JPWO2023038140A5 - - Google Patents

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Publication number
JPWO2023038140A5
JPWO2023038140A5 JP2023547022A JP2023547022A JPWO2023038140A5 JP WO2023038140 A5 JPWO2023038140 A5 JP WO2023038140A5 JP 2023547022 A JP2023547022 A JP 2023547022A JP 2023547022 A JP2023547022 A JP 2023547022A JP WO2023038140 A5 JPWO2023038140 A5 JP WO2023038140A5
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JP
Japan
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mass
adhesive layer
copolymer
parts
less
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JP2023547022A
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English (en)
Japanese (ja)
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JP7691508B2 (ja
JPWO2023038140A1 (https=
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Priority claimed from PCT/JP2022/034109 external-priority patent/WO2023038140A1/ja
Publication of JPWO2023038140A1 publication Critical patent/JPWO2023038140A1/ja
Publication of JPWO2023038140A5 publication Critical patent/JPWO2023038140A5/ja
Application granted granted Critical
Publication of JP7691508B2 publication Critical patent/JP7691508B2/ja
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JP2023547022A 2021-09-13 2022-09-12 ペリクル Active JP7691508B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021148632 2021-09-13
JP2021148632 2021-09-13
PCT/JP2022/034109 WO2023038140A1 (ja) 2021-09-13 2022-09-12 ペリクル

Publications (3)

Publication Number Publication Date
JPWO2023038140A1 JPWO2023038140A1 (https=) 2023-03-16
JPWO2023038140A5 true JPWO2023038140A5 (https=) 2024-06-04
JP7691508B2 JP7691508B2 (ja) 2025-06-11

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ID=85506493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023547022A Active JP7691508B2 (ja) 2021-09-13 2022-09-12 ペリクル

Country Status (6)

Country Link
US (1) US20240377725A1 (https=)
JP (1) JP7691508B2 (https=)
KR (1) KR20240047425A (https=)
CN (1) CN117916661A (https=)
TW (1) TWI911482B (https=)
WO (1) WO2023038140A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021193681A1 (ja) * 2020-03-27 2021-09-30 三井化学株式会社 ペリクル、およびその製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3331996B2 (ja) * 1998-12-25 2002-10-07 日本電気株式会社 ペリクル
JP6105188B2 (ja) * 2009-11-18 2017-03-29 旭化成株式会社 ペリクル
JP5319501B2 (ja) 2009-11-18 2013-10-16 旭化成イーマテリアルズ株式会社 ペリクル
JP2011113033A (ja) * 2009-11-30 2011-06-09 Shin-Etsu Chemical Co Ltd ペリクル膜の製造方法および装置
CN106795396B (zh) * 2014-12-02 2020-12-18 琳得科株式会社 粘着片以及加工物的制造方法
CN113677722A (zh) * 2019-03-28 2021-11-19 三井化学株式会社 防护膜组件

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