KR100199955B1 - 배선기판의 레이저가공방법, 배선기판의 레이저가공장치 및 배선기판 가공용의 탄산가스 레이저발진기 - Google Patents

배선기판의 레이저가공방법, 배선기판의 레이저가공장치 및 배선기판 가공용의 탄산가스 레이저발진기 Download PDF

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Publication number
KR100199955B1
KR100199955B1 KR1019960032874A KR19960032874A KR100199955B1 KR 100199955 B1 KR100199955 B1 KR 100199955B1 KR 1019960032874 A KR1019960032874 A KR 1019960032874A KR 19960032874 A KR19960032874 A KR 19960032874A KR 100199955 B1 KR100199955 B1 KR 100199955B1
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KR
South Korea
Prior art keywords
laser
processing
wiring board
laser beam
pulse
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1019960032874A
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English (en)
Korean (ko)
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KR970013540A (ko
Inventor
미키 구로자와
쓰카시 후쿠시마
마사노리 미즈노
쇼즈이 다케노
마사하루 모리아스
마사유키 가네코
Original Assignee
다니구찌 이찌로오, 기타오카 다카시
미쓰비시덴키 가부시키가이샤
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Publication of KR970013540A publication Critical patent/KR970013540A/ko
Application granted granted Critical
Publication of KR100199955B1 publication Critical patent/KR100199955B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/30—Structure or shape of the active region; Materials used for the active region
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0011—Working of insulating substrates or insulating layers
    • H05K3/0017—Etching of the substrate by chemical or physical means
    • H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
    • H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/05—Patterning and lithography; Masks; Details of resist
    • H05K2203/0548—Masks
    • H05K2203/0554—Metal used as mask for etching vias, e.g. by laser ablation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/08—Treatments involving gases
    • H05K2203/081—Blowing of gas, e.g. for cooling or for providing heat during solder reflowing

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Laser Beam Processing (AREA)
KR1019960032874A 1995-08-07 1996-08-07 배선기판의 레이저가공방법, 배선기판의 레이저가공장치 및 배선기판 가공용의 탄산가스 레이저발진기 Expired - Lifetime KR100199955B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP95-201194 1995-08-07
JP20119495 1995-08-07
JP96-59862 1996-03-15
JP95-59862 1996-03-15
JP8059862A JPH09107168A (ja) 1995-08-07 1996-03-15 配線基板のレーザ加工方法、配線基板のレーザ加工装置及び配線基板加工用の炭酸ガスレーザ発振器

Publications (2)

Publication Number Publication Date
KR970013540A KR970013540A (ko) 1997-03-29
KR100199955B1 true KR100199955B1 (ko) 1999-06-15

Family

ID=26400942

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960032874A Expired - Lifetime KR100199955B1 (ko) 1995-08-07 1996-08-07 배선기판의 레이저가공방법, 배선기판의 레이저가공장치 및 배선기판 가공용의 탄산가스 레이저발진기

Country Status (5)

Country Link
US (1) US20030146196A1 (enExample)
JP (1) JPH09107168A (enExample)
KR (1) KR100199955B1 (enExample)
CN (1) CN1098022C (enExample)
TW (1) TW312082B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101462689B1 (ko) * 2007-07-19 2014-11-18 닛토덴코 가부시키가이샤 레이저 가공 방법

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US6861364B1 (en) * 1999-11-30 2005-03-01 Canon Kabushiki Kaisha Laser etching method and apparatus therefor
US6281471B1 (en) * 1999-12-28 2001-08-28 Gsi Lumonics, Inc. Energy-efficient, laser-based method and system for processing target material
US7671295B2 (en) 2000-01-10 2010-03-02 Electro Scientific Industries, Inc. Processing a memory link with a set of at least two laser pulses
US6705914B2 (en) 2000-04-18 2004-03-16 Matsushita Electric Industrial Co., Ltd. Method of forming spherical electrode surface for high intensity discharge lamp
JP4659300B2 (ja) 2000-09-13 2011-03-30 浜松ホトニクス株式会社 レーザ加工方法及び半導体チップの製造方法
JP4634692B2 (ja) * 2001-01-31 2011-02-16 エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド レーザ処理方法
US6911623B2 (en) 2001-04-05 2005-06-28 Mitsubishi Denki Kabushiki Kaisha Carbon dioxide gas laser machining method of multilayer material
JP5028722B2 (ja) * 2001-07-31 2012-09-19 三菱電機株式会社 レーザ加工方法及びレーザ加工機
DE10145184B4 (de) * 2001-09-13 2005-03-10 Siemens Ag Verfahren zum Laserbohren, insbesondere unter Verwendung einer Lochmaske
US20030155328A1 (en) * 2002-02-15 2003-08-21 Huth Mark C. Laser micromachining and methods and systems of same
DE60313900T2 (de) 2002-03-12 2008-01-17 Hamamatsu Photonics K.K., Hamamatsu Methode zur Trennung von Substraten
TWI221791B (en) * 2002-04-02 2004-10-11 Mitsubishi Electric Corp Laser processing system and laser processing method
DE102004014277A1 (de) * 2004-03-22 2005-10-20 Fraunhofer Ges Forschung Verfahren zum laserthermischen Trennen von Flachgläsern
TW200617794A (en) * 2004-09-14 2006-06-01 Oji Paper Co Tape with built-in IC chip, production method thereof, and sheet with built-in IC chip
CA2594357C (en) * 2004-12-30 2016-01-05 R. J. Dwayne Miller Laser selective cutting by impulsive heat deposition in the ir wavelength range for direct-drive ablation
JP5030512B2 (ja) 2005-09-30 2012-09-19 日立ビアメカニクス株式会社 レーザ加工方法
CN1939644B (zh) * 2005-09-30 2012-10-17 日立比亚机械股份有限公司 激光加工方法以及激光加工装置
JP2008212999A (ja) 2007-03-06 2008-09-18 Disco Abrasive Syst Ltd レーザー加工装置
CN102439211B (zh) * 2009-01-28 2016-04-13 阿尔巴尼国际公司 用于生产非织造布的工业织物及其制造方法
CN102317028A (zh) * 2009-02-13 2012-01-11 录象射流技术公司 激光器参数调整
US8529991B2 (en) * 2009-07-31 2013-09-10 Raytheon Canada Limited Method and apparatus for cutting a part without damaging a coating thereon
CN101969746B (zh) * 2010-11-04 2012-05-09 沪士电子股份有限公司 印刷电路板镂空区局部除电镀铜的方法
KR20130130769A (ko) * 2011-01-05 2013-12-02 가부시키가이샤 유키기쥬츠소고 빔 가공 장치
JP5839876B2 (ja) * 2011-07-27 2016-01-06 古河電気工業株式会社 レーザ加工用銅板および該レーザ加工用銅板を用いたプリント基板、並びに銅板のレーザ加工方法
CN103857207B (zh) * 2012-11-30 2017-03-01 碁鼎科技秦皇岛有限公司 电路板及其制作方法
JP2014120568A (ja) * 2012-12-14 2014-06-30 Showa Denko Packaging Co Ltd 配線基板の表裏導通方法
CN103909351A (zh) * 2013-01-04 2014-07-09 欣兴电子股份有限公司 线路板以及此线路板的激光钻孔方法
CN103286456B (zh) * 2013-05-07 2015-07-01 大族激光科技产业集团股份有限公司 激光切割装置及切割方法
JP6110225B2 (ja) * 2013-06-25 2017-04-05 ビアメカニクス株式会社 レーザ穴明け加工方法
CN103747636A (zh) * 2013-12-24 2014-04-23 广州兴森快捷电路科技有限公司 镀金线路板引线回蚀的方法
JP6134914B2 (ja) * 2014-09-08 2017-05-31 パナソニックＩｐマネジメント株式会社 コンフォーマルマスク材料のレーザ加工方法
CN106199830A (zh) * 2015-05-08 2016-12-07 中兴通讯股份有限公司 光波导的制备方法及装置
CN105578771A (zh) * 2015-12-31 2016-05-11 广州兴森快捷电路科技有限公司 电路板内槽的加工方法
JP2020109820A (ja) * 2019-01-01 2020-07-16 大船企業日本株式会社 プリント基板のレーザ加工方法およびプリント基板のレーザ加工機
CN112444162B (zh) * 2019-09-02 2023-10-13 西安尚道电子科技有限公司 一种导电布精度靶板制造方法
US20220316069A1 (en) * 2019-09-13 2022-10-06 Zefa Co., Ltd. Molded circuit component and electronic device
CN113099615B (zh) * 2021-04-01 2022-09-06 深圳市祺利电子有限公司 一种大尺寸线路板钻孔定位方法
CN112992880B (zh) * 2021-04-25 2023-08-15 江西沃格光电股份有限公司 一种Mini-LED背光板通孔的形成方法及电子设备
CN114152614A (zh) * 2021-12-24 2022-03-08 深圳技师学院（深圳高级技工学校） 一种覆盖膜激光切割碳化程度的测量方法
CN117464170B (zh) * 2023-12-27 2024-04-02 武汉铱科赛科技有限公司 一种层间电连激光加工方法、设备、装置及系统
CN119511056B (zh) * 2024-10-18 2025-08-05 武汉铱科赛科技有限公司 一种盲孔可靠性测试方法、设备、装置及系统
CN119589111A (zh) * 2024-10-30 2025-03-11 杭州银湖激光科技有限公司 一种金刚石的激光切割装置及切割方法
CN120404231B (zh) * 2025-07-02 2025-09-05 乐捷家居股份有限公司 一种家具材料检测取样装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101462689B1 (ko) * 2007-07-19 2014-11-18 닛토덴코 가부시키가이샤 레이저 가공 방법

Also Published As

Publication number Publication date
CN1142743A (zh) 1997-02-12
JPH09107168A (ja) 1997-04-22
TW312082B (enExample) 1997-08-01
US20030146196A1 (en) 2003-08-07
KR970013540A (ko) 1997-03-29
CN1098022C (zh) 2003-01-01

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