JPH0596254A - Ultrasonic washing apparatus and washing tank used therein - Google Patents

Abstract

PURPOSE:To provide an ultrasonic washing apparatus capable of automatically and certainly performing the ultrasonic washing of a work such as precise mechanical parts or electronic machinery parts. CONSTITUTION:Washing chambers 3a, 3b, 3d-3g, dehydration chambers 3c, 3h and a drying chamber 4 are provided side by side in series and a traverse mechanism 6 is arranged above them. Rotary bodies 17 rotating carriers 18 having works received therein, ultrasonic vibration sources 12 and jet pipes 13 are arranged in the respective washing chambers 3a, 3b, 3d-3g storing a washing solution 8 to perform the ultrasonic jet washing of the carriers 18 immersed in the washing solution 8. The carriers 18 placed on the rotary bodies 17 are rotated at a high speed within the dehydration chambers 3c, 3h to dehydrate the works. The carriers 18 are successively sent to the washing chambers 3a, 3b, 3d-3g, the dehydration chambers 3c, 3h and the drying chamber 4 by the traverse mechanism 6.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic cleaning apparatus utilizing ultrasonic vibrations used in a cleaning process of works such as precision machine parts and electronic equipment parts, and a cleaning chamber used in the apparatus.

[0002]

2. Description of the Related Art For example, in a cleaning process in the manufacture of precision machine parts, electronic device parts, etc., a work is sequentially fed to a large number of cleaning tanks arranged in parallel, and each cleaning solution is filled in each cleaning tank. Immersion is carried out, and the ultrasonic vibration generated in the cleaning liquid is used to release impurities from the surface of the workpiece for cleaning.

[0003]

By the way, in the above-described cleaning process, when the workpieces are sequentially fed to a large number of cleaning tanks, they are manually fed. However, since the tank is filled with an organic solvent that is harmful to the human body as a cleaning liquid,
Work is extremely dangerous. Therefore, there has been a demand for the development of an apparatus capable of automatically cleaning a work without human intervention. However, the present situation is that an apparatus which does not sufficiently satisfy the demands in terms of safety, productivity and durability has not been provided.

The present invention has been proposed in view of the above situation, and provides an ultrasonic cleaning apparatus capable of surely cleaning a work while automatically performing cleaning and drying operations using a dangerous organic solvent. It is intended to be provided.

[0005]

In order to solve the above-mentioned problems, an ultrasonic cleaning apparatus according to the present invention has a cleaning chamber having a treatment tank and a dehydration chamber having a centrifugal dehydration tank between a carry-in conveyor and a carry-out conveyor. A cleaning unit is formed by arranging the cleaning units in parallel in series, and a drying chamber having a dryer is provided between one end of the cleaning unit and the carry-out conveyor, and the cleaning chamber, the dehydration chamber, and the drying chamber A traverse mechanism is arranged above, the processing tank includes a rotating body for rotating a carrier containing a work, an ultrasonic vibration source for generating ultrasonic vibrations in the cleaning liquid stored therein, and an internal And a jet tube for generating a jet flow in the centrifugal dehydration tank,
The dryer is provided with a rotating body for rotating the carrier,
The work accommodated in the carrier is blown with hot air having high cleanliness to dry the work, and the traverse mechanism is
The carrier has an elevating frame arranged to be vertically movable and a traveling frame connected to the elevating frame and movable in the horizontal direction. A plurality of chuckers for suspending and supporting the carrier are disposed on the traveling frame to dispose the carrier in the horizontal direction. Forward to.

Further, a cleaning chamber having a treatment tank and a dehydration chamber having a centrifugal dehydration tank are arranged in series between a carry-in conveyor and a carry-out conveyor to form a cleaning unit. One end of the cleaning unit and the carry-out conveyor are provided. A drying chamber having a dryer is provided between the cleaning chamber, the dewatering chamber, and the traverse mechanism above the drying chamber.
The processing tank includes a rotating body that rotates a carrier containing a work, an ultrasonic vibration source that generates ultrasonic vibrations in the cleaning liquid stored inside, and a jet tube that generates a jet inside, The centrifugal dehydration tank is equipped with a rotating body for rotating the carrier, the dryer blows hot clean air on the work contained in the carrier to dry the work, and the traverse mechanism is arranged to be vertically movable. An elevating frame and a traveling frame which is connected to the elevating frame and is movable in the horizontal direction, and a plurality of chuckers for suspending and supporting the carrier on the traveling frame are arranged to sequentially feed the carrier in the horizontal direction. In the sonic cleaning device, the plurality of cleaning chambers are arranged adjacent to each other for each cleaning chamber that stores the same type of cleaning liquid in its processing tank to form a unit,
The dehydration chamber is arranged between the unitized cleaning chambers to form the cleaning unit.

By the way, the cleaning chamber used in such an ultrasonic cleaning apparatus has a rotating body for rotating a carrier containing a work, an ultrasonic vibration source for generating ultrasonic vibrations in the cleaning liquid stored therein, A treatment tank having a jet pipe for producing a jet in the cleaning liquid stored therein;

[0008] A reserve tank having a filter inside, a collecting passage for collecting a cleaning liquid overflowing from the upper end of the treatment tank around the treatment tank, the collecting passage and the filter inside the reserve tank. And a reflux pipe for refluxing the cleaning liquid, which has passed through the filter material in the reserve tank, to the processing tank via a pump.

[0009]

The carrier containing the work is carried in by the carry-in conveyor and is sequentially fed into a plurality of cleaning chambers and dehydration chambers arranged in series. Then, the carrier is placed on the rotating body in the processing tank of each cleaning chamber and immersed in the cleaning liquid, and the ultrasonic vibration caused by the ultrasonic vibration source or the jet tube is generated while rotating with the rotation of the rotating body. Alternatively, it is washed with a jet stream. Also,
Similarly, this carrier is placed on the rotating body in the centrifugal dehydration tank of each dehydrating chamber, and is dehydrated while rotating as the rotating body rotates. The carrier sequentially transported to each washing chamber and dehydration chamber is sent to a dryer, dried with hot air, and discharged to the outside of the device by a carry-out conveyor. At this time, the traverse mechanism arranged above these successively feeds the carrier to each of the washing chamber, the dehydrating chamber and the drying chamber. This traverse mechanism sequentially feeds the carrier by the lifting motion of the elevating frame, the chucker grips the carrier and pulls it upward, and then the traveling frame moves horizontally by a certain amount and the chucker that grips the carrier adjoins the cleaning room, dehydration room, etc. Is carried out, the lifting frame is lowered, the chucker releases the carrier, and the carrier is placed on the rotating body.

Further, the cleaning chambers are arranged adjacent to each other for each cleaning chamber in which the same type of cleaning liquid is stored in the processing tank, and unitized,
By arranging the dehydration chamber between the unitized cleaning chambers, the work washed by the cleaning liquid in one unitized cleaning chamber is dehydrated from the cleaning liquid attached once in the dehydration chamber before The cleaning liquid is transferred to a unitized cleaning chamber that stores the cleaning liquid.

Further, the cleaning liquid overflowing from the processing tank is recovered in the collecting passage, flows into the filter material in the reserve tank, is filtered by the filter material, and is then returned from the reflux pipe to the processing tank via the pump. ..

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of an ultrasonic cleaning apparatus according to the present invention and a cleaning chamber used in the apparatus will be described with reference to FIGS. 1 to 5 (a).
A description will be given based on (b).

1 to 3 show a front view, a plan view and a side view of the device of the present invention. In the figure, (1st) ~
(13st) indicates a work station, and among the work stations (1st) to (13st), the first station (1st)
st) is connected to the end portion of the carry-in conveyor (2), and the cleaning unit (1) including the cleaning chamber or the dehydration chambers (3a) to (3h) is connected to the second station (2st) to the ninth station (9st). The drying chamber (4) is arranged at the 10th station (10st) to the 12th station (12st), and the starting end of the carry-out conveyor (5) is connected to the 13th station (13st). On the other hand, above these, a traverse mechanism (6)
Are arranged. In the cleaning unit (1), (3a), (3b), (3d) to (3g) represent cleaning chambers, and (3)
c) (3h) indicates a dehydration chamber. With the above-described structure, the device of the present invention uses the traverse mechanism (6) to wash the work carried in by the carry-in conveyor (2) or the dewatering room (3a) to
(3h) is sequentially transferred to the drying chamber (4), and finally the work is conveyed from the dryer (4) to the carry-out conveyor (5) and carried out to wash and dry the work. is there. Each component will be described in detail below.

The structure of the cleaning chambers (3a) (3b) (3d) to (3g) is shown in FIG. In the figure, (7) is a processing tank in which the cleaning liquid (8) is stored, and a liquid collecting passageway (40) is formed around it. The liquid collection passageway (40) communicates with a reserve tank (9) arranged laterally via a communication pipe (41). Impurities released from the work during cleaning overflow with the cleaning liquid from the upper end of the processing tank (7),
It flows into the reserve tank (9) through the liquid collection passageway (40) and the communication pipe (41). The cleaning liquid containing the impurities is vertically recirculated in the reserve tank (9) by the partition plates (10a) and (10b) of the reserve tank (9), and at this time, the built-in filter media (11a) (11b). ) (11c) filters impurities. (13) is a jet tube arranged on the floor of the treatment tank (7). Cleaning liquid (8) purified in the reserve tank (9)
Is sucked by the pump (14) and jetted into the cleaning liquid (8) in the treatment tank (7) through the reflux pipe (42).

Reference numeral (12) is an ultrasonic vibration source mounted on the side wall of the processing tank (7) for causing ultrasonic vibration in the cleaning liquid (8) in the processing tank (7). As described above, the ultrasonic vibration is generated in the cleaning liquid, so that the work can be cleaned more effectively. In this embodiment, the ultrasonic vibration source (12) is arranged only in the cleaning chambers (3a) (3b) (3e) (3f), and in the cleaning chambers (3d) (3g) which are not particularly necessary. I haven't. However, this ultrasonic vibration source (12) can be used in the cleaning chambers (3a) (3b) (3d) to (3g) as required by the user.
It can be attached to any or all of the above.

On the other hand, (15) is a rotary shaft which is rotatably penetrated through the central portion of the bottom of the processing tank (7), and the rotary shaft (15) has a sleeve (16) integrally formed with the processing tank (7). ) Is fitted coaxially. (17) is a rotating body that is supported by being connected to a rotating shaft (15), and in this rotating body, a carrier made of, for example, a wire net or the like that accommodates a large number of works (not shown) in (17). A table (19) for mounting and holding (18) is integrally provided. (20) is a drive motor for rotating the rotating shaft (15), and its output shaft and the rotating shaft (15) are connected by an appropriate power transmission means. When the drive motor (20) is started, the rotary shaft (15) is rotated via the power transmission means, and further the rotary body (17) is rotated to be mounted on the table (19) of the rotary body (17). The carrier (18) being rotated also rotates.

Further, (48) is a drain recovery device arranged below the processing tank (7), which is composed of a drain receiver (49), a drain pipe (50) and a drain tank (51). The cleaning liquid (8) vaporized in the treatment tank (7) enters between the rotary shaft (15) and the sleeve (16) through the gap between the rotary shaft (15) above the rotary body (17). To condense. The drain generated in this way is collected by the drain receiver (49), and the drain pipe (5
Liquid is collected in the drain tank (51) via the (0) to prevent the drive motor (20) and the power transmission means from getting wet.

In this embodiment, the cleaning chambers (3a) (3
The organic solvent is stored in the treatment tank (7) of b), and these cleaning chambers (3a) and (3b) constitute a solvent cleaning unit (A). Further, city water or pure water is stored in the treatment tanks (7) of the cleaning chambers (3d) to (3f), and these cleaning chambers (3d) to
(3f) constitutes an aqueous cleaning unit (B). And
City water is stored in the treatment tank (7) of the cleaning chamber (3d) that constitutes the aqueous cleaning unit (B), and the carried-in workpiece is cleaned with city water. In addition, pure water is stored in the processing tank (7) of the cleaning chambers (3e) and (3f), and the transferred work is cleaned with pure water, and the pure water is stored in the processing tank (7) of the cleaning chamber (3g). The rinse liquid is stored and the work carried in is rinsed with pure water. With such a configuration, the loaded work is first washed with an organic solvent in the solvent washing unit (A), then transferred to the aqueous washing unit (B), and washed with city water or pure water. After that, it will be rinsed with pure water.

On the other hand, the dehydration chambers (3c) and (3h) are constructed by disposing the rotating body (17) having the same structure as described above in the centrifugal dehydration tank (45). When the carrier (18) is placed on the table (19) of the rotating body (17) and the drive motor (20) rotates the table (19) at a high speed, the carrier (18) rotates at a high speed, and this occurs at this time. By the centrifugal force, the cleaning liquid (8) is detached from the surface of many works in the carrier (18) to dehydrate the works.

Of the dehydration chambers (3c) and (3h) having the above structure, the dehydration chamber (3c) is arranged between the organic cleaning unit (A) and the aqueous cleaning unit (B). With such an arrangement, the carrier (18) that has been cleaned with the organic solvent in the cleaning chamber (3b) is transported to the cleaning chamber (3d) once the organic solvent has been centrifugally dehydrated. The other dehydration room (3h)
Is arranged at the terminal end of the aqueous cleaning unit (B), and the work that has been cleaned by the aqueous cleaning unit (B) is once dehydrated and then conveyed to the drying chamber (4) described later.
As a result, the drying process of the work in the drying chamber (4) is surely performed. The cleaning liquid dehydrated in the dehydration chambers (3c) and (3h) is stored in the recirculation pipes (47) and (47) shown in FIG. 2 in the reservoirs (9) and (9) of the cleaning chambers (3b) and (3g), respectively. ). With this configuration, it is possible to effectively use the cleaning liquid composed of the organic solution material or city water and pure water.

The drying chamber (4) is arranged between the cleaning unit (1) and the carry-out conveyor (5). The dryer (46) arranged in the drying chamber (4) includes a hot air blower (22) (22), a HEPA filter (23) (2) in a casing type drying chamber (21).
3) and an air circulation mechanism (not shown), the air heated to a predetermined temperature by the hot air blowers (22) (22) is blown onto the carrier (18) to be housed in the carrier (18). The hot work is dried with hot air. The air blown on the work is returned to the hot air blowers (22) and (22) by an air circulation mechanism (not shown), and the HEPA filter (23) is returned during the return.
(23) Air cleans and maintains high cleanliness.

The traverse mechanism (6) is for sequentially feeding the carriers (18), (18), ... At the first station (1st) to the twelfth station (12st) at a time, and is arranged to be vertically movable. Connected to the lifting frame (24) and the lifting frame (24) via a plurality of wheels (25) (25) ...
In addition, a traveling frame (2
6) and 12 chuckers (27a) suspended and supported in series at positions facing the first station (1st) to twelfth station (12st) of the traveling frame (26).
(27l) and.

As shown in FIG. 3, the lifting frame (24) has its four corners integrally supported by the chain (28) and moves up and down through the chain (28) by a lifting motor (29). Although not shown, the traveling frame (26) is attached to a drive source via a chain and reciprocates in a horizontal direction with a constant stroke.

The chuckers (27a) to (27l) are shown in FIG.
The structure shown in (a) and (b) is used. Running frame (26)
A slide member (31) having four arms (30) protruding in four horizontal directions at the lower end of the slide member is vertically inserted and inserted into each of the four arms (30) of the slide member (31). One end of the chuck claw (32) is rotatably connected via a pin (33). Further, the vicinity of the bent portion of the chuck claw (32) is rotatably connected to a bracket (34) protruding from the traveling frame (26) via a pin (35). In this structure, when the slide member (31) is pushed down by the chuck cylinder (36) shown in FIG. 3, the four chuck claws (32) are
As shown by the phantom line in FIG. 5 (a), and when the slide member (31) is pulled upward, it is closed inward as shown by the solid line in FIG. 5 (a). It will be in a state of being. The chuckers (27a) to (27l) are attached to the carrier (1) with the chuck claws (32) (32) ... Closed inward.
8) is chucked and the chucking of the carrier (18) is released when the chuck claws (32) (32) ... Are opened outward.

The device of the present invention has the above-mentioned structure. Next, an operation example of the device of the present invention will be described with reference to FIGS.

A carrier (18) accommodating works such as precision equipment parts and electronic equipment parts is firstly placed on the carry-in conveyor (2).
It is transported to the station (1st). Then, the elevating frame (24) of the traverse mechanism (6) is lowered to lower the traveling frame (26) and the chuckers (27a) to (27l).

After descending to a predetermined position, the chucker (27
The chuck claws (32) of a) to (27 l) are closed. Then,
The vertical lower end of the chuck claw (32) of the first chucker (27a) hooks the upper end of the carrier (18) conveyed to the first station (1st) for chucking.

The elevating frame (24) rises to raise the traveling frame (26) and the chuckers (27a) to (27l), and at the same time, the traveling frame (26) advances forward by a constant stroke in the horizontal direction to the chuckers (27a) to (27a). Move (27l) horizontally. Then, the carrier (18) chucked by the first chucker (27a) becomes the second station (2st).
Is transferred directly above the cleaning room (3a).

The lifting frame (24) descends, and then
The chuck claws (32) of the chuckers (27a) to (27l) are opened. The carrier (18) chucked by the first chucker (27a) is immersed in the cleaning liquid (8) in the cleaning chamber (3a) and placed on the table (19) of the rotating body (17).

The drive motor (20) is activated to rotate the carrier (18) in the cleaning liquid. And pumps (14)
Also, the ultrasonic vibration source (12) is activated, and the cleaning liquid is ejected from the jet pipe (13) to the carrier (18) to ultrasonically clean the work. At the same time, the elevating frame (24) rises, and the traveling frame (26) retracts horizontally and returns to its original position.

After that, the above operations (1) to (5) are repeated, and while the carrier (18) is newly carried in by the carry-in conveyor (2), the carried-in carrier (18) is transferred to the second station (2).
st) to the thirteenth station (13st) are sequentially transferred to the outside by the carry-out conveyor (5). And the carrier (1
8) is the 2nd station (2st) ~ 13th station (1
While being sequentially transferred to the 3st), the work in the carrier (18) is ultrasonically jet-cleaned with the organic solvent in the cleaning chambers (3a) and (3b), and the organic solvent is centrifugally dehydrated in the dehydration chamber (3c). .. Next, city water jet cleaning is performed in the cleaning chamber (3d), and then pure water ultrasonic jet cleaning is performed in the cleaning chambers (3e) and (3f). Further, pure water is rinsed in the cleaning chamber (3g), and then the pure water is dehydrated in the dehydration chamber (3h). Then, it is dried with hot air in the drying chamber (4) and is transported to the outside of the cleaning chamber (1) by the carry-out conveyor (5).

As described above, in the apparatus of the present invention, the carrier (18) accommodating the work is immersed in the cleaning liquid (8) to rotate the carrier (18) together with the rotating body (17), and the jet pipe (1
While ejecting the cleaning liquid from 3), ultrasonic vibration is generated in the cleaning liquid (8) by the ultrasonic vibration source (12). Therefore,
Each of the cleaning chambers (3a), (3b), (3d) to (3g) has a strong cleaning power, which enables reliable cleaning of the work.

Furthermore, a cleaning unit (1) is constructed by arranging a cleaning chamber and a dehydration chamber in series, and this cleaning unit (1)
The drying chamber (4) is connected to the carrier, and the traverse mechanism (6) sequentially feeds the carrier (18) to each of the washing chamber, the dehydrating chamber and the drying chamber. Therefore, it is possible to automatically wash and dry the work carried in by the carry-in conveyor (2) without going through the staff, and carry it out to the outside by the carry-out conveyor (5).

Further, a cleaning chamber having the same type of cleaning liquid is unitized to form a solvent cleaning unit (A) and an aqueous cleaning unit (B), and a dehydration chamber (3c) is provided between these units (A) and (B). Because of the arrangement, the work washed by the solvent washing unit (A) is centrifugally dehydrated and then conveyed to the aqueous washing unit (B). Therefore, the cleaning liquid stored in the solvent cleaning unit (A), that is, the organic liquid material,
The cleaning liquid stored in the aqueous cleaning unit (B), that is,
The cleanliness of city water or pure water is maintained at a high level for a long time without being mixed with city water or pure water.

Further, the cleaning chambers (3a) (3b) (3d) to
In (3g), the dirty cleaning liquid in the processing tank (7) is once taken out of the processing tank (7), purified in the reserve tank (9) and then returned to the processing tank (7). (8) is less likely to get dirty, and therefore the frequency of replacement of the cleaning liquid (8) is greatly reduced.

[0036]

According to the ultrasonic cleaning apparatus of the present invention,
A single device can automatically perform cleaning and drying operations using an organic solvent that is dangerous for the operation. Moreover,
Ultrasonic jet cleaning while rotating the work in the cleaning liquid,
Since this work is performed a plurality of times, stains on the work can be reliably washed.

Further, the cleaning chambers are arranged adjacent to each of the cleaning chambers that store the same type of cleaning liquid in the processing tank to form a unit, and the dehydration chamber is arranged between the unitized cleaning chambers. Therefore, the cleaning liquid stored in one unit does not mix with the cleaning liquid stored in the other unit. Therefore, the cleanliness of the cleaning liquid can be maintained for a long time, and the frequency of replacement of the cleaning liquid is reduced. Furthermore, since the cleaning liquid stored in the processing tank of each cleaning chamber is filtered by the filter material in the reserve tank and is recirculated into the processing tank, high cleanliness of the cleaning liquid can be maintained for a long period of time.

From such a point, according to the device of the present invention,
It is possible to reliably and economically perform cleaning / drying work of precision machine parts and electronic device parts over a long period of time.

[Brief description of drawings]

FIG. 1 is a front view of an ultrasonic cleaning device according to the present invention.

FIG. 2 is a plan view of an ultrasonic cleaning device according to the present invention.

FIG. 3 is a side view of the ultrasonic cleaning apparatus according to the present invention.

FIG. 4 is a sectional view of a cleaning chamber.

FIG. 5A is a front view of the chucker, and FIG.
The figure is a cross-sectional view taken along the line AA of FIG.

[Explanation of symbols]

 1st ~ 13st Work station 2 Carry-in conveyor 3a / 3b Washing room (solvent) 3d ~ 3g Washing room (city water / pure water) 3c / 3h Dehydrating room 4 Drying room 5 Carrying out conveyor 6 Traverse mechanism 7 Treatment tank 8 Cleaning liquid 9 Reserve tank 11 Filter material 12 Ultrasonic vibration source 13 Jet pipe 14 Pump 17 Rotating body 18 Carrier 22 Hot air blower 24 Elevating frame 26 Traveling frame 27a ~ 27l Chucker 40 Liquid collecting passage 41 Communication pipe 42 Reflux pipe 46 Dryer

Claims (3)

[Claims] 1. A cleaning unit is constructed by arranging a cleaning chamber having a processing tank and a dehydration chamber having a centrifugal dehydration tank in series between a carry-in conveyor and a carry-out conveyor to form a cleaning unit. One end of the cleaning unit and the carry-out conveyor. And a traverse mechanism above the cleaning chamber, the dehydration chamber, and the drying chamber, while the drying chamber having a dryer is provided between the processing tank and the drying chamber. The rotating body for rotating the carrier, an ultrasonic vibration source for generating ultrasonic vibration and a jet flow in the cleaning liquid stored therein, and a jet tube are provided, and the centrifugal dehydration tank is provided with a rotating body for rotating the carrier. The dryer dries the work contained in the carrier by blowing hot air with high cleanliness to the work, and the traverse mechanism is connected to an elevating frame and an elevating frame arranged so as to be vertically movable. Had a running frame horizontally movable, the running frame ultrasonic cleaning apparatus, characterized in that to forward by arranging a plurality of chucker carriers horizontally to hanging carrier supported. 2. A cleaning unit is constructed by arranging a cleaning chamber having a treatment tank and a dehydration chamber having a centrifugal dehydration tank in series between a carry-in conveyor and a carry-out conveyor to form a cleaning unit. One end of the cleaning unit and the carry-out conveyor. And a traverse mechanism above the cleaning chamber, the dehydration chamber, and the drying chamber, while the drying chamber having a dryer is provided between the processing tank and the drying chamber. The rotating body for rotating the carrier, an ultrasonic vibration source for generating ultrasonic vibration and a jet flow in the cleaning liquid stored therein, and a jet tube are provided, and the centrifugal dehydration tank is provided with a rotating body for rotating the carrier. The dryer dries the work contained in the carrier by blowing hot air with high cleanliness to the work, and the traverse mechanism is connected to an elevating frame and an elevating frame arranged so as to be vertically movable. And a traveling frame movable in the horizontal direction, and a plurality of chuckers for suspending and supporting the carrier on the traveling frame are arranged to sequentially feed the carrier in the horizontal direction. The cleaning unit is configured by arranging adjacent cleaning chambers that store cleaning liquids of the same type in the processing tank so as to be adjacent to each other, and disposing a dehydration chamber between the cleaning chambers that are unitized. Ultrasonic cleaning device. 3. A processing tank comprising a rotating body for rotating a carrier containing a work, an ultrasonic vibration source for generating ultrasonic vibration and a jet flow in a cleaning liquid stored therein, and a jet pipe, and a filtration inside. A reserve tank having a material, a liquid collecting passage configured around the treatment tank to collect a cleaning liquid overflowing from the upper end of the treatment tank, and a communication pipe connecting the liquid collecting passage and the filter material in the reserve tank. And a reflux pipe for refluxing the cleaning liquid, which has passed through the filter material in the reserve tank, to the processing tank via a pump.