JPS6161384B2 - - Google Patents
Info
- Publication number
- JPS6161384B2 JPS6161384B2 JP54141624A JP14162479A JPS6161384B2 JP S6161384 B2 JPS6161384 B2 JP S6161384B2 JP 54141624 A JP54141624 A JP 54141624A JP 14162479 A JP14162479 A JP 14162479A JP S6161384 B2 JPS6161384 B2 JP S6161384B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- gas
- photoconductive layer
- silicon
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Light Receiving Elements (AREA)
- Photoreceptors In Electrophotography (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14162479A JPS5665142A (en) | 1979-11-01 | 1979-11-01 | Manufacture of electrophotographic receptor |
US06/202,201 US4361638A (en) | 1979-10-30 | 1980-10-30 | Electrophotographic element with alpha -Si and C material doped with H and F and process for producing the same |
DE19803040972 DE3040972A1 (de) | 1979-10-30 | 1980-10-30 | Elektrophotographisches lichtempfindliches material und verfahren zu dessen herstellung |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14162479A JPS5665142A (en) | 1979-11-01 | 1979-11-01 | Manufacture of electrophotographic receptor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5665142A JPS5665142A (en) | 1981-06-02 |
JPS6161384B2 true JPS6161384B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-12-25 |
Family
ID=15296359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14162479A Granted JPS5665142A (en) | 1979-10-30 | 1979-11-01 | Manufacture of electrophotographic receptor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5665142A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0635323B2 (ja) * | 1982-06-25 | 1994-05-11 | 株式会社日立製作所 | 表面処理方法 |
JPS5986053A (ja) * | 1982-11-09 | 1984-05-18 | Seiko Epson Corp | 感光ドラム |
JPH0691010B2 (ja) * | 1983-01-11 | 1994-11-14 | 三井東圧化学株式会社 | 非晶質薄膜の製法 |
JPH0644552B2 (ja) * | 1983-03-30 | 1994-06-08 | 三井東圧化学株式会社 | 非晶質薄膜の製法 |
JPH0652428B2 (ja) * | 1985-03-04 | 1994-07-06 | 松下電器産業株式会社 | 光導電体 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5325366A (en) * | 1976-08-23 | 1978-03-09 | Hitachi Ltd | Plasma treating method and apparat us |
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1979
- 1979-11-01 JP JP14162479A patent/JPS5665142A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5665142A (en) | 1981-06-02 |