KR100435012B1 - 잉크 제트 헤드 기판, 잉크 제트 헤드, 잉크 제트 헤드기판 제조 방법, 잉크 제트 헤드 제조 방법, 잉크 제트헤드 사용 방법 및 잉크 제트 기록 장치 - Google Patents

잉크 제트 헤드 기판, 잉크 제트 헤드, 잉크 제트 헤드기판 제조 방법, 잉크 제트 헤드 제조 방법, 잉크 제트헤드 사용 방법 및 잉크 제트 기록 장치 Download PDF

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Publication number
KR100435012B1
KR100435012B1 KR10-2001-0046184A KR20010046184A KR100435012B1 KR 100435012 B1 KR100435012 B1 KR 100435012B1 KR 20010046184 A KR20010046184 A KR 20010046184A KR 100435012 B1 KR100435012 B1 KR 100435012B1
Authority
KR
South Korea
Prior art keywords
ink jet
layer
heat generating
film
jet head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR10-2001-0046184A
Other languages
English (en)
Korean (ko)
Other versions
KR20020010876A (ko
Inventor
오자끼테루오
이께다마사미
가사모또마사미
사이또이찌로
이시나가히로유끼
고야마슈지
미스미요시노리
이리준이찌로
모찌즈끼무가
Original Assignee
캐논 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20020010876A publication Critical patent/KR20020010876A/ko
Application granted granted Critical
Publication of KR100435012B1 publication Critical patent/KR100435012B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/14048—Movable member in the chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1604—Production of bubble jet print heads of the edge shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
KR10-2001-0046184A 2000-07-31 2001-07-31 잉크 제트 헤드 기판, 잉크 제트 헤드, 잉크 제트 헤드기판 제조 방법, 잉크 제트 헤드 제조 방법, 잉크 제트헤드 사용 방법 및 잉크 제트 기록 장치 Expired - Fee Related KR100435012B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2000-00232408 2000-07-31
JP2000232408 2000-07-31
JP2000267820A JP3720689B2 (ja) 2000-07-31 2000-09-04 インクジェットヘッド用基体、インクジェットヘッド、インクジェットヘッドの製造方法、インクジェットヘッドの使用方法およびインクジェット記録装置
JPJP-P-2000-00267820 2000-09-04

Publications (2)

Publication Number Publication Date
KR20020010876A KR20020010876A (ko) 2002-02-06
KR100435012B1 true KR100435012B1 (ko) 2004-06-09

Family

ID=26597112

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2001-0046184A Expired - Fee Related KR100435012B1 (ko) 2000-07-31 2001-07-31 잉크 제트 헤드 기판, 잉크 제트 헤드, 잉크 제트 헤드기판 제조 방법, 잉크 제트 헤드 제조 방법, 잉크 제트헤드 사용 방법 및 잉크 제트 기록 장치

Country Status (8)

Country Link
US (1) US6530650B2 (enExample)
EP (1) EP1177899B1 (enExample)
JP (1) JP3720689B2 (enExample)
KR (1) KR100435012B1 (enExample)
CN (1) CN1192889C (enExample)
AT (1) ATE329760T1 (enExample)
DE (1) DE60120573T2 (enExample)
SG (1) SG113390A1 (enExample)

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US6582070B2 (en) * 2000-09-04 2003-06-24 Canon Kabushiki Kaisha Recording unit and image recording apparatus
JP4656624B2 (ja) * 2000-09-04 2011-03-23 キヤノン株式会社 記録ユニット及び画像記録装置
US20020131651A1 (en) * 2001-01-12 2002-09-19 Chandrashekhara Anantharamu System and method for reducing images including graphs
JP2003145770A (ja) * 2001-11-15 2003-05-21 Canon Inc 記録ヘッド用基板、記録ヘッド、記録装置、および記録ヘッドの製造方法
US6607264B1 (en) 2002-06-18 2003-08-19 Hewlett-Packard Development Company, L.P. Fluid controlling apparatus
JP4125069B2 (ja) * 2002-08-13 2008-07-23 キヤノン株式会社 インクジェット記録ヘッド用基板、インクジェット記録ヘッドおよび該インクジェット記録ヘッドを用いたインクジェット記録装置
US6719406B1 (en) 2002-11-23 2004-04-13 Silverbrook Research Pty Ltd Ink jet printhead with conformally coated heater
CN100493912C (zh) * 2002-12-27 2009-06-03 佳能株式会社 用于喷墨头的衬底、使用所述衬底的喷墨头及其制造方法
JP2004216889A (ja) * 2002-12-27 2004-08-05 Canon Inc 発熱抵抗体薄膜、これを用いたインクジェットヘッド用基体、インクジェットヘッド及びインクジェット装置
JP4078295B2 (ja) * 2002-12-27 2008-04-23 キヤノン株式会社 インクジェットヘッド用基体およびこれを用いるインクジェットヘッドとその製造方法
US6955835B2 (en) * 2003-04-30 2005-10-18 Hewlett-Packard Development Company, L.P. Method for forming compressive alpha-tantalum on substrates and devices including the same
TW580436B (en) 2003-06-27 2004-03-21 Benq Corp Ink-jet micro-injector device and fabrication method thereof
JP2005081652A (ja) * 2003-09-08 2005-03-31 Rohm Co Ltd インクジェットプリンタヘッド用ヒーター装置およびその製造方法
KR100555917B1 (ko) * 2003-12-26 2006-03-03 삼성전자주식회사 잉크젯 프린트 헤드 및 잉크젯 프린트 헤드의 제조방법
US7172268B2 (en) * 2003-12-26 2007-02-06 Canon Kabushiki Kaisha Ink jet head, method for driving the same, and ink jet recording apparatus
JP4208793B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4208794B2 (ja) * 2004-08-16 2009-01-14 キヤノン株式会社 インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド
JP4646602B2 (ja) * 2004-11-09 2011-03-09 キヤノン株式会社 インクジェット記録ヘッド用基板の製造方法
JP2006327180A (ja) * 2005-04-28 2006-12-07 Canon Inc インクジェット記録ヘッド用基板、インクジェット記録ヘッド、インクジェット記録装置、およびインクジェット記録ヘッド用基板の製造方法
JP4926669B2 (ja) * 2005-12-09 2012-05-09 キヤノン株式会社 インクジェットヘッドのクリーニング方法、インクジェットヘッドおよびインクジェット記録装置
JP4819608B2 (ja) * 2006-07-31 2011-11-24 富士フイルム株式会社 液体吐出ヘッド、液体吐出装置、及び画像形成装置
WO2010098743A1 (en) * 2009-02-24 2010-09-02 Hewlett-Packard Development Company, L.P. Printhead and method of fabricating the same
JP5677109B2 (ja) * 2010-03-01 2015-02-25 キヤノン株式会社 インクジェット記録ヘッド用基板、インクジェット記録ヘッド及び記録装置
WO2011136772A1 (en) * 2010-04-29 2011-11-03 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP6120662B2 (ja) 2013-04-25 2017-04-26 キヤノン株式会社 液体吐出ヘッドの再生方法
WO2016164041A1 (en) * 2015-04-10 2016-10-13 Hewlett-Packard Development Company, L.P. Removing an inclined segment of a metal conductor while forming printheads
CN106979791B (zh) * 2017-04-20 2019-05-24 苏州南智传感科技有限公司 封装内加热fbg传感器的方法
JP7134733B2 (ja) 2018-06-25 2022-09-12 キヤノン株式会社 記録素子基板、液体吐出ヘッド、および液体吐出装置
JP7277180B2 (ja) * 2019-02-28 2023-05-18 キヤノン株式会社 ウルトラファインバブル生成装置およびウルトラファインバブル生成方法
JP2021187121A (ja) 2020-06-03 2021-12-13 キヤノン株式会社 素子基板、液体吐出ヘッド、及び記録装置

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JPH0584910A (ja) * 1991-09-26 1993-04-06 Canon Inc 液体噴射記録ヘツド
JPH07309009A (ja) * 1994-05-17 1995-11-28 Canon Inc インクジェット記録ヘッド

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JP2902136B2 (ja) 1991-02-07 1999-06-07 株式会社リコー インク飛翔記録装置
JP2823178B2 (ja) * 1992-04-06 1998-11-11 シャープ株式会社 金属配線基板及びその製造方法
US5660739A (en) 1994-08-26 1997-08-26 Canon Kabushiki Kaisha Method of producing substrate for ink jet recording head, ink jet recording head and ink jet recording apparatus
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JP2000062180A (ja) 1998-08-21 2000-02-29 Canon Inc 液体吐出ヘッド、液体吐出方法、および液体吐出装置
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JPH0584910A (ja) * 1991-09-26 1993-04-06 Canon Inc 液体噴射記録ヘツド
JPH07309009A (ja) * 1994-05-17 1995-11-28 Canon Inc インクジェット記録ヘッド

Also Published As

Publication number Publication date
EP1177899B1 (en) 2006-06-14
SG113390A1 (en) 2005-08-29
EP1177899A1 (en) 2002-02-06
DE60120573D1 (de) 2006-07-27
JP3720689B2 (ja) 2005-11-30
DE60120573T2 (de) 2007-05-31
CN1192889C (zh) 2005-03-16
ATE329760T1 (de) 2006-07-15
CN1344619A (zh) 2002-04-17
US20020024564A1 (en) 2002-02-28
US6530650B2 (en) 2003-03-11
KR20020010876A (ko) 2002-02-06
JP2002113870A (ja) 2002-04-16

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