JPWO2022249753A5 - - Google Patents

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Publication number
JPWO2022249753A5
JPWO2022249753A5 JP2023524066A JP2023524066A JPWO2022249753A5 JP WO2022249753 A5 JPWO2022249753 A5 JP WO2022249753A5 JP 2023524066 A JP2023524066 A JP 2023524066A JP 2023524066 A JP2023524066 A JP 2023524066A JP WO2022249753 A5 JPWO2022249753 A5 JP WO2022249753A5
Authority
JP
Japan
Prior art keywords
gate
wiring
semiconductor device
polysilicon
gate trench
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023524066A
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English (en)
Japanese (ja)
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JPWO2022249753A1 (https=
JP7613576B2 (ja
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Publication date
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Priority claimed from PCT/JP2022/016190 external-priority patent/WO2022249753A1/ja
Publication of JPWO2022249753A1 publication Critical patent/JPWO2022249753A1/ja
Publication of JPWO2022249753A5 publication Critical patent/JPWO2022249753A5/ja
Application granted granted Critical
Publication of JP7613576B2 publication Critical patent/JP7613576B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023524066A 2021-05-24 2022-03-30 半導体装置 Active JP7613576B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021087222 2021-05-24
JP2021087222 2021-05-24
PCT/JP2022/016190 WO2022249753A1 (ja) 2021-05-24 2022-03-30 半導体装置

Publications (3)

Publication Number Publication Date
JPWO2022249753A1 JPWO2022249753A1 (https=) 2022-12-01
JPWO2022249753A5 true JPWO2022249753A5 (https=) 2023-07-19
JP7613576B2 JP7613576B2 (ja) 2025-01-15

Family

ID=84228642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023524066A Active JP7613576B2 (ja) 2021-05-24 2022-03-30 半導体装置

Country Status (5)

Country Link
US (1) US20230261096A1 (https=)
JP (1) JP7613576B2 (https=)
CN (1) CN116457944A (https=)
DE (1) DE112022000136T5 (https=)
WO (1) WO2022249753A1 (https=)

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004221230A (ja) * 2003-01-14 2004-08-05 Toyota Industries Corp トレンチ構造を有する半導体装置
US8502314B2 (en) * 2011-04-21 2013-08-06 Fairchild Semiconductor Corporation Multi-level options for power MOSFETS
US8872278B2 (en) * 2011-10-25 2014-10-28 Fairchild Semiconductor Corporation Integrated gate runner and field implant termination for trench devices
JP6115050B2 (ja) 2012-09-10 2017-04-19 トヨタ自動車株式会社 半導体装置
JP5935948B2 (ja) * 2013-08-06 2016-06-15 富士電機株式会社 トレンチゲートmos型半導体装置およびその製造方法
JP2017013524A (ja) 2015-06-26 2017-01-19 ヤマハ発動機株式会社 電動補助自転車
JP6686398B2 (ja) * 2015-12-03 2020-04-22 富士電機株式会社 半導体装置
JP6676947B2 (ja) * 2015-12-14 2020-04-08 富士電機株式会社 半導体装置
CN107086217B (zh) * 2016-02-16 2023-05-16 富士电机株式会社 半导体装置
US10522674B2 (en) * 2016-05-18 2019-12-31 Rohm Co., Ltd. Semiconductor with unified transistor structure and voltage regulator diode
US10692863B2 (en) * 2016-09-30 2020-06-23 Rohm Co., Ltd. Semiconductor device and semiconductor package
CN109314134B (zh) * 2016-12-16 2021-11-05 富士电机株式会社 半导体装置及制造方法
US11532737B2 (en) * 2017-03-15 2022-12-20 Fuji Electric Co., Ltd. Semiconductor device
JP7087280B2 (ja) 2017-05-31 2022-06-21 富士電機株式会社 炭化珪素半導体装置および炭化珪素半導体装置の製造方法
US10600897B2 (en) * 2017-11-08 2020-03-24 Fuji Electric Co., Ltd. Semiconductor device
CN111052393B (zh) 2018-02-14 2023-11-14 富士电机株式会社 半导体装置
CN110323273B (zh) * 2018-03-30 2025-02-25 富士电机株式会社 半导体装置、半导体封装、半导体模块及半导体电路装置

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