KR20070073753A - 민감성 게터 층을 구비하는 표면 음파 가스 센서 및 그제조 방법 - Google Patents

민감성 게터 층을 구비하는 표면 음파 가스 센서 및 그제조 방법 Download PDF

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Publication number
KR20070073753A
KR20070073753A KR1020077006546A KR20077006546A KR20070073753A KR 20070073753 A KR20070073753 A KR 20070073753A KR 1020077006546 A KR1020077006546 A KR 1020077006546A KR 20077006546 A KR20077006546 A KR 20077006546A KR 20070073753 A KR20070073753 A KR 20070073753A
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South Korea
Prior art keywords
sensor
layer
gas
sensor according
wafer
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KR1020077006546A
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English (en)
Korean (ko)
Inventor
마르코 아미오티
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사에스 게터스 에스.페.아.
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Publication of KR20070073753A publication Critical patent/KR20070073753A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/228—Details, e.g. general constructional or apparatus details related to high temperature conditions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C16/00—Alloys based on zirconium
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C7/00—Alloys based on mercury
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2462—Probes with waveguides, e.g. SAW devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2468—Probes with delay lines
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/021—Gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Acoustics & Sound (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
KR1020077006546A 2004-10-22 2005-10-17 민감성 게터 층을 구비하는 표면 음파 가스 센서 및 그제조 방법 KR20070073753A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT002017A ITMI20042017A1 (it) 2004-10-22 2004-10-22 Sensore di gas a onde acustiche superficiali e procedimento per la sua fabbricazione
ITMI2004A002017 2004-10-24

Publications (1)

Publication Number Publication Date
KR20070073753A true KR20070073753A (ko) 2007-07-10

Family

ID=35708990

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077006546A KR20070073753A (ko) 2004-10-22 2005-10-17 민감성 게터 층을 구비하는 표면 음파 가스 센서 및 그제조 방법

Country Status (10)

Country Link
US (2) US20080168825A1 (it)
EP (1) EP1802964A1 (it)
JP (1) JP2008518201A (it)
KR (1) KR20070073753A (it)
CN (1) CN101073004A (it)
CA (1) CA2581260A1 (it)
IL (1) IL182194A0 (it)
IT (1) ITMI20042017A1 (it)
NO (1) NO20071365L (it)
WO (1) WO2006043299A1 (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI420717B (zh) * 2008-06-20 2013-12-21 Hon Hai Prec Ind Co Ltd 表面聲波感測器之製作方法
CN102735753A (zh) * 2012-06-29 2012-10-17 中国科学院微电子研究所 一种声表面波气体传感器多层敏感膜的制备方法
EP2728345B1 (de) 2012-10-31 2016-07-20 MTU Aero Engines AG Verfahren zum Ermitteln einer Randschichtcharakteristik eines Bauteils
CN103499638B (zh) * 2013-10-22 2015-08-19 天津七一二通信广播有限公司 具有监测汽车尾气功能的声表面波气体传感器
KR101722460B1 (ko) * 2014-12-31 2017-04-04 한국과학기술원 표면 탄성파를 이용한 그래핀 가스센서
CN105445367A (zh) * 2015-12-30 2016-03-30 桂林斯壮微电子有限责任公司 氢气检测系统
CN109342558A (zh) * 2018-11-26 2019-02-15 中国科学院声学研究所 一种基于钯铜纳米线薄膜的声表面波氢气传感器
CN111781271B (zh) * 2020-07-14 2022-03-08 电子科技大学 一种柔性声表面波气体传感器及其制备方法
CN114323407B (zh) * 2021-12-28 2022-09-09 电子科技大学 一种柔性薄膜式自驱动多功能传感器及其制备方法

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IT1198325B (it) * 1980-06-04 1988-12-21 Getters Spa Struttura e composizione getteranti,particolarmente adatti per basse temperature
US4759210A (en) * 1986-06-06 1988-07-26 Microsensor Systems, Inc. Apparatus for gas-monitoring and method of conducting same
US4793182A (en) * 1987-06-02 1988-12-27 Djorup Robert Sonny Constant temperature hygrometer
US4932255A (en) * 1988-12-16 1990-06-12 Johnson Service Company Flow sensing using surface acoustic waves
JP2604228B2 (ja) * 1989-03-30 1997-04-30 三洋電機株式会社 水素ガスセンサ
JP3057237B2 (ja) * 1990-07-30 2000-06-26 日本電信電話株式会社 電子会議システム
US5583282A (en) * 1990-12-14 1996-12-10 Millipore Investment Holdings Limited Differential gas sensing in-line monitoring system
US5261932A (en) * 1992-09-01 1993-11-16 Air Products And Chemicals, Inc. Process for recovering oxygen from gaseous mixtures containing water or carbon dioxide which process employs ion transport membranes
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Also Published As

Publication number Publication date
CN101073004A (zh) 2007-11-14
CA2581260A1 (en) 2006-04-27
ITMI20042017A1 (it) 2005-01-22
US20090249599A1 (en) 2009-10-08
IL182194A0 (en) 2007-07-24
EP1802964A1 (en) 2007-07-04
WO2006043299A1 (en) 2006-04-27
US20080168825A1 (en) 2008-07-17
JP2008518201A (ja) 2008-05-29
NO20071365L (no) 2007-05-21

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