JPS6133613B2 - - Google Patents
Info
- Publication number
- JPS6133613B2 JPS6133613B2 JP8128281A JP8128281A JPS6133613B2 JP S6133613 B2 JPS6133613 B2 JP S6133613B2 JP 8128281 A JP8128281 A JP 8128281A JP 8128281 A JP8128281 A JP 8128281A JP S6133613 B2 JPS6133613 B2 JP S6133613B2
- Authority
- JP
- Japan
- Prior art keywords
- zirconium
- getter
- grains
- mesh
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000203 mixture Substances 0.000 claims description 53
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 50
- 229910052726 zirconium Inorganic materials 0.000 claims description 41
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 39
- 229910052742 iron Inorganic materials 0.000 claims description 35
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 239000002184 metal Substances 0.000 claims description 19
- 238000010438 heat treatment Methods 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 17
- 229910002058 ternary alloy Inorganic materials 0.000 claims description 17
- 229910000640 Fe alloy Inorganic materials 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 11
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 10
- 229910052719 titanium Inorganic materials 0.000 claims description 10
- 239000010936 titanium Substances 0.000 claims description 10
- 238000010586 diagram Methods 0.000 claims description 6
- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- 229910000756 V alloy Inorganic materials 0.000 claims description 5
- 150000002739 metals Chemical class 0.000 claims description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 4
- 238000007789 sealing Methods 0.000 claims 3
- 239000008187 granular material Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 25
- 238000001179 sorption measurement Methods 0.000 description 22
- 238000005245 sintering Methods 0.000 description 20
- 238000001994 activation Methods 0.000 description 18
- 230000004913 activation Effects 0.000 description 17
- 239000000843 powder Substances 0.000 description 13
- 229910000986 non-evaporable getter Inorganic materials 0.000 description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000007792 addition Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000002341 toxic gas Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 239000003570 air Substances 0.000 description 3
- 229910052783 alkali metal Inorganic materials 0.000 description 3
- 150000001340 alkali metals Chemical class 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- 238000005247 gettering Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 229910052756 noble gas Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000155 melt Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 150000002835 noble gases Chemical group 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- 241001507939 Cormus domestica Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010039 TiAl3 Inorganic materials 0.000 description 1
- 229910007727 Zr V Inorganic materials 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- DNXNYEBMOSARMM-UHFFFAOYSA-N alumane;zirconium Chemical compound [AlH3].[Zr] DNXNYEBMOSARMM-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 239000011872 intimate mixture Substances 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 239000006194 liquid suspension Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000001473 noxious effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000006187 pill Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/045—Alloys based on refractory metals
- C22C1/0458—Alloys based on titanium, zirconium or hafnium
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/10—Sintering only
- B22F3/11—Making porous workpieces or articles
- B22F3/1103—Making porous workpieces or articles with particular physical characteristics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
- H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
- H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- Powder Metallurgy (AREA)
- Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Vacuum Packaging (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT22545/80A IT1198325B (it) | 1980-06-04 | 1980-06-04 | Struttura e composizione getteranti,particolarmente adatti per basse temperature |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5753235A JPS5753235A (en) | 1982-03-30 |
JPS6133613B2 true JPS6133613B2 (xx) | 1986-08-02 |
Family
ID=11197666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8128281A Granted JPS5753235A (en) | 1980-06-04 | 1981-05-29 | Getter composition and structure particularly available at low temperature and their use in manufacture of vessel enclosing vacuum or rare gas |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5753235A (xx) |
DE (1) | DE3122188C2 (xx) |
FR (1) | FR2484138A1 (xx) |
GB (1) | GB2077487B (xx) |
IT (1) | IT1198325B (xx) |
NL (1) | NL186412C (xx) |
Families Citing this family (39)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59106368A (ja) * | 1982-12-09 | 1984-06-20 | Atsugi Motor Parts Co Ltd | 動力操向装置 |
JPS59180081A (ja) * | 1983-03-29 | 1984-10-12 | Matsushita Electric Ind Co Ltd | 真空ポンプ装置 |
IT1173866B (it) * | 1984-03-16 | 1987-06-24 | Getters Spa | Metodo perfezionato per fabbricare dispositivi getter non evarobili porosi e dispositivi getter cosi' prodotti |
IT1173865B (it) * | 1984-03-16 | 1987-06-24 | Getters Spa | Metodo perfezionato per fabbricare dispositivi getter non evaporabili porosi e dispositivi getter cosi' prodotti |
JPS623008A (ja) * | 1985-06-28 | 1987-01-09 | 大陽酸素株式会社 | アルゴンの超精製装置、並びに精製方法 |
WO1988002180A1 (en) * | 1986-09-18 | 1988-03-24 | Crewe Albert V | Differential pressure electron beam system, method and gun |
JPH01169828A (ja) * | 1987-12-16 | 1989-07-05 | Saes Getters Spa | 非蒸発型ゲッター装置及びその製造方法 |
US4833362A (en) * | 1988-04-19 | 1989-05-23 | Orchid One | Encapsulated high brightness electron beam source and system |
HU207398B (en) * | 1989-05-17 | 1993-03-29 | Tungsram Reszvenytarsasag | Getter composition for light sources |
US5150001A (en) * | 1990-04-10 | 1992-09-22 | Orchid One Corporation | Field emission electron gun and method having complementary passive and active vacuum pumping |
IT1255438B (it) * | 1992-07-17 | 1995-10-31 | Getters Spa | Pompa getter non evaporabile |
US5508586A (en) * | 1993-06-17 | 1996-04-16 | Saes Getters S.P.A. | Integrated getter device suitable for flat displays |
IT1273349B (it) * | 1994-02-28 | 1997-07-08 | Getters Spa | Visualizzatore piatto ad emissione di campo contenente un getter e procedimento per il suo ottenimento |
US5685963A (en) * | 1994-10-31 | 1997-11-11 | Saes Pure Gas, Inc. | In situ getter pump system and method |
US6109880A (en) * | 1994-10-31 | 2000-08-29 | Saes Pure Gas, Inc. | Getter pump module and system including focus shields |
US5972183A (en) * | 1994-10-31 | 1999-10-26 | Saes Getter S.P.A | Getter pump module and system |
US6142742A (en) * | 1994-10-31 | 2000-11-07 | Saes Pure Gas, Inc. | Getter pump module and system |
US5911560A (en) * | 1994-10-31 | 1999-06-15 | Saes Pure Gas, Inc. | Getter pump module and system |
TW287117B (xx) * | 1994-12-02 | 1996-10-01 | Getters Spa | |
US5908579A (en) * | 1994-12-02 | 1999-06-01 | Saes Getters, S.P.A. | Process for producing high-porosity non-evaporable getter materials and materials thus obtained |
US6110807A (en) * | 1995-06-07 | 2000-08-29 | Saes Getters S.P.A. | Process for producing high-porosity non-evaporable getter materials |
US5935395A (en) * | 1995-11-08 | 1999-08-10 | Mitel Corporation | Substrate processing apparatus with non-evaporable getter pump |
US5838761A (en) * | 1996-05-06 | 1998-11-17 | Siemens Aktiengesellschaft | X-ray tube with getter |
IT1290451B1 (it) * | 1997-04-03 | 1998-12-03 | Getters Spa | Leghe getter non evaporabili |
IT1295340B1 (it) * | 1997-10-15 | 1999-05-12 | Getters Spa | Pompa getter ad elevata velocita' di assorbimento di gas |
DE19921766C1 (de) * | 1999-05-11 | 2001-02-01 | Siemens Ag | Röntgenbildverstärker und Verfahren zu seiner Herstellung |
DE10117365A1 (de) * | 2001-04-06 | 2002-10-10 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Niederdruckentladungslampe |
TWI245308B (en) * | 2002-09-13 | 2005-12-11 | Getters Spa | Non-evaporable getter compositions which can be reactivated at low temperature after exposure to reactive gases at a higher temperature |
ITMI20042017A1 (it) * | 2004-10-22 | 2005-01-22 | Getters Spa | Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione |
US20060198777A1 (en) * | 2005-03-03 | 2006-09-07 | Cross Joseph B | Mercury removal sorbent |
ITMI20101519A1 (it) | 2010-08-06 | 2012-02-07 | Getters Spa | Miglioramenti per tubi ricevitori di collettori solari |
ITMI20111492A1 (it) | 2011-08-04 | 2013-02-05 | Getters Spa | Miglioramenti per tubi ricevitori per collettori solari |
ITMI20111870A1 (it) | 2011-10-14 | 2013-04-15 | Getters Spa | Composizioni di getter non evaporabili che possono essere riattivate a bassa temperatura dopo l'esposizione a gas reattivi ad una temperatura maggiore |
ITMI20120144A1 (it) | 2012-02-03 | 2013-08-04 | Getters Spa | Miglioramenti per tubi ricevitori di collettori solari |
EP4098288A1 (en) * | 2012-02-20 | 2022-12-07 | Smith & Nephew, Inc. | Methods of making porous structures |
DE102012212409A1 (de) | 2012-07-16 | 2013-12-05 | Siemens Ag | Vakuumgehäuse |
ITMI20122092A1 (it) * | 2012-12-10 | 2014-06-11 | Getters Spa | Leghe getter non evaporabili riattivabili dopo l'esposizione a gas reattivi |
US12091732B2 (en) | 2019-09-06 | 2024-09-17 | Technova Inc. | Nanocomposite metal material and method for manufacturing nanocomposite metal material |
RU2754864C1 (ru) * | 2020-11-23 | 2021-09-08 | Акционерное общество «Обнинское научно-производственное предприятие «Технология» им. А.Г.Ромашина» | Способ получения неиспаряемого геттера и композитный геттер для рентгеновской трубки |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT963874B (it) * | 1972-08-10 | 1974-01-21 | Getters Spa | Dispositivo getter perfezionato contenente materiale non evapora bile |
DE2744191A1 (de) * | 1977-09-30 | 1979-04-05 | Yissum Res Dev Co | Zirkonlegierungen |
IT1110271B (it) * | 1979-02-05 | 1985-12-23 | Getters Spa | Lega ternaria getterante non evaporabile e metodo di suo impiego per l'assorbimento di acqua,vapore d'acqua,di altri gas |
-
1980
- 1980-06-04 IT IT22545/80A patent/IT1198325B/it active
-
1981
- 1981-05-29 JP JP8128281A patent/JPS5753235A/ja active Granted
- 1981-06-01 GB GB8116696A patent/GB2077487B/en not_active Expired
- 1981-06-02 FR FR8110892A patent/FR2484138A1/fr active Granted
- 1981-06-03 NL NLAANVRAGE8102697,A patent/NL186412C/xx not_active IP Right Cessation
- 1981-06-04 DE DE3122188A patent/DE3122188C2/de not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL8102697A (nl) | 1982-01-04 |
DE3122188C2 (de) | 1986-09-11 |
JPS5753235A (en) | 1982-03-30 |
GB2077487B (en) | 1984-08-30 |
IT8022545A0 (it) | 1980-06-04 |
IT1198325B (it) | 1988-12-21 |
FR2484138A1 (fr) | 1981-12-11 |
NL186412C (nl) | 1990-11-16 |
GB2077487A (en) | 1981-12-16 |
NL186412B (nl) | 1990-06-18 |
DE3122188A1 (de) | 1982-03-04 |
FR2484138B1 (xx) | 1984-06-29 |
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