JP2001241393A - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JP2001241393A
JP2001241393A JP2000205017A JP2000205017A JP2001241393A JP 2001241393 A JP2001241393 A JP 2001241393A JP 2000205017 A JP2000205017 A JP 2000205017A JP 2000205017 A JP2000205017 A JP 2000205017A JP 2001241393 A JP2001241393 A JP 2001241393A
Authority
JP
Japan
Prior art keywords
outer cylinder
stator
rotor
base
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000205017A
Other languages
English (en)
Japanese (ja)
Other versions
JP2001241393A5 (https=
Inventor
Yoshinobu Odate
好伸 大立
Hiroyoshi Namiki
啓能 並木
Akira Yamauchi
明 山内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Seiki KK
Original Assignee
Seiko Seiki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Seiki KK filed Critical Seiko Seiki KK
Priority to JP2000205017A priority Critical patent/JP2001241393A/ja
Priority to US09/740,663 priority patent/US6575713B2/en
Priority to KR1020000079849A priority patent/KR100732275B1/ko
Priority to DE60030833T priority patent/DE60030833T2/de
Priority to EP00311552A priority patent/EP1118774B1/en
Publication of JP2001241393A publication Critical patent/JP2001241393A/ja
Publication of JP2001241393A5 publication Critical patent/JP2001241393A5/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2000205017A 1999-12-21 2000-07-06 真空ポンプ Pending JP2001241393A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2000205017A JP2001241393A (ja) 1999-12-21 2000-07-06 真空ポンプ
US09/740,663 US6575713B2 (en) 1999-12-21 2000-12-19 Vaccum pump
KR1020000079849A KR100732275B1 (ko) 1999-12-21 2000-12-21 진공펌프
DE60030833T DE60030833T2 (de) 1999-12-21 2000-12-21 Vakuumpumpe
EP00311552A EP1118774B1 (en) 1999-12-21 2000-12-21 Vacuum pump

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP36309799 1999-12-21
JP11-363097 1999-12-21
JP2000205017A JP2001241393A (ja) 1999-12-21 2000-07-06 真空ポンプ

Publications (2)

Publication Number Publication Date
JP2001241393A true JP2001241393A (ja) 2001-09-07
JP2001241393A5 JP2001241393A5 (https=) 2005-06-30

Family

ID=26581455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000205017A Pending JP2001241393A (ja) 1999-12-21 2000-07-06 真空ポンプ

Country Status (5)

Country Link
US (1) US6575713B2 (https=)
EP (1) EP1118774B1 (https=)
JP (1) JP2001241393A (https=)
KR (1) KR100732275B1 (https=)
DE (1) DE60030833T2 (https=)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006068014A1 (ja) * 2004-12-20 2006-06-29 Boc Edwards Japan Limited 端部間の接続構造及び該構造を適用した真空システム
JP2007064026A (ja) * 2005-08-29 2007-03-15 Fulta Electric Machinery Co Ltd ブロア駆動部の脱落防止機構
US7300263B2 (en) 2004-04-23 2007-11-27 Mitsubishi Heavy Industries, Ltd. Pump
JP2008088956A (ja) * 2006-10-05 2008-04-17 Edwards Kk 真空ポンプとその振動吸収ダンパ
JP2010519475A (ja) * 2007-02-23 2010-06-03 オーリコン レイボルド バキューム ゲーエムベーハー 減圧ライン
JP2011052628A (ja) * 2009-09-03 2011-03-17 Osaka Vacuum Ltd 分子ポンプ
KR20200111651A (ko) * 2019-03-19 2020-09-29 엘지전자 주식회사 공기조화기
KR20200111568A (ko) * 2019-03-19 2020-09-29 엘지전자 주식회사 공기조화기

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
JP2002327698A (ja) * 2001-04-27 2002-11-15 Boc Edwards Technologies Ltd 真空ポンプ
JP4250353B2 (ja) * 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP2003049772A (ja) * 2001-08-08 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
JP2003336597A (ja) * 2002-03-12 2003-11-28 Boc Edwards Technologies Ltd ターボ分子ポンプ
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
JP2004286045A (ja) 2003-03-19 2004-10-14 Boc Edwards Kk 磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置
US7300261B2 (en) * 2003-07-18 2007-11-27 Applied Materials, Inc. Vibration damper with nested turbo molecular pump
KR100553454B1 (ko) * 2003-10-29 2006-02-22 백융 밀폐형 회전압축기의 회전자 회전장치
DE102004012677A1 (de) * 2004-03-16 2005-10-13 Leybold Vakuum Gmbh Vakuumsystem
JP2006063969A (ja) * 2004-07-30 2006-03-09 Shimadzu Corp 回転式真空ポンプ、真空装置およびポンプ接続構造
JP2006144783A (ja) * 2004-11-24 2006-06-08 Pfeiffer Vacuum Gmbh 高速回転ロータを有する真空ポンプのフランジと結合可能な破損防止装置
DE102005006433A1 (de) * 2005-02-12 2006-08-24 Leybold Vacuum Gmbh Anordnung mehrerer schnelldrehender Vakuumpumpen
FR2893094B1 (fr) * 2005-11-10 2011-11-11 Cit Alcatel Dispositif de fixation pour une pompe a vide
DE102006016405B4 (de) * 2006-04-07 2024-08-01 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Antriebsgerät
DE102007009080A1 (de) * 2007-02-24 2008-08-28 Oerlikon Leybold Vacuum Gmbh Schnelldrehende Vakuumpumpe
US20080206079A1 (en) * 2007-02-27 2008-08-28 Jtekt Corporation Turbo-molecular pump and touchdown bearing device
DE102007027711A1 (de) 2007-06-15 2008-12-18 Pfeiffer Vacuum Gmbh Verfahren zum Betreiben einer Anordnung mit Vakuumpumpe und Anordnung mit einer Vakuumpumpe
AU2009200357B2 (en) * 2008-01-31 2013-10-24 ResMed Pty Ltd Respiratory Apparatus
EP2255711A1 (en) * 2009-03-17 2010-12-01 Koninklijke Philips Electronics N.V. Vacuum cleaner
JP5785494B2 (ja) * 2009-08-28 2015-09-30 エドワーズ株式会社 真空ポンプ及び真空ポンプに使用される部材
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
CN102425561B (zh) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵动平衡方法
CN102425562B (zh) * 2011-12-05 2014-04-30 北京中科科仪股份有限公司 一种磁悬浮分子泵动平衡方法
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
CN102594016B (zh) * 2012-03-20 2013-06-12 大连交通大学 机电集成章动活齿传动装置
DE102012222230A1 (de) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
EP3034881B1 (de) * 2014-12-18 2018-10-31 Pfeiffer Vacuum GmbH Vakuumpumpe
US10704715B2 (en) * 2017-05-29 2020-07-07 Shimadzu Corporation Vacuum pumping device, vacuum pump, and vacuum valve
EP3640481B1 (de) * 2018-10-15 2023-05-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2579791B (en) * 2018-12-13 2021-07-14 Edwards Ltd Vacuum pump with variable axial position
CN113544386B (zh) * 2019-04-25 2024-03-26 株式会社岛津制作所 真空泵
JP7347964B2 (ja) * 2019-05-30 2023-09-20 エドワーズ株式会社 真空ポンプ及び該真空ポンプに備えられた保護部
JP7371852B2 (ja) * 2019-07-17 2023-10-31 エドワーズ株式会社 真空ポンプ
JP7766998B2 (ja) * 2020-03-31 2025-11-11 エドワーズ株式会社 真空ポンプ
JP7625548B2 (ja) * 2022-03-11 2025-02-03 エドワーズ株式会社 真空ポンプ
US20250271002A1 (en) * 2024-02-28 2025-08-28 Kla Corporation Three-axis tuned mass damper for turbo molecular pump
CN119373726A (zh) * 2024-12-30 2025-01-28 上海则欧机电科技有限公司 一种转子减重结构、控制系统及分子泵

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2709002C3 (de) * 1977-03-02 1980-09-11 Danfoss A/S, Nordborg (Daenemark) Verdichteraggregat, insbesondere für Kältemaschinen
DE2847930A1 (de) * 1978-11-04 1980-05-14 Teldix Gmbh Magnetische lagereinrichtung
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPS61294191A (ja) 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
DE3537822A1 (de) 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe mit gehaeuse und rotor
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
FR2659395B1 (fr) 1990-03-07 1992-05-15 Cit Alcatel Pompe a vide a suspension magnetique.
JP3046533B2 (ja) 1995-10-11 2000-05-29 株式会社荏原製作所 軸受ユニット

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7300263B2 (en) 2004-04-23 2007-11-27 Mitsubishi Heavy Industries, Ltd. Pump
WO2006068014A1 (ja) * 2004-12-20 2006-06-29 Boc Edwards Japan Limited 端部間の接続構造及び該構造を適用した真空システム
JP2007064026A (ja) * 2005-08-29 2007-03-15 Fulta Electric Machinery Co Ltd ブロア駆動部の脱落防止機構
JP2008088956A (ja) * 2006-10-05 2008-04-17 Edwards Kk 真空ポンプとその振動吸収ダンパ
JP2010519475A (ja) * 2007-02-23 2010-06-03 オーリコン レイボルド バキューム ゲーエムベーハー 減圧ライン
JP2011052628A (ja) * 2009-09-03 2011-03-17 Osaka Vacuum Ltd 分子ポンプ
KR20200111651A (ko) * 2019-03-19 2020-09-29 엘지전자 주식회사 공기조화기
KR20200111568A (ko) * 2019-03-19 2020-09-29 엘지전자 주식회사 공기조화기
KR102231059B1 (ko) * 2019-03-19 2021-03-24 엘지전자 주식회사 공기조화기
KR102279938B1 (ko) * 2019-03-19 2021-07-22 엘지전자 주식회사 공기조화기

Also Published As

Publication number Publication date
US6575713B2 (en) 2003-06-10
DE60030833D1 (de) 2006-11-02
KR100732275B1 (ko) 2007-06-25
US20010012488A1 (en) 2001-08-09
EP1118774B1 (en) 2006-09-20
EP1118774A2 (en) 2001-07-25
DE60030833T2 (de) 2007-03-29
KR20010062597A (ko) 2001-07-07
EP1118774A3 (en) 2002-10-30

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