FR2330146A1 - Procede de gravure a alignement automatique d'une couche double de silicium polycristallin - Google Patents
Procede de gravure a alignement automatique d'une couche double de silicium polycristallinInfo
- Publication number
- FR2330146A1 FR2330146A1 FR7628293A FR7628293A FR2330146A1 FR 2330146 A1 FR2330146 A1 FR 2330146A1 FR 7628293 A FR7628293 A FR 7628293A FR 7628293 A FR7628293 A FR 7628293A FR 2330146 A1 FR2330146 A1 FR 2330146A1
- Authority
- FR
- France
- Prior art keywords
- polycrystalline silicon
- double layer
- automatic alignment
- engraving process
- alignment engraving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32131—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by physical means only
- H01L21/32132—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by physical means only of silicon-containing layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
- Weting (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US62685975A | 1975-10-29 | 1975-10-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2330146A1 true FR2330146A1 (fr) | 1977-05-27 |
FR2330146B1 FR2330146B1 (fr) | 1982-08-27 |
Family
ID=24512170
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7628293A Granted FR2330146A1 (fr) | 1975-10-29 | 1976-09-21 | Procede de gravure a alignement automatique d'une couche double de silicium polycristallin |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS6020908B2 (fr) |
DE (1) | DE2645014C3 (fr) |
FR (1) | FR2330146A1 (fr) |
GB (1) | GB1540450A (fr) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0002997A2 (fr) * | 1977-12-23 | 1979-07-11 | International Business Machines Corporation | Transistor à effet de champ à portes superposées et auto-alignées et procédé de fabrication |
EP0013091A1 (fr) * | 1978-12-29 | 1980-07-09 | Western Electric Company, Incorporated | Procédé de fabrication de dispositifs MOS à deux niveaux d'électrodes de silicium polycristallin |
EP0023528A1 (fr) * | 1978-12-04 | 1981-02-11 | Mostek Corporation | Structure de transistor à double diffusion et procédé pour sa fabrication |
FR2468185A1 (fr) * | 1980-10-17 | 1981-04-30 | Intel Corp | Procede de fabrication d'une matrice de memoire electriquement programmable a haute densite |
EP0049392A2 (fr) * | 1980-10-06 | 1982-04-14 | Siemens Aktiengesellschaft | Procédé de fabrication d'une cellule de mémoire mondithique intégrée à deux transistors et en technologie MOS |
EP0085551A2 (fr) * | 1982-01-29 | 1983-08-10 | Seeq Technology, Incorporated | Procédé de fabrication d'une matrice de mémoires du type MOS comprenant des éléments de stockage électriquement programmables et électriquement effaçables |
FR2543738A1 (fr) * | 1983-03-31 | 1984-10-05 | Ates Componenti Elettron | Procede pour l'auto-alignement d'une double couche de silicium polycristallin, dans un dispositif a circuit integre, au moyen d'une operation d'oxydation |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1089299B (it) | 1977-01-26 | 1985-06-18 | Mostek Corp | Procedimento per fabbricare un dispositivo semiconduttore |
JPS5419372A (en) * | 1977-07-14 | 1979-02-14 | Nec Corp | Production of semiconductor memory |
JPS54109785A (en) * | 1978-02-16 | 1979-08-28 | Nec Corp | Semiconductor device |
JPS5550667A (en) * | 1978-10-09 | 1980-04-12 | Fujitsu Ltd | Method of fabricating double gate mos-type integrated circuit |
JPS5787176A (en) * | 1980-11-20 | 1982-05-31 | Seiko Epson Corp | Fabrication of semiconductor device |
JPS57106171A (en) * | 1980-12-24 | 1982-07-01 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS60187852A (ja) * | 1984-03-07 | 1985-09-25 | Shimadzu Corp | Νmr ct装置における静磁場発生装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2116410A1 (fr) * | 1970-12-03 | 1972-07-13 | Ncr Co | |
FR2148439A1 (fr) * | 1971-08-07 | 1973-03-23 | Itt | |
FR2186737A1 (fr) * | 1972-05-30 | 1974-01-11 | Westinghouse Electric Corp | |
FR2236247A1 (fr) * | 1973-07-05 | 1975-01-31 | Tokyo Shibaura Electric Co |
-
1976
- 1976-08-31 GB GB35950/76A patent/GB1540450A/en not_active Expired
- 1976-09-21 JP JP51113550A patent/JPS6020908B2/ja not_active Expired
- 1976-09-21 FR FR7628293A patent/FR2330146A1/fr active Granted
- 1976-10-06 DE DE2645014A patent/DE2645014C3/de not_active Expired
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2116410A1 (fr) * | 1970-12-03 | 1972-07-13 | Ncr Co | |
FR2148439A1 (fr) * | 1971-08-07 | 1973-03-23 | Itt | |
FR2186737A1 (fr) * | 1972-05-30 | 1974-01-11 | Westinghouse Electric Corp | |
FR2236247A1 (fr) * | 1973-07-05 | 1975-01-31 | Tokyo Shibaura Electric Co |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0002997A2 (fr) * | 1977-12-23 | 1979-07-11 | International Business Machines Corporation | Transistor à effet de champ à portes superposées et auto-alignées et procédé de fabrication |
EP0002997A3 (fr) * | 1977-12-23 | 1979-09-19 | International Business Machines Corporation | Transistor à effet de champ à portes superposées et auto-alignées et procédé de fabrication |
EP0023528A1 (fr) * | 1978-12-04 | 1981-02-11 | Mostek Corporation | Structure de transistor à double diffusion et procédé pour sa fabrication |
EP0013091A1 (fr) * | 1978-12-29 | 1980-07-09 | Western Electric Company, Incorporated | Procédé de fabrication de dispositifs MOS à deux niveaux d'électrodes de silicium polycristallin |
EP0049392A2 (fr) * | 1980-10-06 | 1982-04-14 | Siemens Aktiengesellschaft | Procédé de fabrication d'une cellule de mémoire mondithique intégrée à deux transistors et en technologie MOS |
EP0049392A3 (en) * | 1980-10-06 | 1984-07-04 | Siemens Aktiengesellschaft | Method of making a two-transistor monolithic integrated memory cell using mos technology |
FR2468185A1 (fr) * | 1980-10-17 | 1981-04-30 | Intel Corp | Procede de fabrication d'une matrice de memoire electriquement programmable a haute densite |
EP0085551A2 (fr) * | 1982-01-29 | 1983-08-10 | Seeq Technology, Incorporated | Procédé de fabrication d'une matrice de mémoires du type MOS comprenant des éléments de stockage électriquement programmables et électriquement effaçables |
EP0085551A3 (en) * | 1982-01-29 | 1986-06-04 | Seeq Technology, Incorporated | Method of fabricating an mos memory array having electrically-programmable and electrically-erasable storage devices incorporated therein |
FR2543738A1 (fr) * | 1983-03-31 | 1984-10-05 | Ates Componenti Elettron | Procede pour l'auto-alignement d'une double couche de silicium polycristallin, dans un dispositif a circuit integre, au moyen d'une operation d'oxydation |
Also Published As
Publication number | Publication date |
---|---|
JPS6020908B2 (ja) | 1985-05-24 |
FR2330146B1 (fr) | 1982-08-27 |
DE2645014C3 (de) | 1980-02-28 |
JPS5259585A (en) | 1977-05-17 |
GB1540450A (en) | 1979-02-14 |
DE2645014B2 (de) | 1979-06-07 |
DE2645014A1 (de) | 1977-05-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |