JPS6117135B2 - - Google Patents

Info

Publication number
JPS6117135B2
JPS6117135B2 JP54089525A JP8952579A JPS6117135B2 JP S6117135 B2 JPS6117135 B2 JP S6117135B2 JP 54089525 A JP54089525 A JP 54089525A JP 8952579 A JP8952579 A JP 8952579A JP S6117135 B2 JPS6117135 B2 JP S6117135B2
Authority
JP
Japan
Prior art keywords
resin film
ion implantation
film
polyimide polymer
polymer resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54089525A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5613722A (en
Inventor
Kazuhiko Tsuji
Shigetoshi Takayanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8952579A priority Critical patent/JPS5613722A/ja
Publication of JPS5613722A publication Critical patent/JPS5613722A/ja
Publication of JPS6117135B2 publication Critical patent/JPS6117135B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P30/20—

Landscapes

  • Formation Of Insulating Films (AREA)
JP8952579A 1979-07-13 1979-07-13 Manufacture of semiconductor device Granted JPS5613722A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8952579A JPS5613722A (en) 1979-07-13 1979-07-13 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8952579A JPS5613722A (en) 1979-07-13 1979-07-13 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5613722A JPS5613722A (en) 1981-02-10
JPS6117135B2 true JPS6117135B2 (OSRAM) 1986-05-06

Family

ID=13973214

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8952579A Granted JPS5613722A (en) 1979-07-13 1979-07-13 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5613722A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0318619A (ja) * 1989-06-14 1991-01-28 Nissan Motor Co Ltd 渦流室式ディーゼル機関の燃焼室

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS599981A (ja) * 1982-07-07 1984-01-19 Sumitomo Electric Ind Ltd 半導体発光装置
US6017787A (en) * 1996-12-31 2000-01-25 Lucent Technologies Inc. Integrated circuit with twin tub
WO2004097914A1 (ja) * 2003-04-25 2004-11-11 Sumitomo Electric Industries, Ltd. 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0318619A (ja) * 1989-06-14 1991-01-28 Nissan Motor Co Ltd 渦流室式ディーゼル機関の燃焼室

Also Published As

Publication number Publication date
JPS5613722A (en) 1981-02-10

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