JPS6113388B2 - - Google Patents

Info

Publication number
JPS6113388B2
JPS6113388B2 JP52026984A JP2698477A JPS6113388B2 JP S6113388 B2 JPS6113388 B2 JP S6113388B2 JP 52026984 A JP52026984 A JP 52026984A JP 2698477 A JP2698477 A JP 2698477A JP S6113388 B2 JPS6113388 B2 JP S6113388B2
Authority
JP
Japan
Prior art keywords
film
oxide film
active region
polycrystalline silicon
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52026984A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53112686A (en
Inventor
Hiroshi Matsui
Hiroshi Onoda
Akihisa Aoki
Masayoshi Ino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP2698477A priority Critical patent/JPS53112686A/ja
Publication of JPS53112686A publication Critical patent/JPS53112686A/ja
Publication of JPS6113388B2 publication Critical patent/JPS6113388B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Semiconductor Memories (AREA)
JP2698477A 1977-03-14 1977-03-14 Manufacture for semiconductor device Granted JPS53112686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2698477A JPS53112686A (en) 1977-03-14 1977-03-14 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2698477A JPS53112686A (en) 1977-03-14 1977-03-14 Manufacture for semiconductor device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP58050464A Division JPS58175861A (ja) 1983-03-28 1983-03-28 半導体記憶装置

Publications (2)

Publication Number Publication Date
JPS53112686A JPS53112686A (en) 1978-10-02
JPS6113388B2 true JPS6113388B2 (enExample) 1986-04-12

Family

ID=12208418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2698477A Granted JPS53112686A (en) 1977-03-14 1977-03-14 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS53112686A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647615U (enExample) * 1987-06-30 1989-01-17

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5565458A (en) * 1978-11-10 1980-05-16 Nec Corp Memory cell
JPS57114272A (en) * 1981-01-06 1982-07-16 Nec Corp Semiconductor memory
JPS57186354A (en) * 1981-05-13 1982-11-16 Hitachi Ltd Semiconductor memory storage and manufacture thereof
JPH01152661A (ja) * 1988-06-20 1989-06-15 Hitachi Ltd 半導体メモリ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647615U (enExample) * 1987-06-30 1989-01-17

Also Published As

Publication number Publication date
JPS53112686A (en) 1978-10-02

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