1/en
Publication of TW200744149A publication Critical patent/TW200744149A/en
Application granted granted Critical
Publication of TWI296835B publication Critical patent/TWI296835B/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G13/00Roller-ways
    • B65G13/11Roller frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/02Adaptations of individual rollers and supports therefor
    • B65G39/09Arrangements of bearing or sealing means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G39/00Rollers, e.g. drive rollers, or arrangements thereof incorporated in roller-ways or other types of mechanical conveyors 
    • B65G39/10Arrangements of rollers
    • B65G39/12Arrangements of rollers mounted on framework
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Rollers For Roller Conveyors For Transfer (AREA)

Description

1296835 九、發明說明: 【發明所屬之技術領域】 本發明疋有關於一種玻璃基板之輪送設備,且特別是 有關於一種應用於濕滑環境中的玻璃基板輸送設備。 【先前技術】 隨著光學科技與半導體技術的進步,液晶顯示裝置 (Liquid Crystal Display ; LCD)已廣泛的應用於電子產品顯 示裝置上。液晶顯示器具有高畫質、體積小、重量輕、低 電壓驅動、低消耗功率及應用範圍廣等優點,故已廣泛的 應用於可攜式電視、行動電話、攝錄放影機、筆記型電腦、 桌上型顯示器、以及投影電視等消費性電子或電腦產品 中,成為顯示器的主流。 一般液晶顯示器之主體為液晶單元,主要是由兩片玻 璃基板以及被封於基板之間的液晶所構成。目前液晶顯示 器是以薄膜電晶體(Thin Film Transistor ; TFT)液晶顯示哭 為主,液晶上下兩層玻璃基板主要是用來夾住液晶,下層 基板具有薄膜電晶體,而上層基板則係為一彩色濾光片 (Color fther)。彩色濾光片係在上層基板上形成紅(R)、綠 (G)、藍(B)二原色之彩色濾光層,以使液晶顯示器呈現出豐 富的顏色圖像。 在液晶顯示器的製作過程中,往往需要在各個製程中 輸送玻璃基板。習知的玻璃基板輸送設備係由下軸承座、 下滾輪組、上軸承座及上滾輪組所組成。下滾輪組樞接於 下軸承座,且其具有下轉轴及穿設於下轉軸之下滾輪片與 Ϊ296835 下齒輪。上軸承座係位於下軸承座上。上滾輪組則樞接於 上軸承座,且其具有上轉軸及穿設於上轉軸之上滾輪片與 上齒輪。其中,上滾輪組之上齒輪係嚙合下滾輪組之下齒 輪,以使上滾輪組藉由下滾輪組的帶動而旋轉。如此,使 用者只需將玻璃基板置放於滾動中的上滾輪片及下滾輪片 之間,玻璃基板即可藉由上、下滾輪片的帶動而前進。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass substrate transfer apparatus, and more particularly to a glass substrate transportation apparatus for use in a wet environment. [Prior Art] With advances in optical technology and semiconductor technology, liquid crystal display devices (LCDs) have been widely used in electronic product display devices. LCD monitors have high image quality, small size, light weight, low voltage drive, low power consumption and wide application range. They have been widely used in portable TVs, mobile phones, video recorders, and notebook computers. In consumer electronics or computer products such as desktop monitors and projection TVs, it has become the mainstream of displays. Generally, the main body of the liquid crystal display is a liquid crystal cell, which is mainly composed of two glass substrates and a liquid crystal sealed between the substrates. At present, the liquid crystal display is mainly based on a thin film transistor (TFT) liquid crystal display, the upper and lower glass substrates of the liquid crystal are mainly used for sandwiching the liquid crystal, the lower substrate has a thin film transistor, and the upper substrate is a color. Filter (Color fther). The color filter forms a color filter layer of two primary colors of red (R), green (G), and blue (B) on the upper substrate, so that the liquid crystal display exhibits a rich color image. In the production process of liquid crystal displays, it is often necessary to transport the glass substrates in various processes. The conventional glass substrate conveying apparatus is composed of a lower bearing seat, a lower roller set, an upper bearing seat and an upper roller set. The lower roller set is pivotally connected to the lower bearing housing, and has a lower shaft and a lower roller shaft and a lower roller 296835 lower gear. The upper bearing seat is located on the lower bearing housing. The upper roller set is pivotally connected to the upper bearing housing, and has an upper rotating shaft and a roller piece and an upper gear which are disposed on the upper rotating shaft. Wherein, the gear train on the upper roller group meshes with the gear wheel under the lower roller group, so that the upper roller group rotates by the lower roller group. Thus, the user only needs to place the glass substrate between the upper roller and the lower roller in the rolling direction, and the glass substrate can be advanced by the driving of the upper and lower roller blades.

然而,使用上所述之玻璃基板輸送設備,會有下列缺 點: N (1) 上滾輪組之上齒輪容易因下滾輪組之下齒輪的推 斥而輕起,使得上滾輪組之上滚輪片肖下滾輪組之下滾輪 片之間的距離變大,造成上、下滾輪片與玻璃基板間的^ 擦力下降,因而產生傳送異常;以及 (2) 上滾輪組之上滾輪片與下滾輪組之下滾輪片之間 的距離因磨耗而增加,使得玻璃基板與上、下滾輪片之門 的摩擦力減少,造成玻璃基板前進不順。 特別是在玻璃基板的清潔製程中,由於製程環境非常 地潮濕且易滑,因此上滾輪片所提供的摩擦力往往不足: 再加上清潔製程常會施加特定的化學藥劑保養清洗,此將 使得原本就已經很濕滑的製程環境將更加地惡劣,這此: 素再再都使得傳送異常頻頻地發生。 沒一口 【發明内容】 此本發明—方面就是錢供—種_騎 其可增加上、下滾輪組與玻璃基板間的摩擦‘&amp; 減少傳送異常的發生。 ’、’進而 1296835 係由月—較佳實施例,—種玻璃基板之輸送設備 二 i、下滾輪組、上軸承座、上滾輪、組、定位架 及定位件所組成。其巾,下滾輪組係樞接於下軸承座。^ 轴承座係設置於下軸承座上。上滾輪㈣樞接於 座’並喃合下滾輪組。定位架係設置於上軸承座上,並且 有槽孔設置於定位架之頂壁上。定位件則設置於槽孔,並 抵住上滾輪組,使±滾輪組承受下壓力,進而提升上、下 滾輪組與玻璃基板之間的摩擦力。 更具體地說,上述之定位件係由套筒、彈菁及活塞所 組成。其中,套筒具有活塞孔設置其一端。彈簧設置於套 ::内。活塞則部分設置於套筒内,且活塞之一端係抵住彈 Η而另端則牙過活塞孔並抵住上滾輪組。由於套筒拘 束著彈貫的行程,故彈簧僅能在其軸向產生變形,此將使 定位件所提供的下壓力較為穩定,不致因彈簧挫屈而使下 壓力大幅變化。 承以上所述,定位件更可具有套筒螺紋,設置於套筒 之外側,而槽孔亦可具有槽孔螺紋,用以配合套筒螺紋。 這樣,使用者即可將定位件輕易地旋入槽孔中,並依旋入 槽孔的殊度,來計算施加給上滾輪組的下壓力。 續以上所述,定位件另可包含限位件,設置於套筒背 對上滾輪組的一端,當套筒螺紋完全旋入槽孔螺紋時,限 位件恰抵住頂壁。換言之,限位件係限制了定位件旋入槽 孔的距離,此將確保當限位件抵住頂壁時,上滾輪組所承 受的下壓力為一定值,其可讓使用者無須費心計算旋入槽 孔的距離。 1296835 ^另外,上述之上滾輪組可具有一抵接平面,而定位件 係抵住此抵接平面。也就是說,定位件與上滾輪組間的接 觸屬於平面接觸,其可確保上滾輪組承受穩定的下壓力, 避免因疋位件與上滾輪組間發生滑位而導致下壓力大俨 化。 田 本發明另一方面就是在提供一種玻璃基板之輸送設 備,其提供一對連續式的定位架及複數個定位件於滾輪輸 迗組的兩端,用以減少因濕滑及摩擦力不均所產生的 異常及破損。 ' ^根據本發明另一較佳實施例,一種玻璃基板之輸送設 備係由複數個滾輪輸送組、一對定位架及複數個定位件所 組成。其中’上述之複數個滾輪輸送組係彼此間隔一距離 设置,且每-滾輪輸送組均具有一對下輛承座、兩端分別 槐接此對下軸承座之下滾輪組、分別設置於此對下軸承座 上之-對上軸承座,以及兩端分別樞接於此對上轴承座並 唾合下滾輪組之上滾輪組。上述之兩定位架分別位於滾輪 輸送組,兩端’並設置於每—滾輪輸送組之上軸承座上。 此外,母一定位架均具有複數個槽孔設置於其頂壁上。而 上述之複數個定位件則分別設置於這些槽孔中,並抿住每 -滾輪輸送組之上滾輪組的兩端,使其承受一下麼力,進 而提升上、下滾輪組與玻璃基板之間的摩擦力。值得注咅 得是,抵住每一上滾輪組兩端之定位件將提供相同的下星 力,以避免玻璃基板因兩端受力不等而產生旋轉,進而造 成玻璃基板的破損。 更具體地說,上述之每一定位件均由套筒、彈菁及活 1296835 塞所組成。其中,套筒具有活塞孔設置其一端。彈簧設置 於套筒内。活塞則部分設置於套筒内,且活塞之一端係抵 住彈簧,而另一端則穿過活塞孔並抵住上滾輪組。由於套 筒拘束著彈簧的行程,故彈簧僅能在其轴向產生變形。如 此一來’定位件即可提供給上滾輪組穩定的下壓力,不致 因彈簧挫屈而使下壓力大幅變化。 承以上所述’每一定位件更可具有套筒螺紋,設置於 套筒之外側,而槽孔亦可具有槽孔螺紋,用以配合套筒螺 紋。這樣,使用者即可將定位件輕易地旋入槽孔中,並依 旋入槽孔的深度,來計算施加給上滾輪組的下壓力。 續以上所述,每一定位件另可包含限位件,設置於套 筒背對上滾輪組的一端,當套筒螺紋完全旋入槽孔螺紋 時,限位件恰抵住頂壁。在本實施例中,每一定位件之套 筒的長度均相等,因此當限位件抵住頂壁時,每一定位件 提供給上滾輪組的下壓力均為一定值,其可讓使用者無須 費心計异旋入槽孔的距離。 另外,每一滾輪輸送組之上滾輪組均可具有一抵接平 面而疋位件係抵住此抵接平面。換言之,定位件與上滾 輪組間的接觸係屬於平面接觸,其可確保上滾輪組承受穩 定的下壓力,避免因定位件與上滚輪組間發生滑位而導致 下壓力大幅變化。 因此,運用本發明所揭露之玻璃基板輸送設備具有下 列優點:⑴可增加上、下滾輪組與玻璃基板間的摩捧力, 進而減少傳送異常;(2)在增加上、下滚輪組與玻 之摩擦力的同時確保玻璃基板兩端平衡受力,避免二料 1296835 基板旋轉而導致破損;以及(3)特別適用於潮濕且易滑的製 程環境中輸送玻璃基板。 【實施方式】 本發明係增加習知玻璃基板輸送設備之上、下滾輪矣且 及玻璃基板間的摩擦力,使傳送異常的情況得以減少,如 此可讓本發明之玻璃基板輸送設備適用於潮濕且易滑的製 程環境中。以下將以圖示及詳細的描述,清楚說明本創作 之精神。如熟悉此技術之人員在瞭解本創作之較佳實施例 後’當可由本創作所教示之技術,加以改變及修飾,其並 不脫離本創作之精神與範圍。 參照弟1A圖,其繪示依照本發明一較佳實施例玻璃基 板之輸送設備的部分側視圖。在第1A圖中,一種玻璃基板 之輸送設備係由下軸承座120、下滾輪組13〇、上軸承座 140、上滾輪組150、定位架16〇及定位件2〇〇所組成。其 中,下滾輪組130係樞接於下軸承座12〇。上軸承座14〇 係設置於下軸承座120上。上滾輪組15〇係樞接於上軸承 座140,並嚙合下滾輪組13〇。定位架16〇係設置於上軸承 座14〇上,並具有槽孔162設置於定位架160之頂壁163 上。定位件200則設置於槽孔162,並抵住上滾輪組15〇, 使上滾輪組150承受下壓力,進而提升上滾輪組15〇、下滾 輪組130與玻璃基板之間的摩擦力。 ’…、第1B及ic圖’其分別緣示第ία圖中之定位件 =〇於安裝前後的剖面圖。由第1B及1C圖可知,上述之 定位件200係由套筒210、彈簧220及活塞230所組成。其 Ϊ296835 中,套筒210具有活塞孔212設置套筒210之第一端214。 彈簧220設置於套筒210内。活塞230則部分設置於套筒 210内,且活塞230之第一端234係抵住彈簧220,而活塞 230之第二端232則穿過活塞孔212並抵住'上滾輪組(第1A 圖所繪示之上滾輪組150)。進一步地比較第1B及1C圖可 知,彈簧220於定位件200安裝前後僅產生壓縮變形,而 無其他方向的變形(如:挫屈或彎曲),此係由於套筒21〇 拘束著彈簧220的行程,故彈簧220僅能在其軸向產生變 形,此將使得定位件200所提供的下壓力較為穩定,不致 因彈簧220挫屈而使下壓力大幅變化。此外,由於彈箬僅 在其軸向產生變形,故依照虎克定律,上滾輪組所承受的 下壓力與彈簧變形將是線性關係,因此上滾輪組所承受的 下壓力可輕易藉由彈簧變形來推知,而不需要複雜的計算。 再次參照第1A及1C圖,在本實施例中,定位件2〇〇 更可具有套筒螺紋240,設置於套筒21〇之外側,而槽孔 162亦可具有槽孔螺紋164,用以配合套筒螺紋24〇。這樣, 使用者即可將定位件200輕易地旋入槽孔162中,並依旋 入槽孔162的深度,來計算施加給上滾輪組15〇的下壓力。 續以上所述,疋位件200另可包含限位件250,設置於 套筒210背對上滾輪組150的第二端216,當套筒螺紋24〇 完全旋入槽孔螺紋164時,限位件25〇將恰抵住頂壁163。 換言之,限位件250係限制了定位件2〇〇旋入槽孔162的 距離,此將確保當限位件250抵住頂壁163時, 150所承受的下壓力為—定值,其可讓使用者無須費心言;算 旋入槽孔162的距離。 12 1296835 參照第ID圖,其繪示第1A圖之定位件200抵住上滾 輪組150部分的剖面圖。更具體地說,第1D圖係繪示第 1Α圖之上滾輪組150拆除齒輪151後的示意圖。在第1D 圖中,上述之上滾輪組可具有一抵接平面152,而定位件 200係抵住此抵接平面152。具體而言,上滾輪組可具有一 矩形塊153穿設於齒輪的内側,而定位件200係抵住此矩 形塊153上的抵接平面152。也就是說,定位件200與上滾 輪組間的接觸屬於平面接觸,其可確保上滾輪組承受穩定 的下壓力,避免因定位件200與上滾輪組間發生滑位而導 致下壓力大幅變化。 參照第2Α及2Β圖,其繪示依照本發明另一較佳實施 例玻璃基板之輸送設備的部分側視及正視圖。在第2Α及 2Β圖中,一種玻璃基板之輸送設備係由複數個滾輪輸送組 310、一對定位架360及複數個定位件400所組成。其中, 上述之複數個滾輪輸送組310係彼此間隔一距離設置,且 每一滾輪輸送組310均具有一對下軸承座320、兩端分別樞 接此對下軸承座320之下滾輪組330、分別設置於此對下軸 承座320上之一對上軸承座340,以及兩端分別樞接於此對 上轴承座340並喃合下滾輪組330之上滾輪組350。上述之 兩定位架360分別位於滾輪輸送組310的兩端,並設置於 每一滾輪輸送組310之上軸承座340上。此外,每一定位 架360均具有複數個槽孔362設置於其頂壁363上。而上 述之複數個定位件400則分別設置於這些槽孔362中,並 抵住每一滾輪輸送組310之上滾輪組350的兩端,使其承 受一下壓力,進而提升上滾輪組350、下滾輪組330與玻璃 13 1296835 基板之間的摩擦力。值得注意得是,抵住每—上滾輪組 兩端之定位件400將提供相同的下壓力,以避免玻璃 因兩端受力不等而產生旋轉’進而造成玻璃基板的破才)。 在本實施例中,每一定位件4〇〇的細部結構均與前述 相同,在此不再贅述。惟在本實施例中,每一定位件之套 同的長度均相等,因此當限位件4〇2抵住頂壁363時,每 一疋位件400提供給上滾輪組的下壓力均為一定值,其可 避免玻璃基板因受力不均而破損。 另外,每一滾輪輸送組310之上滾輪組3·5〇兩端均可 具有一抵接平面352,而定位件4〇〇係抵住此抵接平面 352。換言之,定位件4〇〇與上滾輪組35〇間的接觸係屬於 平面接觸,其可確保上滾輪組35〇承受穩定的下壓力,避 免因定位件400與上滾輪組35〇間發生滑位而導致下壓力 大幅變化。 由上述本發明較佳實施例可知,應用本發明具有下列 優點。 (1) 可增加上、下滾輪組與玻璃基板間的摩擦力,進而 減少傳送異常; (2) 在增加上、下滾輪組與玻璃基板間摩擦力的同時確 保玻璃基板兩端平衡受力,避免因玻璃基板旋轉而導致破 損;以及 (3) 特別適用於潮濕且易滑的製程環境中輸送玻璃基 板。 雖然本發明已以一較佳實施例揭露如上,然其並非用 以限定本發明,任何熟習此技藝者,在不脫離本發明之精 1296835 神和範圍内,當可作各種之更動與潤飾,因此本發明之保 護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 為讓本發明之上述和其他目的、特徵、優點與實施例 能更明顯易懂,所附圖式之詳細說明如下: 第1A圖係繪示依照本發明一較佳實施例玻璃基板之 輸送設備的部分側視圖。 第1B及1C圖係分別繪示第1A圖中之定位件200於 安裝前後的剖面圖。 第1D圖係繪示第1A圖中定位件200抵住上滾輪組150 部分之剖面圖。 第2A圖係繪示依照本發明另一較佳實施例玻璃基板 之輸送設備的部分側視圖。 第2B圖係繪示第2A圖之玻璃基板之輸送設備的部分 正視圖。 【主要元件符號說明】 120 :下轴承座 140 :上軸承座 151 :齒輪 153 :矩形塊 130 :下滾輪組 150 :上滾輪組 152 :抵接平面 160 :定位架 15 1296835 滾輪輸送組320 :下軸承座 下滾輪組 340 :上軸承座 上滾輪組 3 5 2 :抵接平面 162 :槽孔 164 ··槽孔螺紋 210 :套筒 214 :第一端 220 :彈簧 232 :第二端 240 :套筒螺紋 310 : 330 : 350 : 360 :定位架 363 :頂壁 400 :定位件 163 :頂壁 200 :定位件 212 :活塞孔 216 ··第二端 230 :活塞 234 :第一端 250 :限位件 362 :槽孔 364 :槽孔螺紋 402 :限位件However, the use of the glass substrate transporting apparatus described above has the following disadvantages: N (1) The gears on the upper roller set are easily lifted by the repulsive force of the gears under the lower roller set, so that the roller on the upper roller set The distance between the roller pieces under the lower roller group becomes larger, causing the friction between the upper and lower roller pieces and the glass substrate to decrease, thereby causing abnormal transmission; and (2) the roller piece and the lower roller on the upper roller group The distance between the roller pieces under the group increases due to wear, so that the friction between the glass substrate and the upper and lower roller pieces is reduced, and the glass substrate is not advanced smoothly. Especially in the cleaning process of glass substrates, because the process environment is very humid and slippery, the friction provided by the upper roller is often insufficient: plus the cleaning process often applies a specific chemical maintenance cleaning, which will make the original The process environment, which is already very slippery, will be even worse, and this: The transmissions will often occur frequently. There is no one. [Invention] The present invention - the aspect is the money supply - the type of riding - which increases the friction between the upper and lower roller sets and the glass substrate ‘&amp; reduces the occurrence of transmission anomalies. ',' and then 1296835 are composed of a month-best embodiment, a glass substrate conveying device II, a lower roller set, an upper bearing seat, an upper roller, a group, a positioning frame and a positioning member. The towel and the lower roller set are pivotally connected to the lower bearing seat. ^ The bearing housing is placed on the lower housing. The upper roller (4) is pivoted to the seat' and the lower roller set is halved. The positioning frame is disposed on the upper bearing seat, and the slot is disposed on the top wall of the positioning frame. The positioning member is disposed in the slot and abuts against the upper roller group, so that the ± roller group is subjected to the downward pressure, thereby improving the friction between the upper and lower roller groups and the glass substrate. More specifically, the above-mentioned positioning member is composed of a sleeve, an elastomer, and a piston. Wherein, the sleeve has a piston hole provided at one end thereof. The spring is placed inside the sleeve ::. The piston is partially disposed within the sleeve, and one end of the piston abuts the magazine and the other end passes over the piston bore and abuts the upper roller set. Since the sleeve is restrained by the stroke of the spring, the spring can only be deformed in its axial direction, which will make the downward pressure provided by the positioning member more stable, and the downforce will not be greatly changed due to the spring buckling. According to the above, the positioning member may further have a sleeve thread disposed on the outer side of the sleeve, and the slot may also have a slot thread for engaging the sleeve thread. In this way, the user can easily screw the positioning member into the slot and calculate the downforce applied to the upper roller group according to the degree of screwing into the slot. Continuing the above, the positioning member may further comprise a limiting member disposed at one end of the sleeve opposite the upper roller set. When the sleeve thread is completely screwed into the slot thread, the limiting member abuts against the top wall. In other words, the limiting member limits the distance that the positioning member is screwed into the slot, which ensures that when the limiting member abuts against the top wall, the lowering pressure of the upper roller group is a certain value, which allows the user to calculate without any trouble. The distance that is screwed into the slot. 1296835 ^ In addition, the upper roller set may have an abutment plane against which the positioning member abuts. That is to say, the contact between the positioning member and the upper roller group is a planar contact, which ensures that the upper roller group is subjected to a stable downforce, thereby avoiding a large downforce due to the slippage between the clamp member and the upper roller group. Another aspect of the invention is to provide a glass substrate conveying device, which provides a pair of continuous positioning frames and a plurality of positioning members at both ends of the roller conveying group for reducing unevenness due to wet skid and friction. Abnormalities and damages. According to another preferred embodiment of the present invention, a glass substrate transporting apparatus is composed of a plurality of roller transporting sets, a pair of positioning brackets, and a plurality of positioning members. Wherein the plurality of roller conveying groups are arranged at a distance from each other, and each of the roller conveying groups has a pair of lower bearing seats, and the two ends are respectively connected to the roller groups below the lower bearing housings, respectively disposed thereon The pair of upper bearing housings on the lower bearing housing, and the two ends are respectively pivotally connected to the upper bearing housing and salivating the roller group above the lower roller group. The two positioning brackets are respectively located in the roller conveying group, and both ends are disposed on the bearing seat above each roller conveying group. In addition, the female one positioning frame has a plurality of slots disposed on the top wall thereof. The plurality of positioning members are respectively disposed in the slots, and clamp the two ends of the roller group above each roller conveying group to receive a force, thereby improving the upper and lower roller groups and the glass substrate. Friction between. It is worth noting that the positioning members that resist the ends of each of the upper roller sets will provide the same lower star force to prevent the glass substrate from rotating due to the unequal force at both ends, thereby causing damage to the glass substrate. More specifically, each of the above-mentioned positioning members is composed of a sleeve, an elastic crystal and a live 1296835 plug. Wherein, the sleeve has a piston hole provided at one end thereof. The spring is placed inside the sleeve. The piston is partially disposed within the sleeve with one end of the piston against the spring and the other end passing through the piston bore and against the upper roller set. Since the sleeve is constrained by the stroke of the spring, the spring can only be deformed in its axial direction. As a result, the positioning member can provide a stable downforce to the upper roller set without causing a large change in the downforce due to the spring buckling. According to the above description, each of the positioning members may have a sleeve thread disposed on the outer side of the sleeve, and the slot may also have a slot thread for matching the sleeve thread. In this way, the user can easily screw the positioning member into the slot and calculate the downward pressure applied to the upper roller group depending on the depth of the slot. Continuing to be noted above, each of the positioning members may further include a limiting member disposed at one end of the sleeve opposite the upper roller set. When the sleeve thread is completely screwed into the slot thread, the limiting member abuts against the top wall. In this embodiment, the lengths of the sleeves of each positioning member are equal, so when the limiting member abuts against the top wall, the downward pressure provided by each positioning member to the upper roller group is a certain value, which can be used. There is no need to bother to calculate the distance that is screwed into the slot. In addition, the roller set above each of the roller transport groups can have an abutment plane against which the clamp member abuts. In other words, the contact between the positioning member and the upper roller set is a planar contact, which ensures that the upper roller set is subjected to a stable downforce to avoid a large change in the downforce due to the slippage between the positioning member and the upper roller set. Therefore, the glass substrate conveying apparatus disclosed by the present invention has the following advantages: (1) the friction between the upper and lower roller groups and the glass substrate can be increased, thereby reducing the transmission abnormality; (2) increasing the upper and lower roller groups and the glass The frictional force ensures the balance of the two ends of the glass substrate to avoid damage caused by the rotation of the second material 1296835 substrate; and (3) is particularly suitable for conveying the glass substrate in a wet and slippery process environment. [Embodiment] The present invention increases the friction between the upper glass substrate and the lower glass roller and the glass substrate, so that the abnormality of the transmission is reduced, so that the glass substrate conveying device of the present invention can be applied to the moisture. And in a slippery process environment. The spirit of the present writing will be clearly illustrated by the following description and detailed description. It will be apparent to those skilled in the art that the present invention may be modified and modified without departing from the spirit and scope of the present invention. Referring to Figure 1A, a partial side view of a glass substrate transport apparatus in accordance with a preferred embodiment of the present invention is shown. In Fig. 1A, a glass substrate transporting apparatus is composed of a lower bearing housing 120, a lower roller set 13A, an upper bearing housing 140, an upper roller set 150, a positioning frame 16A, and a positioning member 2''. The lower roller set 130 is pivotally connected to the lower bearing housing 12A. The upper bearing housing 14 is disposed on the lower bearing housing 120. The upper roller set 15 is pivotally connected to the upper bearing block 140 and engages the lower roller set 13A. The positioning frame 16 is disposed on the upper bearing housing 14b and has a slot 162 disposed on the top wall 163 of the positioning frame 160. The positioning member 200 is disposed in the slot 162 and abuts against the upper roller set 15〇, so that the upper roller set 150 is subjected to the downward pressure, thereby improving the friction between the upper roller set 15〇 and the lower roller set 130 and the glass substrate. '..., 1B and ic diagram' respectively indicate the positioning member in the Fig. 〇α diagram = the sectional view before and after the installation. As can be seen from Figs. 1B and 1C, the above-described positioning member 200 is composed of a sleeve 210, a spring 220, and a piston 230. In Ϊ296835, the sleeve 210 has a piston bore 212 that defines a first end 214 of the sleeve 210. The spring 220 is disposed within the sleeve 210. The piston 230 is partially disposed within the sleeve 210, and the first end 234 of the piston 230 abuts against the spring 220, and the second end 232 of the piston 230 passes through the piston bore 212 and abuts the 'upper roller set (Fig. 1A) The upper roller set 150) is depicted. Further, comparing FIGS. 1B and 1C, the spring 220 only produces compression deformation before and after the positioning member 200 is installed, and there is no deformation in other directions (such as frustration or bending), because the sleeve 21 is restrained by the spring 220. The stroke, so the spring 220 can only be deformed in its axial direction, which will make the downward pressure provided by the positioning member 200 relatively stable, and the downforce will not be greatly changed due to the spring 220 being frustrated. In addition, since the magazine is only deformed in its axial direction, according to Hooke's law, the downforce subjected to the upper roller group and the spring deformation will be linear, so the downforce applied to the upper roller group can be easily deformed by the spring. To infer without the need for complicated calculations. Referring to FIGS. 1A and 1C again, in the embodiment, the positioning member 2 can further have a sleeve thread 240 disposed on the outer side of the sleeve 21 , and the slot 162 can also have a slot thread 164 for Fit the sleeve thread 24〇. Thus, the user can easily screw the positioning member 200 into the slot 162 and calculate the downward pressure applied to the upper roller set 15〇 according to the depth of the slot 162. Continuing the above, the clamping member 200 can further include a limiting member 250 disposed on the second end 216 of the sleeve 210 opposite to the upper roller set 150. When the sleeve thread 24 is fully screwed into the slot thread 164, The bit 25 will be just against the top wall 163. In other words, the limiting member 250 limits the distance that the positioning member 2 is screwed into the slot 162, which ensures that when the limiting member 250 abuts against the top wall 163, the downforce that the 150 is subjected to is a constant value. The user is not required to bother; the distance that is screwed into the slot 162 is counted. 12 1296835 Referring to the ID drawing, a cross-sectional view of the positioning member 200 of Fig. 1A against the upper roller set 150 is shown. More specifically, Fig. 1D is a schematic view showing the roller group 150 after the gear 151 is removed on the first drawing. In the 1D view, the upper roller set may have an abutment plane 152 against which the positioning member 200 abuts. Specifically, the upper roller set may have a rectangular block 153 extending through the inner side of the gear, and the positioning member 200 is abutted against the abutting plane 152 on the rectangular block 153. That is to say, the contact between the positioning member 200 and the upper rolling wheel group is a planar contact, which ensures that the upper roller group is subjected to a stable downforce and avoids a large change in the downforce due to the slippage between the positioning member 200 and the upper roller group. Referring to Figures 2 and 2, there are shown partial side elevational and front elevational views of a delivery apparatus for a glass substrate in accordance with another preferred embodiment of the present invention. In Figures 2 and 2, a glass substrate transport apparatus is comprised of a plurality of roller transport groups 310, a pair of locating frames 360, and a plurality of locating members 400. The plurality of roller transport groups 310 are disposed at a distance from each other, and each of the roller transport groups 310 has a pair of lower bearing blocks 320, and the two ends are respectively pivotally connected to the lower roller set 330 of the lower bearing housing 320, The upper bearing housing 340 is disposed on the pair of lower bearing housings 320, and the two ends are respectively pivotally connected to the upper bearing housing 340 and the roller group 350 above the lower roller group 330. The two positioning brackets 360 are respectively located at two ends of the roller conveying group 310, and are disposed on the bearing housing 340 of each roller conveying group 310. In addition, each of the locators 360 has a plurality of slots 362 disposed in the top wall 363 thereof. The plurality of positioning members 400 are respectively disposed in the slots 362, and are respectively pressed against the two ends of the roller group 350 on each roller conveying group 310 to receive a pressure, thereby lifting the upper roller group 350 and the lower portion. Friction between the roller set 330 and the glass 13 1296835 substrate. It is worth noting that the positioning members 400 that resist the ends of each of the upper roller sets will provide the same downforce to prevent the glass from rotating due to unequal forces on both ends, thereby causing the glass substrate to break. In this embodiment, the detailed structure of each of the positioning members 4 is the same as the foregoing, and details are not described herein. However, in this embodiment, the sleeves of each positioning member have the same length, so when the limiting member 4〇2 abuts against the top wall 363, the pressing force provided to the upper roller group by each of the clamping members 400 is constant. A value that prevents the glass substrate from being damaged due to uneven force. In addition, each roller transporting group 310 can have an abutting plane 352 at both ends of the roller set 3·5〇, and the positioning member 4 is pressed against the abutting plane 352. In other words, the contact between the positioning member 4〇〇 and the upper roller set 35〇 is a planar contact, which ensures that the upper roller set 35〇 is subjected to a stable downforce, avoiding the occurrence of slippage between the positioning member 400 and the upper roller set 35. As a result, the downforce has changed dramatically. It will be apparent from the above-described preferred embodiments of the present invention that the application of the present invention has the following advantages. (1) The friction between the upper and lower roller sets and the glass substrate can be increased, thereby reducing the transmission abnormality; (2) increasing the friction between the upper and lower roller groups and the glass substrate while ensuring the balance of the two ends of the glass substrate, Avoid damage due to rotation of the glass substrate; and (3) Particularly suitable for transporting glass substrates in a wet and slippery process environment. Although the present invention has been described above in terms of a preferred embodiment, it is not intended to limit the invention, and those skilled in the art can make various changes and modifications without departing from the scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS The above and other objects, features, advantages and embodiments of the present invention will become more <RTIgt; A partial side view of a transport apparatus for a glass substrate. Figs. 1B and 1C are cross-sectional views showing the positioning member 200 of Fig. 1A before and after installation, respectively. 1D is a cross-sectional view showing the portion of the positioning member 200 against the upper roller set 150 in FIG. 1A. Fig. 2A is a partial side elevational view showing a conveying apparatus for a glass substrate in accordance with another preferred embodiment of the present invention. Fig. 2B is a partial front elevational view showing the conveying apparatus of the glass substrate of Fig. 2A. [Main component symbol description] 120: Lower bearing housing 140: Upper bearing housing 151: Gear 153: Rectangular block 130: Lower roller group 150: Upper roller group 152: Abutment plane 160: Positioning frame 15 1296835 Roller conveying group 320: Lower Bearing lower roller set 340: upper bearing seat upper roller set 3 5 2 : abutting plane 162: slot hole 164 · slotted thread 210: sleeve 214: first end 220: spring 232: second end 240: sleeve Barrel thread 310 : 330 : 350 : 360 : Locator 363 : Top wall 400 : Locating member 163 : Top wall 200 : Locating member 212 : Piston hole 216 · Second end 230 : Piston 234 : First end 250 : Limit Piece 362: Slot 364: Slotted Thread 402: Limiter

1616

Claims (1)

1296835 十、申請專利範圍: 1· 一種玻璃基板之輸送設備,包含: 一下軸承座; 一下滾輪組,樞接於該下軸承座; 一上軸承座,設置於該下轴承座上; ★ 上滾輪組,樞接於該上軸承座,並嚙合該下滾輪組; , 一定位架,設置於該上軸承座上,並具有一槽孔設置 鲁 於該疋位架之一頂壁上;以及 疋位件σ又置於該槽孔,並抵住該上滾輪組,使該 上滚輪組承受一下壓力。 2. 如申請專利範圍第丨項所述之輸送設備,其中該定 仅件包含: 套筒’具有一活塞孔設置於該套筒之一端; 一彈簧,設置於該套筒内;以及 % /舌塞’部分設置於該套筒内,且該活塞之一端係抵 住该彈簧,而該活塞之另一端則穿過該活塞孔並抵住該上 滚輪組D 第 3. 如申請專利範圍第2項所述之輸送設備,其中該定 、 位件更包含一套筒螺紋,設置於該套筒之外側,而該槽孔 更具有一槽孔螺紋,用以配合該套筒螺紋。 4. 如申請專利範圍第3項所述之輸送設備,其中該定 17 1296835 位件更包含: ^ 一限位件,設置於該套筒背對該上滾輪組之另一端, 當該套筒㈣完全旋人該槽孔敎時,該限位件恰抵住該 頂壁。 5·如申請專利範圍第丨項所述之輸送設備,其中該上 滾輪組具有一抵接平面,而該定位件係抵住該抵接平面。 6· 一種玻璃基板之輸送設備,包含: 複數個滾輪輸送組,彼此間隔一距離設置,每一該些 滾輪輸送組包含: 一對下軸承座; 下滾輪組,該下滾輪組的兩端分別搞接該對下轴承 座; 一對上軸承座,分別設置於該對下軸承座上;以及 一上滾輪組,該上滾輪組的兩端分別樞接該對上軸承 座,並嚙合該下滾輪組;以及 一對定位架,分別位於該些滾輪輸送組之兩端,且設 置於該些滾輪輸送組之該對上軸承座上,每一該對定位架 具有複數個槽孔設置於每一該對定位架之一頂壁上;以及 複數個定位件,分別設置於該些槽孔中,並抵住該些 滾輪輸送組之該上滾輪組的兩端,使該些滾輪輸送組之該 上滾輪組承受一下壓力,其中抵住每一該些上滾輪組兩端 之該些定位件所提供的該下壓力係相等。 18 1296835 7·如申請專利範圍第6項所述之輸送設備,其中每一 該些定位件包含: 一套筒,具有一活塞孔設置於該套筒之一端; 一彈簧,設置於該套筒内;以及 一活塞,部分設置於該套筒内,且該活塞之一端係抵 住忒彈貫,而該活塞之另一端則穿過該活塞孔並抵住該些 滾輪輸送組其中之一的該上滾輪組。 8·如申请專利範圍第7項所述之輸送設備,其中每一 該些定位件更包含一套筒螺紋,設置於該套筒之外側,而 每一該些槽孔更具有一槽孔螺紋,用以配合該套筒螺紋。 9·如申請專利範圍第8項所述之輸送設備,其中每一 名二疋位件之泫套筒的長度倶為一定值,且每一該些定位 件包含: 一限位件,設置於該套筒背對該些上滾輪組之另一 端,當該套筒螺紋完全旋入該槽孔螺紋時,該限位件恰抵 住該些定位架之該頂壁。 10.如申請專利範圍第6項所述之輪送設備,其中每 一該些上滾輪組具有一抵接平面。1296835 X. Patent application scope: 1. A glass substrate conveying device, comprising: a lower bearing seat; a lower roller group pivotally connected to the lower bearing seat; an upper bearing seat disposed on the lower bearing seat; ★ upper roller a set, pivotally connected to the upper bearing seat and engaging the lower roller set; a positioning frame disposed on the upper bearing seat and having a slot disposed on a top wall of the one of the clamping frame; The position piece σ is placed in the slot and is pressed against the upper roller set to subject the upper roller set to a lower pressure. 2. The conveying device of claim 2, wherein the only piece comprises: a sleeve having a piston bore disposed at one end of the sleeve; a spring disposed within the sleeve; and % / a tongue plug' is partially disposed in the sleeve, and one end of the piston is against the spring, and the other end of the piston passes through the piston hole and abuts the upper roller set D. 3. As claimed in the patent scope The conveying device of claim 2, wherein the fixing member further comprises a sleeve thread disposed on an outer side of the sleeve, and the slot further has a slot thread for engaging the sleeve thread. 4. The conveying device according to claim 3, wherein the fixed position of 12 1296835 further comprises: a limiting member disposed on the other end of the sleeve opposite the upper roller set, when the sleeve (4) When the slot is completely twisted, the limiting member abuts against the top wall. 5. The conveyor apparatus of claim 3, wherein the upper roller set has an abutment plane and the locating member abuts the abutment plane. 6· A glass substrate conveying device, comprising: a plurality of roller conveying groups arranged at a distance from each other, each of the roller conveying groups comprising: a pair of lower bearing seats; a lower roller group, the two ends of the lower roller group respectively Engaging the pair of lower bearing seats; a pair of upper bearing seats respectively disposed on the pair of lower bearing seats; and an upper roller group, the two ends of the upper roller group are respectively pivotally connected to the pair of upper bearing seats, and meshing the lower a roller set; and a pair of positioning brackets respectively located at the two ends of the roller conveying groups, and disposed on the pair of upper bearing seats of the roller conveying groups, each of the pair of positioning brackets having a plurality of slots arranged in each a top wall of one of the pair of positioning frames; and a plurality of positioning members respectively disposed in the slots and abutting the two ends of the upper roller group of the roller conveying groups, so that the roller conveying groups The upper roller set is subjected to a lower pressure, wherein the lower pressures provided by the positioning members against the ends of each of the upper roller sets are equal. The transporting device of claim 6, wherein each of the positioning members comprises: a sleeve having a piston hole disposed at one end of the sleeve; a spring disposed on the sleeve And a piston partially disposed in the sleeve, and one end of the piston is pressed against the ball, and the other end of the piston passes through the piston hole and resists one of the roller conveying groups The upper roller set. 8. The conveying device of claim 7, wherein each of the positioning members further comprises a sleeve thread disposed on an outer side of the sleeve, and each of the slots further has a slot thread Used to match the thread of the sleeve. 9. The conveying device of claim 8, wherein the length of each of the two jaw members is a certain value, and each of the positioning members comprises: a limiting member disposed at The sleeve faces away from the other end of the upper roller set. When the sleeve thread is completely screwed into the slot thread, the limiting member abuts against the top wall of the positioning brackets. 10. The wheeling apparatus of claim 6, wherein each of the upper roller sets has an abutment plane.
TW095117911A 2006-05-19 2006-05-19 Apparatus for transporting glass substrates TWI296835B (en)

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JPS56128338U (en) * 1980-02-26 1981-09-30
JP3960087B2 (en) * 2001-05-30 2007-08-15 東京エレクトロン株式会社 Transport device

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