IT1218344B - Processo per l'autoallineamento di un doppio strato di silicio policristallino,in un dispositivo a circuito integrato,mediante un' operazione di ossidazione - Google Patents

Processo per l'autoallineamento di un doppio strato di silicio policristallino,in un dispositivo a circuito integrato,mediante un' operazione di ossidazione

Info

Publication number
IT1218344B
IT1218344B IT20391/83A IT2039183A IT1218344B IT 1218344 B IT1218344 B IT 1218344B IT 20391/83 A IT20391/83 A IT 20391/83A IT 2039183 A IT2039183 A IT 2039183A IT 1218344 B IT1218344 B IT 1218344B
Authority
IT
Italy
Prior art keywords
alignment
self
integrated circuit
polycrystalline silicon
circuit device
Prior art date
Application number
IT20391/83A
Other languages
English (en)
Other versions
IT8320391A0 (it
Inventor
Pierangelo Pansana
Original Assignee
Ates Componenti Elettron
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ates Componenti Elettron filed Critical Ates Componenti Elettron
Priority to IT20391/83A priority Critical patent/IT1218344B/it
Publication of IT8320391A0 publication Critical patent/IT8320391A0/it
Priority to US06/593,238 priority patent/US4488931A/en
Priority to NL8400960A priority patent/NL8400960A/nl
Priority to JP59057481A priority patent/JPS59211282A/ja
Priority to FR8405074A priority patent/FR2543738B1/fr
Priority to DE19843411960 priority patent/DE3411960A1/de
Priority to GB08408434A priority patent/GB2138632B/en
Application granted granted Critical
Publication of IT1218344B publication Critical patent/IT1218344B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/40—Electrodes ; Multistep manufacturing processes therefor
    • H01L29/401—Multistep manufacturing processes
    • H01L29/4011—Multistep manufacturing processes for data storage electrodes
    • H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
IT20391/83A 1983-03-31 1983-03-31 Processo per l'autoallineamento di un doppio strato di silicio policristallino,in un dispositivo a circuito integrato,mediante un' operazione di ossidazione IT1218344B (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IT20391/83A IT1218344B (it) 1983-03-31 1983-03-31 Processo per l'autoallineamento di un doppio strato di silicio policristallino,in un dispositivo a circuito integrato,mediante un' operazione di ossidazione
US06/593,238 US4488931A (en) 1983-03-31 1984-03-26 Process for the self-alignment of a double polycrystalline silicon layer in an integrated circuit device through an oxidation process
NL8400960A NL8400960A (nl) 1983-03-31 1984-03-27 Werkwijze voor het vervaardigen van een constructie met geintegreerd circuit van het mos-type met een zelf-richtende dubbele laag van polykristallijn silicium.
JP59057481A JPS59211282A (ja) 1983-03-31 1984-03-27 集積回路の製造方法
FR8405074A FR2543738B1 (fr) 1983-03-31 1984-03-30 Procede pour l'auto-alignement d'une double couche de silicium polycristallin, dans un dispositif a circuit integre, au moyen d'une operation d'oxydation
DE19843411960 DE3411960A1 (de) 1983-03-31 1984-03-30 Verfahren zur selbstausrichtung einer doppelten schicht aus polykristallinem silicium mittels oxydation in einer integrierten schaltung
GB08408434A GB2138632B (en) 1983-03-31 1984-04-02 Self-aligned double layers of poly-crystalline silicon

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT20391/83A IT1218344B (it) 1983-03-31 1983-03-31 Processo per l'autoallineamento di un doppio strato di silicio policristallino,in un dispositivo a circuito integrato,mediante un' operazione di ossidazione

Publications (2)

Publication Number Publication Date
IT8320391A0 IT8320391A0 (it) 1983-03-31
IT1218344B true IT1218344B (it) 1990-04-12

Family

ID=11166285

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20391/83A IT1218344B (it) 1983-03-31 1983-03-31 Processo per l'autoallineamento di un doppio strato di silicio policristallino,in un dispositivo a circuito integrato,mediante un' operazione di ossidazione

Country Status (7)

Country Link
US (1) US4488931A (it)
JP (1) JPS59211282A (it)
DE (1) DE3411960A1 (it)
FR (1) FR2543738B1 (it)
GB (1) GB2138632B (it)
IT (1) IT1218344B (it)
NL (1) NL8400960A (it)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1213192B (it) * 1984-07-19 1989-12-14 Ates Componenti Elettron Processo per la fabbricazione di transistori ad effetto di campo agate isolato (igfet) ad elevata velocita' di risposta in circuiti integrati ad alta densita'.
JPS61136274A (ja) * 1984-12-07 1986-06-24 Toshiba Corp 半導体装置
US4735919A (en) * 1986-04-15 1988-04-05 General Electric Company Method of making a floating gate memory cell
US4683640A (en) * 1986-04-15 1987-08-04 Rca Corporation Method of making a floating gate memory cell
US4808555A (en) * 1986-07-10 1989-02-28 Motorola, Inc. Multiple step formation of conductive material layers
US5272100A (en) * 1988-09-08 1993-12-21 Mitsubishi Denki Kabushiki Kaisha Field effect transistor with T-shaped gate electrode and manufacturing method therefor
US5089863A (en) * 1988-09-08 1992-02-18 Mitsubishi Denki Kabushiki Kaisha Field effect transistor with T-shaped gate electrode
US5543646A (en) * 1988-09-08 1996-08-06 Mitsubishi Denki Kabushiki Kaisha Field effect transistor with a shaped gate electrode

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1540450A (en) * 1975-10-29 1979-02-14 Intel Corp Self-aligning double polycrystalline silicon etching process
US4142926A (en) * 1977-02-24 1979-03-06 Intel Corporation Self-aligning double polycrystalline silicon etching process
EP0002107A3 (en) * 1977-11-17 1979-09-05 Rca Corporation Method of making a planar semiconductor device
US4190466A (en) * 1977-12-22 1980-02-26 International Business Machines Corporation Method for making a bipolar transistor structure utilizing self-passivating diffusion sources
US4239559A (en) * 1978-04-21 1980-12-16 Hitachi, Ltd. Method for fabricating a semiconductor device by controlled diffusion between adjacent layers
US4234362A (en) * 1978-11-03 1980-11-18 International Business Machines Corporation Method for forming an insulator between layers of conductive material
US4355455A (en) * 1979-07-19 1982-10-26 National Semiconductor Corporation Method of manufacture for self-aligned floating gate memory cell
FR2468185A1 (fr) * 1980-10-17 1981-04-30 Intel Corp Procede de fabrication d'une matrice de memoire electriquement programmable a haute densite

Also Published As

Publication number Publication date
DE3411960C2 (it) 1992-04-02
JPS59211282A (ja) 1984-11-30
US4488931A (en) 1984-12-18
DE3411960A1 (de) 1984-10-04
GB8408434D0 (en) 1984-05-10
IT8320391A0 (it) 1983-03-31
FR2543738A1 (fr) 1984-10-05
GB2138632B (en) 1986-10-15
NL8400960A (nl) 1984-10-16
GB2138632A (en) 1984-10-24
FR2543738B1 (fr) 1986-06-20

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Legal Events

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TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19970329