JPS6331932B2 - - Google Patents
Info
- Publication number
- JPS6331932B2 JPS6331932B2 JP55096912A JP9691280A JPS6331932B2 JP S6331932 B2 JPS6331932 B2 JP S6331932B2 JP 55096912 A JP55096912 A JP 55096912A JP 9691280 A JP9691280 A JP 9691280A JP S6331932 B2 JPS6331932 B2 JP S6331932B2
- Authority
- JP
- Japan
- Prior art keywords
- zirconium
- film
- insulating film
- chelate compound
- resin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P14/00—Formation of materials, e.g. in the shape of layers or pillars
- H10P14/60—Formation of materials, e.g. in the shape of layers or pillars of insulating materials
Landscapes
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9691280A JPS5723229A (en) | 1980-07-17 | 1980-07-17 | Semiconductor device and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9691280A JPS5723229A (en) | 1980-07-17 | 1980-07-17 | Semiconductor device and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5723229A JPS5723229A (en) | 1982-02-06 |
| JPS6331932B2 true JPS6331932B2 (enExample) | 1988-06-27 |
Family
ID=14177566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9691280A Granted JPS5723229A (en) | 1980-07-17 | 1980-07-17 | Semiconductor device and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5723229A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61232646A (ja) * | 1985-04-09 | 1986-10-16 | Nec Corp | 樹脂封止型半導体集積回路装置 |
-
1980
- 1980-07-17 JP JP9691280A patent/JPS5723229A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5723229A (en) | 1982-02-06 |
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