KR100693236B1 - 반도체 소자 어레이 기판 및 그 제조 방법 - Google Patents

반도체 소자 어레이 기판 및 그 제조 방법 Download PDF

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Publication number
KR100693236B1
KR100693236B1 KR1020040105284A KR20040105284A KR100693236B1 KR 100693236 B1 KR100693236 B1 KR 100693236B1 KR 1020040105284 A KR1020040105284 A KR 1020040105284A KR 20040105284 A KR20040105284 A KR 20040105284A KR 100693236 B1 KR100693236 B1 KR 100693236B1
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KR
South Korea
Prior art keywords
layer
interlayer insulating
insulating film
gate electrode
semiconductor element
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KR1020040105284A
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English (en)
Korean (ko)
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KR20050060005A (ko
Inventor
가와무라데쯔야
Original Assignee
도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드
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Application filed by 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드 filed Critical 도시바 마쯔시따 디스플레이 테크놀로지 컴퍼니, 리미티드
Publication of KR20050060005A publication Critical patent/KR20050060005A/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
KR1020040105284A 2003-12-15 2004-12-14 반도체 소자 어레이 기판 및 그 제조 방법 Expired - Fee Related KR100693236B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003416676A JP2005175381A (ja) 2003-12-15 2003-12-15 半導体素子、アレイ基板およびその製造方法
JPJP-P-2003-00416676 2003-12-15

Publications (2)

Publication Number Publication Date
KR20050060005A KR20050060005A (ko) 2005-06-21
KR100693236B1 true KR100693236B1 (ko) 2007-03-12

Family

ID=34650637

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040105284A Expired - Fee Related KR100693236B1 (ko) 2003-12-15 2004-12-14 반도체 소자 어레이 기판 및 그 제조 방법

Country Status (6)

Country Link
US (1) US7095048B2 (enExample)
JP (1) JP2005175381A (enExample)
KR (1) KR100693236B1 (enExample)
CN (1) CN1629706A (enExample)
SG (1) SG113002A1 (enExample)
TW (1) TW200530664A (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340695A (ja) * 2004-05-31 2005-12-08 Hitachi Displays Ltd 表示装置の製造方法
EP1987762A1 (de) * 2007-05-03 2008-11-05 F.Hoffmann-La Roche Ag Oximeter
KR101566431B1 (ko) 2009-09-25 2015-11-06 삼성디스플레이 주식회사 액정 표시 장치
KR20130007003A (ko) 2011-06-28 2013-01-18 삼성디스플레이 주식회사 표시 장치 및 표시 장치의 제조 방법
CN104956475B (zh) * 2013-01-25 2017-08-29 夏普株式会社 半导体装置
KR102441560B1 (ko) * 2015-04-07 2022-09-08 삼성디스플레이 주식회사 박막트랜지스터 어레이 기판 및 이를 구비한 유기 발광 표시 장치
US20170062456A1 (en) * 2015-08-31 2017-03-02 Cypress Semiconductor Corporation Vertical division of three-dimensional memory device
KR102500799B1 (ko) * 2018-03-09 2023-02-20 삼성디스플레이 주식회사 트랜지스터 기판 및 이를 구비하는 표시 장치
JP2020009883A (ja) * 2018-07-06 2020-01-16 ソニーセミコンダクタソリューションズ株式会社 受光素子、測距モジュール、および、電子機器
TWI717972B (zh) * 2020-01-14 2021-02-01 友達光電股份有限公司 主動陣列基板及其製造方法
CN112713139B (zh) * 2020-12-28 2024-04-02 武汉天马微电子有限公司 柔性显示面板及柔性显示装置
CN112909020B (zh) * 2021-01-21 2023-04-07 武汉华星光电半导体显示技术有限公司 显示面板及显示装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000075321A (ja) 1998-08-31 2000-03-14 Furontekku:Kk 薄膜トランジスタアレイ基板および液晶表示装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0156178B1 (ko) * 1995-10-20 1998-11-16 구자홍 액정표시 소자의 제조방법
KR100430773B1 (ko) * 1998-07-14 2004-05-10 가부시끼가이샤 도시바 액티브 매트릭스형 액정표시장치
JP2003280020A (ja) * 2002-03-22 2003-10-02 Seiko Epson Corp 電気光学装置及びその製造方法並びに電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000075321A (ja) 1998-08-31 2000-03-14 Furontekku:Kk 薄膜トランジスタアレイ基板および液晶表示装置

Also Published As

Publication number Publication date
US20050127358A1 (en) 2005-06-16
SG113002A1 (en) 2005-07-28
CN1629706A (zh) 2005-06-22
KR20050060005A (ko) 2005-06-21
JP2005175381A (ja) 2005-06-30
US7095048B2 (en) 2006-08-22
TW200530664A (en) 2005-09-16
TWI312085B (enExample) 2009-07-11

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