KR100801172B1 - 전기광학장치, 액정표시장치 및 그것들의 제조방법 - Google Patents

전기광학장치, 액정표시장치 및 그것들의 제조방법 Download PDF

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Publication number
KR100801172B1
KR100801172B1 KR1020050088013A KR20050088013A KR100801172B1 KR 100801172 B1 KR100801172 B1 KR 100801172B1 KR 1020050088013 A KR1020050088013 A KR 1020050088013A KR 20050088013 A KR20050088013 A KR 20050088013A KR 100801172 B1 KR100801172 B1 KR 100801172B1
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KR
South Korea
Prior art keywords
electrode
insulating film
film
contact hole
gate
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Expired - Fee Related
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KR1020050088013A
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English (en)
Korean (ko)
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KR20060051517A (ko
Inventor
하루미 무라카미
토시오 아라키
노부아키 이시가
Original Assignee
미쓰비시덴키 가부시키가이샤
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Publication of KR20060051517A publication Critical patent/KR20060051517A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133345—Insulating layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/42—Arrangements for providing conduction through an insulating substrate

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Thin Film Transistor (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR1020050088013A 2004-10-26 2005-09-22 전기광학장치, 액정표시장치 및 그것들의 제조방법 Expired - Fee Related KR100801172B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00310677 2004-10-26
JP2004310677A JP2006126255A (ja) 2004-10-26 2004-10-26 電気光学装置、液晶表示装置及びそれらの製造方法

Publications (2)

Publication Number Publication Date
KR20060051517A KR20060051517A (ko) 2006-05-19
KR100801172B1 true KR100801172B1 (ko) 2008-02-11

Family

ID=36721093

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050088013A Expired - Fee Related KR100801172B1 (ko) 2004-10-26 2005-09-22 전기광학장치, 액정표시장치 및 그것들의 제조방법

Country Status (3)

Country Link
JP (1) JP2006126255A (enExample)
KR (1) KR100801172B1 (enExample)
TW (1) TWI258863B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007093686A (ja) 2005-09-27 2007-04-12 Mitsubishi Electric Corp 液晶表示装置及びその製造方法
JP4728170B2 (ja) * 2006-05-26 2011-07-20 三菱電機株式会社 半導体デバイスおよびアクティブマトリクス型表示装置
JP2008098611A (ja) * 2006-09-15 2008-04-24 Kobe Steel Ltd 表示装置
JP2008112847A (ja) * 2006-10-30 2008-05-15 Shin Etsu Chem Co Ltd 単結晶シリコン太陽電池の製造方法及び単結晶シリコン太陽電池
WO2011158704A1 (en) 2010-06-18 2011-12-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP2019087768A (ja) * 2019-03-13 2019-06-06 ラピスセミコンダクタ株式会社 半導体装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020089008A (ko) * 2001-05-22 2002-11-29 엘지.필립스 엘시디 주식회사 반사투과형 액정표시장치용 어레이기판과 그 제조방법
JP2004004680A (ja) * 2002-03-27 2004-01-08 Tfpd Kk 表示装置用配線基板及びその製造方法
KR20040061206A (ko) * 2002-12-30 2004-07-07 엘지.필립스 엘시디 주식회사 액정표시패널 및 그 제조방법
KR20040066268A (ko) * 2003-01-17 2004-07-27 삼성전자주식회사 어레이 기판의 제조방법

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190460A (ja) * 1984-10-11 1986-05-08 Nec Corp 半導体装置
JPH07273064A (ja) * 1994-03-28 1995-10-20 Sony Corp 微小構造及びその製造方法、及び接続配線構造の形成方法
FR2751468A1 (fr) * 1996-07-15 1998-01-23 Lgelectronics Procede d'attaque pour un dispositif presentant un materiau organique
JPH11284069A (ja) * 1998-03-30 1999-10-15 Toshiba Corp 半導体装置の製造方法
JP3941901B2 (ja) * 1998-04-28 2007-07-11 株式会社半導体エネルギー研究所 半導体装置の作製方法
JP3880568B2 (ja) * 2002-10-25 2007-02-14 鹿児島日本電気株式会社 液晶表示装置の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020089008A (ko) * 2001-05-22 2002-11-29 엘지.필립스 엘시디 주식회사 반사투과형 액정표시장치용 어레이기판과 그 제조방법
JP2004004680A (ja) * 2002-03-27 2004-01-08 Tfpd Kk 表示装置用配線基板及びその製造方法
KR20040061206A (ko) * 2002-12-30 2004-07-07 엘지.필립스 엘시디 주식회사 액정표시패널 및 그 제조방법
KR20040066268A (ko) * 2003-01-17 2004-07-27 삼성전자주식회사 어레이 기판의 제조방법

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Publication number Publication date
KR20060051517A (ko) 2006-05-19
JP2006126255A (ja) 2006-05-18
TWI258863B (en) 2006-07-21
TW200614513A (en) 2006-05-01

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