JPWO2017213180A1 - 表示装置及びその製造方法 - Google Patents
表示装置及びその製造方法 Download PDFInfo
- Publication number
- JPWO2017213180A1 JPWO2017213180A1 JP2018521757A JP2018521757A JPWO2017213180A1 JP WO2017213180 A1 JPWO2017213180 A1 JP WO2017213180A1 JP 2018521757 A JP2018521757 A JP 2018521757A JP 2018521757 A JP2018521757 A JP 2018521757A JP WO2017213180 A1 JPWO2017213180 A1 JP WO2017213180A1
- Authority
- JP
- Japan
- Prior art keywords
- film
- insulating film
- metal film
- electrode
- transparent electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
- G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
- G09G3/3611—Control of matrices with row and column drivers
- G09G3/3648—Control of matrices with row and column drivers using an active matrix
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
- G02F1/136295—Materials; Compositions; Manufacture processes
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Human Computer Interaction (AREA)
- Mathematical Physics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
以下、図面を参照し、本発明の実施の形態を詳しく説明する。図中同一または相当部分には同一符号を付してその説明は繰り返さない。なお、説明を分かりやすくするために、以下で参照する図面においては、構成が簡略化または模式化して示されたり、一部の構成部材が省略されたりしている。また、各図に示された構成部材間の寸法比は、必ずしも実際の寸法比を示すものではない。
図8A〜8Jは、本実施形態におけるアクティブマトリクス基板1の製造工程を説明するための図である。具体的には、図8A〜8Jは、TFT42が形成された領域と信号線接続領域とを含む領域Aと、上述の接続部Ca、Cb、及び端子部Taがそれぞれ形成される領域B〜Dの各製造工程におけるアクティブマトリクス基板1の断面図を示している。以下、各製造工程について説明する。
る。そして、領域Aにおいて、ゲート絶縁膜43を介してゲート電極42aと重なるように、例えばIn、Ga、Zn及び酸素を含む半導体膜を成膜する。そして、フォトリソグラフィ及びウェットエッチングを行い半導体膜をパターニングする。これにより、領域Aにおいて、ゲート絶縁膜43上に半導体膜42bが形成される(図8B参照)
上述した実施形態の端子部Taは、第1金属膜71、第2金属膜72、第1透明電極膜81、及び第2透明電極膜82が順に重ねて配置される構造を有する例を説明したが、端子部の構造はこれに限定されない。以下、上述した実施形態とは異なる他の端子部の構成例について説明する。
図9Aは、本変形例の端子部の一例を示す断面図である。なお、図9Aにおいて、実施形態と同様の構成には実施形態と同じ符号を付している。以下、実施形態の端子部Taと異なる部分を主に説明する。
図10は、図9Aとは異なる他の端子部の例を示す断面図である。なお、図10において、実施形態と同様の構成には第1実施形態と同じ符号を付している。以下、実施形態における端子部Taと異なる部分を主に説明する。
図11Aは、図9A及び図10とは異なる端子部の他の例を示す断面図である。なお、図11Aにおいて、第1実施形態と同様の構成には第1実施形態と同じ符号を付している。以下、第1実施形態の端子部Taと異なる部分を主に説明する。
上述した実施形態及び変形例において、TFT42のソース電極42cとドレイン電極42dとの間にエッチストッパ層が設けられていてもよい。この構成により、ソース電極42cやドレイン電極42dを形成する際のエッチングによって、半導体膜42bがダメージを受けることを防止できる。
また、上述した実施形態及び変形例では、ボトムゲート型のTFTを例に説明したが、トップゲート型でもよい。また、半導体膜42bは酸化物半導体膜に限らず、アモルファスシリコン膜であってもよい。
上述した実施形態及び変形例では、画像表示機能とタッチ位置検出機能とを有するアクティブマトリクス基板を備えたタッチパネル付き表示装置を例に説明したが、アクティブマトリクス基板は画像表示機能のみを備えるものであってもよい。この場合、タッチ位置を検出するための信号線52と、端子部Taと信号線52とを接続するための接続部Caは形成されなくてもよい。
Claims (10)
- アクティブマトリクス基板を備える表示装置であって、
前記アクティブマトリクス基板は、
ゲート配線と、
前記ゲート配線と交差して配置されたデータ配線と、
画素電極と、
前記画素電極との間で容量を形成する対向電極と、
前記ゲート配線と前記データ配線の少なくとも一方に制御信号を供給するための表示用駆動回路と、
前記対向電極と接続され、タッチ検出用の駆動信号が供給される信号線と、
前記タッチ検出用の駆動信号を供給するタッチ検出用駆動回路と、
前記表示用駆動回路と前記タッチ検出用駆動回路とにそれぞれ接続される複数の端子と、を備え、
前記複数の端子は、共通の層構造を有する、表示装置。 - 前記層構造は、
前記ゲート配線と同じ材料からなる第1金属膜と、
前記データ配線と同じ材料からなる第2金属膜と、
前記画素電極と同じ材料からなる第1透明電極膜と、
前記対向電極と同じ材料からなる第2透明電極膜と、を備え、
前記第1金属膜、前記第2金属膜、前記第1透明電極膜、及び前記第2透明電極膜が順に積層されている、請求項1に記載の表示装置。 - 前記層構造は、
前記ゲート配線と同じ材料からなる第1金属膜と、
前記データ配線と同じ材料からなる第2金属膜と、
絶縁膜と、
前記信号線と同じ材料からなる第3金属膜と、
前記画素電極と同じ材料からなる第1透明電極膜と、
前記対向電極と同じ材料からなる第2透明電極膜と、を備え、
前記第1金属膜、前記第2金属膜、前記絶縁膜、前記第3金属膜、前記第1透明電極膜、及び前記第2透明電極膜が順に積層されている、請求項1に記載の表示装置。 - 前記層構造は、
前記ゲート配線と同じ材料からなる第1金属膜と、
前記データ配線と同じ材料からなる第2金属膜と、
前記画素電極と同じ材料からなる第1透明電極膜と、を備え、
前記第1金属膜、前記第2金属膜、及び前記第1透明電極膜が順に積層されている、請求項1に記載の表示装置。 - 前記層構造は、
前記信号線と同じ材料からなる第3金属膜と、
前記画素電極と同じ材料からなる第1透明電極膜と、
前記対向電極と同じ材料からなる第2透明電極膜と、を備え、
前記第3金属膜、前記第1透明電極膜、及び第2透明電極膜が順に積層されている、請求項1に記載の表示装置。 - 前記アクティブマトリクス基板は、前記信号線と前記対向電極との間に、第1の絶縁膜と第2の絶縁膜とをさらに備え、
前記層構造は、前記第1透明電極膜の上層に前記第2の絶縁膜が配置される部分を含む、請求項2から5のいずれか一項に記載の表示装置。 - 前記画素電極と前記データ配線との間に有機絶縁膜をさらに備え、
前記層構造に、前記有機絶縁膜が含まれない、請求項1から6のいずれか一項に記載の表示装置。 - さらに、
カラーフィルタを備える対向基板と、
前記アクティブマトリクス基板と前記対向基板との間に設けられた液晶層と、
を備える請求項1から7のいずれか一項に記載の表示装置。 - ゲート電極、半導体膜、ソース電極、及びドレイン電極を含む表示制御素子と、駆動回路を接続するための端子部とを備えるアクティブマトリクス基板の製造方法であって、
前記アクティブマトリクス基板において、前記表示制御素子を形成する表示制御素子領域に第1金属膜からなる前記ゲート電極を形成するとともに、前記端子部を形成する端子部領域に前記第1金属膜を成膜し、
前記表示制御素子領域と前記端子部領域において、前記ゲート電極及び前記第1金属膜を覆うように絶縁膜を成膜し、前記第1金属膜の上において、前記絶縁膜に第1開口部を形成し、
前記表示制御素子領域において前記絶縁膜を介して前記ゲート電極と重なるように半導体膜を形成し、
前記表示制御素子領域における前記半導体膜の上に第2金属膜からなるソース電極及びドレイン電極を形成するとともに、前記端子部領域の前記第1開口部において前記第1金属膜と接するように前記第2金属膜を成膜し、
前記表示制御素子領域における前記ソース電極及び前記ドレイン電極と、前記端子部領域における前記第2金属膜の上に無機絶縁膜を成膜し、
前記表示制御素子領域及び前記端子部領域において、前記無機絶縁膜の上に前記第1の絶縁膜を成膜し、
前記表示制御素子領域と前記端子部領域において前記無機絶縁膜と前記第1の絶縁膜とを貫通する第2開口部を形成し、
前記端子部領域の前記第2開口部において前記ドレイン電極と接し、前記端子部領域の前記第2開口部において前記第2金属膜と接するように、前記第1の絶縁膜の上に第1透明電極膜を形成し、
前記表示制御素子領域と前記端子部領域において前記第1の絶縁膜と前記第1透明電極膜の上に第2の絶縁膜を成膜し、前記端子部領域における前記第2の絶縁膜に第3開口部を形成し、
前記表示制御素子領域における前記第2の絶縁膜の上に、第2透明電極膜からなる対向電極を形成するとともに、前記端子部領域における前記第3開口部において前記第1透明電極膜と接するように、前記第2透明電極膜を前記第2の絶縁膜の上に形成する、
製造方法。 - 前記表示制御素子領域及び前記端子部領域において前記無機絶縁膜を成膜した後、さらに、前記無機絶縁膜の上に有機絶縁膜を成膜し、前記端子部領域において前記有機絶縁膜を除去する、請求項9に記載の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016115588 | 2016-06-09 | ||
JP2016115588 | 2016-06-09 | ||
PCT/JP2017/021161 WO2017213180A1 (ja) | 2016-06-09 | 2017-06-07 | 表示装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017213180A1 true JPWO2017213180A1 (ja) | 2018-12-27 |
JP6625212B2 JP6625212B2 (ja) | 2019-12-25 |
Family
ID=60579031
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018521757A Active JP6625212B2 (ja) | 2016-06-09 | 2017-06-07 | 表示装置及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US10795225B2 (ja) |
JP (1) | JP6625212B2 (ja) |
CN (1) | CN109313371B (ja) |
WO (1) | WO2017213180A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7166935B2 (ja) * | 2019-01-08 | 2022-11-08 | 株式会社ジャパンディスプレイ | 表示装置 |
JP7229789B2 (ja) * | 2019-01-22 | 2023-02-28 | 株式会社ジャパンディスプレイ | 表示装置、及び、表示装置を組み込んだ電子機器 |
US11287709B2 (en) | 2019-02-28 | 2022-03-29 | Panasonic Liquid Crystal Display Co., Ltd. | Active matrix substrate and liquid crystal display device |
CN111599823B (zh) * | 2020-05-29 | 2024-01-05 | 京东方科技集团股份有限公司 | 阵列基板及显示装置 |
CN113066796B (zh) * | 2021-03-02 | 2023-02-28 | 武汉华星光电半导体显示技术有限公司 | 显示面板、显示面板的制备方法及显示装置 |
CN114236922B (zh) * | 2021-12-06 | 2024-01-16 | 昆山龙腾光电股份有限公司 | 反射式阵列基板及制作方法、反射式显示面板 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013122752A (ja) * | 2011-12-09 | 2013-06-20 | Lg Display Co Ltd | タッチスクリーン一体型表示装置 |
US20150091014A1 (en) * | 2013-09-27 | 2015-04-02 | Lg Display Co., Ltd. | Display Device and Method of Manufacturing the Same |
JP2015108732A (ja) * | 2013-12-05 | 2015-06-11 | 三菱電機株式会社 | 薄膜トランジスタ基板およびその製造方法 |
JP2015114460A (ja) * | 2013-12-11 | 2015-06-22 | 三菱電機株式会社 | アクティブマトリックス基板およびその製造方法 |
US20150364507A1 (en) * | 2014-06-13 | 2015-12-17 | Lg Display Co., Ltd. | Display device integrated with touch screen panel and method of fabricating the same |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100443831B1 (ko) * | 2001-12-20 | 2004-08-09 | 엘지.필립스 엘시디 주식회사 | 액정표시소자의 제조 방법 |
KR101359921B1 (ko) * | 2007-03-02 | 2014-02-07 | 삼성디스플레이 주식회사 | 표시 장치 |
JP5235363B2 (ja) * | 2007-09-04 | 2013-07-10 | 株式会社ジャパンディスプレイイースト | 液晶表示装置 |
CN102667678A (zh) * | 2009-11-20 | 2012-09-12 | 夏普株式会社 | 带触摸传感器功能的挠性显示面板 |
KR101841770B1 (ko) * | 2011-09-02 | 2018-03-26 | 엘지디스플레이 주식회사 | 산화물 박막 트랜지스터를 구비한 평판 표시장치 및 그의 제조방법 |
KR101524449B1 (ko) * | 2011-12-22 | 2015-06-02 | 엘지디스플레이 주식회사 | 액정표시장치 및 그 제조방법 |
JP6045924B2 (ja) * | 2013-01-28 | 2016-12-14 | シナプティクス・ジャパン合同会社 | タッチパネル表示装置及びタッチパネルコントローラ |
JP5626739B2 (ja) | 2013-03-25 | 2014-11-19 | 株式会社ジャパンディスプレイ | 液晶表示装置 |
JP6235021B2 (ja) * | 2013-08-07 | 2017-11-22 | シャープ株式会社 | 半導体装置、表示装置および半導体装置の製造方法 |
US9098161B2 (en) * | 2013-12-20 | 2015-08-04 | Lg Display Co., Ltd. | Display device integrated with touch screen panel and method of driving the same |
KR101633654B1 (ko) | 2013-12-20 | 2016-06-27 | 엘지디스플레이 주식회사 | 터치스크린 패널 일체형 표시장치, 터치스크린 패널 일체형 표시패널, 데이터 구동 집적회로, 게이트 구동 집적회로 및 터치스크린 패널 일체형 표시장치의 구동 방법 |
KR102124970B1 (ko) | 2013-12-26 | 2020-06-19 | 엘지디스플레이 주식회사 | 터치센서 일체형 표시장치 |
CN103728804B (zh) * | 2013-12-27 | 2016-02-24 | 京东方科技集团股份有限公司 | 一种母板、阵列基板及制备方法、显示装置 |
JP6205312B2 (ja) * | 2014-06-18 | 2017-09-27 | 株式会社ジャパンディスプレイ | 液晶表示装置 |
US9703439B2 (en) * | 2014-12-26 | 2017-07-11 | Lg Display Co., Ltd. | Touch sensor integrated type display device |
TWI723984B (zh) * | 2015-03-27 | 2021-04-11 | 日商半導體能源研究所股份有限公司 | 觸控面板 |
TWI739796B (zh) * | 2016-02-12 | 2021-09-21 | 日商半導體能源硏究所股份有限公司 | 半導體裝置及電子裝置及半導體晶圓 |
-
2017
- 2017-06-07 US US16/308,423 patent/US10795225B2/en active Active
- 2017-06-07 CN CN201780035306.2A patent/CN109313371B/zh active Active
- 2017-06-07 JP JP2018521757A patent/JP6625212B2/ja active Active
- 2017-06-07 WO PCT/JP2017/021161 patent/WO2017213180A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013122752A (ja) * | 2011-12-09 | 2013-06-20 | Lg Display Co Ltd | タッチスクリーン一体型表示装置 |
US20150091014A1 (en) * | 2013-09-27 | 2015-04-02 | Lg Display Co., Ltd. | Display Device and Method of Manufacturing the Same |
JP2015108732A (ja) * | 2013-12-05 | 2015-06-11 | 三菱電機株式会社 | 薄膜トランジスタ基板およびその製造方法 |
JP2015114460A (ja) * | 2013-12-11 | 2015-06-22 | 三菱電機株式会社 | アクティブマトリックス基板およびその製造方法 |
US20150364507A1 (en) * | 2014-06-13 | 2015-12-17 | Lg Display Co., Ltd. | Display device integrated with touch screen panel and method of fabricating the same |
Also Published As
Publication number | Publication date |
---|---|
WO2017213180A1 (ja) | 2017-12-14 |
US20190258105A1 (en) | 2019-08-22 |
CN109313371A (zh) | 2019-02-05 |
US10795225B2 (en) | 2020-10-06 |
CN109313371B (zh) | 2021-09-14 |
JP6625212B2 (ja) | 2019-12-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6625212B2 (ja) | 表示装置及びその製造方法 | |
CN108255353B (zh) | 内嵌式触控显示面板 | |
CN109117016B (zh) | 显示面板与其制造方法 | |
US20180203565A1 (en) | Touch control display device and manufacturing method thereof | |
US9753590B2 (en) | Display device integrated with touch screen panel and method of fabricating the same | |
US9201533B2 (en) | Substrate for in-cell type touch sensor liquid crystal display device and method of fabricating the same | |
WO2011030583A1 (ja) | 液晶表示装置及びその製造方法 | |
JP6513197B2 (ja) | タッチパネル付き表示装置及びタッチパネル付き表示装置の製造方法 | |
WO2009081633A1 (ja) | アクティブマトリクス基板、これを備えた液晶表示装置、及びアクティブマトリクス基板の製造方法 | |
WO2017030080A1 (ja) | タッチパネル付き表示装置及びタッチパネル付き表示装置の製造方法 | |
US10775660B2 (en) | Touch-panel-equipped display device and method for producing touch-panel-equipped display device | |
JP2019028095A (ja) | 表示装置 | |
CN109416492B (zh) | 液晶显示装置 | |
JP6605146B2 (ja) | タッチパネル付き表示装置 | |
JP4007381B2 (ja) | 電気光学装置 | |
JP2018045590A (ja) | 表示装置及びその製造方法 | |
JP5582800B2 (ja) | 液晶表示装置及びその製造方法 | |
JP4798094B2 (ja) | 電気光学装置 | |
JP2009271105A (ja) | 液晶表示装置の製造方法 | |
WO2018038038A1 (ja) | タッチパネル付き表示装置 | |
CN111580315B (zh) | 有源矩阵基板和具备其的液晶显示装置 | |
JP7431793B2 (ja) | アクティブマトリクス基板、および表示パネル | |
KR101697272B1 (ko) | 액정표시장치용 어레이 기판 및 이의 제조 방법 | |
TWI551931B (zh) | 顯示器面板 | |
JP2008102230A (ja) | 電気光学装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180810 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190507 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190628 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191112 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191126 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6625212 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |