KR100796884B1 - 적층형 반도체 장치의 제조 방법 및 적층형 전자 부품의제조 방법 - Google Patents
적층형 반도체 장치의 제조 방법 및 적층형 전자 부품의제조 방법 Download PDFInfo
- Publication number
- KR100796884B1 KR100796884B1 KR1020060027518A KR20060027518A KR100796884B1 KR 100796884 B1 KR100796884 B1 KR 100796884B1 KR 1020060027518 A KR1020060027518 A KR 1020060027518A KR 20060027518 A KR20060027518 A KR 20060027518A KR 100796884 B1 KR100796884 B1 KR 100796884B1
- Authority
- KR
- South Korea
- Prior art keywords
- semiconductor element
- adhesive layer
- electronic component
- semiconductor
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P54/00—Cutting or separating of wafers, substrates or parts of devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7402—Wafer tapes, e.g. grinding or dicing support tapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/7416—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/74—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using temporarily an auxiliary support
- H10P72/744—Details of chemical or physical process used for separating the auxiliary support from a device or a wafer
- H10P72/7442—Separation by peeling
- H10P72/7444—Separation by peeling using a peeling wedge, a knife or a bar
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/013—Manufacture or treatment of die-attach connectors
- H10W72/01331—Manufacture or treatment of die-attach connectors using blanket deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07331—Connecting techniques
- H10W72/07337—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
- H10W72/07338—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy hardening the adhesive by curing, e.g. thermosetting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
- H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/851—Dispositions of multiple connectors or interconnections
- H10W72/874—On different surfaces
- H10W72/884—Die-attach connectors and bond wires
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/751—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
- H10W90/754—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Dicing (AREA)
- Die Bonding (AREA)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005092596A JP4594777B2 (ja) | 2005-03-28 | 2005-03-28 | 積層型電子部品の製造方法 |
| JPJP-P-2005-00092595 | 2005-03-28 | ||
| JPJP-P-2005-00092596 | 2005-03-28 | ||
| JP2005092595A JP4612450B2 (ja) | 2005-03-28 | 2005-03-28 | 積層型半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20060104912A KR20060104912A (ko) | 2006-10-09 |
| KR100796884B1 true KR100796884B1 (ko) | 2008-01-22 |
Family
ID=37082411
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020060027518A Expired - Fee Related KR100796884B1 (ko) | 2005-03-28 | 2006-03-27 | 적층형 반도체 장치의 제조 방법 및 적층형 전자 부품의제조 방법 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US7615413B2 (https=) |
| KR (1) | KR100796884B1 (https=) |
| TW (1) | TW200727446A (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006310846A (ja) * | 2005-04-28 | 2006-11-09 | Ls Cable Ltd | 半導体用ダイシングダイ接着フィルム |
| JP4621595B2 (ja) * | 2006-01-11 | 2011-01-26 | 株式会社東芝 | 半導体装置の製造方法 |
| JP4881044B2 (ja) * | 2006-03-16 | 2012-02-22 | 株式会社東芝 | 積層型半導体装置の製造方法 |
| JP4719042B2 (ja) * | 2006-03-16 | 2011-07-06 | 株式会社東芝 | 半導体装置の製造方法 |
| US20080128879A1 (en) * | 2006-12-01 | 2008-06-05 | Hem Takiar | Film-on-wire bond semiconductor device |
| US20080131998A1 (en) * | 2006-12-01 | 2008-06-05 | Hem Takiar | Method of fabricating a film-on-wire bond semiconductor device |
| US20090001599A1 (en) * | 2007-06-28 | 2009-01-01 | Spansion Llc | Die attachment, die stacking, and wire embedding using film |
| TWI358797B (en) * | 2007-09-11 | 2012-02-21 | Advanced Semiconductor Eng | A wireless communication module with power amplifi |
| US20090194871A1 (en) | 2007-12-27 | 2009-08-06 | Utac - United Test And Assembly Test Center, Ltd. | Semiconductor package and method of attaching semiconductor dies to substrates |
| JP2009302212A (ja) * | 2008-06-11 | 2009-12-24 | Fujitsu Microelectronics Ltd | 半導体装置及びその製造方法 |
| JP5089560B2 (ja) * | 2008-11-28 | 2012-12-05 | リンテック株式会社 | 半導体チップ積層体および半導体チップ積層用接着剤組成物 |
| TWI382506B (zh) * | 2009-09-24 | 2013-01-11 | 力成科技股份有限公司 | 中央銲墊型晶片之主動面朝上堆疊方法與構造 |
| JP5384443B2 (ja) * | 2010-07-28 | 2014-01-08 | 日東電工株式会社 | フリップチップ型半導体裏面用フィルム、ダイシングテープ一体型半導体裏面用フィルム、半導体装置の製造方法、及び、フリップチップ型半導体装置 |
| JP2013008915A (ja) * | 2011-06-27 | 2013-01-10 | Toshiba Corp | 基板加工方法及び基板加工装置 |
| JP5472275B2 (ja) * | 2011-12-14 | 2014-04-16 | 株式会社村田製作所 | エキスパンド装置及び部品の製造方法 |
| KR20130073190A (ko) * | 2011-12-23 | 2013-07-03 | 제일모직주식회사 | 다이싱 다이본딩 필름 및 반도체 장치 |
| JP5828881B2 (ja) * | 2013-12-24 | 2015-12-09 | 日東電工株式会社 | 接着フィルム、ダイシング・ダイボンドフィルム、半導体装置の製造方法及び半導体装置 |
| TWI741973B (zh) * | 2015-12-22 | 2021-10-11 | 美商英特爾股份有限公司 | 層積體之製造方法,層積體及多層電路基板 |
| JP2018056539A (ja) * | 2016-09-23 | 2018-04-05 | 東芝メモリ株式会社 | 半導体装置及びその製造方法 |
| JP2019057575A (ja) * | 2017-09-20 | 2019-04-11 | 東芝メモリ株式会社 | 半導体装置の製造方法および半導体装置 |
| CN111656505B (zh) * | 2018-01-25 | 2024-01-30 | 库利克和索夫工业公司 | 用于焊接机的焊接工具、用于焊接半导体元件的焊接机及相关方法 |
| JP7042713B2 (ja) | 2018-07-12 | 2022-03-28 | キオクシア株式会社 | 半導体装置 |
| JP2023121355A (ja) * | 2022-02-21 | 2023-08-31 | キオクシア株式会社 | 半導体装置および半導体装置の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010099722A (ko) * | 2000-04-26 | 2001-11-09 | 다니구찌 이찌로오, 기타오카 다카시 | 수지 봉지 칩 적층형 반도체 장치 |
| JP2004311848A (ja) | 2003-04-09 | 2004-11-04 | Nitta Ind Corp | 半導体装置の製造方法、保護用粘着テープおよびダイボンド用接着剤付き支持用粘着テープ |
| JP2005050902A (ja) | 2003-07-30 | 2005-02-24 | Hitachi Chem Co Ltd | 半導体装置およびその製造方法、ならびに半導体装置に用いられるダイボンディング材 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5220200A (en) | 1990-12-10 | 1993-06-15 | Delco Electronics Corporation | Provision of substrate pillars to maintain chip standoff |
| AU4242693A (en) | 1992-05-11 | 1993-12-13 | Nchip, Inc. | Stacked devices for multichip modules |
| JPH08288455A (ja) | 1995-04-11 | 1996-11-01 | Oki Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JP3481444B2 (ja) | 1998-01-14 | 2003-12-22 | シャープ株式会社 | 半導体装置及びその製造方法 |
| JP2001217384A (ja) | 2000-02-01 | 2001-08-10 | Sony Corp | 積層型半導体装置の製造方法、及び積層型半導体装置 |
| US6333562B1 (en) | 2000-07-13 | 2001-12-25 | Advanced Semiconductor Engineering, Inc. | Multichip module having stacked chip arrangement |
| JP3913481B2 (ja) | 2001-01-24 | 2007-05-09 | シャープ株式会社 | 半導体装置および半導体装置の製造方法 |
| JP2003041209A (ja) | 2001-07-30 | 2003-02-13 | Hitachi Chem Co Ltd | 接着シートならびに半導体装置およびその製造方法 |
| JP4800524B2 (ja) | 2001-09-10 | 2011-10-26 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法、及び、製造装置 |
| JP2003179200A (ja) | 2001-12-10 | 2003-06-27 | Shinko Electric Ind Co Ltd | 半導体装置およびその製造方法 |
| JP2003218316A (ja) | 2002-01-10 | 2003-07-31 | Ficta Technology Inc | マルチチップパッケージ構造及び製造方法 |
| JP3912223B2 (ja) | 2002-08-09 | 2007-05-09 | 富士通株式会社 | 半導体装置及びその製造方法 |
| JP2004193363A (ja) | 2002-12-11 | 2004-07-08 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| JP4316253B2 (ja) | 2003-02-18 | 2009-08-19 | リンテック株式会社 | ウエハダイシング・接着用シートおよび半導体装置の製造方法 |
| JP3933118B2 (ja) | 2003-10-02 | 2007-06-20 | ソニー株式会社 | 半導体装置の製造方法および半導体装置の製造装置 |
| MY138566A (en) * | 2004-03-15 | 2009-06-30 | Hitachi Chemical Co Ltd | Dicing/die bonding sheet |
| US20050205981A1 (en) | 2004-03-18 | 2005-09-22 | Kabushiki Kaisha Toshiba | Stacked electronic part |
| JP2005327789A (ja) | 2004-05-12 | 2005-11-24 | Sharp Corp | ダイシング・ダイボンド兼用粘接着シートおよびこれを用いた半導体装置の製造方法 |
| JP2006128169A (ja) | 2004-10-26 | 2006-05-18 | Fujitsu Ltd | 半導体装置及び半導体装置の製造方法 |
| US7560821B2 (en) * | 2005-03-24 | 2009-07-14 | Sumitomo Bakelite Company, Ltd | Area mount type semiconductor device, and die bonding resin composition and encapsulating resin composition used for the same |
-
2006
- 2006-03-07 TW TW095107613A patent/TW200727446A/zh unknown
- 2006-03-27 KR KR1020060027518A patent/KR100796884B1/ko not_active Expired - Fee Related
- 2006-03-28 US US11/390,285 patent/US7615413B2/en active Active
-
2009
- 2009-09-17 US US12/585,547 patent/US7785926B2/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010099722A (ko) * | 2000-04-26 | 2001-11-09 | 다니구찌 이찌로오, 기타오카 다카시 | 수지 봉지 칩 적층형 반도체 장치 |
| JP2004311848A (ja) | 2003-04-09 | 2004-11-04 | Nitta Ind Corp | 半導体装置の製造方法、保護用粘着テープおよびダイボンド用接着剤付き支持用粘着テープ |
| JP2005050902A (ja) | 2003-07-30 | 2005-02-24 | Hitachi Chem Co Ltd | 半導体装置およびその製造方法、ならびに半導体装置に用いられるダイボンディング材 |
Also Published As
| Publication number | Publication date |
|---|---|
| US20100062566A1 (en) | 2010-03-11 |
| US7615413B2 (en) | 2009-11-10 |
| TWI295500B (https=) | 2008-04-01 |
| KR20060104912A (ko) | 2006-10-09 |
| TW200727446A (en) | 2007-07-16 |
| US20060226520A1 (en) | 2006-10-12 |
| US7785926B2 (en) | 2010-08-31 |
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