JPS6156869B2 - - Google Patents
Info
- Publication number
- JPS6156869B2 JPS6156869B2 JP55104274A JP10427480A JPS6156869B2 JP S6156869 B2 JPS6156869 B2 JP S6156869B2 JP 55104274 A JP55104274 A JP 55104274A JP 10427480 A JP10427480 A JP 10427480A JP S6156869 B2 JPS6156869 B2 JP S6156869B2
- Authority
- JP
- Japan
- Prior art keywords
- zirconium
- layer
- semiconductor substrate
- wiring layer
- polyimide resin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10427480A JPS5730334A (en) | 1980-07-31 | 1980-07-31 | Protection of wiring layer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10427480A JPS5730334A (en) | 1980-07-31 | 1980-07-31 | Protection of wiring layer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5730334A JPS5730334A (en) | 1982-02-18 |
| JPS6156869B2 true JPS6156869B2 (enExample) | 1986-12-04 |
Family
ID=14376338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10427480A Granted JPS5730334A (en) | 1980-07-31 | 1980-07-31 | Protection of wiring layer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5730334A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2607505B2 (ja) * | 1987-02-27 | 1997-05-07 | 株式会社東芝 | デイジタル位相同期制御装置 |
| JPS6486715A (en) * | 1987-09-29 | 1989-03-31 | Toshiba Corp | Automatic frequency control circuit |
-
1980
- 1980-07-31 JP JP10427480A patent/JPS5730334A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5730334A (en) | 1982-02-18 |
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