JPWO2018193742A1 - 反射防止部材及びその製造方法 - Google Patents
反射防止部材及びその製造方法 Download PDFInfo
- Publication number
- JPWO2018193742A1 JPWO2018193742A1 JP2019513258A JP2019513258A JPWO2018193742A1 JP WO2018193742 A1 JPWO2018193742 A1 JP WO2018193742A1 JP 2019513258 A JP2019513258 A JP 2019513258A JP 2019513258 A JP2019513258 A JP 2019513258A JP WO2018193742 A1 JPWO2018193742 A1 JP WO2018193742A1
- Authority
- JP
- Japan
- Prior art keywords
- group
- integer
- antireflection
- water
- atom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000005871 repellent Substances 0.000 claims abstract description 50
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 50
- 230000002940 repellent Effects 0.000 claims abstract description 40
- 150000003961 organosilicon compounds Chemical class 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 24
- 229920002313 fluoropolymer Polymers 0.000 claims abstract description 21
- 239000004811 fluoropolymer Substances 0.000 claims abstract description 21
- 230000003746 surface roughness Effects 0.000 claims abstract description 14
- 239000007859 condensation product Substances 0.000 claims abstract description 8
- 239000000047 product Substances 0.000 claims abstract description 8
- 239000003921 oil Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 26
- 125000004432 carbon atom Chemical group C* 0.000 claims description 24
- 229910052731 fluorine Inorganic materials 0.000 claims description 23
- 229920000642 polymer Polymers 0.000 claims description 23
- 125000000962 organic group Chemical group 0.000 claims description 20
- 239000003795 chemical substances by application Substances 0.000 claims description 18
- 239000011737 fluorine Substances 0.000 claims description 18
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 13
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 12
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 12
- -1 YF 3 Inorganic materials 0.000 claims description 11
- 125000000217 alkyl group Chemical group 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 8
- 125000001153 fluoro group Chemical group F* 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 125000005843 halogen group Chemical group 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 5
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000001771 vacuum deposition Methods 0.000 claims description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 4
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 125000004429 atom Chemical group 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 4
- 125000004437 phosphorous atom Chemical group 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052717 sulfur Inorganic materials 0.000 claims description 4
- 125000004434 sulfur atom Chemical group 0.000 claims description 4
- 229910016569 AlF 3 Inorganic materials 0.000 claims description 3
- 229910016036 BaF 2 Inorganic materials 0.000 claims description 3
- 229910004261 CaF 2 Inorganic materials 0.000 claims description 3
- 229910017768 LaF 3 Inorganic materials 0.000 claims description 3
- 229910004541 SiN Inorganic materials 0.000 claims description 3
- 229910006404 SnO 2 Inorganic materials 0.000 claims description 3
- 238000007733 ion plating Methods 0.000 claims description 3
- 239000007921 spray Substances 0.000 claims description 2
- 230000003667 anti-reflective effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 84
- 239000002904 solvent Substances 0.000 description 12
- 238000000576 coating method Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 10
- 230000000052 comparative effect Effects 0.000 description 10
- 238000005299 abrasion Methods 0.000 description 9
- 239000002585 base Substances 0.000 description 8
- 150000002430 hydrocarbons Chemical group 0.000 description 8
- 238000007740 vapor deposition Methods 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 5
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 5
- 239000000523 sample Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- 0 CC(C)(*=CC)N Chemical compound CC(C)(*=CC)N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 125000003545 alkoxy group Chemical group 0.000 description 3
- 125000002947 alkylene group Chemical group 0.000 description 3
- 229910052799 carbon Chemical group 0.000 description 3
- 125000001309 chloro group Chemical group Cl* 0.000 description 3
- 229940126214 compound 3 Drugs 0.000 description 3
- 229940125898 compound 5 Drugs 0.000 description 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical group [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 210000002268 wool Anatomy 0.000 description 3
- SJBBXFLOLUTGCW-UHFFFAOYSA-N 1,3-bis(trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC(C(F)(F)F)=C1 SJBBXFLOLUTGCW-UHFFFAOYSA-N 0.000 description 2
- DFUYAWQUODQGFF-UHFFFAOYSA-N 1-ethoxy-1,1,2,2,3,3,4,4,4-nonafluorobutane Chemical compound CCOC(F)(F)C(F)(F)C(F)(F)C(F)(F)F DFUYAWQUODQGFF-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 241000282575 Gorilla Species 0.000 description 2
- 125000000732 arylene group Chemical group 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 125000005647 linker group Chemical group 0.000 description 2
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 2
- FYJQJMIEZVMYSD-UHFFFAOYSA-N perfluoro-2-butyltetrahydrofuran Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C1(F)OC(F)(F)C(F)(F)C1(F)F FYJQJMIEZVMYSD-UHFFFAOYSA-N 0.000 description 2
- RVZRBWKZFJCCIB-UHFFFAOYSA-N perfluorotributylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F RVZRBWKZFJCCIB-UHFFFAOYSA-N 0.000 description 2
- 125000000843 phenylene group Chemical group C1(=C(C=CC=C1)*)* 0.000 description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 2
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 2
- 239000012756 surface treatment agent Substances 0.000 description 2
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 2
- 125000000027 (C1-C10) alkoxy group Chemical group 0.000 description 1
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- GETTZEONDQJALK-UHFFFAOYSA-N (trifluoromethyl)benzene Chemical compound FC(F)(F)C1=CC=CC=C1 GETTZEONDQJALK-UHFFFAOYSA-N 0.000 description 1
- OKIYQFLILPKULA-UHFFFAOYSA-N 1,1,1,2,2,3,3,4,4-nonafluoro-4-methoxybutane Chemical compound COC(F)(F)C(F)(F)C(F)(F)C(F)(F)F OKIYQFLILPKULA-UHFFFAOYSA-N 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- MELHSMGNHAQIDE-POHAHGRESA-N CC(C)(C(C)(C)/[N+](/[O-])=C/C)N Chemical compound CC(C)(C(C)(C)/[N+](/[O-])=C/C)N MELHSMGNHAQIDE-POHAHGRESA-N 0.000 description 1
- TWHKHTZVPAVISP-UHFFFAOYSA-N CC(C)(C(C)(C)N=O)NC(C)=C Chemical compound CC(C)(C(C)(C)N=O)NC(C)=C TWHKHTZVPAVISP-UHFFFAOYSA-N 0.000 description 1
- FVVGXRJNWIYMNJ-UHFFFAOYSA-N CC(C1)C1(C)N Chemical compound CC(C1)C1(C)N FVVGXRJNWIYMNJ-UHFFFAOYSA-N 0.000 description 1
- MVSNNYYZWURZOS-POHAHGRESA-N CCC[O](C)(C)C/C=N\[NH+](C)[NH-] Chemical compound CCC[O](C)(C)C/C=N\[NH+](C)[NH-] MVSNNYYZWURZOS-POHAHGRESA-N 0.000 description 1
- CBKQBEOLQOLTEG-UHFFFAOYSA-N CCOC(C)(C(C)(C)N)O Chemical compound CCOC(C)(C(C)(C)N)O CBKQBEOLQOLTEG-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000004480 active ingredient Substances 0.000 description 1
- 125000004423 acyloxy group Chemical group 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000005358 alkali aluminosilicate glass Substances 0.000 description 1
- 125000003342 alkenyl group Chemical group 0.000 description 1
- 125000003302 alkenyloxy group Chemical group 0.000 description 1
- 150000003973 alkyl amines Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 230000003373 anti-fouling effect Effects 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 235000010290 biphenyl Nutrition 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 125000006267 biphenyl group Chemical group 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- IAQRGUVFOMOMEM-UHFFFAOYSA-N but-2-ene Chemical group CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 description 1
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229940125904 compound 1 Drugs 0.000 description 1
- 229940125782 compound 2 Drugs 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 1
- 150000002170 ethers Chemical class 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 210000004209 hair Anatomy 0.000 description 1
- 125000004836 hexamethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 230000003301 hydrolyzing effect Effects 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 125000002346 iodo group Chemical group I* 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229940104873 methyl perfluorobutyl ether Drugs 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 125000001181 organosilyl group Chemical group [SiH3]* 0.000 description 1
- 125000005824 oxyalkoxy group Chemical group 0.000 description 1
- LGUZHRODIJCVOC-UHFFFAOYSA-N perfluoroheptane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F LGUZHRODIJCVOC-UHFFFAOYSA-N 0.000 description 1
- YVBBRRALBYAZBM-UHFFFAOYSA-N perfluorooctane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F YVBBRRALBYAZBM-UHFFFAOYSA-N 0.000 description 1
- AQZYBQIAUSKCCS-UHFFFAOYSA-N perfluorotripentylamine Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)N(C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F AQZYBQIAUSKCCS-UHFFFAOYSA-N 0.000 description 1
- 239000003208 petroleum Substances 0.000 description 1
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N phenylbenzene Natural products C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920001690 polydopamine Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 210000003296 saliva Anatomy 0.000 description 1
- 210000002374 sebum Anatomy 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000015096 spirit Nutrition 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 125000005156 substituted alkylene group Chemical group 0.000 description 1
- 210000004243 sweat Anatomy 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D171/00—Coating compositions based on polyethers obtained by reactions forming an ether link in the main chain; Coating compositions based on derivatives of such polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/60—Deposition of organic layers from vapour phase
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/06—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain multicolour or other optical effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
- B05D5/083—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface involving the use of fluoropolymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
- C03C17/30—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with silicon-containing compounds
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
- C03C23/006—Other surface treatment of glass not in the form of fibres or filaments by irradiation by plasma or corona discharge
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D171/00—Coating compositions based on polyethers obtained by reactions forming an ether link in the main chain; Coating compositions based on derivatives of such polymers
- C09D171/02—Polyalkylene oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/10—Glass or silica
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/18—Coatings for keeping optical surfaces clean, e.g. hydrophobic or photo-catalytic films
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2203/00—Other substrates
- B05D2203/30—Other inorganic substrates, e.g. ceramics, silicon
- B05D2203/35—Glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2506/00—Halogenated polymers
- B05D2506/10—Fluorinated polymers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2518/00—Other type of polymers
- B05D2518/10—Silicon-containing polymers
- B05D2518/12—Ceramic precursors (polysiloxanes, polysilazanes)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/73—Anti-reflective coatings with specific characteristics
- C03C2217/734—Anti-reflective coatings with specific characteristics comprising an alternation of high and low refractive indexes
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/75—Hydrophilic and oleophilic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/76—Hydrophobic and oleophobic coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/70—Properties of coatings
- C03C2217/78—Coatings specially designed to be durable, e.g. scratch-resistant
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/151—Deposition methods from the vapour phase by vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/31—Pre-treatment
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/002—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds
- C08G65/005—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens
- C08G65/007—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from unsaturated compounds containing halogens containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/02—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring
- C08G65/32—Polymers modified by chemical after-treatment
- C08G65/329—Polymers modified by chemical after-treatment with organic compounds
- C08G65/336—Polymers modified by chemical after-treatment with organic compounds containing silicon
Abstract
Description
で表される直鎖状フルオロオキシアルキレン基含有ポリマーが開示されている。
特許文献1に記載の処理剤を多層反射防止膜に塗工しても、耐スチールウール性や低動摩擦性が不十分であった。
〔1〕
基材上の多層反射防止層表面の自乗平均平方根面粗さが0.8nm以上2.0nm以下である多層反射防止層上に、フッ素ポリマー部分の数平均分子量が4,500以上10,000以下であるフルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物及び/又はその部分加水分解縮合物を主成分とする撥水撥油剤の硬化物である膜厚1〜30nmの撥水撥油層を有する反射防止部材。
〔2〕
前記多層反射防止層が、MgF2、MgO、SiO、SiO2、CeF3、NdF3、LaF3、AlF3、YF3、BaF2、CaF2、Al2O3、SiNx(xは1〜1.5の正数)、ITO、In2O3、SnO2、ZrO2、TiO2、Ti2O3、Ti4O7、Ti3O5、TiNx'Oy(x’は1〜4の正数、yは1〜12の正数)、Nb2O5、Ta2O5、Y2O3、ZnS、WO3、HfO2及びLa2Ti2O7から選ばれる少なくとも2種を使用した多層反射防止層であることを特徴とする〔1〕に記載の反射防止部材。
〔3〕
前記多層反射防止層が、真空蒸着膜、イオンプレーティング膜、イオンアシスト膜、スパッタリング膜又はプラズマCVD膜であることを特徴とする〔1〕又は〔2〕に記載の反射防止部材。
〔4〕
前記フルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物が、下記一般式(1)、(2)、(3)、(4)及び(5)で表される化合物から選ばれる少なくとも1種であることを特徴とする〔1〕〜〔3〕のいずれかに記載の反射防止部材。
(A−Rf)α−ZWβ (1)
Rf−(ZWβ)2 (2)
Z’−(Rf−ZWβ)γ (3)
〔式中、Rfは−(CF2)d−O−(CF2O)p(CF2CF2O)q(CF2CF2CF2O)r(CF2CF2CF2CF2O)s(CF(CF3)CF2O)t−(CF2)d−であり、dは0〜8の整数であり、p、q、r、s、tはそれぞれ独立に0〜200の整数であり、p+q+r+s+t+2dはフッ素ポリマー部分の数平均分子量を4,500以上10,000以下とする数であり、括弧内に示される各単位はランダムに結合されていてよい。Aはフッ素原子、水素原子、又は末端が−CF3基、−CF2H基もしくは−CH2F基である1価のフッ素含有基であり、Z、Z’は独立に単結合、又は窒素原子、酸素原子、ケイ素原子、リン原子もしくは硫黄原子を含んでいてもよく、フッ素置換されていてもよい2〜8価の有機基であり、Wは独立に末端に加水分解性基を有する1価の有機基である。α、βはそれぞれ独立に1〜7の整数であり、かつ、α+β=2〜8である。γは2〜8の整数である。〕
A−Rf−Q−(Y)δ−B (4)
Rf−(Q−(Y)δ−B)2 (5)
(式中、Rf、Aは前記と同じであり、Qは単結合又は2価の有機基であり、Yは加水分解性基を有する2価の有機基であり、δは1〜10の整数であり、Bは水素原子、炭素数1〜4のアルキル基、又はハロゲン原子である。)
〔5〕
前記式(1)〜(5)中のRfが直鎖構造であることを特徴とする〔4〕に記載の反射防止部材。
〔6〕
前記式(1)〜(5)中のRfが、−CF2CF2O−を含むことを特徴とする〔5〕に記載の反射防止部材。
〔7〕
前記フルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物が、下記式で表されるものである〔1〕〜〔6〕のいずれかに記載の反射防止部材。
〔8〕
前記基材が、ガラス、サファイヤ、石英又は透明樹脂であることを特徴とする〔1〕〜〔7〕のいずれかに記載の反射防止部材。
〔9〕
基材上に、表面の自乗平均平方根面粗さが0.8nm以上2.0nm以下になるように、少なくとも2種の反射防止剤を真空蒸着法、イオンプレーティング法、イオンアシスト法、スパッタリング法又はプラズマCVD法により複数回成膜して多層反射防止層を形成する工程と、該多層反射防止層上に、フルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物及び/又はその部分加水分解縮合物を主成分とする撥水撥油剤を真空蒸着法、スプレー法、Dip法又はスピン法により成膜して撥水撥油層を形成する工程とを含むことを特徴とする〔1〕〜〔8〕のいずれかに記載の反射防止部材の製造方法。
本発明の反射防止部材は、基材上の多層反射防止層表面の自乗平均平方根面粗さ(RMS)が0.8nm以上2.0nm以下である多層反射防止層上に、フッ素ポリマー部分の数平均分子量が4,500以上10,000以下であるフルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物及び/又はその部分加水分解縮合物を主成分とする撥水撥油剤の硬化物である膜厚1〜30nmの撥水撥油層を有するものである。
なお、基材表面は、できるだけ平滑であることが好ましく、例えば、RMSが0.1〜1.0nmであることが好ましい。
フルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物に関して、更に具体的に説明する。
−CF2O−
−CF2CF2O−
−CF2CF2CF2O−
−CF(CF3)CF2O−
−CF2CF2CF2CF2O−
−CF2CF2CF2CF2CF2O−
−C(CF3)2O−
(A−Rf)α−ZWβ (1)
Rf−(ZWβ)2 (2)
Z’−(Rf−ZWβ)γ (3)
A−Rf−Q−(Y)δ−B (4)
Rf−(Q−(Y)δ−B)2 (5)
〔式(1)〜(5)中、Rfは−(CF2)d−O−(CF2O)p(CF2CF2O)q(CF2CF2CF2O)r(CF2CF2CF2CF2O)s(CF(CF3)CF2O)t−(CF2)d−であり、dは0〜8の整数であり、p、q、r、s、tはそれぞれ独立に0〜200の整数であり、p+q+r+s+t+2dはフッ素ポリマー部分の数平均分子量を4,500以上10,000以下とする数であり、括弧内に示される各単位はランダムに結合されていてよい。Aはフッ素原子、水素原子、又は末端が−CF3基、−CF2H基もしくは−CH2F基である1価のフッ素含有基であり、Z、Z’は独立に単結合、又は窒素原子、酸素原子、ケイ素原子、リン原子もしくは硫黄原子を含んでいてもよく、フッ素置換されていてもよい2〜8価の有機基であり、Wは独立に末端に加水分解性基を有する1価の有機基である。α、βはそれぞれ独立に1〜7の整数であり、かつ、α+β=2〜8である。γは2〜8の整数である。Qは単結合又は2価の有機基であり、Yは加水分解性基を有する2価の有機基であり、δは1〜10の整数であり、Bは水素原子、炭素数1〜4のアルキル基、又はハロゲン原子である。〕
なお、Rfは直鎖構造であることが好ましく、更には−CF2CF2O−の繰り返し単位を含むことが好ましい。
Mは互いに独立に、単結合、−R1 2C−で示される2価の基、−R3 2Si−で示される2価の基、−R1C=で示される3価の基、−R3Si=で示される3価の基、−C≡で示される4価の基、−O−C≡で示される4価の基、及び−Si≡で示される4価の基から選ばれる基、又は2〜8価のシロキサン残基である。上記において、R1は独立に、好ましくは炭素数1〜3のアルキル基、ヒドロキシル基、CH3(OCH2CH2)i−O−(iは1〜20の整数)で示される基又はR2 3SiO−で示されるシリルエーテル基であり、R2は互いに独立に、水素原子、好ましくは炭素数1〜3のアルキル基、フェニル基等のアリール基、又は炭素数1〜3のアルコキシ基である。R3は独立に、好ましくは炭素数1〜3のアルキル基、炭素数2又は3のアルケニル基、炭素数1〜3のアルコキシ基、又はクロル基である。Mが2〜8価のシロキサン残基の場合には、ケイ素原子数2〜13個、好ましくは2〜5個の直鎖状、分岐状又は環状オルガノポリシロキサン構造を有することが好ましい。該オルガノポリシロキサン構造は、炭素数1〜8、より好ましくは1〜4のメチル基、エチル基、プロピル基、及びブチル基等のアルキル基又はフェニル基を有するものがよい。また、2つのケイ素原子がアルキレン基で結合されたシルアルキレン構造、即ちSi−(CH2)n−Si、を含んでいてもよい。前記式においてnは2〜6の整数であり、好ましくは2〜4の整数である。
また、Bは水素原子、炭素数1〜4のメチル基、エチル基、プロピル基及びブチル基等のアルキル基、又はフッ素原子、塩素原子、臭素原子及びヨウ素原子等のハロゲン原子である。
撥水撥油剤は、室温(25℃)で硬化させることができるが、更に短時間で硬化させるために30〜200℃で10〜24時間程度加熱してもよい。硬化は加湿下で行うことが加水分解を促進する上で好ましい。
[撥水撥油性の評価方法]
接触角計(DropMaster、協和界面科学社製)を用いて、硬化被膜(撥水撥油層)の水接触角及びオレイン酸に対する接触角を測定した。
ベンコット(旭化成社製)に対する硬化被膜(撥水撥油層)の動摩擦係数を、新東科学社製の表面性試験機を用いて下記条件で測定した。
接触面積:10mm×30mm
荷重:100g
往復摩耗試験機(HEIDON 30S、新東科学社製)を用いて、以下の条件で硬化被膜(撥水撥油層)の耐摩耗性試験を実施し、試験後の硬化被膜の水接触角を上記と同様の方法により測定した。
評価環境条件:25℃、湿度40%
擦り材:試料と接触するテスターの先端部(10mm×10mm)にスチールウール(#0000 ボンスター)を3mm厚になるように重ねて包み、輪ゴムで固定した。
荷重:1kg
擦り距離(片道):30mm
擦り速度:3,600mm/min
往復回数:5,000往復
基材上に、表1に示す材料を用い、真空蒸着法又はスパッタ法により(多層)反射防止層を順次形成し、基板A〜Fを作製した。基材は、コーニング社のGorilla3(ガラス基材)を用いた。表1中のカッコ内の数値は各層の厚みである。
多層反射防止層表面の自乗平均平方根面粗さRMSは、走査型プローブ顕微鏡((株)日立ハイテクサイエンス製SPA300、カンチレバー:SI−DF20)で測定した。
また、入射角5度反射率は、島津製作所製UV−3600を用いて測定し、波長550nmの反射率を採用した。
[化合物1]
[化合物2]
[化合物3]
[化合物4]
[化合物5]
上記で得られた基材の反射防止層上に、上記化合物1〜5をそれぞれNovec(登録商標)7200(3M社製)で有効成分20質量%になるように希釈してから下記塗工条件で真空蒸着塗工した。40℃、湿度80%の雰囲気下で2時間硬化させて撥水撥油層を形成し、反射防止部材を作製した。
・塗工装置:小型真空蒸着装置VPC−250F
・圧力:2.0×10-3〜3.0×10-2Pa
・蒸着温度(ボートの到達温度):700℃
・蒸着距離:20mm
・処理剤の仕込み量:10mg
・蒸着量:10mg(膜厚:15nm)
実施例1〜4及び比較例1は、上記の方法に基づき、上記基板A(RMS:0.82nm)に化合物1〜5(撥水撥油剤の数平均分子量を変えたもの)をそれぞれ用いて撥水撥油層を形成した。上記の評価を行い、評価結果を表2に示す。
実施例5〜7及び比較例2は、上記の方法に基づき、上記基板B〜Eそれぞれに化合物3(数平均分子量:7,280)を用いて撥水撥油層を形成した。上記の評価を行い、評価結果を上記実施例3(基板A及び化合物3を用いたもの)の結果と共に表3に示す。
上記実施例/比較例において、多層反射防止層のRMSを0.8nmより小さくすることはできなかったが、参考に、ガラス基材上に単層の反射防止層としてSiO2層(単層)を10nm成膜した基板F(RMS:0.63nm)に、上記の方法に基づき、化合物5を塗工して撥水撥油層を形成し、上記と同様の評価を行ったところ、表4に示す結果が得られた。
Claims (9)
- 基材上の多層反射防止層表面の自乗平均平方根面粗さが0.8nm以上2.0nm以下である多層反射防止層上に、フッ素ポリマー部分の数平均分子量が4,500以上10,000以下であるフルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物及び/又はその部分加水分解縮合物を主成分とする撥水撥油剤の硬化物である膜厚1〜30nmの撥水撥油層を有する反射防止部材。
- 前記多層反射防止層が、MgF2、MgO、SiO、SiO2、CeF3、NdF3、LaF3、AlF3、YF3、BaF2、CaF2、Al2O3、SiNx(xは1〜1.5の正数)、ITO、In2O3、SnO2、ZrO2、TiO2、Ti2O3、Ti4O7、Ti3O5、TiNx'Oy(x’は1〜4の正数、yは1〜12の正数)、Nb2O5、Ta2O5、Y2O3、ZnS、WO3、HfO2及びLa2Ti2O7から選ばれる少なくとも2種を使用した多層反射防止層であることを特徴とする請求項1に記載の反射防止部材。
- 前記多層反射防止層が、真空蒸着膜、イオンプレーティング膜、イオンアシスト膜、スパッタリング膜又はプラズマCVD膜であることを特徴とする請求項1又は2に記載の反射防止部材。
- 前記フルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物が、下記一般式(1)、(2)、(3)、(4)及び(5)で表される化合物から選ばれる少なくとも1種であることを特徴とする請求項1〜3のいずれか1項に記載の反射防止部材。
(A−Rf)α−ZWβ (1)
Rf−(ZWβ)2 (2)
Z’−(Rf−ZWβ)γ (3)
〔式中、Rfは−(CF2)d−O−(CF2O)p(CF2CF2O)q(CF2CF2CF2O)r(CF2CF2CF2CF2O)s(CF(CF3)CF2O)t−(CF2)d−であり、dは0〜8の整数であり、p、q、r、s、tはそれぞれ独立に0〜200の整数であり、p+q+r+s+t+2dはフッ素ポリマー部分の数平均分子量を4,500以上10,000以下とする数であり、括弧内に示される各単位はランダムに結合されていてよい。Aはフッ素原子、水素原子、又は末端が−CF3基、−CF2H基もしくは−CH2F基である1価のフッ素含有基であり、Z、Z’は独立に単結合、又は窒素原子、酸素原子、ケイ素原子、リン原子もしくは硫黄原子を含んでいてもよく、フッ素置換されていてもよい2〜8価の有機基であり、Wは独立に末端に加水分解性基を有する1価の有機基である。α、βはそれぞれ独立に1〜7の整数であり、かつ、α+β=2〜8である。γは2〜8の整数である。〕
A−Rf−Q−(Y)δ−B (4)
Rf−(Q−(Y)δ−B)2 (5)
(式中、Rf、Aは前記と同じであり、Qは単結合又は2価の有機基であり、Yは加水分解性基を有する2価の有機基であり、δは1〜10の整数であり、Bは水素原子、炭素数1〜4のアルキル基、又はハロゲン原子である。) - 前記式(1)〜(5)中のRfが直鎖構造であることを特徴とする請求項4に記載の反射防止部材。
- 前記式(1)〜(5)中のRfが、−CF2CF2O−を含むことを特徴とする請求項5に記載の反射防止部材。
- 前記基材が、ガラス、サファイヤ、石英又は透明樹脂であることを特徴とする請求項1〜7のいずれか1項に記載の反射防止部材。
- 基材上に、表面の自乗平均平方根面粗さが0.8nm以上2.0nm以下になるように、少なくとも2種の反射防止剤を真空蒸着法、イオンプレーティング法、イオンアシスト法、スパッタリング法又はプラズマCVD法により複数回成膜して多層反射防止層を形成する工程と、該多層反射防止層上に、フルオロオキシアルキレン基含有ポリマー変性有機ケイ素化合物及び/又はその部分加水分解縮合物を主成分とする撥水撥油剤を真空蒸着法、スプレー法、Dip法又はスピン法により成膜して撥水撥油層を形成する工程とを含むことを特徴とする請求項1〜8のいずれか1項に記載の反射防止部材の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017083634 | 2017-04-20 | ||
JP2017083634 | 2017-04-20 | ||
PCT/JP2018/008900 WO2018193742A1 (ja) | 2017-04-20 | 2018-03-08 | 反射防止部材及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018193742A1 true JPWO2018193742A1 (ja) | 2020-05-21 |
JP7030792B2 JP7030792B2 (ja) | 2022-03-07 |
Family
ID=63857083
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019513258A Active JP7030792B2 (ja) | 2017-04-20 | 2018-03-08 | 反射防止部材及びその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11624858B2 (ja) |
JP (1) | JP7030792B2 (ja) |
KR (1) | KR102569079B1 (ja) |
CN (1) | CN110537116B (ja) |
TW (1) | TWI772388B (ja) |
WO (1) | WO2018193742A1 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210116608A1 (en) * | 2018-04-27 | 2021-04-22 | Konica Minolta Inc. | Optical Thin-Film, Optical Member, and Method for Manufacturing Optical Thin-Film |
KR102215218B1 (ko) * | 2019-11-19 | 2021-02-15 | (주)도 은 | 내열충격성 저굴절 코팅재 및 이 코팅재를 이용한 렌즈 코팅막의 형성방법 |
JP7089609B2 (ja) * | 2020-03-04 | 2022-06-22 | デクセリアルズ株式会社 | 光学積層体、物品、光学積層体の製造方法 |
EP4116083A1 (en) * | 2020-03-04 | 2023-01-11 | Dexerials Corporation | Optical laminate, article, and method for producing optical laminate |
JP7101297B2 (ja) * | 2020-07-17 | 2022-07-14 | デクセリアルズ株式会社 | 光学積層体、物品、光学積層体の製造方法 |
JP7248830B2 (ja) * | 2020-07-17 | 2023-03-29 | デクセリアルズ株式会社 | 光学積層体の製造方法 |
KR20230007488A (ko) * | 2020-07-17 | 2023-01-12 | 데쿠세리아루즈 가부시키가이샤 | 광학 적층체, 물품, 광학 적층체의 제조 방법 |
JP7303954B2 (ja) | 2020-07-17 | 2023-07-05 | デクセリアルズ株式会社 | 光学積層体の製造方法 |
EP4183573A1 (en) * | 2020-07-17 | 2023-05-24 | Dexerials Corporation | Method for producing optical multilayer body |
CN111875263B (zh) * | 2020-07-23 | 2022-09-06 | 安徽晶驰光电科技有限公司 | 一种减反射玻璃的防眩光镀膜方法 |
EP4212922A1 (en) * | 2020-09-10 | 2023-07-19 | Dexerials Corporation | Production method for optical laminate |
KR20220099828A (ko) | 2021-01-07 | 2022-07-14 | 현대모비스 주식회사 | 적층체 및 이의 제조방법 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003064345A (ja) * | 2001-08-28 | 2003-03-05 | Sony Corp | 表面改質材、表面改質膜用組成物、表面改質膜、光学部品及び表示装置 |
JP2004226942A (ja) * | 2002-03-18 | 2004-08-12 | Hoya Corp | 光学部材、光学部材の製造方法及び薄膜の製造方法 |
JP2004271545A (ja) * | 2003-03-04 | 2004-09-30 | Nikon Corp | 光学部品、レンズ系、及び投影露光装置 |
JP2005199572A (ja) * | 2004-01-16 | 2005-07-28 | Nitto Denko Corp | 汚染防止型反射防止膜及び表示装置 |
JP2006201558A (ja) * | 2005-01-21 | 2006-08-03 | Hitachi Ltd | 撥液層を有する物品又は透明部品、撥液層を有する光学レンズ及びその製造方法、並びにこの光学レンズを用いた投射型画像表示装置 |
JP2011150286A (ja) * | 2009-12-23 | 2011-08-04 | Sumitomo Electric Hardmetal Corp | 光学部品 |
WO2014129333A1 (ja) * | 2013-02-22 | 2014-08-28 | 旭硝子株式会社 | 光学部品 |
JP2014194530A (ja) * | 2013-02-28 | 2014-10-09 | Asahi Glass Co Ltd | 光学素子 |
WO2015125498A1 (ja) * | 2014-02-24 | 2015-08-27 | キヤノンオプトロン株式会社 | 防汚膜付光学部材およびタッチパネル式ディスプレイ |
WO2015159839A1 (ja) * | 2014-04-15 | 2015-10-22 | 旭硝子株式会社 | 反射防止積層体およびその製造方法 |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE60229340D1 (de) * | 2001-10-05 | 2008-11-27 | Shinetsu Chemical Co | Perfluoropolyethermodifizierte Silane, Oberflächenbehandlungsmittel und Antireflexfilter |
CA2421538C (en) | 2002-03-18 | 2007-11-20 | Hoya Corporation | Optical member and process for producing it and thin films |
US6958191B2 (en) * | 2002-08-29 | 2005-10-25 | Shin-Etsu Chemical Co., Ltd. | Lens with stain resistant surface layer |
CA2448410A1 (en) * | 2002-11-06 | 2004-05-06 | Pentax Corporation | Anti-relfection spectacle lens and its production method |
EP1963891B1 (en) * | 2005-12-23 | 2016-04-27 | Essilor International (Compagnie Generale D'optique) | Optical article having an antistatic, antireflection coating and method of manufacturing same |
JP2007276445A (ja) * | 2006-03-15 | 2007-10-25 | Seiko Epson Corp | 防汚層を有する製品の製造方法および防汚層を有する製品 |
US7847015B2 (en) * | 2006-11-15 | 2010-12-07 | Shin-Etsu Chemical Co., Ltd. | Coating composition |
US20110117273A1 (en) * | 2007-08-28 | 2011-05-19 | Hoya Corporation | Evaporation source, process for producing optical member, and optical member |
KR20100112740A (ko) * | 2009-04-10 | 2010-10-20 | 도레이첨단소재 주식회사 | 저반사 필름 |
JP5235026B2 (ja) | 2010-09-28 | 2013-07-10 | 信越化学工業株式会社 | フルオロオキシアルキレン基含有ポリマー組成物および該組成物を含む表面処理剤並びに該表面処理剤で表面処理された物品 |
DE202012013052U1 (de) * | 2011-02-23 | 2014-09-29 | Schott Ag | Saphirglas-Scheibe mit Antireflexionsbeschichtung sowie deren Verwendung |
JP6336387B2 (ja) * | 2011-07-22 | 2018-06-06 | サティスロウ アーゲーSatisloh AG | 改善された耐久性を有する、界面活性剤をベースとする一時的な防曇コーティングを含んでなる光学物品 |
JP5857942B2 (ja) * | 2011-11-30 | 2016-02-10 | 信越化学工業株式会社 | 蒸着用フッ素系表面処理剤及び該表面処理剤で蒸着処理された物品 |
JPWO2013183457A1 (ja) * | 2012-06-08 | 2016-01-28 | 旭硝子株式会社 | 光学素子 |
KR101743851B1 (ko) * | 2012-11-05 | 2017-06-05 | 다이킨 고교 가부시키가이샤 | 퍼플루오로(폴리)에테르기 함유 실란 화합물 |
JP5992875B2 (ja) * | 2013-07-01 | 2016-09-14 | 信越化学工業株式会社 | フッ素系表面処理剤及び該表面処理剤で処理された物品 |
JP6319143B2 (ja) * | 2014-03-31 | 2018-05-09 | 信越化学工業株式会社 | 含フッ素コーティング剤及び該コーティング剤で処理された物品 |
US11267973B2 (en) * | 2014-05-12 | 2022-03-08 | Corning Incorporated | Durable anti-reflective articles |
CN106536440B (zh) * | 2014-07-16 | 2020-09-01 | Agc株式会社 | 覆盖玻璃 |
KR101943231B1 (ko) * | 2014-08-07 | 2019-01-28 | 다이킨 고교 가부시키가이샤 | 방오 처리 조성물, 처리 장치, 처리 방법 및 처리 물품 |
JP6248858B2 (ja) * | 2014-08-07 | 2017-12-20 | 信越化学工業株式会社 | フッ素系表面処理剤及び該表面処理剤で表面処理された物品 |
JP6705752B2 (ja) * | 2014-11-12 | 2020-06-03 | 住友化学株式会社 | 撥水撥油コーティング組成物及び透明皮膜 |
JP6274083B2 (ja) * | 2014-11-17 | 2018-02-07 | 信越化学工業株式会社 | 耐熱性を有する撥水撥油処理剤及びその製造方法並びに物品 |
JP6107891B2 (ja) * | 2015-06-25 | 2017-04-05 | ダイキン工業株式会社 | パーフルオロ(ポリ)エーテル基含有シラン化合物を含む表面処理剤 |
EP3255108B1 (en) * | 2016-06-06 | 2021-12-08 | Nbd Nanotechnologies, Inc. | Invisible fingerprint coatings and process for forming same |
WO2018012093A1 (ja) * | 2016-07-15 | 2018-01-18 | 日産自動車株式会社 | 防汚構造体前駆体、防汚構造体、表面改質組成物、及び表面改質方法 |
KR102443756B1 (ko) * | 2016-08-19 | 2022-09-15 | 에이지씨 가부시키가이샤 | 발수막 형성용 조성물, 발수막, 발수막 부착 기체 (基體) 및 물품 |
JP2018065946A (ja) * | 2016-10-20 | 2018-04-26 | キヤノン株式会社 | コーティング用材料およびその製造方法 |
WO2018131656A1 (ja) * | 2017-01-12 | 2018-07-19 | ダイキン工業株式会社 | パーフルオロ(ポリ)エーテル基含有化合物を含む表面処理剤 |
US11681079B2 (en) * | 2017-10-31 | 2023-06-20 | Daikin Industries, Ltd. | Surface treatment composition |
-
2018
- 2018-03-08 WO PCT/JP2018/008900 patent/WO2018193742A1/ja active Application Filing
- 2018-03-08 JP JP2019513258A patent/JP7030792B2/ja active Active
- 2018-03-08 US US16/603,134 patent/US11624858B2/en active Active
- 2018-03-08 CN CN201880025915.4A patent/CN110537116B/zh active Active
- 2018-03-08 KR KR1020197032153A patent/KR102569079B1/ko active IP Right Grant
- 2018-03-20 TW TW107109387A patent/TWI772388B/zh active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003064345A (ja) * | 2001-08-28 | 2003-03-05 | Sony Corp | 表面改質材、表面改質膜用組成物、表面改質膜、光学部品及び表示装置 |
JP2004226942A (ja) * | 2002-03-18 | 2004-08-12 | Hoya Corp | 光学部材、光学部材の製造方法及び薄膜の製造方法 |
JP2004271545A (ja) * | 2003-03-04 | 2004-09-30 | Nikon Corp | 光学部品、レンズ系、及び投影露光装置 |
JP2005199572A (ja) * | 2004-01-16 | 2005-07-28 | Nitto Denko Corp | 汚染防止型反射防止膜及び表示装置 |
JP2006201558A (ja) * | 2005-01-21 | 2006-08-03 | Hitachi Ltd | 撥液層を有する物品又は透明部品、撥液層を有する光学レンズ及びその製造方法、並びにこの光学レンズを用いた投射型画像表示装置 |
JP2011150286A (ja) * | 2009-12-23 | 2011-08-04 | Sumitomo Electric Hardmetal Corp | 光学部品 |
WO2014129333A1 (ja) * | 2013-02-22 | 2014-08-28 | 旭硝子株式会社 | 光学部品 |
JP2014194530A (ja) * | 2013-02-28 | 2014-10-09 | Asahi Glass Co Ltd | 光学素子 |
WO2015125498A1 (ja) * | 2014-02-24 | 2015-08-27 | キヤノンオプトロン株式会社 | 防汚膜付光学部材およびタッチパネル式ディスプレイ |
WO2015159839A1 (ja) * | 2014-04-15 | 2015-10-22 | 旭硝子株式会社 | 反射防止積層体およびその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR102569079B1 (ko) | 2023-08-22 |
TWI772388B (zh) | 2022-08-01 |
JP7030792B2 (ja) | 2022-03-07 |
KR20190137117A (ko) | 2019-12-10 |
CN110537116B (zh) | 2021-10-29 |
US11624858B2 (en) | 2023-04-11 |
WO2018193742A1 (ja) | 2018-10-25 |
US20210215853A1 (en) | 2021-07-15 |
TW201843290A (zh) | 2018-12-16 |
CN110537116A (zh) | 2019-12-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7030792B2 (ja) | 反射防止部材及びその製造方法 | |
JP6248858B2 (ja) | フッ素系表面処理剤及び該表面処理剤で表面処理された物品 | |
JP6044701B2 (ja) | 蒸着用フッ素系表面処理剤の硬化被膜を有する物品 | |
JP6988905B2 (ja) | 撥水撥油部材及び撥水撥油部材の製造方法 | |
KR102441819B1 (ko) | 내열성을 가진 발수발유 처리제 및 그의 제조방법 및 물품 | |
JP5747699B2 (ja) | フルオロオキシアルキレン基含有ポリマー変性シラン及び該シランを含む表面処理剤並びに該表面処理剤で表面処理された物品 | |
EP3858943B1 (en) | Surface treatment agent | |
JP5935748B2 (ja) | フルオロオキシアルキレン基含有ポリマー変性シラン及び該シランを含む表面処理剤並びに該表面処理剤で表面処理された物品 | |
TWI693261B (zh) | 含氟塗佈劑及以該塗佈劑處理之物品 | |
JP7236624B2 (ja) | 撥水撥油部材及び撥水撥油部材の製造方法 | |
JP7211423B2 (ja) | 撥水撥油部材及び撥水撥油部材の製造方法 | |
JPWO2019035271A1 (ja) | 撥水部材及び撥水部材の製造方法 | |
JP6384394B2 (ja) | フルオロオキシアルキル基含有ポリマーを含む表面処理剤及び該表面処理剤で処理された物品 | |
JP6520419B2 (ja) | フルオロオキシアルキレン基含有ポリマー変性ホスホン酸誘導体及び該誘導体を含む表面処理剤、該表面処理剤で処理された物品及び光学物品 | |
JP7255692B2 (ja) | 撥水撥油部材及び撥水撥油部材の製造方法 | |
WO2022168762A1 (ja) | 表面処理剤 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20190927 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200623 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200820 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20210112 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210302 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20210302 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20210309 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20210316 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20210528 |
|
C211 | Notice of termination of reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C211 Effective date: 20210601 |
|
C22 | Notice of designation (change) of administrative judge |
Free format text: JAPANESE INTERMEDIATE CODE: C22 Effective date: 20210727 |
|
C302 | Record of communication |
Free format text: JAPANESE INTERMEDIATE CODE: C302 Effective date: 20210819 |
|
C13 | Notice of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: C13 Effective date: 20210921 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211112 |
|
C302 | Record of communication |
Free format text: JAPANESE INTERMEDIATE CODE: C302 Effective date: 20211216 |
|
C13 | Notice of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: C13 Effective date: 20211221 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211228 |
|
C23 | Notice of termination of proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C23 Effective date: 20220118 |
|
C03 | Trial/appeal decision taken |
Free format text: JAPANESE INTERMEDIATE CODE: C03 Effective date: 20220222 |
|
C30A | Notification sent |
Free format text: JAPANESE INTERMEDIATE CODE: C3012 Effective date: 20220222 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220222 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7030792 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |