KR100732275B1 - 진공펌프 - Google Patents

진공펌프 Download PDF

Info

Publication number
KR100732275B1
KR100732275B1 KR1020000079849A KR20000079849A KR100732275B1 KR 100732275 B1 KR100732275 B1 KR 100732275B1 KR 1020000079849 A KR1020000079849 A KR 1020000079849A KR 20000079849 A KR20000079849 A KR 20000079849A KR 100732275 B1 KR100732275 B1 KR 100732275B1
Authority
KR
South Korea
Prior art keywords
stator
outer cylindrical
rotor
cylindrical portion
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020000079849A
Other languages
English (en)
Korean (ko)
Other versions
KR20010062597A (ko
Inventor
오타치요시노부
나미키히로타카
야마우치아키라
Original Assignee
비오씨 에드워즈 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 비오씨 에드워즈 가부시키가이샤 filed Critical 비오씨 에드워즈 가부시키가이샤
Publication of KR20010062597A publication Critical patent/KR20010062597A/ko
Application granted granted Critical
Publication of KR100732275B1 publication Critical patent/KR100732275B1/ko
Assigned to 에드워즈 가부시키가이샤 reassignment 에드워즈 가부시키가이샤 권리의 전부이전등록 Assignors: 에드워즈 가부시키가이샤
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
KR1020000079849A 1999-12-21 2000-12-21 진공펌프 Expired - Lifetime KR100732275B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP36309799 1999-12-21
JP1999-363097 1999-12-21
JP2000205017A JP2001241393A (ja) 1999-12-21 2000-07-06 真空ポンプ
JP2000-205017 2000-07-06

Publications (2)

Publication Number Publication Date
KR20010062597A KR20010062597A (ko) 2001-07-07
KR100732275B1 true KR100732275B1 (ko) 2007-06-25

Family

ID=26581455

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020000079849A Expired - Lifetime KR100732275B1 (ko) 1999-12-21 2000-12-21 진공펌프

Country Status (5)

Country Link
US (1) US6575713B2 (https=)
EP (1) EP1118774B1 (https=)
JP (1) JP2001241393A (https=)
KR (1) KR100732275B1 (https=)
DE (1) DE60030833T2 (https=)

Families Citing this family (49)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP4250353B2 (ja) * 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP2003049772A (ja) * 2001-08-08 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
JP2004286045A (ja) 2003-03-19 2004-10-14 Boc Edwards Kk 磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
KR100553454B1 (ko) * 2003-10-29 2006-02-22 백융 밀폐형 회전압축기의 회전자 회전장치
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem
JP3970260B2 (ja) 2004-04-23 2007-09-05 三菱重工業株式会社 ポンプ
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
JP2006144783A (ja) * 2004-11-24 2006-06-08 Pfeiffer Vacuum Gmbh 高速回転ロータを有する真空ポンプのフランジと結合可能な破損防止装置
WO2006068014A1 (ja) * 2004-12-20 2006-06-29 Boc Edwards Japan Limited 端部間の接続構造及び該構造を適用した真空システム
DE102005006433A1 (de) * 2005-02-12 2006-08-24 Leybold Vacuum Gmbh Anordnung mehrerer schnelldrehender Vakuumpumpen
JP4822771B2 (ja) * 2005-08-29 2011-11-24 フルタ電機株式会社 ブロア駆動部の脱落防止機構
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
DE102006016405B4 (de) * 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
JP4925781B2 (ja) * 2006-10-05 2012-05-09 エドワーズ株式会社 真空ポンプとその振動吸収ダンパ
DE102007008859A1 (de) * 2007-02-23 2008-08-28 Oerlikon Leybold Vacuum Gmbh Vakuumleitung
DE102007009080A1 (de) * 2007-02-24 2008-08-28 Oerlikon Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
US20080206079A1 (en) * 2007-02-27 2008-08-28 Jtekt Corporation Turbo-molecular pump and touchdown bearing device
DE102007027711A1 (de) 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
AU2009200357B2 (en) * 2008-01-31 2013-10-24 ResMed Pty Ltd Respiratory Apparatus
EP2255711A1 (en) * 2009-03-17 2010-12-01 Koninklijke Philips Electronics N.V. Vacuum cleaner
JP5785494B2 (ja) * 2009-08-28 2015-09-30 エドワーズ株式会社 真空ポンプ及び真空ポンプに使用される部材
JP5483684B2 (ja) * 2009-09-03 2014-05-07 株式会社大阪真空機器製作所 分子ポンプ
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
CN102425561B (zh) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵动平衡方法
CN102425562B (zh) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵动平衡方法
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
CN102594016B (zh) * 2012-03-20 2013-06-12 大连交通大学 机电集成章动活齿传动装置
DE102012222230A1 (de) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
EP3034881B1 (de) * 2014-12-18 2018-10-31 Pfeiffer Vacuum GmbH Vakuumpumpe
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
EP3640481B1 (de) * 2018-10-15 2023-05-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position
KR102231059B1 (ko) * 2019-03-19 2021-03-24 엘지전자 주식회사 공기조화기
KR102279938B1 (ko) * 2019-03-19 2021-07-22 엘지전자 주식회사 공기조화기
CN113544386B (zh) * 2019-04-25 2024-03-26 株式会社岛津制作所 真空泵
JP7347964B2 (ja) * 2019-05-30 2023-09-20 エドワーズ株式会社 真空ポンプ及び該真空ポンプに備えられた保護部
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ
JP7766998B2 (ja) * 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ
JP7625548B2 (ja) * 2022-03-11 2025-02-03 エドワーズ株式会社 真空ポンプ
US20250271002A1 (en) * 2024-02-28 2025-08-28 Kla Corporation Three-axis tuned mass damper for turbo molecular pump
CN119373726A (zh) * 2024-12-30 2025-01-28 上海则欧机电科技有限公司 一种转子减重结构、控制系统及分子泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294191A (ja) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
EP0220581A1 (de) * 1985-10-24 1987-05-06 Leybold-Heraeus GmbH Vakuumpumpe mit Gehäuse und Rotor
US5166566A (en) * 1988-06-01 1992-11-24 Arthur Pfeiffer Vakuumtechnik Gmbh Magnetic bearings for a high speed rotary vacuum pump
EP0768467A1 (en) * 1995-10-11 1997-04-16 Ebara Corporation Bearing unit

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2709002C3 (de) * 1977-03-02 1980-09-11 Danfoss A/S, Nordborg (Daenemark) Verdichteraggregat, insbesondere für Kältemaschinen
DE2847930A1 (de) * 1978-11-04 1980-05-14 Teldix Gmbh Magnetische lagereinrichtung
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
FR2659395B1 (fr) 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide a suspension magnetique.

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61294191A (ja) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
EP0220581A1 (de) * 1985-10-24 1987-05-06 Leybold-Heraeus GmbH Vakuumpumpe mit Gehäuse und Rotor
US5166566A (en) * 1988-06-01 1992-11-24 Arthur Pfeiffer Vakuumtechnik Gmbh Magnetic bearings for a high speed rotary vacuum pump
EP0768467A1 (en) * 1995-10-11 1997-04-16 Ebara Corporation Bearing unit

Also Published As

Publication number Publication date
US6575713B2 (en) 2003-06-10
DE60030833D1 (de) 2006-11-02
US20010012488A1 (en) 2001-08-09
EP1118774B1 (en) 2006-09-20
JP2001241393A (ja) 2001-09-07
EP1118774A2 (en) 2001-07-25
DE60030833T2 (de) 2007-03-29
KR20010062597A (ko) 2001-07-07
EP1118774A3 (en) 2002-10-30

Similar Documents

Publication Publication Date Title
KR100732275B1 (ko) 진공펌프
US6840736B2 (en) Vacuum pump
JP5046647B2 (ja) ダンパおよび真空ポンプ
CA2233707C (en) Integrated magnetic levitation and rotation system
TWI868150B (zh) 風扇
EP1024294A2 (en) Motor and turbo-molecular pump
CN110520627B (zh) 真空泵、磁轴承装置及转子
JPS62150133A (ja) 翼の回転試験装置
US20030035737A1 (en) Connecting structure for vacuum pump
WO2019181705A1 (ja) 真空ポンプ及び真空ポンプ用ダンパ
JPWO2009011042A1 (ja) 防振ダンパ
JP4481124B2 (ja) 磁気軸受装置及び該磁気軸受装置が搭載されたターボ分子ポンプ
KR20220156528A (ko) 진공 펌프 및 진공 펌프의 배관 구조부
JP2008232029A (ja) ポンプ装置
JP2002303294A (ja) 真空ポンプ
JP2010144739A (ja) 真空ポンプ防振構造
EP1811176A1 (en) Vacuum exhaust device
JPH02102915A (ja) 動圧流体軸受装置
JP2002295372A (ja) ダンパ装置、及び真空ポンプ
JP2002295396A (ja) 真空ポンプ、及びダンパ
CN119021900A (zh) 送风装置
KR20240109979A (ko) 진공 펌프, 진공 펌프의 베어링 보호 구조, 및 진공 펌프의 회전체
JP2001173588A (ja) 真空ポンプ
JPH04339194A (ja) 減衰機構
JPS61185697A (ja) タ−ボ分子ポンプ

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 20001221

PG1501 Laying open of application
N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20020311

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

N231 Notification of change of applicant
PN2301 Change of applicant

Patent event date: 20040315

Comment text: Notification of Change of Applicant

Patent event code: PN23011R01D

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20050905

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 20001221

Comment text: Patent Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20060831

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20070426

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20070619

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20070619

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
G170 Re-publication after modification of scope of protection [patent]
PG1701 Publication of correction
PR1001 Payment of annual fee

Payment date: 20100610

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20110527

Start annual number: 5

End annual number: 5

PR1001 Payment of annual fee

Payment date: 20120611

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20130531

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20130531

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20140603

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20140603

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20150515

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20150515

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20160517

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20160517

Start annual number: 10

End annual number: 10

FPAY Annual fee payment

Payment date: 20170522

Year of fee payment: 11

PR1001 Payment of annual fee

Payment date: 20170522

Start annual number: 11

End annual number: 11

FPAY Annual fee payment

Payment date: 20180516

Year of fee payment: 12

PR1001 Payment of annual fee

Payment date: 20180516

Start annual number: 12

End annual number: 12

FPAY Annual fee payment

Payment date: 20190515

Year of fee payment: 13

PR1001 Payment of annual fee

Payment date: 20190515

Start annual number: 13

End annual number: 13

PC1801 Expiration of term

Termination date: 20210621

Termination category: Expiration of duration