JPWO2011043058A1 - 半導体装置 - Google Patents

半導体装置 Download PDF

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Publication number
JPWO2011043058A1
JPWO2011043058A1 JP2011535278A JP2011535278A JPWO2011043058A1 JP WO2011043058 A1 JPWO2011043058 A1 JP WO2011043058A1 JP 2011535278 A JP2011535278 A JP 2011535278A JP 2011535278 A JP2011535278 A JP 2011535278A JP WO2011043058 A1 JPWO2011043058 A1 JP WO2011043058A1
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Prior art keywords
epoxy resin
semiconductor device
group
general formula
metal hydroxide
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JP2011535278A
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Japanese (ja)
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伸一 前佛
伸一 前佛
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Sumitomo Bakelite Co Ltd
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Sumitomo Bakelite Co Ltd
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    • C08K3/00Use of inorganic substances as compounding ingredients
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US8900677B2 (en) 2011-07-21 2014-12-02 Hewlett-Packard Development Company, L.P. Print medium
JP6218413B2 (ja) * 2013-03-29 2017-10-25 株式会社Subaru プレドープ剤、これを用いた蓄電デバイス及びその製造方法
CN104882386B (zh) 2014-02-27 2019-03-01 恩智浦美国有限公司 半导体器件格栅阵列封装
JP6605190B2 (ja) * 2014-05-28 2019-11-13 住友ベークライト株式会社 封止用樹脂組成物、および半導体装置
KR101689833B1 (ko) * 2015-05-19 2017-01-10 주식회사 프로텍 Bga 반도체 패키지의 전자파 차폐막 형성 방법 및 이에 사용되는 베이스 테이프
US10797025B2 (en) 2016-05-17 2020-10-06 Taiwan Semiconductor Manufacturing Company, Ltd. Advanced INFO POP and method of forming thereof
SG10201912594XA (en) 2016-05-30 2020-02-27 Hitachi Chemical Co Ltd Sealing composition and semiconductor device
DE102017121485A1 (de) * 2017-09-15 2019-03-21 Infineon Technologies Austria Ag Halbleitervorrichtung mit Kupferkorrosionsinhibitoren
KR20210000530A (ko) 2019-06-25 2021-01-05 삼성전자주식회사 칩 적층 반도체 패키지 및 그 제조 방법

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213432A (ja) * 1985-07-11 1987-01-22 Sumitomo Bakelite Co Ltd エポキシ樹脂組成物
JP2000309684A (ja) * 1999-02-25 2000-11-07 Nitto Denko Corp 半導体封止用樹脂組成物およびそれを用いた半導体装置ならびに半導体装置の製法
JP2002121260A (ja) * 1999-10-06 2002-04-23 Nitto Denko Corp 半導体封止用樹脂組成物およびそれを用いた半導体装置ならびに半導体装置の製法
JP2003082197A (ja) * 2001-09-17 2003-03-19 Sumitomo Bakelite Co Ltd エポキシ樹脂組成物及び半導体装置
JP2003292569A (ja) * 2002-03-29 2003-10-15 Sumitomo Bakelite Co Ltd エポキシ樹脂組成物及び半導体装置
JP2007023272A (ja) * 2005-06-15 2007-02-01 Hitachi Chem Co Ltd 封止用液状エポキシ樹脂組成物、電子部品装置及びウエハーレベルチップサイズパッケージ
JP2009152561A (ja) * 2007-11-29 2009-07-09 Sumitomo Bakelite Co Ltd 半導体装置並びに封止用エポキシ樹脂組成物及びその製造方法
JP2009177104A (ja) * 2007-02-20 2009-08-06 Nec Electronics Corp 半導体装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0597970A (ja) * 1991-10-07 1993-04-20 Shin Etsu Chem Co Ltd 熱硬化性樹脂組成物及び半導体装置
JPH086484B2 (ja) 1992-07-01 1996-01-24 永代機械工業株式会社 立体駐車装置
US6268662B1 (en) * 1998-10-14 2001-07-31 Texas Instruments Incorporated Wire bonded flip-chip assembly of semiconductor devices
JP3661444B2 (ja) 1998-10-28 2005-06-15 株式会社ルネサステクノロジ 半導体装置、半導体ウエハ、半導体モジュールおよび半導体装置の製造方法
EP1203792A4 (en) * 1999-02-25 2002-05-29 Nitto Denko Corp RESIN COMPOSITION FOR SEMICONDUCTOR ENCLOSURE, SEMICONDUCTOR COMPONENT OBTAINED therefrom, AND METHOD FOR THE PRODUCTION OF SEMICONDUCTOR COMPONENTS
JP3573651B2 (ja) * 1999-03-30 2004-10-06 住友ベークライト株式会社 エポキシ樹脂組成物及び半導体装置
SG97948A1 (en) 1999-10-06 2003-08-20 Nitto Denko Corp Resin composition for semiconductor encapsulation, semiconductor device comprising the same and process for the production of semiconductor device using the same
CN1286906C (zh) * 2000-09-30 2006-11-29 住友电木株式会社 环氧树脂组合物和半导体装置
US20040245320A1 (en) * 2001-10-23 2004-12-09 Mesato Fukagaya Bonding wire
MY148463A (en) * 2004-07-29 2013-04-30 Sumitomo Bakelite Co Epoxy resin composition and semiconductor device
CA2577681C (en) * 2004-08-18 2013-10-08 Kaneka Corporation Epoxy resin composition for semiconductor sealing agents and epoxy resin molding material
JP2007012776A (ja) 2005-06-29 2007-01-18 Nippon Steel Materials Co Ltd 半導体装置用ボンディングワイヤ
JP4941804B2 (ja) * 2005-03-02 2012-05-30 Dic株式会社 エポキシ樹脂組成物、その硬化物、半導体封止材料、新規フェノール樹脂、および新規エポキシ樹脂
JP4946030B2 (ja) * 2005-12-16 2012-06-06 住友ベークライト株式会社 エポキシ樹脂組成物及び半導体装置
MY158822A (en) * 2006-05-12 2016-11-15 Denka Company Ltd Ceramic powder and use thereof
JP5120266B6 (ja) * 2007-01-31 2018-06-27 富士通セミコンダクター株式会社 半導体装置及びその製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213432A (ja) * 1985-07-11 1987-01-22 Sumitomo Bakelite Co Ltd エポキシ樹脂組成物
JP2000309684A (ja) * 1999-02-25 2000-11-07 Nitto Denko Corp 半導体封止用樹脂組成物およびそれを用いた半導体装置ならびに半導体装置の製法
JP2002121260A (ja) * 1999-10-06 2002-04-23 Nitto Denko Corp 半導体封止用樹脂組成物およびそれを用いた半導体装置ならびに半導体装置の製法
JP2003082197A (ja) * 2001-09-17 2003-03-19 Sumitomo Bakelite Co Ltd エポキシ樹脂組成物及び半導体装置
JP2003292569A (ja) * 2002-03-29 2003-10-15 Sumitomo Bakelite Co Ltd エポキシ樹脂組成物及び半導体装置
JP2007023272A (ja) * 2005-06-15 2007-02-01 Hitachi Chem Co Ltd 封止用液状エポキシ樹脂組成物、電子部品装置及びウエハーレベルチップサイズパッケージ
JP2009177104A (ja) * 2007-02-20 2009-08-06 Nec Electronics Corp 半導体装置
JP2009152561A (ja) * 2007-11-29 2009-07-09 Sumitomo Bakelite Co Ltd 半導体装置並びに封止用エポキシ樹脂組成物及びその製造方法

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