JPS6380890A - 洗浄装置 - Google Patents
洗浄装置Info
- Publication number
- JPS6380890A JPS6380890A JP22471086A JP22471086A JPS6380890A JP S6380890 A JPS6380890 A JP S6380890A JP 22471086 A JP22471086 A JP 22471086A JP 22471086 A JP22471086 A JP 22471086A JP S6380890 A JPS6380890 A JP S6380890A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- cleaning
- wiping
- drying
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 71
- 238000001035 drying Methods 0.000 claims description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 22
- 239000007788 liquid Substances 0.000 description 11
- 239000000758 substrate Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000003599 detergent Substances 0.000 description 3
- 239000011120 plywood Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22471086A JPS6380890A (ja) | 1986-09-22 | 1986-09-22 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22471086A JPS6380890A (ja) | 1986-09-22 | 1986-09-22 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6380890A true JPS6380890A (ja) | 1988-04-11 |
| JPH0419918B2 JPH0419918B2 (enrdf_load_stackoverflow) | 1992-03-31 |
Family
ID=16818031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22471086A Granted JPS6380890A (ja) | 1986-09-22 | 1986-09-22 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6380890A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07282315A (ja) * | 1994-04-13 | 1995-10-27 | San Denshi Kogyo Kk | 各種記録カード自動洗浄装置 |
-
1986
- 1986-09-22 JP JP22471086A patent/JPS6380890A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07282315A (ja) * | 1994-04-13 | 1995-10-27 | San Denshi Kogyo Kk | 各種記録カード自動洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0419918B2 (enrdf_load_stackoverflow) | 1992-03-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9144881B2 (en) | Polishing apparatus and polishing method | |
| CN103962941B (zh) | 基板的背面的研磨方法及基板处理装置 | |
| KR20030062222A (ko) | 웨이퍼 엣지 연마시스템 | |
| US20200066510A1 (en) | Substrate processing device, substrate processing method, and storage medium storing program for causing computer to execute method for controlling substrate processing device | |
| JP2001096245A (ja) | 洗浄方法および洗浄装置 | |
| JPS6380888A (ja) | 洗浄装置 | |
| KR100721595B1 (ko) | 글래스 패드의 세정장치 | |
| JPS6380890A (ja) | 洗浄装置 | |
| JP4089837B2 (ja) | スピンナー装置 | |
| JPWO2019138881A1 (ja) | 洗浄装置、洗浄方法及びコンピュータ記憶媒体 | |
| JP3448844B2 (ja) | 基板洗浄装置 | |
| JP2801489B2 (ja) | リングフレーム自動洗浄装置 | |
| JP2000107713A (ja) | ディスク用カセットの洗浄装置 | |
| JP3320048B2 (ja) | ワーク加工システム | |
| JP2830102B2 (ja) | ディスク洗浄装置 | |
| JP2000111254A (ja) | ディスク用カセットの乾燥装置 | |
| US5826292A (en) | Disk cleaning and drying apparatus | |
| JPH0422411Y2 (enrdf_load_stackoverflow) | ||
| JP3883256B2 (ja) | ポリッシング装置 | |
| JP3537875B2 (ja) | 基板洗浄装置 | |
| JPS59166444A (ja) | 工作機械による自動加工ラインの切粉除去装置 | |
| JPS5845851A (ja) | ウエハの研削，搬送および洗滌方法ならびにその装置 | |
| JPS61249582A (ja) | 洗浄装置 | |
| JPH0125137B2 (enrdf_load_stackoverflow) | ||
| JP2003273058A (ja) | スクラブ洗浄装置におけるブラシクリーニング方法及び処理システム |