JPS59121938A - Cleaning by slowly flowing liquid and equipment of the same - Google Patents

Abstract

PURPOSE:To reduce the frequency of the putting in and out and improve the cleansing effect by a method wherein the cleansing liquid in a cleansing bath is let flow slowly and a cleansed object is dipped into the cleansing liquid at its downstream and is cleansed while it is conveyed against the direction of the flow of the cleansing liquid and is pulled out of the liquid at its upstream. CONSTITUTION:The cleansing liquid L11 in a cleansing bath 11 is positively recovered and fed to a tank 13 by the operation of a pump 14 and, on the other hand, the cleansing liquid stored in the tank 13 is fed to the cleaning bath 11 through a filter 16 by the operation of another pump 15. The cleansing liquid is circulated while the surface of the liquid in the cleansing bath 11 is kept nearly stable. Floating foreign articles are transferred from right to left and the floating foreign articles near a liquid feeding inlet 11b are quickly removed. A cleansed object 10 is dipped near a liquid recovering outlet 11a or at the downstream of the flowing cleansing liquid and put on a conveyer 12 so that it is conveyed to the direction of an arrow mark A and is cleansed continuously until it reaches near the liquid feeding inlet 11b or the upstream of the flowing liquid.

Description

Detailed Description of the Invention [Technical Field of the Invention] The present invention relates to (1) a cleaning method using a weak flowing liquid used in a rinsing step after etching, and Regarding equipment.

[Technical background of the invention]

This type of conventional cleaning method, as shown in FIG.
Cleaning tanks 1, 2, respectively. ．． 3'Y side by side, objects to be cleaned such as semiconductors or glass substrates (including holders?) 1
0 is first immersed in the cleaning liquid in cleaning tank 1, and after a predetermined period of time has elapsed, it is lifted up. After rinsing, it is dried in a dryer 4 provided near the washing tank 3.

In this case, among the foreign substances removed from the object 10 to be cleaned, those with a low specific gravity remain on the surface of the cleaning liquid as floating foreign substances, and there is a risk that these floating foreign substances may re-adhere to the surface of the object 10 to be cleaned when the object 10 is pulled up. Therefore, the floating foreign matter 7 is usually removed by allowing the cleaning solution to overflow.〇 [Problems in the background art] In such a conventional cleaning method, the floating foreign matter 7 is removed by allowing the cleaning solution to overflow.
Cleaning liquid? Although the cleaning liquid is allowed to overflow, if it takes a long time to completely remove the floating foreign matter from the surface of the cleaning liquid and the cleaning is completed in a short time, the floating foreign matter may fall onto the surface when the object 10 to be cleaned is pulled up. As it is reattached,
There is a drawback that this floating foreign matter is brought into the next stage cleaning tank.Also, when the object to be cleaned is glass, for example.

Static electricity is generated when the cleaning solution is put in and taken out, and floating foreign matter or dust in the air is attracted by the static electricity and air.
[Object of the Invention] The present invention has been made to eliminate the above-mentioned drawbacks of the conventional methods. Significantly reduce the number of objects to be cleaned? Providing a cleaning method and device using a weakly flowing liquid that can quickly remove floating foreign matter at a pulled-up position, thereby significantly increasing the cleaning effect. Purpose] C [Summary of the invention] This purpose? In order to achieve this, 1. The method of cleaning using a weak flow liquid of the present invention is to slowly flow the cleaning liquid Y in the cleaning tank and clean the object to be cleaned. Immerse it downstream of the cleaning solution.

This object to be cleaned? The object to be cleaned is cleaned while being immersed in the cleaning liquid while being moved in a direction opposite to the direction in which the cleaning liquid flows, and the object to be cleaned is pulled up on the upstream side of the cleaning liquid.

In addition, in order to carry out this method, the washing device using a weak flow liquid of the present invention is formed in a horizontally elongated manner, and has a washing tank in which the washing liquid is stored inside, and a washing tank in which the washing liquid is stored in the washing tank. , the purified cleaning liquid 7 is collected from one end of the tank and supplied to the other end of the tank along with the purification filter.
A purification circulation device that causes fluid to flow in the longitudinal direction of the tank, holds an object to be cleaned, holds this object to be cleaned, and cleans the object to be cleaned. A conveyance device that moves the body immersed in the cleaning liquid in the cleaning tank in a direction opposite to the direction in which the cleaning liquid flows down. Features: Features:

[Embodiments of the invention]

Hereinafter, one embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 2 shows the structure of a cleaning device using a weak flow liquid according to the present invention, in which a cleaning tank 11 is formed into a horizontally elongated shape, and a conveyor 12 serving as a conveying device is provided at the inner bottom of the cleaning tank 11.
A cleaning liquid Lll is charged into this tank.

Further, one end of the cleaning tank 11 in the longitudinal direction is provided with a cleaning liquid L.
11 'Liquid recovery hole 11 & of the twice-recovery reservoir is provided at the other end, while liquid supply hole 11 of the reservoir for supplying the cleaning liquid Lll' is provided at the other end.
b are provided respectively.

Plus, wash! 11 is provided with a tank 13 for storing cleaning liquid, and this tank 13 and the liquid recovery hole 1
1a are pipe-connected through 14 pumps, and the tank 13 and the liquid supply hole 11b are pipe-connected through a pump 15 and a filter 16.

Here, the conveyor 12 is placed on the object 1 to be cleaned.
0Y Is it a cleaning effect that always moves from the left side to the right side of the drawing? A belt such as a mesh belt is used to prevent damage. The function of the cleaning device constructed as above is explained. First, the pump 14? The cleaning liquid L in the cleaning tank 11 is
11? The cleaning liquid stored in the tank 13 is forcibly collected and fed to the tank 13 while the pump 15 is also activated. , and is supplied to the cleaning tank 11 through 16 filters. In this case, are the pumps 14 and 15 related so that the amount of cleaning fluid recovered and the amount of supply are approximately equal? be held and controlled.

Next, do the liquid recovery holes 11a and the liquid supply holes 11b have relatively large diameters? and is formed on four longitudinally opposite side walls.

Thus, the cleaning liquid is circulated while the liquid level in the cleaning tank 11 is maintained substantially constant, and during the circulation, it is purified under the action of the filter 160, and furthermore, inside the cleaning tank 11, B
Move in the direction of the arrow f.

This flow of cleaning liquid facilitates the cleaning of the object 10 by simply allowing the cleaning liquid to overflow, which facilitates the cleaning of the object 10 to be cleaned compared to the conventional cleaning power method. Floating foreign matter can be quickly removed in the vicinity of the cleaning object 11b.

That is, the object to be cleaned [0] is immersed in the downstream @11 of the flowing cleaning liquid and placed on the conveyor 12, and the object to be cleaned [0 is conveyed in the direction of the arrow A, and is placed in the vicinity of the liquid supply hole 11b, that is, the flowing cleaning liquid Cleaning is performed by step-parenting until the cleaning liquid reaches the upstream stage.

Subsequently, the object 10 to be cleaned is pulled up near the liquid supply hole 11b, and after being shower-washed by, for example, a shower set water supply device 17, the object 10 to be cleaned is sent to a drying machine. As mentioned above, the floating foreign matter at the position to be pulled up is removed by the flow of the liquid, so the drawback of the conventional cleaning method is that the floating foreign matter should not adhere to the surface of the object to be cleaned 10 that is pulled up after cleaning. Dissolved and with stones.

The number of times the object 10 to be washed is put in and taken out of the cleaning solution can be kept to a minimum, and even if the object 10 to be washed is easily contaminated with static air, such as glass, it is possible to suck up dust in the air. It becomes easier to take countermeasures.

Next, FIG. 3 is a plan view showing the configuration of another embodiment of the cleaning device according to the present invention, in which the cleaning tank 2 is formed in an annular shape, and there are partition plates 21a and 21a at two adjacent locations around the circumference. 21b is provided.

This partition plate 21a has a liquid recovery hole 2 similar to that described above.
C is the partition plate 21, and b is also the same liquid supply hole 2 as described above.
1d respectively, and these are the pump 15 and filter 16? Connected via pipe.

Further, in the center of the annularly formed cleaning tank 2, there are a plurality of arms 31 to 3n arranged radially. A rotary transport device (9) is provided.

Here, each of the arms 31 to 31 has a holding mechanism 40 at its distal end for holding the object to be cleaned 7, and at its base end, it can be moved up and down while holding the object to be cleaned, as shown in FIG. A vertical movement device (not shown) that operates in the direction is provided.

Then, a predetermined amount of cleaning solution is charged into the cleaning tank 2,
When the pump 15 is driven, this cleaning liquid flows into the liquid recovery hole 2]
The cleaning liquid recovered from the filter 16 and purified under the action of the filter 16 is supplied into the tank through the liquid supply hole 21dV. As a result, the cleaning liquid flows in the direction of arrow B.

On the other hand, the single-rotation transfer device 30 is rotated in the direction of the arrow A, and when the arms 31 to 3n reach the liquid supply side end of the cleaning tank 2, they are lifted once and moved to the liquid recovery side end of the cleaning tank 21. When the arms 31 to 3n are lifted up, the object to be cleaned 10 is held there.

The object to be cleaned 10 is immersed in the cleaning liquid near the liquid recovery hole 2c, and after approximately circulating in the cleaning tank 21 in this state, it is pulled up from the cleaning liquid near the liquid supply hole 2jν.

Thus, cleaning similar to that described with reference to FIG. 2 is performed.

As shown in FIG. 3, by forming the cleaning tank 21 in an annular shape, a conveying device can be provided in the center of the tank, making the entire cleaning device compact and easy to automate.

〔Effect of the invention〕

As is clear from the above description, according to the present invention, since the object to be cleaned is lifted at a position where there are substantially no floating foreign objects, it is possible to prevent floating foreign objects from adhering to the object to be cleaned. , how many times should the object to be cleaned be put in and taken out of the cleaning solution? Since it can be kept to a minimum, the object to be cleaned absorbs dust from the air f,5? An excellent effect can be obtained in that measures to prevent f6 can be made easier.

[Brief explanation of the drawing]

Figure 1 is an explanatory diagram of a conventional cleaning method, and Figure 2 is an example of the apparatus used to explain the cleaning method and apparatus using a weak flow liquid of the present invention. , the configuration of the cleaning tank along with the cleaning fluid purification circulation system? Are the cross-sectional diagrams and nest 3 diagrams shown other configuration examples of the same device? Plan view shown 1. Figure 4 shows the partial operating state of this device? FIG. 10...Object to be cleaned, 11...Cleaning tank, 11a.-
・Liquid recovery hole. 11b...i supply hole, 12...belt conveyor,
13... Tank, 14, 15°°, ゛Pump, 16.
...Filter, 21...Cleaning tank, 21c...Liquid collection hole, 21d...Liquid supply hole, 30...Rotary transfer device, 31-3n...Arm, 40...Holding mechanism,
Applicant's agent Kiyoshi Inomata Figure 1 Figure 3

Claims (1)

[Claims] 1. Cleaning liquid in the cleaning tank? The object to be cleaned is immersed on the downstream side of the cleaning liquid by gently flowing the cleaning liquid, and while the object to be cleaned is immersed in the cleaning liquid, the object to be cleaned is cleaned while being moved in the opposite direction to the flowing direction of the cleaning liquid, and the object to be cleaned is immersed in the cleaning liquid. A cleaning method using a weak flow liquid, which is characterized by pulling up on the upstream side of the liquid. 2. A cleaning tank that is elongated in the horizontal direction and can store cleaning liquid inside, and the cleaning liquid stored in this cleaning tank is collected from one end of the tank, purified, and supplied to the other end of the tank. f7) By. What is a purifying circulation device for flowing purified cleaning liquid in the longitudinal direction of a tank, and a method for holding an object to be cleaned and flowing down the cleaning liquid while the object to be cleaned is immersed in the cleaning liquid in the cleaning tank? A washing device using a weak flow liquid is equipped with a conveying device for moving in the opposite direction. 3. A cleaning device using a weak flow liquid according to claim 2, wherein the cleaning device is formed in an annular shape.