JPS6312108B2 - - Google Patents

Info

Publication number
JPS6312108B2
JPS6312108B2 JP55034004A JP3400480A JPS6312108B2 JP S6312108 B2 JPS6312108 B2 JP S6312108B2 JP 55034004 A JP55034004 A JP 55034004A JP 3400480 A JP3400480 A JP 3400480A JP S6312108 B2 JPS6312108 B2 JP S6312108B2
Authority
JP
Japan
Prior art keywords
polyimide resin
coupling agent
film
zirconium
organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55034004A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56131949A (en
Inventor
Shinetsu Fujeda
Naoyuki Kokuni
Shuichi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP3400480A priority Critical patent/JPS56131949A/ja
Publication of JPS56131949A publication Critical patent/JPS56131949A/ja
Publication of JPS6312108B2 publication Critical patent/JPS6312108B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
    • H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
    • H10P14/68—Organic materials, e.g. photoresists
    • H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC

Landscapes

  • Paints Or Removers (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP3400480A 1980-03-19 1980-03-19 Coupling agent for inorganic insulating film containing silicon and polyimide resin film Granted JPS56131949A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3400480A JPS56131949A (en) 1980-03-19 1980-03-19 Coupling agent for inorganic insulating film containing silicon and polyimide resin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3400480A JPS56131949A (en) 1980-03-19 1980-03-19 Coupling agent for inorganic insulating film containing silicon and polyimide resin film

Publications (2)

Publication Number Publication Date
JPS56131949A JPS56131949A (en) 1981-10-15
JPS6312108B2 true JPS6312108B2 (enExample) 1988-03-17

Family

ID=12402287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3400480A Granted JPS56131949A (en) 1980-03-19 1980-03-19 Coupling agent for inorganic insulating film containing silicon and polyimide resin film

Country Status (1)

Country Link
JP (1) JPS56131949A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171505A (ja) * 1989-11-29 1991-07-25 Tokyo Electric Co Ltd 照明器具

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7139460B2 (en) * 2001-05-30 2006-11-21 Hitachi Chemical Company, Ltd. Optical element, method of producing optical elements, coating device, and coating method
CN110066595B (zh) * 2019-03-22 2021-02-26 嘉兴科联信新材料有限公司 一种改性聚酰亚胺润滑涂覆组合物、固体润滑涂层及其应用

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03171505A (ja) * 1989-11-29 1991-07-25 Tokyo Electric Co Ltd 照明器具

Also Published As

Publication number Publication date
JPS56131949A (en) 1981-10-15

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