ITMI20042017A1 - Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione - Google Patents

Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione

Info

Publication number
ITMI20042017A1
ITMI20042017A1 IT002017A ITMI20042017A ITMI20042017A1 IT MI20042017 A1 ITMI20042017 A1 IT MI20042017A1 IT 002017 A IT002017 A IT 002017A IT MI20042017 A ITMI20042017 A IT MI20042017A IT MI20042017 A1 ITMI20042017 A1 IT MI20042017A1
Authority
IT
Italy
Prior art keywords
procedure
manufacturing
acoustic waves
surface sensor
gas surface
Prior art date
Application number
IT002017A
Other languages
English (en)
Inventor
Marco Amiotti
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Priority to IT002017A priority Critical patent/ITMI20042017A1/it
Publication of ITMI20042017A1 publication Critical patent/ITMI20042017A1/it
Priority to CNA2005800338731A priority patent/CN101073004A/zh
Priority to EP05802959A priority patent/EP1802964A1/en
Priority to JP2007537475A priority patent/JP2008518201A/ja
Priority to KR1020077006546A priority patent/KR20070073753A/ko
Priority to PCT/IT2005/000605 priority patent/WO2006043299A1/en
Priority to CA002581260A priority patent/CA2581260A1/en
Priority to NO20071365A priority patent/NO20071365L/no
Priority to IL182194A priority patent/IL182194A0/en
Priority to US11/737,259 priority patent/US20080168825A1/en
Priority to US12/478,379 priority patent/US20090249599A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/228—Details, e.g. general constructional or apparatus details related to high temperature conditions
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C16/00—Alloys based on zirconium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C7/00—Alloys based on mercury
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2462—Probes with waveguides, e.g. SAW devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2468—Probes with delay lines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
IT002017A 2004-10-22 2004-10-22 Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione ITMI20042017A1 (it)

Priority Applications (11)

Application Number Priority Date Filing Date Title
IT002017A ITMI20042017A1 (it) 2004-10-22 2004-10-22 Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione
CA002581260A CA2581260A1 (en) 2004-10-22 2005-10-17 Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture
KR1020077006546A KR20070073753A (ko) 2004-10-22 2005-10-17 민감성 게터 층을 구비하는 표면 음파 가스 센서 및 그제조 방법
EP05802959A EP1802964A1 (en) 2004-10-22 2005-10-17 Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture
JP2007537475A JP2008518201A (ja) 2004-10-22 2005-10-17 感知ゲッター層を有する表面弾性波ガスセンサーおよびその製造のためのプロセス
CNA2005800338731A CN101073004A (zh) 2004-10-22 2005-10-17 有灵敏吸气层的表面声波气体传感器及其制造方法
PCT/IT2005/000605 WO2006043299A1 (en) 2004-10-22 2005-10-17 Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture
NO20071365A NO20071365L (no) 2004-10-22 2007-03-14 Gassensor med folsomt getterlag og fremgangsmate for fremstilling av denne.
IL182194A IL182194A0 (en) 2004-10-22 2007-03-26 Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture
US11/737,259 US20080168825A1 (en) 2004-10-22 2007-04-19 Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture
US12/478,379 US20090249599A1 (en) 2004-10-22 2009-06-04 Gas sensor manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT002017A ITMI20042017A1 (it) 2004-10-22 2004-10-22 Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione

Publications (1)

Publication Number Publication Date
ITMI20042017A1 true ITMI20042017A1 (it) 2005-01-22

Family

ID=35708990

Family Applications (1)

Application Number Title Priority Date Filing Date
IT002017A ITMI20042017A1 (it) 2004-10-22 2004-10-22 Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione

Country Status (10)

Country Link
US (2) US20080168825A1 (it)
EP (1) EP1802964A1 (it)
JP (1) JP2008518201A (it)
KR (1) KR20070073753A (it)
CN (1) CN101073004A (it)
CA (1) CA2581260A1 (it)
IL (1) IL182194A0 (it)
IT (1) ITMI20042017A1 (it)
NO (1) NO20071365L (it)
WO (1) WO2006043299A1 (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI420717B (zh) * 2008-06-20 2013-12-21 Hon Hai Prec Ind Co Ltd 表面聲波感測器之製作方法
CN102735753A (zh) * 2012-06-29 2012-10-17 中国科学院微电子研究所 一种声表面波气体传感器多层敏感膜的制备方法
EP2728345B1 (de) * 2012-10-31 2016-07-20 MTU Aero Engines AG Verfahren zum Ermitteln einer Randschichtcharakteristik eines Bauteils
CN103499638B (zh) * 2013-10-22 2015-08-19 天津七一二通信广播有限公司 具有监测汽车尾气功能的声表面波气体传感器
KR101722460B1 (ko) * 2014-12-31 2017-04-04 한국과학기술원 표면 탄성파를 이용한 그래핀 가스센서
CN105445367A (zh) * 2015-12-30 2016-03-30 桂林斯壮微电子有限责任公司 氢气检测系统
CN109342558A (zh) * 2018-11-26 2019-02-15 中国科学院声学研究所 一种基于钯铜纳米线薄膜的声表面波氢气传感器
CN111781271B (zh) * 2020-07-14 2022-03-08 电子科技大学 一种柔性声表面波气体传感器及其制备方法
CN114323407B (zh) * 2021-12-28 2022-09-09 电子科技大学 一种柔性薄膜式自驱动多功能传感器及其制备方法

Family Cites Families (28)

* Cited by examiner, † Cited by third party
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US3203901A (en) * 1962-02-15 1965-08-31 Porta Paolo Della Method of manufacturing zirconiumaluminum alloy getters
IT1198325B (it) * 1980-06-04 1988-12-21 Getters Spa Struttura e composizione getteranti,particolarmente adatti per basse temperature
US4759210A (en) * 1986-06-06 1988-07-26 Microsensor Systems, Inc. Apparatus for gas-monitoring and method of conducting same
US4793182A (en) * 1987-06-02 1988-12-27 Djorup Robert Sonny Constant temperature hygrometer
US4932255A (en) * 1988-12-16 1990-06-12 Johnson Service Company Flow sensing using surface acoustic waves
JP2604228B2 (ja) * 1989-03-30 1997-04-30 三洋電機株式会社 水素ガスセンサ
JP3057237B2 (ja) * 1990-07-30 2000-06-26 日本電信電話株式会社 電子会議システム
US5583282A (en) * 1990-12-14 1996-12-10 Millipore Investment Holdings Limited Differential gas sensing in-line monitoring system
US5261932A (en) * 1992-09-01 1993-11-16 Air Products And Chemicals, Inc. Process for recovering oxygen from gaseous mixtures containing water or carbon dioxide which process employs ion transport membranes
US5571944A (en) * 1994-12-20 1996-11-05 Sandia Corporation Acoustic wave (AW) based moisture sensor for use with corrosive gases
US5670115A (en) * 1995-10-16 1997-09-23 General Motors Corporation Hydrogen sensor
US5795993A (en) * 1995-11-29 1998-08-18 Sandia Corporation Acoustic-wave sensor for ambient monitoring of a photoresist-stripping agent
JPH09189685A (ja) * 1996-01-05 1997-07-22 Mitsubishi Electric Corp 自己再生型ガス感応膜を用いたガスセンサ
JPH09210975A (ja) * 1996-01-30 1997-08-15 Kurita Water Ind Ltd ガス検出装置
US5821425A (en) * 1996-09-30 1998-10-13 The United States Of America As Represented By The Secretary Of The Army Remote sensing of structural integrity using a surface acoustic wave sensor
US5992215A (en) * 1997-05-29 1999-11-30 Sensor Research And Development Corp. Surface acoustic wave mercury vapor sensors
KR100644470B1 (ko) * 1997-07-28 2006-11-13 가부시끼가이샤 도시바 탄성표면파 필터 및 그의 제조방법
US6596236B2 (en) * 1999-01-15 2003-07-22 Advanced Technology Materials, Inc. Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same
JP2001141868A (ja) * 1999-11-17 2001-05-25 Hitachi Ltd 水素ガス処理設備
CA2408235A1 (en) * 2000-05-08 2001-11-15 Mass Sensors, Inc. Microscale mass spectrometric chemical-gas sensor
US6848295B2 (en) * 2002-04-17 2005-02-01 Wayne State University Acoustic wave sensor apparatus, method and system using wide bandgap materials
US6621192B2 (en) * 2000-07-13 2003-09-16 Rutgers, The State University Of New Jersey Integrated tunable surface acoustic wave technology and sensors provided thereby
US6945090B2 (en) * 2002-06-24 2005-09-20 Particle Measuring Systems, Inc. Method and apparatus for monitoring molecular contamination of critical surfaces using coated SAWS
WO2004066415A2 (en) * 2003-01-23 2004-08-05 The Penn State Research Foundation Thin film semi-permeable membranes for gas sensor and catalytic applications
GB2399170A (en) * 2003-03-05 2004-09-08 Boc Group Plc Chemical sensor with temperature differential between measurement and reference SAWs
US20040223884A1 (en) * 2003-05-05 2004-11-11 Ing-Shin Chen Chemical sensor responsive to change in volume of material exposed to target particle
US20040244466A1 (en) * 2003-06-06 2004-12-09 Chi-Yen Shen Ammonia gas sensor and its manufacturing method
US7134319B2 (en) * 2004-08-12 2006-11-14 Honeywell International Inc. Acoustic wave sensor with reduced condensation and recovery time

Also Published As

Publication number Publication date
US20080168825A1 (en) 2008-07-17
EP1802964A1 (en) 2007-07-04
JP2008518201A (ja) 2008-05-29
WO2006043299A1 (en) 2006-04-27
KR20070073753A (ko) 2007-07-10
US20090249599A1 (en) 2009-10-08
NO20071365L (no) 2007-05-21
CN101073004A (zh) 2007-11-14
IL182194A0 (en) 2007-07-24
CA2581260A1 (en) 2006-04-27

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