JPWO2023038139A5 - - Google Patents
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- Publication number
- JPWO2023038139A5 JPWO2023038139A5 JP2023547021A JP2023547021A JPWO2023038139A5 JP WO2023038139 A5 JPWO2023038139 A5 JP WO2023038139A5 JP 2023547021 A JP2023547021 A JP 2023547021A JP 2023547021 A JP2023547021 A JP 2023547021A JP WO2023038139 A5 JPWO2023038139 A5 JP WO2023038139A5
- Authority
- JP
- Japan
- Prior art keywords
- adhesive layer
- pellicle
- mass
- copolymer
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021148630 | 2021-09-13 | ||
| JP2021148630 | 2021-09-13 | ||
| PCT/JP2022/034108 WO2023038139A1 (ja) | 2021-09-13 | 2022-09-12 | ペリクル、露光原版、露光装置、及びペリクルの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2023038139A1 JPWO2023038139A1 (https=) | 2023-03-16 |
| JPWO2023038139A5 true JPWO2023038139A5 (https=) | 2024-06-04 |
| JP7673217B2 JP7673217B2 (ja) | 2025-05-08 |
Family
ID=85506430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023547021A Active JP7673217B2 (ja) | 2021-09-13 | 2022-09-12 | ペリクル、露光原版、露光装置、及びペリクルの製造方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20240377726A1 (https=) |
| JP (1) | JP7673217B2 (https=) |
| KR (1) | KR20240047426A (https=) |
| CN (1) | CN118020023A (https=) |
| WO (1) | WO2023038139A1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021193681A1 (ja) * | 2020-03-27 | 2021-09-30 | 三井化学株式会社 | ペリクル、およびその製造方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5319501B2 (ja) | 2009-11-18 | 2013-10-16 | 旭化成イーマテリアルズ株式会社 | ペリクル |
| JP6430118B2 (ja) * | 2013-12-12 | 2018-11-28 | 旭化成株式会社 | ペリクル、ペリクル付フォトマスク及び半導体素子の製造方法 |
| JP6543044B2 (ja) * | 2015-02-23 | 2019-07-10 | 旭化成株式会社 | ペリクル |
| US10353283B2 (en) | 2016-07-11 | 2019-07-16 | Shin-Etsu Chemical Co., Ltd. | Adhesive for pellicle, pellicle, and method of selecting adhesive for pellicle |
| KR102172218B1 (ko) * | 2018-07-31 | 2020-10-30 | 주식회사 시엠테크놀로지 | 펠리클 수납용기 |
-
2022
- 2022-09-12 WO PCT/JP2022/034108 patent/WO2023038139A1/ja not_active Ceased
- 2022-09-12 CN CN202280061342.7A patent/CN118020023A/zh active Pending
- 2022-09-12 KR KR1020247008338A patent/KR20240047426A/ko active Pending
- 2022-09-12 JP JP2023547021A patent/JP7673217B2/ja active Active
- 2022-09-12 US US18/690,494 patent/US20240377726A1/en active Pending
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