JPS6380888A - 洗浄装置 - Google Patents

洗浄装置

Info

Publication number
JPS6380888A
JPS6380888A JP61224709A JP22470986A JPS6380888A JP S6380888 A JPS6380888 A JP S6380888A JP 61224709 A JP61224709 A JP 61224709A JP 22470986 A JP22470986 A JP 22470986A JP S6380888 A JPS6380888 A JP S6380888A
Authority
JP
Japan
Prior art keywords
cleaning
workpiece
unit
work
supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61224709A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0446195B2 (enrdf_load_stackoverflow
Inventor
土田　重則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SpeedFam Co Ltd
Original Assignee
SpeedFam Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SpeedFam Co Ltd filed Critical SpeedFam Co Ltd
Priority to JP61224709A priority Critical patent/JPS6380888A/ja
Publication of JPS6380888A publication Critical patent/JPS6380888A/ja
Publication of JPH0446195B2 publication Critical patent/JPH0446195B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP61224709A 1986-09-22 1986-09-22 洗浄装置 Granted JPS6380888A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61224709A JPS6380888A (ja) 1986-09-22 1986-09-22 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61224709A JPS6380888A (ja) 1986-09-22 1986-09-22 洗浄装置

Publications (2)

Publication Number Publication Date
JPS6380888A true JPS6380888A (ja) 1988-04-11
JPH0446195B2 JPH0446195B2 (enrdf_load_stackoverflow) 1992-07-29

Family

ID=16818013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61224709A Granted JPS6380888A (ja) 1986-09-22 1986-09-22 洗浄装置

Country Status (1)

Country Link
JP (1) JPS6380888A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0227722A (ja) * 1988-06-29 1990-01-30 Samsung Electron Co Ltd 半導体製造用のウェーハ洗浄装置
JPH02197119A (ja) * 1989-01-26 1990-08-03 Tel Sagami Ltd 熱処理炉用基板保持具の搬送装置
JPH0596254A (ja) * 1990-05-07 1993-04-20 Haneda Seisakusho:Kk 超音波洗浄装置並びに該装置に用いる洗浄槽
JPH06106142A (ja) * 1992-09-30 1994-04-19 Yoshihide Shibano 洗浄装置
JP2003086555A (ja) * 2001-09-10 2003-03-20 Mimasu Semiconductor Industry Co Ltd ウェーハの表面処理装置
JP2011077152A (ja) * 2009-09-29 2011-04-14 Dainippon Screen Mfg Co Ltd 基板処理装置
KR101331022B1 (ko) * 2012-03-08 2013-11-19 주식회사 세림지엠티 하우징 세척기
JP2022077021A (ja) * 2020-11-10 2022-05-20 株式会社スギノマシン 処理システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868933A (ja) * 1981-10-21 1983-04-25 Hitachi Ltd 自動洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868933A (ja) * 1981-10-21 1983-04-25 Hitachi Ltd 自動洗浄装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0227722A (ja) * 1988-06-29 1990-01-30 Samsung Electron Co Ltd 半導体製造用のウェーハ洗浄装置
JPH02197119A (ja) * 1989-01-26 1990-08-03 Tel Sagami Ltd 熱処理炉用基板保持具の搬送装置
JPH0596254A (ja) * 1990-05-07 1993-04-20 Haneda Seisakusho:Kk 超音波洗浄装置並びに該装置に用いる洗浄槽
JPH06106142A (ja) * 1992-09-30 1994-04-19 Yoshihide Shibano 洗浄装置
JP2003086555A (ja) * 2001-09-10 2003-03-20 Mimasu Semiconductor Industry Co Ltd ウェーハの表面処理装置
JP2011077152A (ja) * 2009-09-29 2011-04-14 Dainippon Screen Mfg Co Ltd 基板処理装置
KR101331022B1 (ko) * 2012-03-08 2013-11-19 주식회사 세림지엠티 하우징 세척기
JP2022077021A (ja) * 2020-11-10 2022-05-20 株式会社スギノマシン 処理システム

Also Published As

Publication number Publication date
JPH0446195B2 (enrdf_load_stackoverflow) 1992-07-29

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