JPS61502079A - ポリ（メタクリル酸無水物）レジストを半導体に適用する方法 - Google Patents
ポリ（メタクリル酸無水物）レジストを半導体に適用する方法Info
- Publication number
- JPS61502079A JPS61502079A JP59503270A JP50327084A JPS61502079A JP S61502079 A JPS61502079 A JP S61502079A JP 59503270 A JP59503270 A JP 59503270A JP 50327084 A JP50327084 A JP 50327084A JP S61502079 A JPS61502079 A JP S61502079A
- Authority
- JP
- Japan
- Prior art keywords
- anhydride
- wafer
- layer
- poly
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- -1 poly(methacrylic anhydride) Polymers 0.000 title claims description 24
- 239000004065 semiconductor Substances 0.000 title claims description 14
- 238000000034 method Methods 0.000 claims description 30
- 238000000576 coating method Methods 0.000 claims description 16
- 239000011248 coating agent Substances 0.000 claims description 15
- 239000002904 solvent Substances 0.000 claims description 14
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims description 12
- 239000002243 precursor Substances 0.000 claims description 10
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical group CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 2
- 238000001704 evaporation Methods 0.000 claims description 2
- DCUFMVPCXCSVNP-UHFFFAOYSA-N methacrylic anhydride Chemical compound CC(=C)C(=O)OC(=O)C(C)=C DCUFMVPCXCSVNP-UHFFFAOYSA-N 0.000 claims description 2
- 150000008064 anhydrides Chemical class 0.000 claims 7
- 238000010438 heat treatment Methods 0.000 claims 2
- 150000008065 acid anhydrides Chemical class 0.000 claims 1
- 239000011324 bead Substances 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 19
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 241000257465 Echinoidea Species 0.000 description 3
- 238000003908 quality control method Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 208000019901 Anxiety disease Diseases 0.000 description 1
- 241000238558 Eucarida Species 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- KQNPFQTWMSNSAP-UHFFFAOYSA-N isobutyric acid Chemical compound CC(C)C(O)=O KQNPFQTWMSNSAP-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/136—Coating process making radiation sensitive element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Formation Of Insulating Films (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/606,506 US4508812A (en) | 1984-05-03 | 1984-05-03 | Method of applying poly(methacrylic anhydride resist to a semiconductor |
| US606506 | 2000-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61502079A true JPS61502079A (ja) | 1986-09-18 |
| JPH0150895B2 JPH0150895B2 (https=) | 1989-11-01 |
Family
ID=24428249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59503270A Granted JPS61502079A (ja) | 1984-05-03 | 1984-08-27 | ポリ（メタクリル酸無水物）レジストを半導体に適用する方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4508812A (https=) |
| EP (1) | EP0185016B1 (https=) |
| JP (1) | JPS61502079A (https=) |
| DE (1) | DE3475233D1 (https=) |
| WO (1) | WO1985005194A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987004810A1 (en) * | 1986-01-29 | 1987-08-13 | Hughes Aircraft Company | Method for developing poly(methacrylic anhydride) resists |
| ES2090217T3 (es) * | 1990-12-20 | 1996-10-16 | Siemens Ag | Laca fotosensible. |
| EP0492256B1 (de) * | 1990-12-20 | 1996-08-14 | Siemens Aktiengesellschaft | Photolithographische Strukturerzeugung |
| US5550405A (en) * | 1994-12-21 | 1996-08-27 | Advanced Micro Devices, Incorporated | Processing techniques for achieving production-worthy, low dielectric, low interconnect resistance and high performance ICS |
| DE19549115A1 (de) * | 1995-12-29 | 1997-07-03 | Chemcoat Inc | Verfahren zur Entnahme von Artikeln aus einem Schrank und Schrank zur Ausführung des Verfahrens |
| US6930143B2 (en) * | 2001-11-01 | 2005-08-16 | Arco Chemical Technology, L.P. | Acrylic latex composition |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2451902A1 (de) * | 1973-12-19 | 1975-07-03 | Ibm | Hochempfindliche positivaetz- bzw. -reliefschichten und ihre anwendung fuer die maskenbildung |
| DE2946205A1 (de) * | 1978-11-17 | 1980-05-22 | Vlsi Technology Res Ass | Verfahren zur herstellung eines resistmusters |
| JPS55140836A (en) * | 1979-04-19 | 1980-11-04 | Fujitsu Ltd | Pattern forming method |
| US4332881A (en) * | 1980-07-28 | 1982-06-01 | Bell Telephone Laboratories, Incorporated | Resist adhesion in integrated circuit processing |
| JPS58158636A (ja) * | 1982-03-16 | 1983-09-20 | Nec Corp | パタ−ン形成方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3779806A (en) * | 1972-03-24 | 1973-12-18 | Ibm | Electron beam sensitive polymer t-butyl methacrylate resist |
| US4087569A (en) * | 1976-12-20 | 1978-05-02 | International Business Machines Corporation | Prebaking treatment for resist mask composition and mask making process using same |
| US4476217A (en) * | 1982-05-10 | 1984-10-09 | Honeywell Inc. | Sensitive positive electron beam resists |
-
1984
- 1984-05-03 US US06/606,506 patent/US4508812A/en not_active Expired - Lifetime
- 1984-08-27 WO PCT/US1984/001365 patent/WO1985005194A1/en not_active Ceased
- 1984-08-27 DE DE8484903268T patent/DE3475233D1/de not_active Expired
- 1984-08-27 JP JP59503270A patent/JPS61502079A/ja active Granted
- 1984-08-27 EP EP84903268A patent/EP0185016B1/en not_active Expired
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2451902A1 (de) * | 1973-12-19 | 1975-07-03 | Ibm | Hochempfindliche positivaetz- bzw. -reliefschichten und ihre anwendung fuer die maskenbildung |
| DE2946205A1 (de) * | 1978-11-17 | 1980-05-22 | Vlsi Technology Res Ass | Verfahren zur herstellung eines resistmusters |
| JPS55140836A (en) * | 1979-04-19 | 1980-11-04 | Fujitsu Ltd | Pattern forming method |
| US4332881A (en) * | 1980-07-28 | 1982-06-01 | Bell Telephone Laboratories, Incorporated | Resist adhesion in integrated circuit processing |
| JPS58158636A (ja) * | 1982-03-16 | 1983-09-20 | Nec Corp | パタ−ン形成方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0150895B2 (https=) | 1989-11-01 |
| DE3475233D1 (en) | 1988-12-22 |
| EP0185016B1 (en) | 1988-11-17 |
| US4508812A (en) | 1985-04-02 |
| EP0185016A1 (https=) | 1986-06-25 |
| WO1985005194A1 (en) | 1985-11-21 |
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