TW200614513A - Electrooptical device, liquid crystal display device, and method for manufacturing them - Google Patents

Electrooptical device, liquid crystal display device, and method for manufacturing them

Info

Publication number
TW200614513A
TW200614513A TW094118890A TW94118890A TW200614513A TW 200614513 A TW200614513 A TW 200614513A TW 094118890 A TW094118890 A TW 094118890A TW 94118890 A TW94118890 A TW 94118890A TW 200614513 A TW200614513 A TW 200614513A
Authority
TW
Taiwan
Prior art keywords
interlayer insulation
electrodes
electrode
gate
source
Prior art date
Application number
TW094118890A
Other languages
Chinese (zh)
Other versions
TWI258863B (en
Inventor
Harumi Murakami
Toshio Araki
Nobuaki Ishiga
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of TW200614513A publication Critical patent/TW200614513A/en
Application granted granted Critical
Publication of TWI258863B publication Critical patent/TWI258863B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133345—Insulating layers
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/12—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode
    • G02F2201/123—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 electrode pixel
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/42—Arrangements for providing conduction through an insulating substrate

Abstract

The invention is provided to prevent a defective short-circuit between electrodes caused by a pin hole or a failure of an interlayer insulation film. At least two or more layers interlayer insulation films 14, 18 which insulate first electrodes such as a gate electrode 2, a storage capacitor common electrode 3, a gate wire 4, a gate terminal 5, a source electrode 9, a drain electrode 10, a source wire 11 and a source terminal 12, and second electrodes such as a pixel electrode 22, a gate terminal pad 23 and a source terminal pad 24 from each other are formed. At the same time, a contact hole, to be formed on the interlayer insulation films 14, 18, is formed via at least two or more steps. Even when the pin hole or the failure is produced on the interlayer insulation films 14, 18, the short-circuit defect between the electrodes except for that in the contact hole is prevented, and the yield is improved.
TW094118890A 2004-10-26 2005-06-08 Electro-optical device and its manufacturing method, liquid crystal display device and method of manufacturing thereof TWI258863B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004310677A JP2006126255A (en) 2004-10-26 2004-10-26 Electrooptical device, liquid crystal display device, and method for manufacturing them

Publications (2)

Publication Number Publication Date
TW200614513A true TW200614513A (en) 2006-05-01
TWI258863B TWI258863B (en) 2006-07-21

Family

ID=36721093

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094118890A TWI258863B (en) 2004-10-26 2005-06-08 Electro-optical device and its manufacturing method, liquid crystal display device and method of manufacturing thereof

Country Status (3)

Country Link
JP (1) JP2006126255A (en)
KR (1) KR100801172B1 (en)
TW (1) TWI258863B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI485873B (en) * 2006-10-30 2015-05-21 Shinetsu Chemical Co A single crystal silicon solar cell manufacturing method and a single crystal silicon solar cell

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007093686A (en) 2005-09-27 2007-04-12 Mitsubishi Electric Corp Liquid crystal display device and manufacturing method thereof
JP4728170B2 (en) * 2006-05-26 2011-07-20 三菱電機株式会社 Semiconductor device and active matrix display device
JP2008098611A (en) * 2006-09-15 2008-04-24 Kobe Steel Ltd Display device
WO2011158704A1 (en) 2010-06-18 2011-12-22 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device
JP2019087768A (en) * 2019-03-13 2019-06-06 ラピスセミコンダクタ株式会社 Semiconductor device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6190460A (en) * 1984-10-11 1986-05-08 Nec Corp Semiconductor device
JPH07273064A (en) * 1994-03-28 1995-10-20 Sony Corp Minute structure and its manufacture and method of forming contact wiring structure
FR2751468A1 (en) * 1996-07-15 1998-01-23 Lgelectronics ATTACK METHOD FOR A DEVICE HAVING AN ORGANIC MATERIAL
JPH11284069A (en) * 1998-03-30 1999-10-15 Toshiba Corp Manufacture of semiconductor device
JP3941901B2 (en) * 1998-04-28 2007-07-11 株式会社半導体エネルギー研究所 Method for manufacturing semiconductor device
KR100408345B1 (en) * 2001-05-22 2003-12-06 엘지.필립스 엘시디 주식회사 A Transflective LCD and method for fabricating thereof
JP4488688B2 (en) * 2002-03-27 2010-06-23 東芝モバイルディスプレイ株式会社 Wiring substrate for display device and manufacturing method thereof
JP3880568B2 (en) * 2002-10-25 2007-02-14 鹿児島日本電気株式会社 Manufacturing method of liquid crystal display device
KR20040061206A (en) * 2002-12-30 2004-07-07 엘지.필립스 엘시디 주식회사 Liquid Crystal Display Panel and Fabricating Method Thereof
KR20040066268A (en) * 2003-01-17 2004-07-27 삼성전자주식회사 Method for manufacturing array substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI485873B (en) * 2006-10-30 2015-05-21 Shinetsu Chemical Co A single crystal silicon solar cell manufacturing method and a single crystal silicon solar cell

Also Published As

Publication number Publication date
JP2006126255A (en) 2006-05-18
KR100801172B1 (en) 2008-02-11
KR20060051517A (en) 2006-05-19
TWI258863B (en) 2006-07-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees