KR100485881B1 - 리니어모터, 스테이지장치, 노광장치 및 디바이스제조방법 - Google Patents

리니어모터, 스테이지장치, 노광장치 및 디바이스제조방법 Download PDF

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Publication number
KR100485881B1
KR100485881B1 KR10-2002-0008143A KR20020008143A KR100485881B1 KR 100485881 B1 KR100485881 B1 KR 100485881B1 KR 20020008143 A KR20020008143 A KR 20020008143A KR 100485881 B1 KR100485881 B1 KR 100485881B1
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KR
South Korea
Prior art keywords
linear motor
coil
metal film
magnet
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Expired - Fee Related
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KR10-2002-0008143A
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English (en)
Korean (ko)
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KR20020067672A (ko
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에모또게이지
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캐논 가부시끼가이샤
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K9/00—Arrangements for cooling or ventilating
    • H02K9/22—Arrangements for cooling or ventilating by solid heat conducting material embedded in, or arranged in contact with, the stator or rotor, e.g. heat bridges
    • H02K9/227—Heat sinks

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Linear Motors (AREA)
  • Motor Or Generator Cooling System (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR10-2002-0008143A 2001-02-16 2002-02-15 리니어모터, 스테이지장치, 노광장치 및 디바이스제조방법 Expired - Fee Related KR100485881B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2001-00040170 2001-02-16
JP2001040170A JP4689058B2 (ja) 2001-02-16 2001-02-16 リニアモータ、ステージ装置および露光装置ならびにデバイス製造方法

Publications (2)

Publication Number Publication Date
KR20020067672A KR20020067672A (ko) 2002-08-23
KR100485881B1 true KR100485881B1 (ko) 2005-04-29

Family

ID=18902826

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2002-0008143A Expired - Fee Related KR100485881B1 (ko) 2001-02-16 2002-02-15 리니어모터, 스테이지장치, 노광장치 및 디바이스제조방법

Country Status (5)

Country Link
US (2) US6972499B2 (enExample)
EP (1) EP1233501B1 (enExample)
JP (1) JP4689058B2 (enExample)
KR (1) KR100485881B1 (enExample)
DE (1) DE60234398D1 (enExample)

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US8185434B2 (en) 2007-07-11 2012-05-22 Bous Joseph System and method for conducting sales
JP5357485B2 (ja) * 2008-09-30 2013-12-04 サバンジ大学 磁石可動型リニアモータ
DE102010004642B4 (de) * 2010-01-13 2012-09-27 Integrated Dynamics Engineering Gmbh Magnetaktor sowie Verfahren zu dessen Montage
US8829740B2 (en) * 2010-05-27 2014-09-09 Rockwell Automation Technologies, Inc. Sealed linear motor system
KR101732636B1 (ko) 2010-08-23 2017-05-24 주식회사 코베리 선형 전동기
DE102010041468A1 (de) * 2010-09-27 2012-03-29 Carl Zeiss Smt Gmbh Baugruppe einer Projektionsbelichtungsanlage für die EUV-Lithographie
US8885148B2 (en) * 2011-01-04 2014-11-11 Asml Holding N.V. System and method for design of linear motor for vacuum environment
US9968002B2 (en) * 2016-09-23 2018-05-08 Hiwin Mikrosystems Corp. Heat-transfer mechanism of motor primary
JP7060995B2 (ja) * 2018-03-30 2022-04-27 キヤノン株式会社 ステージ装置、リソグラフィ装置、および物品の製造方法
NL2022467B1 (en) * 2019-01-28 2020-08-18 Prodrive Tech Bv Position sensor for long stroke linear permanent magnet motor
WO2020223030A1 (en) * 2019-04-29 2020-11-05 Kulicke And Soffa Industries, Inc. Linear motors and wire bonding machines including the same
JP7266015B2 (ja) * 2020-09-18 2023-04-27 株式会社Ｓｃｒｅｅｎホールディングス 真空処理装置
JP7337766B2 (ja) * 2020-09-18 2023-09-04 株式会社Ｓｃｒｅｅｎホールディングス 真空処理装置
JP7720550B2 (ja) * 2021-09-29 2025-08-08 パナソニックＩｐマネジメント株式会社 直動装置および電子部品実装装置

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JP2001025227A (ja) * 1999-07-08 2001-01-26 Canon Inc リニアモータ並びにこれを有するステージ装置および露光装置
JP2002272086A (ja) * 2001-03-13 2002-09-20 Yaskawa Electric Corp 真空用モータ

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JPS56148168A (en) * 1980-04-15 1981-11-17 Brother Ind Ltd Linear step motor
US5179304A (en) * 1990-07-26 1993-01-12 Nsk Ltd. Linear motor system
JPH07274478A (ja) * 1994-03-30 1995-10-20 Nippon Thompson Co Ltd リニア直流モータ及びこれを具備した駆動ユニット
JP2001025227A (ja) * 1999-07-08 2001-01-26 Canon Inc リニアモータ並びにこれを有するステージ装置および露光装置
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Also Published As

Publication number Publication date
EP1233501A2 (en) 2002-08-21
US20020113498A1 (en) 2002-08-22
DE60234398D1 (de) 2009-12-31
KR20020067672A (ko) 2002-08-23
JP2002247830A (ja) 2002-08-30
EP1233501B1 (en) 2009-11-18
JP4689058B2 (ja) 2011-05-25
US7218020B2 (en) 2007-05-15
US6972499B2 (en) 2005-12-06
US20050212362A1 (en) 2005-09-29
EP1233501A3 (en) 2004-05-12

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