DE602005027072D1 - Druckwandler mit akoustischen Oberflächenwellen - Google Patents

Druckwandler mit akoustischen Oberflächenwellen

Info

Publication number
DE602005027072D1
DE602005027072D1 DE602005027072T DE602005027072T DE602005027072D1 DE 602005027072 D1 DE602005027072 D1 DE 602005027072D1 DE 602005027072 T DE602005027072 T DE 602005027072T DE 602005027072 T DE602005027072 T DE 602005027072T DE 602005027072 D1 DE602005027072 D1 DE 602005027072D1
Authority
DE
Germany
Prior art keywords
surface acoustic
pressure transducer
acoustic waves
waves
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005027072T
Other languages
English (en)
Inventor
Chantal Combi
Simona Petroni
Angela Pomarico
Lorenzo Baldo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SRL
Original Assignee
STMicroelectronics SRL
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SRL filed Critical STMicroelectronics SRL
Publication of DE602005027072D1 publication Critical patent/DE602005027072D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
DE602005027072T 2005-09-16 2005-09-16 Druckwandler mit akoustischen Oberflächenwellen Active DE602005027072D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05425648A EP1764597B1 (de) 2005-09-16 2005-09-16 Druckwandler mit akoustischen Oberflächenwellen

Publications (1)

Publication Number Publication Date
DE602005027072D1 true DE602005027072D1 (de) 2011-05-05

Family

ID=35652289

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005027072T Active DE602005027072D1 (de) 2005-09-16 2005-09-16 Druckwandler mit akoustischen Oberflächenwellen

Country Status (3)

Country Link
US (1) US7343805B2 (de)
EP (1) EP1764597B1 (de)
DE (1) DE602005027072D1 (de)

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* Cited by examiner, † Cited by third party
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CN111337166A (zh) * 2020-03-25 2020-06-26 电子科技大学 一种新型绝对压声表面波压力传感器的制备方法

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EP1837638B1 (de) * 2006-03-21 2011-12-28 Radi Medical Systems Ab Drucksensor
KR100889044B1 (ko) * 2007-08-09 2009-03-19 주식회사 엠디티 표면탄성파 센서
KR100964971B1 (ko) * 2007-12-05 2010-06-21 한국전자통신연구원 초소형 압저항형 압력 센서 및 그 제조 방법
EP2158840B1 (de) * 2008-08-27 2014-09-10 Biotronik CRM Patent AG Implantierbarer Biosensor und Sensoranordnung
US8742912B2 (en) * 2008-12-31 2014-06-03 Stmicroelectronics, Inc. Self-powered sensor system for monitoring tire pressure
EP2380361B1 (de) * 2009-01-14 2019-03-20 Hewlett-Packard Development Company, L.P. Akustischer druckwandler
KR101498334B1 (ko) * 2009-01-27 2015-03-03 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. 음향 에너지 변환기
DE102009001892A1 (de) * 2009-03-26 2010-09-30 Endress + Hauser Gmbh + Co. Kg Drucksensor
US20110168378A1 (en) * 2010-01-14 2011-07-14 Irvine Sensors Corporation Thermal power distribution system
RU2459188C1 (ru) * 2011-05-27 2012-08-20 Открытое акционерное общество "Авангард" Чувствительный элемент датчика линейных сил сжатия-растяжения
US9250119B2 (en) * 2012-06-01 2016-02-02 The Governors Of The University Of Alberta Apparatus and method for characterizing adhesive bonding and osseointegration
US9321630B2 (en) * 2013-02-20 2016-04-26 Pgs Geophysical As Sensor with vacuum-sealed cavity
DE102013010015A1 (de) * 2013-06-14 2014-12-18 Volkswagen Aktiengesellschaft Drucksensor und Drucksensorsystem
CN105236347B (zh) * 2014-06-03 2017-04-05 中芯国际集成电路制造(上海)有限公司 一种半导体器件及其制作方法和电子装置
JP6349979B2 (ja) * 2014-06-05 2018-07-04 株式会社デンソー 弾性表面波式センサ
US10315224B2 (en) 2015-05-20 2019-06-11 uBeam Inc. Ultrasonic transducer
US10058892B2 (en) 2015-05-20 2018-08-28 uBeam Inc. Membrane bonding
US10065854B2 (en) 2015-05-20 2018-09-04 uBeam Inc. Membrane bonding with photoresist
US10432167B2 (en) * 2016-04-01 2019-10-01 Intel Corporation Piezoelectric package-integrated crystal devices
US10497604B2 (en) * 2017-03-30 2019-12-03 Taiwan Semiconductor Manufacturing Co., Ltd. Photomask transportation stage in semiconductor fabrication and method for using the same
CN107101774A (zh) * 2017-03-30 2017-08-29 中国科学院声学研究所 一种无线声表面波传感器的检测设备及其检测方法
IT201700044301A1 (it) 2017-04-21 2018-10-21 St Microelectronics Srl Sensore di sforzo per il monitoraggio dello stato di salute di strutture fabbricate quali costruzioni, edifici, infrastrutture e simili
IT201700045285A1 (it) * 2017-04-26 2018-10-26 St Microelectronics Srl Trasduttore microelettromeccanico basato su trincea e metodo di fabbricazione del trasduttore microelettromeccanico
CN106961258B (zh) * 2017-05-04 2023-08-15 杭州左蓝微电子技术有限公司 一种空腔型声表面波谐振器及其加工方法
US10663871B2 (en) * 2018-07-30 2020-05-26 Taiwan Semiconductor Manufacturing Co., Ltd. Reticle stage and method for using the same
US11143561B2 (en) * 2018-12-05 2021-10-12 Resonant Inc. Passive microphone/pressure sensor using a piezoelectric diaphragm
US11835414B2 (en) * 2018-12-05 2023-12-05 Murata Manufacturing Co., Ltd. Passive pressure sensor with a piezoelectric diaphragm and a non-piezoelectric substrate
CN111623917B (zh) * 2020-06-10 2022-03-04 北京遥测技术研究所 一种高灵敏度的声表面波绝压压力传感器
CN111854925B (zh) * 2020-06-24 2022-09-16 歌尔微电子有限公司 微机电系统绝对压力传感器、传感器单体及电子设备
CN112362898B (zh) * 2020-11-03 2022-09-23 重庆大学 一种基于风致振动抑制机理的宽量程风速风向传感器及其制备方法
CN114136507A (zh) * 2021-12-07 2022-03-04 中国电子科技集团公司第四十八研究所 一种无线无源声表面波压力传感器及其制备方法

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US3978731A (en) * 1974-02-25 1976-09-07 United Technologies Corporation Surface acoustic wave transducer
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
JPS63307326A (ja) * 1987-06-09 1988-12-15 Fujikura Ltd 圧力センサとその製造方法
US5212988A (en) * 1988-02-29 1993-05-25 The Reagents Of The University Of California Plate-mode ultrasonic structure including a gel
US4993143A (en) * 1989-03-06 1991-02-19 Delco Electronics Corporation Method of making a semiconductive structure useful as a pressure sensor
JP2004510145A (ja) * 2000-09-20 2004-04-02 モレキュラー・リフレクションズ 共鳴センサーとして使用するための微細加工された超音波アレイ
US7096736B2 (en) * 2003-08-04 2006-08-29 The Goodyear Tire & Rubber Company Passive tire pressure sensor and method
EP1577656B1 (de) * 2004-03-19 2010-06-09 STMicroelectronics Srl Halbleiterdrucksensor und Verfahren zur Herstellung
US7165455B2 (en) * 2004-12-18 2007-01-23 Honeywell International Inc. Surface acoustic wave sensor methods and systems

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111337166A (zh) * 2020-03-25 2020-06-26 电子科技大学 一种新型绝对压声表面波压力传感器的制备方法

Also Published As

Publication number Publication date
US20070113658A1 (en) 2007-05-24
EP1764597A1 (de) 2007-03-21
EP1764597B1 (de) 2011-03-23
US7343805B2 (en) 2008-03-18

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