JPH0419918B2 - - Google Patents

Info

Publication number
JPH0419918B2
JPH0419918B2 JP22471086A JP22471086A JPH0419918B2 JP H0419918 B2 JPH0419918 B2 JP H0419918B2 JP 22471086 A JP22471086 A JP 22471086A JP 22471086 A JP22471086 A JP 22471086A JP H0419918 B2 JPH0419918 B2 JP H0419918B2
Authority
JP
Japan
Prior art keywords
workpiece
cleaning
wiping
unit
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP22471086A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6380890A (ja
Inventor
Shigenori Tsuchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Speedfam Corp
Original Assignee
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Speedfam Corp filed Critical Speedfam Corp
Priority to JP22471086A priority Critical patent/JPS6380890A/ja
Publication of JPS6380890A publication Critical patent/JPS6380890A/ja
Publication of JPH0419918B2 publication Critical patent/JPH0419918B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP22471086A 1986-09-22 1986-09-22 洗浄装置 Granted JPS6380890A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22471086A JPS6380890A (ja) 1986-09-22 1986-09-22 洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22471086A JPS6380890A (ja) 1986-09-22 1986-09-22 洗浄装置

Publications (2)

Publication Number Publication Date
JPS6380890A JPS6380890A (ja) 1988-04-11
JPH0419918B2 true JPH0419918B2 (enrdf_load_stackoverflow) 1992-03-31

Family

ID=16818031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22471086A Granted JPS6380890A (ja) 1986-09-22 1986-09-22 洗浄装置

Country Status (1)

Country Link
JP (1) JPS6380890A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2597534B2 (ja) * 1994-04-13 1997-04-09 産電子工業株式会社 各種記録カード連続搬送自動洗浄拭き取り装置

Also Published As

Publication number Publication date
JPS6380890A (ja) 1988-04-11

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