JPS56131949A - Coupling agent for inorganic insulating film containing silicon and polyimide resin film - Google Patents
Coupling agent for inorganic insulating film containing silicon and polyimide resin filmInfo
- Publication number
- JPS56131949A JPS56131949A JP3400480A JP3400480A JPS56131949A JP S56131949 A JPS56131949 A JP S56131949A JP 3400480 A JP3400480 A JP 3400480A JP 3400480 A JP3400480 A JP 3400480A JP S56131949 A JPS56131949 A JP S56131949A
- Authority
- JP
- Japan
- Prior art keywords
- coupling agent
- polyimide resin
- resin film
- chelate compound
- inorganic insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
- H10P14/68—Organic materials, e.g. photoresists
- H10P14/683—Organic materials, e.g. photoresists carbon-based polymeric organic materials, e.g. polyimides, poly cyclobutene or PVC
Landscapes
- Paints Or Removers (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3400480A JPS56131949A (en) | 1980-03-19 | 1980-03-19 | Coupling agent for inorganic insulating film containing silicon and polyimide resin film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3400480A JPS56131949A (en) | 1980-03-19 | 1980-03-19 | Coupling agent for inorganic insulating film containing silicon and polyimide resin film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56131949A true JPS56131949A (en) | 1981-10-15 |
| JPS6312108B2 JPS6312108B2 (enExample) | 1988-03-17 |
Family
ID=12402287
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3400480A Granted JPS56131949A (en) | 1980-03-19 | 1980-03-19 | Coupling agent for inorganic insulating film containing silicon and polyimide resin film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56131949A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002097492A1 (fr) * | 2001-05-30 | 2002-12-05 | Hitachi Chemical Co.,Ltd. | Element optique, procede de fabrication d'elements optiques, et dispositif et procede de revetement |
| CN110066595A (zh) * | 2019-03-22 | 2019-07-30 | 嘉兴科联信新材料有限公司 | 一种改性聚酰亚胺润滑涂覆组合物、固体润滑涂层及其应用 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03171505A (ja) * | 1989-11-29 | 1991-07-25 | Tokyo Electric Co Ltd | 照明器具 |
-
1980
- 1980-03-19 JP JP3400480A patent/JPS56131949A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002097492A1 (fr) * | 2001-05-30 | 2002-12-05 | Hitachi Chemical Co.,Ltd. | Element optique, procede de fabrication d'elements optiques, et dispositif et procede de revetement |
| US7139460B2 (en) * | 2001-05-30 | 2006-11-21 | Hitachi Chemical Company, Ltd. | Optical element, method of producing optical elements, coating device, and coating method |
| CN100456063C (zh) * | 2001-05-30 | 2009-01-28 | 日立化成工业株式会社 | 光学元件、光学元件的制造方法、涂布装置及涂布方法 |
| CN110066595A (zh) * | 2019-03-22 | 2019-07-30 | 嘉兴科联信新材料有限公司 | 一种改性聚酰亚胺润滑涂覆组合物、固体润滑涂层及其应用 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6312108B2 (enExample) | 1988-03-17 |
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