JPS6380888A - Washer - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a cleaning device suitable for cleaning workpieces such as semiconductor wafers, magnetic disk substrates, optical disk substrates, and other electrical and mechanical parts. More specifically, the present invention relates to a unitized cleaning device.

[Prior Art] As a cleaning device for cleaning this type of workpiece, an integrated type in which a workpiece supply section, a cleaning section, a drying section, and a conveyance section are arranged horizontally in a row has been known (for example, Jikosho 5
2-18594).

However, in such conventional cleaning equipment, the above-mentioned parts are integrated into one machine body, so the cleaning part and drying part can be increased or decreased, rearranged, etc. freely depending on the type of workpiece, cleaning method, etc. If this is not possible and the type of workpiece or cleaning method is different, a different cleaning device suitable for the workpiece must be used.

There are some models that allow only the number of cleaning tanks to be increased or decreased, but because the length of the transport section changes depending on the increase or decrease, it is necessary to prepare a transport mechanism that matches the length each time.

[Points to be solved by the invention] The problem of the present invention is that it is possible to easily increase/decrease or rearrange processes such as cleaning and drying depending on the type of workpiece, cleaning method, etc. An object of the present invention is to provide a cleaning device that can automatically attach a conveyance mechanism of a predetermined length according to the amount of time required.

[Means for solving the problems] In order to solve the above problems, the cleaning device of the present invention has the following features:
The work supply, cleaning, drying, and take-out processes are each unitized and each unit is separably connected, and each unit has a rail that can be connected to each other by connecting them. In addition to providing each member, each unit except the supply unit or the take-out unit is provided with a carrier for transporting the workpiece so as to be movable along the rail member, and these carriers are arranged with constant intervals between each carrier. It is characterized in that it is connected to a driving means that maintains and drives synchronously.

[Operation] First, the number, type, arrangement order, etc. of each unit are determined according to the type of workpiece to be cleaned, the cleaning method, etc., and the units are connected in a horizontal line. Through this connection, the rail members of each unit are connected together to form a wooden rail. At the same time, by connecting the connecting members to each other, each carrier is also integrally connected at regular intervals.

The work to be cleaned is sequentially sent to the next process by each conveyor that is synchronously driven by the drive means, and predetermined cleaning is performed during each process.

[Example] Hereinafter, an example of the present invention will be described in detail based on the drawings.

The cleaning device shown in FIGS. 1 and 2 is suitable for cleaning a disk-shaped workpiece 1 (see FIG. 5) having a center hole 1a, such as a magnetic disk substrate or an optical disk substrate. This is an example of a case in which a supply unit 2 supplies an uncleaned workpiece 1, and first and second cleaning units (3, 4) that clean the supplied workpiece 1 with a brush. It consists of a drying unit 5 that performs final cleaning and drying of the work 1 after brush cleaning, and a take-out unit 6 that takes out and stores the work 1 after drying. pressure g1
They are arranged in a horizontal row so that a is equal and are separably connected.

The supply unit 2 is inserted into and engaged with the center hole la of the workpiece 1 which is vertically housed in the container 10 which has been carried to the loading position by a transfer means (not shown), and lifts the workpiece 1 one by one. Lifting arm 1 that can move up and down
1 and two grooved roller-shaped clamping pieces 13 that are attached to a base 15 that can freely move back and forth along a guide 14 so as to be openable and closable with respect to each other, and that clamp the outer peripheral surface of the workpiece 1 lifted by the lifting arm 11. , 13, and a pair of upper and lower supply arms 12.12 provided in front of the supply arms 12.12 to receive the work l from the supply arms 12.12 and transport it to the adjacent first cleaning unit 3. It includes a carrier 16 and a rail member 17 that guides the movement of the carrier 16.

As can be seen from FIG. 4, the carrier 16 is moved toward and away from a plywood 18 movably mounted on a rail member 17 using a pair of left and right clamping arms 21, 21 with their base ends as fulcrums. These clamping arms 21.
21 and two grooved roller-shaped clamping pieces 22, 2, respectively.
2 is attached, and by rotating the clamping arm 21.21, the outer periphery of the workpiece 1 is clamped between the clamping pieces 22.22.Thus, the supply arm 12.12 The arm 21.2 holds the work l from
1 receives the data, as shown in FIG.
Since the clamping pieces 13.13 of the supply arm 12.12 clamp the workpiece 1 from above and below, their clamping positions do not compete with each other.

Furthermore, the rail member 17 extends to the end of the supply unit 2 on the first cleaning unit 3 side, and can be interconnected with the rail member 36 when the first cleaning unit 3 is connected. ing.

The first cleaning unit 3 provided adjacent to the supply unit 2 cleans the workpiece 1 using detergent, and as specifically shown in FIG. 3, it has a door 30a that opens and closes automatically.
In the cleaning chamber 30, there is a support rotation shaft 3 that vertically supports and rotates the work l.
1, a brush mechanism 32 for cleaning the workpiece 1, and a cleaning liquid supply nozzle 33.33 (
6) and a transfer arm 34.34 that transfers the workpiece 1 between the support rotation shaft 31 and the transfer arm 34.34 that transfers the workpiece 1 to the front of the cleaning chamber 30.
5, and a rail member 36 for guiding the movement of the carrier 35.

The support rotation shaft 31 is horizontally supported by a bearing member 37 on the rear wall 30b of the cleaning chamber 30, and the rear end of the support rotation shaft 31 is connected to a drive chamber 38 defined behind the cleaning chamber 30.
It projects inward and is connected to a motor 40 by a belt 39. Moreover, at the tip of the support rotation shaft 31,
As is clear from FIG. 6, a chuck part 41 is formed in which a plurality of claws 41a can be freely expanded and contracted in the radial direction of the rotating shaft 31, and the chuck part 41 is inserted into the center hole la of the workpiece 1 and expanded. By opening it, the work 1 is supported.

On the other hand, as is clear from FIG. 3, the brush mechanism 32 has a support arm 45 provided in the cleaning chamber 30 so as to be rotatable about a pivot 44 between a cleaning position and a standby position. A pair of brush arms 4 are attached to the support shaft 47 at the tip.
8 and 48 are attached to be swingable around the core skin tdI47 and movable in directions toward and away from each other, and these brush arms 4
Disk-shaped brushes 50 and 50 are rotatably attached to the pair of brush arms 48 and 48, respectively.
The swinging and movement of the brushes 8 in the approaching and separating directions are performed by a driving means (not shown) attached to the support arm 45, and the driving rotation of the brushes 50 and 50 is as follows.
The gear 52a is driven by the drive shaft 51 passing through the support @47.
~52c.

Therefore, the brush arms 48, 48 are moved to sandwich the workpiece 1 between the two brushes 50, 50, and the brush 50.
．． 50 rotation and the brush arm 48 centered on the support shaft 47
, 48, the workpiece 1
cleaning is performed.

The brush 50.50 is connected to the substrate 5, as shown in FIG.
It is constructed by attaching a large number of wiping pieces 50b made of a sponge-like member or a male-like member to the opposing surface of 0a.

Further, the nozzles 33, 33, as shown in FIG.
Two pumps are provided diagonally above the work surface of the workpiece 1 supported by the support rotation shaft 31, and detergent is supplied from one of them and pure water is supplied from the other.

Furthermore, as is clear from FIG. t51 and FIG. The transfer arms 34 and 34 are each provided with two grooved roller-shaped clamping pieces 58 and 58 at the tips of the delivery arms 34 and 34, respectively, for clamping the outer periphery of the workpiece 1. 12. Similarly to 12, the work l can be held from above and below.

Moreover, since the conveyance body 35 has substantially the same configuration as the conveyance body 16 in the supply unit 2, the same parts are given the same reference numerals and the explanation thereof will be omitted.

On the other hand, the rail member 36 is connected to the rail members 17 and 3 of the supply unit 2 and the second cleaning unit 4 located on both sides thereof.
6, the width is approximately the same as the width of the cleaning unit 3.

Further, the second cleaning unit 4 cleans the workpiece 1 using only pure water, and is different from the first cleaning unit 3 described above.
Mechanism 6 for wiping off cleaning liquid attached to the work l by the conveyor 60
1 and two cleaning liquid supply nozzles 33
．． 33 is disposed obliquely above the workpiece 1 in its axial direction, as shown in FIG. 8, and pure water is supplied from both of them. The basic configuration is substantially the same. Therefore, regarding the basic configuration, the same parts are given the same reference numerals and the explanation thereof will be omitted.

- The wiping mechanism 61 wipes the center hole of the work 1 while transporting the cleaned work 1 to the next drying unit 5.
This is to wipe off the cleaning liquid that has adhered to the area near a, and as specifically shown in FIGS. (These table units)
61a, 61b are placed on plates 62a, 62b mounted on plywood 18, and both ends are placed on winding rollers 64a, 64.
Wiping tapes 63a and Ei3b are arranged around the supply rollers [i5a and 65b, and intermediate positions are wound around a plurality of guide rollers 66a and 66b, and the wiping tapes 63a and Ei3b are Pressers 67a and Ei7b to be pressed against the work l and cylinder 68 for pressing them
The first tape unit 61a is fixed on the base plate 18, and the second tape unit 61a is fixed on the base plate 18.
The tape unit 61b drives the wiping tape 63b as shown in FIG. 9 by a driving means such as a cylinder (not shown).
is rotatably attached to a wiping position where it faces the other wiping tape 63a and a standby position where the wiping tape 63b stands up as shown in FIG. Normally, it is rotatably held at this standby position. In addition,
In FIG. 2, the second table unit 61b is shown rotated to the wiping position for clarity.
Actually, in this state, the second tape unit 61b is in the standby position.

Note that the pressing surfaces of the pressers 67a and 67b are
It is also possible to form a central hole 1a or a groove 1b (FIG. 5) in a shape that matches the uneven shape of the surface.

Providing such a wiping mechanism 61 on the transport body 60 not only saves space compared to providing a dedicated wiping mechanism installation space, but also makes it possible to wipe the workpiece 1 while it is being transported. By doing so, it will also lead to a reduction in work time. In addition, by wiping off the cleaning liquid that has adhered to the part of the work l near the center hole 1a, in the next drying process, the cleaning liquid that has adhered to the part of the workpiece l that is close to the center hole 1a will flow down the surface of the workpiece due to rotation of the work. This prevents it from scattering around and causing stains.

As shown in FIGS. 1 and 2, the drying unit 5 disposed adjacent to the second washing unit 4 has a drying chamber 70 separated from the others. A support rotation shaft 71 for vertically supporting and rotating the workpiece 1, supply nozzles 72 and 72 for supplying warm pure water and cold pure water for cleaning to both sides of the rotating workpiece 1, and preventing water from scattering. A cover 73 and a transfer arm 74 for the work 1 are provided, and a transport body 75 and a rail member 7 are provided in front of the drying chamber 70.
6 are arranged.

Since the support rotation jd+71 has the same structure as the support rotation shaft 31 in the cleaning units 3 and 4, corresponding parts are given the same reference numerals as those in the cleaning units 3 and 4, and a description thereof will be omitted.

In addition, as shown in FIG.
It is disposed so as to be movable in the radial direction of the signal surface, and performs final cleaning by first supplying hot pure water and then cold pure water to the signal surface. In this case, separate supply nozzles may be provided for warm pure water and cold pure water.

Further, the cover 73 is disposed so as to be movable in the axial direction of the support rotating shaft 71, and moves forward to cover the workpiece 1 when finishing cleaning and drying it. As is clear from FIG. 11, a large number of inclined shielding plates 78 are provided circumferentially at regular intervals, and the workpiece l
This prevents the cleaning liquid that has dispersed and collided with the cover 73 from rebounding and adhering to the workpiece 1.

Also, the delivery arm 74 and the transport body 75. The rail member 76 has substantially the same construction as that of the first cleaning unit 3.

A take-out unit 6 disposed adjacent to the drying unit 5 sequentially stores the dried workpieces 1 into a container 10 set at an unloading position. and a receiving arm 81.81 and a storage arm 82 having the same configuration as the lifting arm 11, and a rail member 83 is disposed in front of the receiving arm 81.81.

Each of the units 2 to 6 is configured so that the process center pressures Ma are equal to each other, and the transport bodies 16, 35 . Go, 75 are connected by a connecting member 23 provided between them at an interval equal to the distance a between the process centers.

A drive source 84 (FIG. 1) such as a cylinder for driving these conveyors is provided in the supply unit 2, and
The drive source 84 drives the conveyors 16, 35, 60° 75 synchronously back and forth by the process center pressure #a, and the workpiece 1 is connected to the conveyor 16 of the supply unit 2.
are transported to adjacent units one after another. That is, the connection member 23 and the drive rA84 Tony Yotte,
A driving means is configured to drive the transport bodies 1G, 35, 60.75 synchronously at regular intervals.

As the drive means for the above-mentioned conveyance bodies, it is also possible to use a type that drives them while electrically synchronizing them.

Note that 79 in FIG. 1 is a clean unit that is provided in each of the cleaning chamber 30 and the drying chamber 70 to remove dust from each chamber and maintain them in a highly clean state. Such a lean unit can be similarly provided in the take-out unit 6.

Next, the operation of the cleaning device having the above configuration will be explained.

First, the number, type, arrangement order, etc. of each unit are determined according to the type of workpiece 1 to be cleaned, the cleaning method, etc., and the units are connected in a horizontal line. With this connection, each unit 2
-6 rail members 17.36°36.76.88 are connected together to form a single rail, and each carrier 1
6, 35, 60.75 are also spaced at a constant interval a by the connecting member 23.
are integrally connected.

In the supply unit 2, the unwashed workpiece 1 lifted from the container IO by the lifting arm 11 is transferred to the supply arm 12.
．． 12 to the conveyor 16, this work l
is conveyed to the first cleaning unit 3 by the conveyor 16 and supplied to the support rotation shaft 31 by the transfer arm 34. At this time, the door 30a of the cleaning chamber 30 is open. After this m30a is closed, the workpiece 1 held on the support rotating shaft 31 is held between the pair of brushes 50 and 50 in the brush mechanism 32 while being rotated at high speed, and is supplied from the cleaning liquid supply nozzle 33. At this time, each carrier has returned to its original position.

The workpiece 1 that has been cleaned is placed in the cleaning room 30 with the door 30a open.
After being carried out by the transfer arm 34 and handed over to the carrier 35, it is sent to the next second cleaning unit 4 by the carrier 35, where it is similarly cleaned with pure water.

The workpiece 1 that has been cleaned with pure water is transferred to the transfer arm 34
The tape is then transferred to the conveyor 60 and sent to the drying unit 5, but during the conveyance, water adhering to the area near the center hole 1a is removed from the two tape units in the wiping mechanism 61).
61a, 61b /7'-retape 63a, 63b
wiped away by. That is, in the middle of the above-mentioned conveyance, the first
The second table unit (61b) which was in the standby position shown in Fig. 0 rotates to the wiping position shown in Fig. 9, and at the same time the press cylinder 68a
, 68b are activated to press the pusher 67a.

Wipe tapes 63a, 63b to advance 67b.
is brought into pressure contact with the workpiece 1 and wiping is performed.

When the workpiece 1 is transferred to the support rotation shaft 71 by the transfer arm 74 and held, a force /<-73 moves forward and covers the workpiece 1, and hot pure water is supplied from the nozzle 72 to both sides of the rotating workpiece l. and cold pure water are supplied over time to perform final cleaning, and at the same time, the water is blown off by high-speed rotation to dry it. As shown in FIG. 11, the hot pure water and cold pure water are supplied to the area outside the area where the wiping has been performed while moving the /zuru 72 in the radial direction from the inside to the outside of the workpiece 1. This removes surfactant and the like remaining on the signal surface.

The work 1 that has been finished with the final cleaning and drying is sent to the take-out unit 6 by the conveyor 75, and then transferred to the receiving arm 8.
1.81 to the storage arm 82, and then sequentially stored in the container 10.

Note that the series of operations described above is automatically controlled by a microcomputer.

[Effects of 371 Light] According to the present invention having the above configuration, each process is unitized, each unit is provided with a rail member that can be connected to each other, and conveyed to other units except for one unit located at the end. Not only is it possible to easily increase or decrease the number of processes or replace them depending on the type of workpiece or cleaning method, etc., but also it is possible to automatically adjust the conveyance mechanism to the corresponding length by simply connecting each unit. can be attached to.

[Brief explanation of the drawing]

FIG. 1 is a partially cutaway front view showing one embodiment of the present invention, and FIG.
The figure is a cross-sectional plan view, Figure 3 is a partially enlarged view of Figure 2, and Figure 4 is a partially enlarged view of Figure 2.
The figure is a side view of the conveyor, Figure 5 is a front view for explaining the delivery state of the workpiece, Figures 6 and 8 are explanatory diagrams for the arrangement of the cleaning liquid supply nozzle, and Figure 7 is a side view of the brush. , S and 1O are plan views and front views of the wiping mechanism in different usage states, and FIG. 11 is a partially enlarged front view C of the drying chamber. 1...Work, 2 φ・Supply unit, 3
．． 4. Fogging/cleaning unit, 5.. Drying unit, 6.. Taking out unit, 1G, 35.60.75 Conflict @ conveyor, 17, 36
．． 76, 83 φ numbering member. Patent Applicant: Speed Fam Co., Ltd. No. 3, Figure 9, lb, Teitosei Yuguchi Seisho (Voluntary), December 15, 1985, Commissioner of the Patent Office, Kuro 1) Mr. Akio, -Ma, 1, Indication of the case Patent Application No. 224709 of 1986 2, Invention Name Cleaning Device 3, Relationship with the Amendment Case Patent Applicant Address 30, 4 Nishirokugo, Ota-ku, Tokyo 3 Names Speedfam Co., Ltd. President and Representative Director Hiroshi Ohara 4, agent 〒180 711 stories (343
) 8755 Address 1-9-12 Nishi-Shinjuku, Shinjuku-ku, Tokyo
Spontaneous 6. Detailed description of the invention in the specification to be amended. z'-17, Contents of correction 5. . Contents of the amendment as shown in the attached sheet (1) "Rail member 17, 313.3B, 76, '88" described on page 18, lines 4-5 of the specification is changed to "rail member 17, 38, 313° 78.83". I am corrected.

Claims (1)

[Claims] 1.It is constructed by unitizing the work supply, cleaning, drying, and unloading processes, and connecting these units so that they can be separated, and each of the above units can be connected to each other by connecting them. In addition, each unit except the supply unit or the take-out unit is provided with a conveyor for conveying the workpiece so as to be movable along the rail member, and these conveyors are arranged such that the intervals between the conveyors are A cleaning device characterized in that it is connected to a driving means that is maintained constant and driven synchronously.