JPS5730334A - Protection of wiring layer - Google Patents

Protection of wiring layer

Info

Publication number
JPS5730334A
JPS5730334A JP10427480A JP10427480A JPS5730334A JP S5730334 A JPS5730334 A JP S5730334A JP 10427480 A JP10427480 A JP 10427480A JP 10427480 A JP10427480 A JP 10427480A JP S5730334 A JPS5730334 A JP S5730334A
Authority
JP
Japan
Prior art keywords
wiring layer
layer
resin
semiconductor substrate
zirconium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10427480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6156869B2 (enExample
Inventor
Shinetsu Fujieda
Shiyuichi Suzuki
Naoyuki Kokuni
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10427480A priority Critical patent/JPS5730334A/ja
Publication of JPS5730334A publication Critical patent/JPS5730334A/ja
Publication of JPS6156869B2 publication Critical patent/JPS6156869B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP10427480A 1980-07-31 1980-07-31 Protection of wiring layer Granted JPS5730334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10427480A JPS5730334A (en) 1980-07-31 1980-07-31 Protection of wiring layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10427480A JPS5730334A (en) 1980-07-31 1980-07-31 Protection of wiring layer

Publications (2)

Publication Number Publication Date
JPS5730334A true JPS5730334A (en) 1982-02-18
JPS6156869B2 JPS6156869B2 (enExample) 1986-12-04

Family

ID=14376338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10427480A Granted JPS5730334A (en) 1980-07-31 1980-07-31 Protection of wiring layer

Country Status (1)

Country Link
JP (1) JPS5730334A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63211818A (ja) * 1987-02-27 1988-09-02 Toshiba Corp デイジタル位相同期制御装置
JPS6486715A (en) * 1987-09-29 1989-03-31 Toshiba Corp Automatic frequency control circuit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63211818A (ja) * 1987-02-27 1988-09-02 Toshiba Corp デイジタル位相同期制御装置
JPS6486715A (en) * 1987-09-29 1989-03-31 Toshiba Corp Automatic frequency control circuit

Also Published As

Publication number Publication date
JPS6156869B2 (enExample) 1986-12-04

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