JP7691508B2 - ペリクル - Google Patents

ペリクル Download PDF

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Publication number
JP7691508B2
JP7691508B2 JP2023547022A JP2023547022A JP7691508B2 JP 7691508 B2 JP7691508 B2 JP 7691508B2 JP 2023547022 A JP2023547022 A JP 2023547022A JP 2023547022 A JP2023547022 A JP 2023547022A JP 7691508 B2 JP7691508 B2 JP 7691508B2
Authority
JP
Japan
Prior art keywords
pellicle
mass
adhesive layer
meth
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023547022A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023038140A5 (https=
JPWO2023038140A1 (https=
Inventor
健 伊藤
靖 佐藤
崇 畦崎
陽介 小野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Publication of JPWO2023038140A1 publication Critical patent/JPWO2023038140A1/ja
Publication of JPWO2023038140A5 publication Critical patent/JPWO2023038140A5/ja
Application granted granted Critical
Publication of JP7691508B2 publication Critical patent/JP7691508B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
    • G03F1/64—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof characterised by the frames, e.g. structure or material, including bonding means therefor
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38—Pressure-sensitive adhesives [PSA]
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38—Pressure-sensitive adhesives [PSA]
    • C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
    • C09J7/385—Acrylic polymers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)
  • Laminated Bodies (AREA)
JP2023547022A 2021-09-13 2022-09-12 ペリクル Active JP7691508B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021148632 2021-09-13
JP2021148632 2021-09-13
PCT/JP2022/034109 WO2023038140A1 (ja) 2021-09-13 2022-09-12 ペリクル

Publications (3)

Publication Number Publication Date
JPWO2023038140A1 JPWO2023038140A1 (https=) 2023-03-16
JPWO2023038140A5 JPWO2023038140A5 (https=) 2024-06-04
JP7691508B2 true JP7691508B2 (ja) 2025-06-11

Family

ID=85506493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023547022A Active JP7691508B2 (ja) 2021-09-13 2022-09-12 ペリクル

Country Status (5)

Country Link
US (1) US20240377725A1 (https=)
JP (1) JP7691508B2 (https=)
CN (1) CN117916661A (https=)
TW (1) TWI911482B (https=)
WO (1) WO2023038140A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20230080753A1 (en) * 2020-03-27 2023-03-16 Mitsui Chemicals, Inc. Pellicle, and production method therefor

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000194121A (ja) 1998-12-25 2000-07-14 Nec Corp ペリクル
JP2011113033A (ja) 2009-11-30 2011-06-09 Shin-Etsu Chemical Co Ltd ペリクル膜の製造方法および装置
JP2011128605A (ja) 2009-11-18 2011-06-30 Asahi Kasei E-Materials Corp ペリクル
WO2020196836A1 (ja) 2019-03-28 2020-10-01 三井化学株式会社 ペリクル

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG11201704347YA (en) * 2014-12-02 2017-06-29 Lintec Corp Adhesive sheet, and method for manufacturing processed article

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000194121A (ja) 1998-12-25 2000-07-14 Nec Corp ペリクル
JP2011128605A (ja) 2009-11-18 2011-06-30 Asahi Kasei E-Materials Corp ペリクル
JP2016167070A (ja) 2009-11-18 2016-09-15 旭化成株式会社 ペリクル
JP2011113033A (ja) 2009-11-30 2011-06-09 Shin-Etsu Chemical Co Ltd ペリクル膜の製造方法および装置
WO2020196836A1 (ja) 2019-03-28 2020-10-01 三井化学株式会社 ペリクル

Also Published As

Publication number Publication date
US20240377725A1 (en) 2024-11-14
TWI911482B (zh) 2026-01-11
JPWO2023038140A1 (https=) 2023-03-16
WO2023038140A1 (ja) 2023-03-16
CN117916661A (zh) 2024-04-19
TW202313909A (zh) 2023-04-01
KR20240047425A (ko) 2024-04-12

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