CN1629706A - 半导体元件、半导体元件阵列基板及其制造方法 - Google Patents

半导体元件、半导体元件阵列基板及其制造方法 Download PDF

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Publication number
CN1629706A
CN1629706A CNA2004101020422A CN200410102042A CN1629706A CN 1629706 A CN1629706 A CN 1629706A CN A2004101020422 A CNA2004101020422 A CN A2004101020422A CN 200410102042 A CN200410102042 A CN 200410102042A CN 1629706 A CN1629706 A CN 1629706A
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CN
China
Prior art keywords
layer
insulating film
array substrate
interlayer insulating
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004101020422A
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English (en)
Chinese (zh)
Inventor
川村哲也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Display Central Inc
Original Assignee
Toshiba Matsushita Display Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Matsushita Display Technology Co Ltd filed Critical Toshiba Matsushita Display Technology Co Ltd
Publication of CN1629706A publication Critical patent/CN1629706A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441—Interconnections, e.g. scanning lines
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362—Active matrix addressed cells
    • G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
CNA2004101020422A 2003-12-15 2004-12-15 半导体元件、半导体元件阵列基板及其制造方法 Pending CN1629706A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003416676A JP2005175381A (ja) 2003-12-15 2003-12-15 半導体素子、アレイ基板およびその製造方法
JP2003416676 2003-12-15

Publications (1)

Publication Number Publication Date
CN1629706A true CN1629706A (zh) 2005-06-22

Family

ID=34650637

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2004101020422A Pending CN1629706A (zh) 2003-12-15 2004-12-15 半导体元件、半导体元件阵列基板及其制造方法

Country Status (6)

Country Link
US (1) US7095048B2 (enExample)
JP (1) JP2005175381A (enExample)
KR (1) KR100693236B1 (enExample)
CN (1) CN1629706A (enExample)
SG (1) SG113002A1 (enExample)
TW (1) TW200530664A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112219280A (zh) * 2018-07-06 2021-01-12 索尼半导体解决方案公司 光接收元件、测距模块和电子设备

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005340695A (ja) * 2004-05-31 2005-12-08 Hitachi Displays Ltd 表示装置の製造方法
EP1987762A1 (de) * 2007-05-03 2008-11-05 F.Hoffmann-La Roche Ag Oximeter
KR101566431B1 (ko) 2009-09-25 2015-11-06 삼성디스플레이 주식회사 액정 표시 장치
KR20130007003A (ko) 2011-06-28 2013-01-18 삼성디스플레이 주식회사 표시 장치 및 표시 장치의 제조 방법
CN104956475B (zh) * 2013-01-25 2017-08-29 夏普株式会社 半导体装置
KR102441560B1 (ko) * 2015-04-07 2022-09-08 삼성디스플레이 주식회사 박막트랜지스터 어레이 기판 및 이를 구비한 유기 발광 표시 장치
US20170062456A1 (en) * 2015-08-31 2017-03-02 Cypress Semiconductor Corporation Vertical division of three-dimensional memory device
KR102500799B1 (ko) * 2018-03-09 2023-02-20 삼성디스플레이 주식회사 트랜지스터 기판 및 이를 구비하는 표시 장치
TWI717972B (zh) * 2020-01-14 2021-02-01 友達光電股份有限公司 主動陣列基板及其製造方法
CN112713139B (zh) * 2020-12-28 2024-04-02 武汉天马微电子有限公司 柔性显示面板及柔性显示装置
CN112909020B (zh) * 2021-01-21 2023-04-07 武汉华星光电半导体显示技术有限公司 显示面板及显示装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0156178B1 (ko) * 1995-10-20 1998-11-16 구자홍 액정표시 소자의 제조방법
KR100430773B1 (ko) * 1998-07-14 2004-05-10 가부시끼가이샤 도시바 액티브 매트릭스형 액정표시장치
JP3969510B2 (ja) 1998-08-31 2007-09-05 エルジー フィリップス エルシーディー カンパニー リミテッド 薄膜トランジスタアレイ基板および液晶表示装置
JP2003280020A (ja) * 2002-03-22 2003-10-02 Seiko Epson Corp 電気光学装置及びその製造方法並びに電子機器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112219280A (zh) * 2018-07-06 2021-01-12 索尼半导体解决方案公司 光接收元件、测距模块和电子设备
US12270943B2 (en) 2018-07-06 2025-04-08 Sony Semiconductor Solutions Corporation Light receiving element, distance measurement module, and electronic device

Also Published As

Publication number Publication date
US20050127358A1 (en) 2005-06-16
SG113002A1 (en) 2005-07-28
KR100693236B1 (ko) 2007-03-12
KR20050060005A (ko) 2005-06-21
JP2005175381A (ja) 2005-06-30
US7095048B2 (en) 2006-08-22
TW200530664A (en) 2005-09-16
TWI312085B (enExample) 2009-07-11

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