NO20071365L - Gassensor med folsomt getterlag og fremgangsmate for fremstilling av denne. - Google Patents

Gassensor med folsomt getterlag og fremgangsmate for fremstilling av denne.

Info

Publication number
NO20071365L
NO20071365L NO20071365A NO20071365A NO20071365L NO 20071365 L NO20071365 L NO 20071365L NO 20071365 A NO20071365 A NO 20071365A NO 20071365 A NO20071365 A NO 20071365A NO 20071365 L NO20071365 L NO 20071365L
Authority
NO
Norway
Prior art keywords
gas sensor
making
getter layer
sensor
sensitive
Prior art date
Application number
NO20071365A
Other languages
English (en)
Inventor
Marco Amiotti
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Publication of NO20071365L publication Critical patent/NO20071365L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/228—Details, e.g. general constructional or apparatus details related to high temperature conditions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C16/00—Alloys based on zirconium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C7/00—Alloys based on mercury
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2462—Probes with waveguides, e.g. SAW devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2468—Probes with delay lines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Akustisk overflatebølgegassensor, spesielt en vakuum- eller hydrogen-sensor, omfattende et piezoelektrisk substrat (1) på hvilket minst ett lag av et gassensitivt materiale (6) er anordnet mellom to interdigitale transdusere (2, 3), og omfatter et gettermateriale slik at molekylene som adsorberes av dette gettermaterialet kan variere frekvensen til et signal som overføres mellom de to transduserne (2, 3). Foreliggende oppfinnelse angår også en fremgangsmåte for fremstilling av denne sensoren.
NO20071365A 2004-10-22 2007-03-14 Gassensor med folsomt getterlag og fremgangsmate for fremstilling av denne. NO20071365L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT002017A ITMI20042017A1 (it) 2004-10-22 2004-10-22 Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione
PCT/IT2005/000605 WO2006043299A1 (en) 2004-10-22 2005-10-17 Surface acoustic wave gas sensor with sensitive getter layer and process for its manufacture

Publications (1)

Publication Number Publication Date
NO20071365L true NO20071365L (no) 2007-05-21

Family

ID=35708990

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20071365A NO20071365L (no) 2004-10-22 2007-03-14 Gassensor med folsomt getterlag og fremgangsmate for fremstilling av denne.

Country Status (10)

Country Link
US (2) US20080168825A1 (no)
EP (1) EP1802964A1 (no)
JP (1) JP2008518201A (no)
KR (1) KR20070073753A (no)
CN (1) CN101073004A (no)
CA (1) CA2581260A1 (no)
IL (1) IL182194A0 (no)
IT (1) ITMI20042017A1 (no)
NO (1) NO20071365L (no)
WO (1) WO2006043299A1 (no)

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* Cited by examiner, † Cited by third party
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TWI420717B (zh) * 2008-06-20 2013-12-21 Hon Hai Prec Ind Co Ltd 表面聲波感測器之製作方法
CN102735753A (zh) * 2012-06-29 2012-10-17 中国科学院微电子研究所 一种声表面波气体传感器多层敏感膜的制备方法
EP2728345B1 (de) 2012-10-31 2016-07-20 MTU Aero Engines AG Verfahren zum Ermitteln einer Randschichtcharakteristik eines Bauteils
CN103499638B (zh) * 2013-10-22 2015-08-19 天津七一二通信广播有限公司 具有监测汽车尾气功能的声表面波气体传感器
KR101722460B1 (ko) * 2014-12-31 2017-04-04 한국과학기술원 표면 탄성파를 이용한 그래핀 가스센서
CN105445367A (zh) * 2015-12-30 2016-03-30 桂林斯壮微电子有限责任公司 氢气检测系统
CN109342558A (zh) * 2018-11-26 2019-02-15 中国科学院声学研究所 一种基于钯铜纳米线薄膜的声表面波氢气传感器
CN111781271B (zh) * 2020-07-14 2022-03-08 电子科技大学 一种柔性声表面波气体传感器及其制备方法
CN114323407B (zh) * 2021-12-28 2022-09-09 电子科技大学 一种柔性薄膜式自驱动多功能传感器及其制备方法

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Also Published As

Publication number Publication date
IL182194A0 (en) 2007-07-24
JP2008518201A (ja) 2008-05-29
WO2006043299A1 (en) 2006-04-27
KR20070073753A (ko) 2007-07-10
EP1802964A1 (en) 2007-07-04
US20090249599A1 (en) 2009-10-08
CA2581260A1 (en) 2006-04-27
CN101073004A (zh) 2007-11-14
US20080168825A1 (en) 2008-07-17
ITMI20042017A1 (it) 2005-01-22

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