JPWO2009139153A1 - 半導体部品の製造方法および半導体部品 - Google Patents
半導体部品の製造方法および半導体部品Info
- Publication number
- JPWO2009139153A1 JPWO2009139153A1 JP2010511881A JP2010511881A JPWO2009139153A1 JP WO2009139153 A1 JPWO2009139153 A1 JP WO2009139153A1 JP 2010511881 A JP2010511881 A JP 2010511881A JP 2010511881 A JP2010511881 A JP 2010511881A JP WO2009139153 A1 JPWO2009139153 A1 JP WO2009139153A1
- Authority
- JP
- Japan
- Prior art keywords
- circuit board
- semiconductor component
- manufacturing
- component according
- flux activity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
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Abstract
Description
(1)機能面に突起電極が形成された半導体ウエハと、一方面の側に半田バンプを有し他方面の側に電極パッドを有する回路基板と、を用意する工程と、
前記半導体ウエハと前記回路基板と間にフラックス活性を有する樹脂層を設けるとともに、前記フラックス活性を有する樹脂層を突き抜けて前記突起電極と前記半田バンプとが当接するように、前記半導体ウエハと前記回路基板とを接合して接合体を得る接合工程と、
前記接合体の前記電極パッドに半田材を付与する工程と、
前記接合体を切断して複数の半導体部品を得る工程と、を含む、半導体部品の製造方法。
(2)前記回路基板には、前記半導体ウエハと前記回路基板とを接合した際に、前記フラックス活性を有する樹脂層が染み出す開口部が形成されている、(1)に記載の半導体部品の製造方法。
(3)前記フラックス活性を有する樹脂層は、フィルムであり、
前記接合工程おいて、前記フィルムを前記半導体ウエハの前記機能面に貼り付けた状態で、前記半導体ウエハと前記回路基板とを接合する、(1)または(2)に記載の半導体部品の製造方法。
(4)前記フラックス活性を有する樹脂層は、フィルムであり、
前記接合工程おいて、前記フィルムを前記回路基板の前記半田バンプを有する面に貼り付けた状態で、前記半導体ウエハと前記回路基板とを接合する、(1)または(2)に記載の半導体部品の製造方法。
(5)前記回路基板が、フレキシブル回路基板である、(1)または(2)に記載の半導体部品の製造方法。
(6)前記回路基板が、リジッド回路基板である、(1)または(2)に記載の半導体部品の製造方法。
(7)前記フレキシブル回路基板の基板平面方向の熱膨張係数が、10[ppm/K]以下である、(5)に記載の半導体部品の製造方法。
(8)前記フレキシブル回路基板の基板平面方向の熱膨張係数が、4[ppm/K]以上である、(5)に記載の半導体部品の製造方法。
(9)前記リジッド回路基板の基板平面方向の熱膨張係数が、15[ppm/K]以下である、(6)に記載の半導体部品の製造方法。
(10)前記リジッド回路基板の基板平面方向の熱膨張係数が、5[ppm/K]以上である、(6)に記載の半導体部品の製造方法。
(11)前記回路基板は、支持体に複数の回路基板が貼着されてなるものである、(1)または(2)に記載の半導体部品の製造方法。
(12)前記フラックス活性を有する樹脂層は、架橋反応可能な樹脂と、フラックス活性を有する化合物とを含む樹脂組成物で構成されているものである、(1)または(2)に記載の半導体部品の製造方法。
(13)前記フラックス活性を有する化合物は、前記架橋反応可能な樹脂の硬化剤として作用するものである、(12)に記載の半導体部品の製造方法。
(14)前記フラックス活性を有する化合物は、分子中にカルボキシル基またはフェノール性水酸基を、少なくとも1つ以上有する、(12)に記載の半導体部品の製造方法。
(15)前記フラックス活性を有する化合物は、下記式(1)で記載されるものである、(12)に記載の半導体部品の製造方法。
(16)前記半田材が付与された前記電極パッドに、さらにフラックス活性を有する樹脂層を配置するものである、(1)または(2)に記載の半導体部品の製造方法。
(17)(1)または(2)に記載の半導体部品の製造方法で得られた半導体部品。
本発明の半導体部品の製造方法は、機能面に突起電極が形成された半導体ウエハと、一方面の側に半田バンプを有し他方面の側に電極パッドを有する回路基板と、を用意する工程と、上記半導体ウエハと上記回路基板と間にフラックス活性を有する樹脂層を設けるとともに、上記フラックス活性を有する樹脂層を突き抜けて上記突起電極と上記半田バンプとが当接するように、上記半導体ウエハと上記回路基板とを接合して接合体を得る接合工程と、上記接合体の前記電極パッドに半田材を付与する工程と、上記接合体を切断して複数の半導体部品を得る工程と、を含むことを特徴とする。
このように、半導体用ウエハレベルで回路基板と一括積層した後、ダイシング処理等することにより複数の半導体部品を効率良く生産することができるものである。
図1は、半導体ウエハの機能面に突起電極が形成されている状態を示す断面図である。
図1に示すように、半導体用ウエハ1の機能面11側に、複数の突起電極12が形成されている半導体用ウエハ1を用意する。
突起電極12は、例えば金バンプ、バンプの表面にニッケル・金メッキし、更に半田メッキを施した銅バンプもしくは銅ポスト、半田バンプ等を挙げることができる。これらの中でも先端を鋭くすることができる金バンプが好ましい。これにより、接合性を向上することができる。
このような突起電極12同士のピッチ(中心間距離)は、50〜300μm程度が現在多く扱われているが、これに限定されず、さらに狭いピッチでも対応することが可能である(以下、「〜」は、特に明示しない限り、上限値と下限値を含むことを表す)。
回路基板2としては、特に限定されず、リジッド回路基板、フレキシブル回路基板のいずれを用いることができるが、狭ピッチでのビア形成や経済的な観点でフレキシブル回路基板を用いることが好ましい。
回路基板2の一例としては、図2に示すように、支持基材23のビア内に半田バンプ21が形成されている。この支持基材23上に配線パターン24が形成されている。また、支持基材23の一方面がソルダーレジスト25で覆われている。
電極パッド22は、マザーボードやモジュール基板等への入出力端子となるため、例えば電極パッド22同士のピッチは、0.3〜0.8mmが現在多く扱われているが、これに限定されず、さらに狭いピッチでも対応することが可能である。
尚、電極パッド22は銅剥き出しよりも、ニッケル/金メッキを施した方が、金属拡散・金属化合物生成を抑えられる観点から望ましい。
図7(a)は、半導体ウエハ1の機能面11のレイアウトを示す。図7(b)は、回路基板2の接合部26(機能面)のレイアウトを示す。機能面11のレイアウトと接合部26のレイアウトとは、同じ配置パターンとする。配置パターンとしては、特に限定されないが、アレイ状とする。機能面11には、複数の突起電極(図示せず)が形成されている。一方、接合部26の一方面の側に複数の半田バンプ(図示せず)が形成され、他方の面側に複数の電極パッド(図示せず)が形成されている。
このとき、図7(c)(d)に示すように、回路基板2の接合部26を囲むように開口部30が形成されている。図7(c)では、接合部26の4辺に、それぞれ開口部30が形成されている。つまり、接合部26の上下左右の辺に対して略平行に4つの開口部30が形成されている。また、図7(d)では、接合部26の上下の辺に対して略平行に2つの開口部30が形成されている。この開口部30は、回路基板2の表面から裏面を貫通する。
なお、本実施形態では、フラックス活性を有する樹脂層13を半導体用ウエハ1側に、フラックス活性を有する樹脂層13のフィルムを配置したが、これに限定されず、回路基板2(回路基板2の半田バンプ21側の面)にフラックス活性を有する樹脂層13のフィルムを配置しても良い。すなわち、半導体用ウエハ1と回路基板2の間のいずれか一方の面に、フラックス活性を有する樹脂層13のフィルムが貼り付けられた状態で配置されていればよい。
フラックス活性を有する樹脂層13を構成する樹脂組成物は、例えば架橋反応可能な樹脂と、フラックス活性を有する化合物とを含んでいる。
前記架橋反応可能な樹脂としては、例えばエポキシ樹脂、オキセタン樹脂、フェノール樹脂、(メタ)アクリレート樹脂、不飽和ポリエステル樹脂、ジアリルフタレート樹脂、マレイミド樹脂等のいわゆる熱硬化性樹脂に分類されるものに加え、カルボキシル基、エポキシ基等の官能基を有する熱可塑性樹脂等も本発明の架橋反応可能な樹脂として挙げることができる。これらの中でも、硬化性と保存性、硬化物の耐熱性、耐湿性、耐薬品性に優れるエポキシ樹脂が好適に用いられる。
このフラックス活性を有する化合物として、より具体的には分子中にカルボキシル基および/またはフェノール性水酸基を少なくとも1つ以上有する化合物が挙げられ、これは液状であっても固体であっても構わない。たとえば、フラックス活性を有する化合物としては、たとえば、2価のカルボン酸が挙げられる。
他の脂肪族カルボン酸としては、蟻酸、酢酸、プロピオン酸、酪酸、吉草酸、ピバル酸カプロン酸、カプリル酸、ラウリン酸、ミリスチン酸、パルミチン酸、ステアリン酸、アクリル酸、メタクリル酸、クロトン酸、オレイン酸、フマル酸、マレイン酸、シュウ酸、マロン酸、琥珀酸等が挙げられる。
このフラックス活性を有する硬化剤としては、例えば1分子中にエポキシ樹脂等の架橋反応可能な樹脂に付加することができる少なくとも2個のフェノール性水酸基と、金属酸化膜に対してフラックス作用を示す、芳香族に直接結合したカルボキシル基を一分子中に少なくとも1個有する化合物が挙げられる。具体的には、2,3−ジヒドロキシ安息香酸、2,4−ジヒドロキシ安息香酸、ゲンチジン酸(2,5−ジヒドロキシ安息香酸)、2,6−ジヒドロキシ安息香酸、3,4−ジヒドロキシ安息香酸、没食子酸(3,4,5−トリヒドロキシ安息香酸)等の安息香酸誘導体;1,4−ジヒドロキシ−2−ナフトエ酸、3,5−ジヒドロキシ−2−ナフトエ酸、3,7−ジヒドロキシ−2−ナフトエ酸等のナフトエ酸誘導体;フェノールフタリン;およびジフェノール酸等が挙げられる。
これらのフラックス活性を有する化合物は、単独で用いても、2種以上を組み合わせて用いてもよい。
前記硬化剤としては、例えばフェノール類、アミン類、チオール類が挙げられる。架橋反応可能な樹脂としてエポキシ樹脂が用いられる場合、このエポキシ樹脂との良好な反応性、硬化時の低寸法変化および硬化後の適切な物性(例えば、耐熱性、耐湿性等)が得られるという点で、フェノール類が好適に用いられる。
前記イミダゾール化合物としては、例えばイミダゾール、2−メチルイミダゾール、2−ウンデシルイミダゾール、2−ヘプタデシルイミダゾール、1,2−ジメチルイミダゾール、2−エチルー4−メチルイミダゾール、2−フェニルイミダゾール、2−フェニルー−フェニル−4−メチルイミダゾール、1−ベンジル−2−フェニルイミダゾール、1−ベンジル−2−メチルイミダゾール、1−シアノエチル−2−メチルイミダゾール、1−シアノエチル−2−エチル−4−メチルイミダゾール、1−シアノエチル−2−ウンデシルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−シアノエチル−2−ウンデシルイミダゾリウムトリメリテイト、1−シアノエチル−2−フェニルイミダゾリウムトリメリテイト、2,4−ジアミノ−6−[2´−メチルイミダゾリル(1´)]−エチル−sトリアジン、2,4−ジアミノ−6−[2´−ウンデシルイミダゾリル(1´)]−エチル−sトリアジン、2,4−ジアミノ−6−[2´−エチル−4−メチルイミダゾリル(1´)]−エチル−sトリアジン、2,4−ジアミノ−6−[2´−メチルイミダゾリル(1´)]−エチル−sトリアジンイソシアヌル酸付加物、2−フェニルイミダゾールイソシアヌル酸付加物、2−メチルイミダゾールイソシアヌル酸付加物、2−フェニルー−フェニル−4,5−ジヒドロキシジメチルイミダゾール、2−フェニル−4−メチル−5−ヒドロキシメチルイミダゾール等が挙げられる。
融点が150℃以上のイミダゾール化合物としては、例えば2−フェニルヒドロキシイミダゾール、2−フェニル−4−メチルヒドロキシイミダゾール、2−フェニル−4−メチルイミダゾール等が挙げられる。なお、イミダゾール化合物の融点の上限に特に制限はなく、例えば樹脂層13の接着温度に応じて適宜設定することができる。
前記フィルム形成性樹脂としては、例えばフェノキシ樹脂、ポリエステル樹脂、ポリウレタン樹脂、ポリイミド樹脂、シロキサン変性ポリイミド樹脂、ポリブタジエン、ポリプロピレン、スチレン−ブタジエン−スチレン共重合体、スチレン−エチレン−ブチレン−スチレン共重合体、ポリアセタール樹脂、ポリビニルブチラール樹脂、ポリビニルアセタール樹脂、ブチルゴム、クロロプレンゴム、ポリアミド樹脂、アクリロニトリル−ブタジエン共重合体、アクリロニトリル−ブタジエン−アクリル酸共重合体、アクリロニトリル−ブタジエン−スチレン共重合体、ポリ酢酸ビニル、ナイロン、アクリルゴム等を用いることができる。これらは、単独で用いても、2種以上を組み合わせて用いてもよい。
フィルム形成性樹脂として、アクリルゴムが用いられる場合、フィルム状の樹脂層13を作製する際の成膜安定性を向上させることができる。また、樹脂層13の弾性率を低下させ、被接着物と樹脂層13間の残留応力を低減することができるため、被接着物に対する密着性を向上させることができる。
接合する条件としては、特に限定されないが、25〜175℃、1ユニット当たり0.5〜5kgfで突起電極12と半田バンプ21の位置を合わせて仮圧着(接続)をした後、半田部の接合(本接続)を得るために200〜300℃×1〜60秒間、1ユニット当たり0.1〜15kgfが好ましい。特に200〜230℃×5〜180秒間が好ましい。接合温度は半田バンプの半田種の融点に依存し、荷重は接合する端子数に依存する。
ここで、フラックス活性を有する樹脂層13を介して、突起電極12と半田バンプ21とを接合するので、半田バンプ21の表面が酸化されるのを抑制しながら(表面酸化膜を除去しながら)半田を接続することができるようになる。
この際の加熱条件は、特に限定されないが、120〜200℃×30〜180分間が好ましく、これにより、フラックス活性を有する樹脂層13が硬化することにより、突起電極12と半田バンプ21の間を封止し、接続信頼性を向上することができる。
なお、本実施形態では、接合体13を得た後、フラックス活性を有する樹脂層13を硬化させたが、これに限定されず、フラックス活性を有する樹脂層13を硬化させた後に接合体13を得る方法でも良い。
半田材としては、例えば図5に示すような半田ボール4が好ましい。これにより、他の基板等への2次実装が容易となる。
半田ボール4を付与する方法としては、例えばメッキ法、ペースト印刷法、ボール搭載法が挙げられる。
なお、ダイシングする前に、接合体3の半田ボール4が付与されている側の面にフラックス活性を有する樹脂層を配置しておくことが好ましい。これにより、2次実装での半田接続が容易となると共に、フラックス処理を省略することができ、生産性や温度サイクル性、落下試験等の2次実装後の信頼性を向上することができる。
ここで、使用するダイシングシートとしては、市販されているものをそのまま用いることができる。
1.突起電極を有する半導体用ウエハの製造
金線ボードボンディング法により、半導体用ウエハ(6inch径、250μm厚さ)上の70μmピッチのALパッドに、バンプボンダーで金スタッドバンプを形成した。金スタッドバンプの形状は、バンプ径30〜35μm、バンプ台座が15〜20μm、バンプ高さ40〜45μmであり、先端はレベリング等の処理を実施しないで鋭角な状態を残した。
銅箔の厚さが12μm、支持基材としてポリイミド(宇部日東社製 BE2508DFF、線膨張係数11ppm/K、厚さ25μm)で構成される銅張板に、レーザー加工により30μm径のビアを形成し、デスミア処理後、半田(Sn−Ag)メッキを施し、ビア内に半田バンプを形成した。
バンプ面を保護した後、銅側にレジストを貼り付け、露光、現像、エッチング、レジスト剥離することで配線パターンを形成した。その後、ソルダーレジストを印刷・塗布し、プレキュア、露光、現像、ポストキュアすることで、外部接続端子であるランドのみが露出した構造になり、ランド部にニッケル/金のメッキを施すことで半田バンプを有するフレキシブル回路基板を作製した。最後に開口部含む外形加工を金型にて実施した。
架橋反応可能な樹脂としてエポキシ樹脂(NC6000、エポキシ当量200g/eq、日本化薬社製)47.0重量%、フィルム形成性樹脂としてアクリル酸エステル共重合体(アクリル酸ブチル−アクリル酸エチル−アクリロニトリル−アクリル酸−アクリル酸ヒドロキシエチル共重合体、ナガセケムテックス社製、SG−708−6、重量平均分子量:500,000)14.6重量%とアクリル樹脂(アクリル酸−スチレン共重合体、重量平均分子量:5,500、UC−3900、東亜合成社製)14.6重量%、硬化剤として固形フェノール樹脂(PR−53647、水酸基当量104g/OH基、住友ベークライト社製)10.3重量%、硬化促進剤としてイミダゾール化合物(2P4MHZ、四国化成工業社製)0.1重量%、フラックス化合物としてフェノールフタリン12.9重量%、カップリング剤としてプロピルトリメトキシシラン(KBM303、信越化学工業社製)0.4量%、レベリング剤としてアクリルポリマー(BYK−361N、ビックケミージャパン社製)0.1重量%をメチルエチルケトンに溶解して樹脂固形分40%の樹脂ワニスを得た。
得られたワニスをポリエステルシート状に塗布し、上記溶剤が揮発する温度に適宜設定し、ワニスを乾燥させることにより、フラックス活性を有する樹脂層のシートを得た。
上述の半導体用ウエハの機能面側に、真空フィルムラミネータ(「MVLP−500/600−2A」、名機製作所製)でフラックス活性を有する樹脂層のシートを貼り付けた。真空フィルムラミネータによりフラックス活性を有する樹脂層のシートを貼り付ける際の処理条件は、120℃、0.8MPa、30秒間とした。半導体用ウエハ上に貼り付けたフラックス活性を有する樹脂層のシートの厚さは30μmであった。
次に、突起電極を有する半導体用ウエハと、半田バンプを有するフレキシブル回路基板の接合については、半田バンプと金スタッドバンプの上下位置を合わせ、プレス装置(VH1−1758)で、仮熱圧着した。仮熱圧着条件は150℃、1.0MPaとした。更に圧力を徐々に開放しながら(0.1MPa以下)、250℃まで加熱することにより、ウエハ上の金スタッドバンプと溶融したフレキシブル回路基板の半田バンプが金属形成した。更に180℃、120分間追加熱することにより、電気的にも接続された接合体(フレキシブル回路基板付きウエハ)が得られた。
得られた半導体用ウエハに半田ボールを搭載し、市販ダイシングシートのカバーフィルムを剥離して、接着フィルム面を6インチ、250μmウエハ厚の裏面に貼り付け、接合体を、ダイシングソー(DISCO製)を用いて、スピンドル回転数30,000rpm、切断速度50mm/secでチップサイズにダイシング(切断)して、複数の半導体部品を得た。
回路基板として、以下のものを用いた以外は、実施例と同様にした。
半田バンプを有するフレキシブル回路基板の支持基材として線膨張係数2.5ppm/Kのポリイミド(東洋紡製)を適用したものを用いた。
回路基板として、図6に示すような支持体5に複数の回路基板51が貼着されてなるものを用いた以外は、実施例1と同様にした。なお、この場合は開口部を有していないものを用いた。
回路基板として、以下のものを用いた以外は、実施例1と同様にした。
回路基板として銅箔の厚さ12μm、30μm厚さガラスクロス入銅張積層板(住友ベークライト社製 ELC−4785GS、線膨張係数9ppm/K)を適用した。
フラックス活性を有する樹脂層として、以下のものを用いた以外は、実施例1と同様にした。
架橋反応可能な樹脂としてエポキシ樹脂(NC6000(エポキシ当量200g/eq、日本化薬社製)47.4重量%、フィルム形成性樹脂としてアクリル酸エステル共重合体(アクリル酸ブチル−アクリル酸エチル−アクリロニトリル−アクリル酸−アクリル酸ヒドロキシエチル共重合体、ナガセケムテックス社製、SG−708−6、重量平均分子量:500,000)14.6重量%とアクリル樹脂(アクリル酸−スチレン共重合体、重量平均分子量:5,500、UC−3900、東亜合成社製)14.6重量%、硬化剤として固形フェノール樹脂(PR−53647、水酸基当量104g/OH基、住友ベークライト社製)16.4重量%、硬化促進剤としてイミダゾール化合物(2P4MHZ、四国化成工業社製)0.1重量%、フラックス化合物としてセバシン酸6.4重量%、カップリング剤としてプロピルトリメトキシシラン(KBM303、信越化学工業社製)0.4量%レベリング剤としてアクリルポリマー(BYK−361N、ビックケミージャパン社製)0.1重量%をメチルエチルケトンに溶解して樹脂固形分40%の樹脂ワニスを得た。得られたワニスをポリエステルシート状に塗布し、上記溶剤が揮発する温度に適宜設定し、ワニスを乾燥させることにより、フラックス活性を有する樹脂層のシートを得た。
比較例としてフリップチップCSP(チップサイズパッケージ)を作製した。
半導体用ウエハ(サイズ:6インチ、厚さ350μm)上に感光性ポリイミド(住友ベークライト社製 CRC−8300)をスピンコータにより、塗布し、ALパッドを露光・現像・硬化することでALパッドが開口させ、開口部にニッケルの無電解メッキ、ついで金の無電解メッキを施し、半田ボールを搭載し、チップサイズにダイシングした。
次に、半田ボールが搭載されたのと同じ位置に端子を有するリジッド基板(アーム電子社製)にフリップチップボンダーを用いて、前述した半田ボールが搭載されたチップと基板の端子を接合した。尚、リジット基板表側の端子にはプレソルダーを印刷により形成し、接合前に上下半田の半田酸化膜をフラックスにより除去した。
接合後、フラックスを洗浄し、接合部のギャップへキャピラリーアンダーフィル(住友ベークライト社製、CRP−4152D)を流し込み、硬化した。リジット基板裏側には実装基板へ実装するためのエリア端子が形成されており、表側端子と裏側の端子は銅の回路で接続されている。エリア端子に半田ボールを搭載することでフリップチップタイプのCSPを得た。
比較例として再配線タイプのウエハレベルCSPを作製した。
半導体用ウエハ(サイズ:6インチ、厚さ450μm)上に感光性ポリイミド(住友ベークライト社製 CRC−8300)をスピンコータにより、塗布し、ALパッドを露光・現像・硬化することでALパッドが開口させ、チタンスパッタリングにより厚さが500オングストロームのチタン膜を形成し、更に銅スパッタリングにより、3,000オングストロームの銅膜を重ねた後、レジストを塗布し、チップの端子から、実装基板の外部接続エリア端子に引き回すための回路パターンを露光、現像処理した後、回路パターン部分のみ銅メッキを施した。その後、レジストを剥離し、銅膜及びチタン膜をエッチング処理することでウエハ上に銅の回路パターンを形成した。更に絶縁層として、感光性ポリイミド(住友ベークライト社製 CRC−3900)をその上再度塗布し、ランドパターンを露光・現像・硬化することで外部端子を形成し、ランド部分をニッケルメッキ、次いで金メッキした後、ランド部分に半田ボールを搭載し、チップサイズにダイシングすることで半導体部品を得た。
比較例1の生産工数を基準(100)として、他の実施例および比較例の生産性を比較した。各符号は、以下の通りである。
◎:比較例1の生産工数を基準(100)として、生産工数が40以上、60未満であった。
○:比較例1の生産工数を基準(100)として、生産工数が60以上、80未満であった。
△:比較例1の生産工数を基準(100)として、生産工数が80以上、100未満であった。
×:比較例1の生産工数を基準(100)として、生産工数が100以上であった。
接続信頼性は、得られた半導体部品を温度サイクル試験後に導通がとれるかどうかで評価した。
具体的には、半導体素子、基板間の接続抵抗を、デジタルマルデジタルマルチメータにより測定した。測定は半導体部品を作製後と、−65℃で1時間および150℃で1時間の温度サイクル1,000サイクル後の両方を測定した。各符号は、以下の通りである。
◎:20/20個の半導体部品で導通が取れた。
○:18〜19/20個の半導体部品で導通が取れた。
△:16〜17/20の半導体部品で導通が取れた。
×:16以下/20の半導体部品で導通が取れた。
耐リフロークラック性は、得られた半導体部品を85℃、相対湿度85%の恒温恒湿槽にて168時間、吸湿処理した後、速やかにリフロー装置を用いてリフロー処理(Max260度10sec)を行い、超音波探傷機(SAT)にて内部剥離の有無を確認した。尚、処理についてはJEDECの標準に準じた。各符号は、以下の通りである。n数は20とした。
◎:処理後、内部剥離が発生なし
×:処理後、内部剥離発生あり
また、実施例1〜5で得られた半導体部品は、接続信頼性および耐リフロークラック性にも優れていた。
Claims (17)
- 機能面に突起電極が形成された半導体ウエハと、一方面の側に半田バンプを有し他方面の側に電極パッドを有する回路基板と、を用意する工程と、
前記半導体ウエハと前記回路基板と間にフラックス活性を有する樹脂層を設けるとともに、前記フラックス活性を有する樹脂層を突き抜けて前記突起電極と前記半田バンプとが当接するように、前記半導体ウエハと前記回路基板とを接合して接合体を得る接合工程と、
前記接合体の前記電極パッドに半田材を付与する工程と、
前記接合体を切断して複数の半導体部品を得る工程と、を含む、半導体部品の製造方法。 - 前記回路基板には、前記半導体ウエハと前記回路基板とを接合した際に、前記フラックス活性を有する樹脂層が染み出す開口部が形成されている、請求項1に記載の半導体部品の製造方法。
- 前記フラックス活性を有する樹脂層は、フィルムであり、
前記接合工程おいて、前記フィルムを前記半導体ウエハの前記機能面に貼り付けた状態で、前記半導体ウエハと前記回路基板とを接合する、請求項1または2に記載の半導体部品の製造方法。 - 前記フラックス活性を有する樹脂層は、フィルムであり、
前記接合工程おいて、前記フィルムを前記回路基板の前記半田バンプを有する面に貼り付けた状態で、前記半導体ウエハと前記回路基板とを接合する、請求項1または2に記載の半導体部品の製造方法。 - 前記回路基板が、フレキシブル回路基板である、請求項1または2に記載の半導体部品の製造方法。
- 前記回路基板が、リジッド回路基板である、請求項1または2に記載の半導体部品の製造方法。
- 前記フレキシブル回路基板の基板平面方向の熱膨張係数が、10[ppm/K]以下である、請求項5に記載の半導体部品の製造方法。
- 前記フレキシブル回路基板の基板平面方向の熱膨張係数が、4[ppm/K]以上である、請求項5に記載の半導体部品の製造方法。
- 前記リジッド回路基板の基板平面方向の熱膨張係数が、15[ppm/K]以下である、請求項6に記載の半導体部品の製造方法。
- 前記リジッド回路基板の基板平面方向の熱膨張係数が、5[ppm/K]以上である、請求項6に記載の半導体部品の製造方法。
- 前記回路基板は、支持体に複数の回路基板が貼着されてなるものである、請求項1または2に記載の半導体部品の製造方法。
- 前記フラックス活性を有する樹脂層は、架橋反応可能な樹脂と、フラックス活性を有する化合物とを含む樹脂組成物で構成されているものである、請求項1または2に記載の半導体部品の製造方法。
- 前記フラックス活性を有する化合物は、前記架橋反応可能な樹脂の硬化剤として作用するものである、請求項12に記載の半導体部品の製造方法。
- 前記フラックス活性を有する化合物は、分子中にカルボキシル基またはフェノール性水酸基を、少なくとも1つ以上有する、請求項12に記載の半導体部品の製造方法。
- 前記半田材が付与された前記電極パッドに、さらにフラックス活性を有する樹脂層を配置するものである、請求項1または2に記載の半導体部品の製造方法。
- 請求項1または2に記載の半導体部品の製造方法で得られた半導体部品。
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-
2009
- 2009-05-13 JP JP2010511881A patent/JP5682308B2/ja not_active Expired - Fee Related
- 2009-05-13 WO PCT/JP2009/002076 patent/WO2009139153A1/ja active Application Filing
- 2009-05-13 EP EP09746360A patent/EP2296175A4/en not_active Withdrawn
- 2009-05-13 US US12/990,220 patent/US8247270B2/en not_active Expired - Fee Related
- 2009-05-13 CN CN2009801176535A patent/CN102027584B/zh not_active Expired - Fee Related
- 2009-05-13 KR KR1020107024918A patent/KR20110010718A/ko not_active Application Discontinuation
- 2009-05-15 TW TW098116117A patent/TW201005814A/zh unknown
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Publication number | Publication date |
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TW201005814A (en) | 2010-02-01 |
WO2009139153A1 (ja) | 2009-11-19 |
CN102027584A (zh) | 2011-04-20 |
US8247270B2 (en) | 2012-08-21 |
JP5682308B2 (ja) | 2015-03-11 |
EP2296175A4 (en) | 2012-02-01 |
CN102027584B (zh) | 2013-03-27 |
EP2296175A1 (en) | 2011-03-16 |
US20110037174A1 (en) | 2011-02-17 |
KR20110010718A (ko) | 2011-02-07 |
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