JPS6020908B2 - Ｍｏｓ二重多結晶集積回路の製造方法 - Google Patents

Ｍｏｓ二重多結晶集積回路の製造方法

Info

Publication number
JPS6020908B2
JPS6020908B2 JP51113550A JP11355076A JPS6020908B2 JP S6020908 B2 JPS6020908 B2 JP S6020908B2 JP 51113550 A JP51113550 A JP 51113550A JP 11355076 A JP11355076 A JP 11355076A JP S6020908 B2 JPS6020908 B2 JP S6020908B2
Authority
JP
Japan
Prior art keywords
silicon layer
layer
gate
silicon
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51113550A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5259585A (en
Inventor
ウイリアム・レスリー・モーガン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Publication of JPS5259585A publication Critical patent/JPS5259585A/ja
Publication of JPS6020908B2 publication Critical patent/JPS6020908B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/01—Manufacture or treatment
    • H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0411—Manufacture or treatment of FETs having insulated gates [IGFET] of FETs having floating gates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/68—Floating-gate IGFETs
    • H10D30/681—Floating-gate IGFETs having only two programming levels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/031—Manufacture or treatment of data-storage electrodes
    • H10D64/035—Manufacture or treatment of data-storage electrodes comprising conductor-insulator-conductor-insulator-semiconductor structures
    • H10P50/263—

Landscapes

  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
  • Weting (AREA)
JP51113550A 1975-10-29 1976-09-21 Ｍｏｓ二重多結晶集積回路の製造方法 Expired JPS6020908B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US62685975A 1975-10-29 1975-10-29
US626859 2000-07-27

Publications (2)

Publication Number Publication Date
JPS5259585A JPS5259585A (en) 1977-05-17
JPS6020908B2 true JPS6020908B2 (ja) 1985-05-24

Family

ID=24512170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51113550A Expired JPS6020908B2 (ja) 1975-10-29 1976-09-21 Ｍｏｓ二重多結晶集積回路の製造方法

Country Status (4)

Country Link
JP (1) JPS6020908B2 (OSRAM)
DE (1) DE2645014C3 (OSRAM)
FR (1) FR2330146A1 (OSRAM)
GB (1) GB1540450A (OSRAM)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1089299B (it) 1977-01-26 1985-06-18 Mostek Corp Procedimento per fabbricare un dispositivo semiconduttore
JPS5419372A (en) * 1977-07-14 1979-02-14 Nec Corp Production of semiconductor memory
JPS54109785A (en) * 1978-02-16 1979-08-28 Nec Corp Semiconductor device
US4288256A (en) * 1977-12-23 1981-09-08 International Business Machines Corporation Method of making FET containing stacked gates
JPS5550667A (en) * 1978-10-09 1980-04-12 Fujitsu Ltd Method of fabricating double gate mos-type integrated circuit
JPS55105373A (en) * 1978-12-04 1980-08-12 Mostek Corp Metal oxide semiconductor transistor and method of fabricating same
US4240196A (en) * 1978-12-29 1980-12-23 Bell Telephone Laboratories, Incorporated Fabrication of two-level polysilicon devices
DE3037744A1 (de) * 1980-10-06 1982-05-19 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen einer monolithisch integrierten zwei-transistor-speicherzelle in mos-technik
FR2468185A1 (fr) * 1980-10-17 1981-04-30 Intel Corp Procede de fabrication d'une matrice de memoire electriquement programmable a haute densite
JPS5787176A (en) * 1980-11-20 1982-05-31 Seiko Epson Corp Fabrication of semiconductor device
JPS57106171A (en) * 1980-12-24 1982-07-01 Fujitsu Ltd Manufacture of semiconductor device
US4490900A (en) * 1982-01-29 1985-01-01 Seeq Technology, Inc. Method of fabricating an MOS memory array having electrically-programmable and electrically-erasable storage devices incorporated therein
IT1218344B (it) * 1983-03-31 1990-04-12 Ates Componenti Elettron Processo per l'autoallineamento di un doppio strato di silicio policristallino,in un dispositivo a circuito integrato,mediante un' operazione di ossidazione
JPS60187852A (ja) * 1984-03-07 1985-09-25 Shimadzu Corp Νｍｒ　ｃｔ装置における静磁場発生装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3719866A (en) * 1970-12-03 1973-03-06 Ncr Semiconductor memory device
DE2139631C3 (de) * 1971-08-07 1979-05-10 Deutsche Itt Industries Gmbh, 7800 Freiburg Verfahren zum Herstellen eines Halbleiterbauelements, bei dem der Rand einer Diffusionszone auf den Rand einer polykristallinen Siliciumelektrode ausgerichtet ist
GB1360770A (en) * 1972-05-30 1974-07-24 Westinghouse Electric Corp N-channel mos transistor
JPS5024084A (OSRAM) * 1973-07-05 1975-03-14

Also Published As

Publication number Publication date
DE2645014A1 (de) 1977-05-12
JPS5259585A (en) 1977-05-17
FR2330146B1 (OSRAM) 1982-08-27
DE2645014B2 (de) 1979-06-07
DE2645014C3 (de) 1980-02-28
GB1540450A (en) 1979-02-14
FR2330146A1 (fr) 1977-05-27

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