JPS61198778A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61198778A
JPS61198778A JP60039091A JP3909185A JPS61198778A JP S61198778 A JPS61198778 A JP S61198778A JP 60039091 A JP60039091 A JP 60039091A JP 3909185 A JP3909185 A JP 3909185A JP S61198778 A JPS61198778 A JP S61198778A
Authority
JP
Japan
Prior art keywords
layer
insulating film
region
forming
type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60039091A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0571132B2 (enExample
Inventor
Hiroshi Horie
博 堀江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP60039091A priority Critical patent/JPS61198778A/ja
Publication of JPS61198778A publication Critical patent/JPS61198778A/ja
Publication of JPH0571132B2 publication Critical patent/JPH0571132B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D10/00—Bipolar junction transistors [BJT]
    • H10D10/40—Vertical BJTs
    • H10D10/421—Vertical BJTs having both emitter-base and base-collector junctions ending at the same surface of the body

Landscapes

  • Bipolar Transistors (AREA)
JP60039091A 1985-02-28 1985-02-28 半導体装置の製造方法 Granted JPS61198778A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60039091A JPS61198778A (ja) 1985-02-28 1985-02-28 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60039091A JPS61198778A (ja) 1985-02-28 1985-02-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61198778A true JPS61198778A (ja) 1986-09-03
JPH0571132B2 JPH0571132B2 (enExample) 1993-10-06

Family

ID=12543402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60039091A Granted JPS61198778A (ja) 1985-02-28 1985-02-28 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61198778A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63124564A (ja) * 1986-11-14 1988-05-28 Toshiba Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63124564A (ja) * 1986-11-14 1988-05-28 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0571132B2 (enExample) 1993-10-06

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