JPWO2018207656A1 - パワーモジュール、電力変換装置、およびパワーモジュールの製造方法 - Google Patents
パワーモジュール、電力変換装置、およびパワーモジュールの製造方法 Download PDFInfo
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- JPWO2018207656A1 JPWO2018207656A1 JP2019517567A JP2019517567A JPWO2018207656A1 JP WO2018207656 A1 JPWO2018207656 A1 JP WO2018207656A1 JP 2019517567 A JP2019517567 A JP 2019517567A JP 2019517567 A JP2019517567 A JP 2019517567A JP WO2018207656 A1 JPWO2018207656 A1 JP WO2018207656A1
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Abstract
Description
図1から図3は、実施の形態1によるパワーモジュール101の構成を示す図である。図1は上面図、図2は図1のA−A′線での矢視断面図、図3は斜視図(封止樹脂なし)である。図1から図3に示すように、パワーモジュール101は、絶縁基板11と、絶縁基板11に配置されるパワー半導体素子21、22と、パワー半導体素子21、22の電極に電気的に接続される主端子としてのリードフレーム611aと、パワー半導体素子22とワイヤ4を介して電気的に接続する信号端子としてのリードフレーム62と、これらパワー半導体素子21、22とその接続する部分の周辺を封止する封止樹脂部7とから構成される。
さらに、ケース51の上部には、予めインサート成型により、リードフレーム62が固定されている。絶縁基板11をケース51の底部に固定することで、パワー半導体素子22の表面の制御電極222と対応する位置に、リードフレーム62が配置される。
実施の形態1では、リードフレーム611a、612aの付け根部分に開口部を設けたが、実施の形態2では、さらに付け根部分をねじれ加工する場合について説明する。
実施の形態1および実施の形態2では、リードフレーム611a、612aの付け根部分に開口部を設けたが、実施の形態3では、付け根部分に屈曲部を形成する場合について説明する。
実施の形態4は、上述した実施の形態1〜3にかかるパワーモジュールを電力変換装置に適用したものである。本願は特定の電力変換装置に限定されるものではないが、以下、実施の形態4として、三相のインバータに本願を適用した場合について説明する。
また、本願に開示されるパワーモジュールは、セラミックからなる絶縁基板と、前記絶縁基板上に配置された半導体素子と、前記半導体素子の電極から外部に接続する板状の電極板と、前記半導体素子と前記電極板との接続部および前記接続部の周辺を封止する封止樹脂部とを備え、前記電極板は、前記接続部の周辺の前記絶縁基板を覆う位置に前記絶縁基板のセラミック部分が覗けるように開口部が設けられ、前記電極板の前記開口部は、前記電極板の厚さの160%以上の直径の円に相当する面積を有し、前記封止樹脂部に封止されていることを特徴とする。
Claims (11)
- セラミック板の両面に導体層のパターンが形成された絶縁基板と、
前記絶縁基板上に配置された半導体素子と、
前記半導体素子の電極から外部に接続する板状の電極板と、
前記半導体素子と前記電極板との接続部および前記接続部の周辺を封止する封止樹脂部とを備え、
前記電極板は、平面視において、前記絶縁基板の導体層が形成されていない部分と少なくとも一部が重なる位置に開口部が設けられることを特徴とするパワーモジュール。 - 前記開口部は、前記電極板の厚さの160%以上、250%以下の直径の円に相当する面積を有することを特徴とする請求項1に記載のパワーモジュール。
- 前記開口部はスリット形状であり、前記電極板は前記スリット形状の開口部を挟む分岐部がそれぞれ立てるようにねじられていることを特徴とする請求項1または請求項2に記載のパワーモジュール。
- 前記電極板は、前記開口部を挟む分岐部に、平面視で重なる位置にワイヤボンドによる金属配線を設けたことを特徴とする請求項1または請求項2に記載のパワーモジュール。
- 前記電極板は、前記開口部を挟む分岐部に、前記分岐部を拡張する幅広部を形成し、前記絶縁基板側または前記絶縁基板と反対側に折り曲げたことを特徴とする請求項1または請求項2に記載のパワーモジュール。
- 前記電極板は、前記開口部を挟む分岐部に、前記分岐部を拡張する幅広部を形成し、平面視で重なる位置に折り曲げたことを特徴とする請求項1または請求項2に記載のパワーモジュール。
- セラミック板の両面に導体層のパターンが形成された絶縁基板と、
前記絶縁基板上に配置された半導体素子と、
前記半導体素子の電極から外部に接続する板状の電極板と、
前記半導体素子と前記電極板との接続部および前記接続部の周辺を封止する封止樹脂部とを備え、
前記電極板は、平面視において、前記絶縁基板の導体層が形成されていない部分と少なくとも一部が重なる位置に屈曲部が設けられ、
前記屈曲部は、前記電極板の形成方向に対して所定の角度で、前記絶縁基板に対して垂直方向に折り曲げたことを特徴とするパワーモジュール。 - 前記半導体素子は、ワイドバンドギャップ半導体材料で形成されたことを特徴とする請求項1から7のいずれか1項に記載のパワーモジュール。
- 前記ワイドバンドギャップ半導体材料は、炭化ケイ素、窒化ガリウム系材料、およびダイヤモンドのうちのいずれかであることを特徴とする請求項8に記載のパワーモジュール。
- 請求項1から請求項9のいずれか1項に記載のパワーモジュールを有し、入力される電力を変換して出力する主変換回路と、
前記主変換回路を制御する制御信号を前記主変換回路に出力する制御回路と
を備えた電力変換装置。 - セラミック板の両面に導体層のパターンが形成された絶縁基板上に半導体素子を接合する工程と、
前記半導体素子の電極と、平面視において、前記絶縁基板の導体層が形成されていない部分と少なくとも一部が重なる位置に開口部が設けられた板状の電極板とを接合する工程と、
前記絶縁基板の導体層が形成されている領域以外の領域の前記絶縁基板の表面を、UVを照射することによって励起させた状態で、前記半導体素子と前記電極板との接続部および前記接続部の周辺に封止樹脂を流し込み、封止する工程と
を含むことを特徴とするパワーモジュールの製造方法。
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06268102A (ja) * | 1993-01-13 | 1994-09-22 | Fuji Electric Co Ltd | 樹脂封止形半導体装置 |
JP2015133462A (ja) * | 2014-01-16 | 2015-07-23 | 三菱電機株式会社 | パワーモジュール |
JP2016122869A (ja) * | 2009-05-14 | 2016-07-07 | ローム株式会社 | 半導体装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH046416A (ja) | 1990-04-25 | 1992-01-10 | Matsushita Electric Ind Co Ltd | 流量管理装置 |
JP3120575B2 (ja) | 1992-06-29 | 2000-12-25 | 富士電機株式会社 | 半導体装置 |
JP2672436B2 (ja) | 1992-07-06 | 1997-11-05 | 株式会社巴コーポレーション | アーチ型トラス構造物の骨組み構造 |
JPH09172116A (ja) | 1995-12-21 | 1997-06-30 | Mitsubishi Electric Corp | 半導体装置 |
JP2003204036A (ja) | 2002-01-10 | 2003-07-18 | Toyota Motor Corp | 複合半導体デバイス用電極板 |
JP4499577B2 (ja) | 2005-01-19 | 2010-07-07 | 三菱電機株式会社 | 半導体装置 |
JP2007165588A (ja) | 2005-12-14 | 2007-06-28 | Omron Corp | パワーモジュール構造及びこれを用いたソリッドステートリレー |
JP4455488B2 (ja) | 2005-12-19 | 2010-04-21 | 三菱電機株式会社 | 半導体装置 |
JP5076440B2 (ja) | 2006-10-16 | 2012-11-21 | 富士電機株式会社 | 半導体装置及び半導体装置の製造方法 |
JP4967701B2 (ja) * | 2007-02-19 | 2012-07-04 | 三菱電機株式会社 | 電力半導体装置 |
JP4666185B2 (ja) * | 2008-06-26 | 2011-04-06 | 三菱電機株式会社 | 半導体装置 |
JP5204744B2 (ja) | 2009-11-26 | 2013-06-05 | 三菱電機株式会社 | 電力用半導体装置 |
JP2013258354A (ja) * | 2012-06-14 | 2013-12-26 | Denso Corp | モールドパッケージおよびその製造方法 |
JP2014082274A (ja) | 2012-10-15 | 2014-05-08 | Toyota Industries Corp | 半導体装置 |
JP6065978B2 (ja) * | 2013-07-04 | 2017-01-25 | 三菱電機株式会社 | 半導体装置の製造方法、半導体装置 |
JP6304974B2 (ja) | 2013-08-27 | 2018-04-04 | 三菱電機株式会社 | 半導体装置 |
US9673118B2 (en) * | 2013-11-26 | 2017-06-06 | Mitsubishi Electric Corporation | Power module and method of manufacturing power module |
US9899345B2 (en) * | 2014-01-27 | 2018-02-20 | Mitsubishi Electric Cooperation | Electrode terminal, semiconductor device for electrical power, and method for manufacturing semiconductor device for electrical power |
JP6293030B2 (ja) * | 2014-10-09 | 2018-03-14 | 三菱電機株式会社 | 電力用半導体装置 |
-
2018
- 2018-04-27 CN CN201880026475.4A patent/CN110574159B/zh active Active
- 2018-04-27 WO PCT/JP2018/017134 patent/WO2018207656A1/ja active Application Filing
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06268102A (ja) * | 1993-01-13 | 1994-09-22 | Fuji Electric Co Ltd | 樹脂封止形半導体装置 |
JP2016122869A (ja) * | 2009-05-14 | 2016-07-07 | ローム株式会社 | 半導体装置 |
JP2015133462A (ja) * | 2014-01-16 | 2015-07-23 | 三菱電機株式会社 | パワーモジュール |
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US20200083129A1 (en) | 2020-03-12 |
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JP6833986B2 (ja) | 2021-02-24 |
CN110574159B (zh) | 2023-04-04 |
US10978366B2 (en) | 2021-04-13 |
CN110574159A (zh) | 2019-12-13 |
WO2018207656A1 (ja) | 2018-11-15 |
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